TWI634309B - Optical inspection apparatus - Google Patents

Abstract

The present invention provides an optical detection device, which is used to detect an object to be measured. The optical detection device includes a first light-emitting part, a first beam splitter, a first collimator, a first light-receiving part, and a second beam splitter. A second photosensitive part, a second focusing lens, a second light emitting part, a second collimating lens, a third photosensitive part, and a third focusing lens. The optical detection device provided by the present invention can simultaneously detect the height deviation, the tilt angle, and the left and right movement amount of a voice coil motor.

Description

Optical inspection equipment

The present invention relates to an optical detection device, and more particularly to an optical device capable of simultaneously detecting height deviation (Z value), tilt angle (α value and β value), and left and right movement amounts (X value and Y value) of a voice coil motor. Testing Equipment.

VCM (Voice Coil Motor) is a type of motor. Because the principle is similar to the speaker, it is called a voice coil motor, which has the characteristics of high frequency response and high precision. Its main principle is to control the stretch position of the spring leaf by changing the direct current of the coil in the motor in a permanent magnetic field, thereby driving up and down movement. Nowadays, the camera module of smart phones widely uses the voice coil motor to realize the auto-focus function. The voice coil motor can adjust the position of the lens and present a clear image. In addition, prior to assembling the camera module, a conventional optical detection device 1 for detecting three axes is generally used (see FIG. 1, which is a schematic diagram of the conventional optical detection device 1) for the tilt angle of the voice coil motor. (α value and β value) and height deviation (Z value) are measured to ensure the imaging quality of the camera module. In addition, the amount of left and right movement (X value and Y value) generated by the voice coil motor when it moves also indirectly affects the imaging quality of the camera module. However, the optical detection device 1 cannot measure the left and right movement amount of the voice coil motor, so the camera module detected by the optical detection device 1 still has a small number of defective products. Therefore, how to design an optical detection device capable of simultaneously detecting the height deviation, the tilt angle, and the left and right movement amount of the voice coil motor is worth thinking about by those with ordinary knowledge in the art.

An object of the present invention is to provide an optical detection device capable of simultaneously detecting a height deviation, an inclination angle, and a left-right movement amount of a voice coil motor. The present invention provides an optical detection device, which is used to detect an object to be measured. The optical detection device includes a first light-emitting part, a first beam splitter, a first collimator, a first light-receiving part, and a second beam splitter. A second photosensitive part, a second focusing lens, a second light emitting part, a second collimating lens, a third photosensitive part, and a third focusing lens. The first light emitting part is used to generate a first color light. The first beam splitter is located below the first light emitting part, and the first collimating mirror is located between the first light emitting part and the first beam splitter. In addition, the first light emitting section, the first collimating mirror, the first beam splitter, the first filter, and the measurement object are sequentially arranged in a linear arrangement, and the first light emitting section, the first collimator, and the first beam splitter The linear arrangement formed by the mirror, the first filter and the object to be measured is defined as a first virtual straight line. In addition, the first photosensitive portion is located on one side of the first beam splitter, the first photosensitive portion, the second beam splitter position, and the first beam splitter are sequentially arranged in a straight line, and the first photosensitive portion and the second beam splitter position The linear arrangement formed with the first beam splitter is defined as a second virtual straight line. In addition, the second light-receiving portion is located on one side of the second beam splitter. The second beam-splitter, the second focusing lens, and the second light-receiving portion are sequentially arranged in a straight line, and the second beam-splitting lens, the second focusing lens, and the second The linear arrangement formed by the photosensitive portion is defined as a third virtual straight line. In addition, the second light-emitting portion is used to generate a second color light, the second light-emitting portion, the second collimating lens, and the object to be measured are sequentially arranged in a linear arrangement, and the second light-emitting portion, the second collimating lens, and the object The linear arrangement formed by the measurement objects is defined as a fourth virtual straight line. In addition, the third photosensitive section and the second light-emitting section are separated on different sides by a first virtual straight line. The third photosensitive section, the third focusing lens, and the object to be measured are sequentially arranged in a linear arrangement, and the third photosensitive section, The linear arrangement formed by the third focusing lens and the object to be measured is defined as a fifth virtual straight line. The first virtual straight line is perpendicular to the second virtual straight line, the first virtual straight line is parallel to the three virtual straight lines, and an angle is included between the fourth virtual straight line and the five virtual straight lines. In the above optical detection device, the diameter of the first color light is 5 mm, and the diameter of the second color light is 0.3 mm. The optical detection device as described above, wherein the object to be measured is a voice coil motor. In the above optical detection device, a reflector is provided above the measured object. In the above-mentioned optical detection device, the included angle is an acute angle. The optical detection device as described above, wherein the first filter is configured to filter the second color light reflected from the mirror. The optical detection device described above further includes a main casing and a control panel. The first photosensitive portion, the second photosensitive portion, the third photosensitive portion, and the control panel are all disposed inside the main casing. In order to make the above-mentioned features and advantages more obvious and easy to understand, the following exemplifies preferred embodiments and the accompanying drawings for detailed description as follows.

Please refer to FIG. 2 and FIG. 3. FIG. 2 is a schematic diagram illustrating a positional relationship between the optical detection device 2 and the object 8 to be measured in this embodiment, and FIG. 3 is a perspective view of the optical detection device 2. The optical detection device 2 is used to detect a height deviation (Z value), an inclination angle (α value and β value), and a left and right movement amount (X value and Y value) of a measured object 8. The measured object 8 is, for example, a A voice coil motor, and a reflector 81 is provided above the measured object 8. The optical detection device 2 includes a main housing 200, a first light emitting portion 20, a first collimating mirror 21, a first beam splitter 22, a first filter 23, a first photosensitive portion 24, and a first The dichroic mirror 25, a second photosensitive portion 27, a second focusing lens 26, a second light emitting portion 30, a second collimating lens 31, a third photosensitive portion 33, and a third focusing lens 32. The first light-emitting portion 20 generates a first-color light, and the second light-emitting portion 30 generates a second-color light. The first light-emitting portion 20 and the second light-emitting portion 30 are both laser diodes. The wavelength range of one color light is different from the wavelength range of the second color light. In addition, in this embodiment, the first color light is a red laser beam with a diameter of 5 mm, and the second color light is a red laser beam with a diameter of 0.3 mm. In addition, the first beam splitter 22 is positioned below the first light emitting section 20, and the first collimator mirror 21 is positioned between the first light emitting section 20 and the first beam splitter 22. Among them, the first light emitting section 20, the first collimator mirror 21, the first beam splitter 22, the first filter 23, and the object to be measured 8 are sequentially arranged in a linear arrangement. In detail, the linear arrangement formed by the first light emitting section 20, the first collimator 21, the first beam splitter 22, the first filter 23, and the object 8 is defined as a first virtual straight line here. 1L. In addition, the first photosensitive portion 24 is located on one side of the first beam splitter 22, and the second beam splitter 25 is located between the first photosensitive portion 24 and the first beam splitter 22, and the first photosensitive portion 24 and the second The beam splitter positions 25 and the first beam splitter 22 are sequentially arranged in a straight line. In detail, the linear arrangement formed by the first photosensitive portion 24, the second beam splitter position 22, and the first beam splitter 22 is previously defined as a second virtual straight line 2L. In addition, the second photosensitive portion 27 is located on one side of the second beam splitter 25, and the second focusing lens 26 is located between the second photosensitive portion 27 and the second beam splitter 25, and the second beam splitter 25 and the second The focus lens 26 and the second photosensitive portion 27 are sequentially arranged in a straight line. In detail, the linear arrangement formed by the second beam splitter 25, the second focusing lens 26, and the second photosensitive portion 27 is previously defined as a third virtual straight line 3L. In addition, the second collimating mirror 31 is located between the second light-emitting portion 30 and the object to be measured 8, and the second light-emitting portion 30, the second collimating lens 31, and the object to be measured 8 are sequentially arranged in a straight line. Specifically, the linear arrangement formed by the second light-emitting portion 30, the second collimator 31, and the object to be measured 8 is defined here as a fourth virtual straight line 4L. In addition, the third photosensitive portion 33 and the second light-emitting portion 30 are separated on different sides by the first virtual straight line 1L, and the third photosensitive portion 33, the third focusing lens 32, and the measured object 8 are arranged in a straight line in order. Style arrangement. In detail, the linear arrangement formed by the third photosensitive portion 33, the third focusing lens 32, and the object to be measured 8 is first defined as a fifth virtual straight line 5L. The first virtual straight line 1L is perpendicular to the second virtual straight line 2L, and the first virtual straight line 1L is parallel to the three virtual straight lines 3L. In addition, the fourth virtual straight line 4L and the five virtual straight lines 5L have an included angle θ, and the included angle θ is an acute angle. Please refer to FIG. 4. FIG. 4 is a schematic diagram of one of the moving paths of the first color light. This moving path is mainly used to detect the left and right movement amounts (X value and Y value) of the measured object 8. The detailed movement process of the first color light is as follows: First, the first light emitting part 20 emits the first color light to the first collimator lens 21, and the first collimator lens 21 makes the advancement of the first color light to be nearly parallel. Degree to avoid loss of light energy due to divergence of the first color light. After that, the first color light passes directly through the first beam splitter 22 and the first filter 23 to the reflector 81 above the object 8 (in FIG. 4, the light passes through the first beam splitter 22 and the first filter The first colored light of 23 is indicated by a solid line). After that, the first color light is reflected from the mirror 81 back to the first filter 23 (in FIG. 4, the first color light reflected by the mirror 8 is indicated by a dotted line). After that, the first color light passes through the first filter 23 and returns to the first beam splitter 22, and is reflected from the first beam splitter 22 to the second beam splitter 25. After that, a part of the first color light passes through the second beam splitter 25 and is projected on the surface of the first photosensitive portion 24. In the above, the first color light is projected on different positions of the first photosensitive portion 24 before and after the measured object 8 moves. Therefore, the optical detection device 2 can calculate the left and right movement amount (X value and Y value) of the measured object 8 based on the positional gap projected by the first color light. Please refer to FIG. 5, which is a schematic diagram illustrating another moving path of the first color light. This movement path mainly detects the inclination angle (α value and β value) of the object 8 to be measured. The detailed movement process is as follows: first, the first light emitting part 20 emits the first color light to the first collimator lens 21, and the first collimator lens 21 makes the advancement of the first color light reach a nearly parallel degree to avoid the first Diffusion of light of one color results in loss of light energy. After that, the first color light will directly pass through the first beam splitter 22 and the first filter 23 to the reflector 81 above the object to be measured (in FIG. 5, the light passes through the first beam splitter 22 and the first filter 23 The first colored light is represented by a solid line). After that, the first color light is reflected from the mirror 81 back to the first filter 23 (in FIG. 5, the first color light reflected by the mirror 8 is indicated by a dotted line). After that, the first color light passes through the first filter 23 and returns to the first beam splitter 22, and is reflected from the first beam splitter 22 to the second beam splitter 25. After that, the other part of the first color light is reflected by the second beam splitter 25 to the second focusing lens 26, and the second focusing lens 26 focuses the first color light on the surface of the second photosensitive portion 27. In the above, the first color light is focused on different positions of the second photosensitive portion 27 before and after the measured object 8 moves. Therefore, the optical detection device 2 can calculate the inclination angle (α value and β value) when the measured object 8 moves based on the position difference of the first color light focus point. Please refer to FIG. 6, which is a schematic diagram illustrating a moving path of the second color light. This movement path mainly detects the height deviation (Z value) of the object 8 to be measured. The detailed movement process of the second color light is as follows: first, the second light emitting part 30 emits the second color light to the second collimator 31, and the second collimator 31 makes the advance of the second color light to a nearly parallel degree to avoid The divergence of the second color light results in a loss of light energy. After that, the second color light is obliquely incident on the reflector 81 above the object 8 (in FIG. 6, the second color light obliquely being incident on the reflector 81 is indicated by a solid line). After that, the second color light is reflected from the reflecting mirror 81 to the third focusing lens 32 (in FIG. 6, the second color light reflected by the reflecting mirror 8 is indicated by a dotted line). After that, the third focusing lens 32 focuses the second color light on the surface of the third photosensitive portion 33 again. In the above, the second color light is focused on different positions of the third photosensitive portion 33 before and after the measured object 8 moves. Therefore, the optical detection device 2 can calculate the height deviation (Z value) when the measured object 8 moves up and down based on the position gap of the focus point of the second color light. Please refer to FIG. 7. FIG. 7 is a schematic diagram illustrating a moving path of the first color light and the second color light. In the operation of the optical detection device 2 actually detecting the measured object 8, the optical detection device 2 applies the first color light and the second color light to the 81 reflection mirror of the measured object 8 at the same time. In this way, the optical detection device 2 can measure the height deviation (Z value), the inclination angle (α value and β value), and the left and right movement amount (X value and Y value) of the object 28 to be measured at the same time. Therefore, compared with the conventional optical detection device 1, the optical detection device 2 of this embodiment can also measure the left and right movements of the voice coil motor (the optical detection device 2 can measure Z values, α values, and β values , X value and Y value belong to the 5-axis optical detection equipment), so the voice coil motor detected by the optical detection device 2 can more ensure the imaging quality of its camera module, and it is not easy to produce defects. In the above, when the second color light is irradiated on the object to be measured 28, although a part of the second color light is also reflected from the reflecting mirror 81 back to the first filter 23. However, since the first color filter 23 filters out the second color light reflected from the reflecting mirror 81, the second color light will not be projected on the first photosensitive portion 24 or focused on the surface of the second photosensitive portion 27 . In detail, the first color light and the second color light of the optical detection device 2 do not interfere with each other. In addition, referring to FIG. 3 again, the optical detection device 2 of this embodiment further includes a control panel 7. The control panel 7 is also provided inside the main casing 200. In this way, the signals received by the first photosensitive portion 24, the second photosensitive portion 27, and the third photosensitive portion 33 can be directly transmitted to the control panel 7, so the signals do not need to be pulled out to the outside of the main case 200 for processing. . This should also be the case. The optical detection device 2 of this embodiment can also reduce noise during high-speed analog signal transmission. Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any person with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the scope of the appended patent application.

2‧‧‧ Optical Inspection Equipment
20‧‧‧The first luminous department
21‧‧‧The first collimator
22‧‧‧First Beamsplitter
23‧‧‧first filter
24‧‧‧The first photosensitive section
25‧‧‧Second Beamsplitter
26‧‧‧Second focusing lens
27‧‧‧Second photosensitive section
30‧‧‧Second Luminous Department
31‧‧‧Second Collimator
32‧‧‧ Third focusing lens
33‧‧‧ Third Photosensitive Section
200‧‧‧Main housing
1L‧‧‧The first virtual straight line
2L‧‧‧The second virtual straight line
3L‧‧‧The third virtual straight line
4L‧‧‧ Fourth virtual straight line
5L‧‧‧Fifth virtual straight line
7‧‧‧Control Panel
8‧‧‧Measured substance
81‧‧‧Reflector θ‧‧‧ Angle

FIG. 1 is a schematic diagram of a conventional optical detection device 1. FIG. 2 is a schematic diagram showing the positional relationship between the optical detection device 2 and the object 8 to be measured in this embodiment. FIG. 3 is a perspective view of the optical detection device 2. FIG. 4 is a schematic diagram of one of the moving paths of the first colored light. FIG. 5 is a schematic diagram illustrating another moving path of the first color light. FIG. 6 is a schematic diagram showing a moving path of the second color light. FIG. 7 is a schematic diagram showing the moving paths of the first color light and the second color light.

Claims (7)

An optical detection device is used for detecting an object to be measured. The optical detection device includes: a first light emitting part for generating a first color light; a first beam splitter, the first beam splitter is located on the first Below the light emitting part; a first collimating mirror, the first collimating mirror is located between the first light emitting part and the first beam splitter; a first filter, the first light emitting part, the first The collimating lens, the first beam splitter, the first filter, and the object to be measured are sequentially arranged in a linear arrangement, and the first light emitting part, the first collimator, the first beam splitter, the The linear arrangement formed by the first filter and the object to be measured is defined as a first virtual straight line; a first photosensitive portion, the first photosensitive portion is located on one side of the first beam splitter; a second Beamsplitter, the first photosensitive part, the second beam splitter position and the first beam splitter are sequentially arranged in a straight line, and the A linear arrangement is defined as a second virtual Line; a second photosensitive portion, which is located on one side of the second beam splitter; a second focusing lens, the second beam splitter, the second focusing lens, and the second photosensitive portion are sequentially arranged It is linear, and the linear arrangement formed by the second beam splitter, the second focusing lens, and the second photosensitive portion is defined as a third virtual straight line; a second light emitting portion, the second light emitting portion is used for A second color light is generated; a second collimating lens, the second light emitting portion, the second collimating lens, and the object to be measured are sequentially arranged in a linear arrangement, and the second light emitting portion and the second collimation The linear arrangement formed by the mirror and the object to be measured is defined as a fourth virtual straight line; a third photosensitive part, the third photosensitive part and the second light emitting part are separated on different sides by the first virtual straight line A third focusing lens, the third photosensitive part, the third focusing lens, and the object to be measured are arranged in a straight line, and the third photosensitive part, the third focusing lens, and the object to be measured are formed; Straight The arrangement is defined as a fifth virtual straight line; wherein the first virtual straight line is perpendicular to the second virtual straight line, the first virtual straight line is parallel to the three virtual straight lines, and between the fourth virtual line and the five virtual straight lines Has an included angle. For example, the optical detection device of the first patent application scope, wherein the diameter of the first color light is 5 mm, and the diameter of the second color light is 0.3 mm. For example, the optical detection device of the first patent application range, wherein the object to be measured is a voice coil motor. For example, the optical detection equipment of the first patent application scope, wherein a reflector is arranged above the measured object. For example, the optical detection device of the scope of application for a patent, wherein the included angle is an acute angle. For example, the optical detection device according to item 4 of the patent application, wherein the first filter is used to filter the second color light reflected from the mirror. For example, the optical detection device of the first patent application scope further includes a main casing and a control panel, and the first photosensitive portion, the second photosensitive portion, the third photosensitive portion, and the control panel are all disposed on the main casing. Inside the body.