TWI384196B - An apparatus for detecting the X-axis positioning error and the Y-axis positioning error by applying a single light source in the pick-and-place mechanism - Google Patents

Description

Device for detecting X-axis positioning error and Y-axis positioning error by using single light source in pick-and-place mechanism

The invention relates to a device for detecting an X-axis positioning error and a Y-axis positioning error by using a single light source in a pick-and-place mechanism, and adopting an optical non-contact detection mode to achieve the high precision requirement of obtaining the mechanism error of the pick-and-place mechanism for innovation. technology.

For example, the wafer packaging machine generally used has an accuracy of about 10 μm. If the speed of the pick-and-place mechanism is to be increased or the wafer size is reduced, the pick-and-place mechanism may have a great influence. The steel of the pick-and-place mechanism is insufficient. If the steel is to be improved, the pick-and-place mechanism may be too heavy, and the movement when the clip is taken or placed may be inaccurate. The measuring instruments used are not expensive enough.

In addition, if the contact measurement is used, the reaction force generated by the pick-and-place mechanism touching the object during the pick-and-place action may cause the measurement result to be inaccurate.

At present, the industry generally uses high-speed cameras to measure the error of the pick-and-place mechanism. However, the problems of this high-speed camera are as follows: (1) Insufficient accuracy: when using a high-speed camera for measurement, because the camera is on the machine The outside of the station is photographed, but when the machine is in operation, vibration will occur. Therefore, the camera is unclear whether the pick-and-place mechanism vibrates relative to the ground or the vibration of the pick-and-place mechanism relative to the object; (2) less measurement data: high speed The data that the camera can capture every second is too Less, its accuracy is poor; (3) high cost: the price of high-speed cameras is high, the price is generally more than one million; (4) the measurement signal is insufficient: the images captured by the high-speed camera are Z-axis and Y-axis The error, and the original requirement is to measure the error of the X-axis and the Y-axis.

Therefore, in view of the above-mentioned technology of the pick-and-place mechanism, the inventor of the present case has in-depth discussions on the unsolvable problems. It is the improvement and innovation of the thoughts, and after years of painstaking research, he finally succeeded in research and development to complete the application of a single source. The device that detects the X-axis positioning error and the Y-axis positioning error uses the non-contact measurement of the sensor and the light source, so that the measurement result is more accurate without worrying about the reaction force.

The object of the present invention is to provide a device for detecting an X-axis positioning error and a Y-axis positioning error by using a single light source in a pick-and-place mechanism, which is suitable for a pick-and-place mechanism such as a wafer packaging machine and a robot arm, and can simultaneously measure the pick-and-place mechanism. Or carry the error of multiple degrees of freedom of the arm mechanism.

A second object of the present invention is to provide a device for detecting X-axis positioning error and Y-axis positioning error in a pick-and-place mechanism by using a single light source with low cost, high precision, small size, and convenient carrying.

Another object of the present invention is to provide a simple installation and rapid detection of a single light source for detecting the X-axis positioning error and the Y-axis positioning error in the pick-and-place mechanism. Set.

Another object of the present invention is to provide a device for detecting an X-axis positioning error and a Y-axis positioning error by using a single light source in a pick-and-place mechanism, which has a sensor for capturing data data at a high frequency to effectively improve measurement accuracy. Insufficient problems.

A device for detecting an X-axis positioning error and a Y-axis positioning error by using a single light source in a pick-and-place mechanism, comprising: a light source fixed to a first axis of the pick-and-place mechanism for emitting a light beam; a collimating lens disposed in front of the light source and on the optical path of the light beam to correct the light beam into parallel light and irradiated to the first sensor or the second sensor; a first sensing The fourth quadrant sensor is configured to receive the beam at a position where the beam is received, and sense a multi-axis spatial degree of freedom of the first axis or the second axis of the pick-and-place mechanism to generate a sensing signal; a second sensor configured to receive a position of the four-quadrant sensor at a position at which the beam is received, and to sense a multi-axis spatial degree of freedom of the second axis or the first axis of the pick-and-place mechanism to generate a sensing signal; a signal processing unit coupled to the first sensor or the second sensor, the signal processing unit receiving the output signal of the sensor, and performing arithmetic processing to convert the system into a system Processing the signal.

The above-mentioned measured processing signals can be obtained by the user using the Fast Fourier Transform (FFT) calculation according to the requirements, and then the vibration frequency of the pick-and-place mechanism can be obtained.

Referring to FIG. 1 to FIG. 3 , the present invention provides a device for detecting an X-axis positioning error and a Y-axis positioning error by using a single light source in a pick-and-place mechanism, which mainly includes: a light source (2) and a first sensor ( 3) and a second sensor (4).

The light source (2) is fixed to the first shaft (11) of the pick-and-place mechanism (1) for emitting a light beam (21); the first sensor (3) is disposed in the pick-and-place mechanism (1) The first axis (11) receives the light beam (21), and senses the multi-axis spatial degree of freedom of the first axis (11) or the second axis (12) of the pick-and-place mechanism (1) To generate a sensing signal; the second sensor (4) is disposed at a position where the second axis (12) of the pick-and-place mechanism (1) receives the light beam (21), and the pick-and-place mechanism ( The second axis (12) or the first axis (11) of 1) performs an action of sensing its multi-axis spatial freedom to generate a sensing signal.

Referring to FIG. 2, a device for detecting X-axis positioning error and Y-axis positioning error by using a single light source in a pick-and-place mechanism includes: a light source (2), a collimating lens (5), and a first sense. a detector (3), a second sensor (4) and a signal processing unit (not shown); wherein the collimating lens (5) is disposed in front of the light source (2) and in the light beam (21) on the optical path, the beam (21) is corrected to parallel light, and is irradiated to the first sensor (3) or the second sensor (4); and the signal processing unit is a sensor (3) or a second sensor (4) is coupled, and the signal processing unit receives the output current of the first sensor (3) or the second sensor (4), and performs Operation processing to turn the output current of its sensor Switch to system processing signal.

Next, the first shaft (11) of the pick-and-place mechanism (1) (that is, the object clip (suction) take-up end) and the second shaft (12) will be described when the present invention is applied to the pick-and-place mechanism (1) (ie, Applying the movement description of the present invention to the object placement end, when the above-mentioned measurement principle is that the pick-and-place mechanism (1) performs the action of clamping (sucking) or placing, the positioning error of the X-axis and the positioning error of the Y-axis may be affected. When a slight displacement in the front and rear directions is generated, and then the light source (2) is moved, the light source (2) moves up and down as the pick-and-place mechanism (1) is clamped (sucked) or placed, wherein The first sensors (3) are respectively fixed to the first shaft (11) (ie, the object clip (suction) take-up end), and the second sensors (4) are respectively fixed to the second shaft (12) (ie For the object placement end); when the pick-and-place mechanism (1) is being clamped or sucked, the first sensor (3) disposed at the position of the first axis (11) receives the light source (2) The incident light beam (21) is simultaneously detected by the first sensor (3) by the positioning error of the pick-and-place mechanism (1) on the X-axis of the first axis (11), the positioning error of the Y-axis, or the positioning of the X-axis. Error between the error and the Y-axis; if the pick-and-place mechanism (1) is being clamped When (sucking) is taken or placed, the second sensor (4) disposed at the position of the second axis (12) receives the light beam (21) incident by the light source (2) while being controlled by the second sensor (4) Detecting the positioning error of the X-axis of the second axis (12), the positioning error of the Y-axis, or the positioning error of the X-axis and the positioning error of the Y-axis of the pick-and-place mechanism (1); and then receiving the signal by the signal processing unit After the output current of the first sensor (3) or the second sensor (4), and performing arithmetic processing to sense the current The output signal of the device is converted into a system processing signal for the user to read or interpret.

Wherein, when the pick-and-place mechanism (1) is clamped (sucked) or placed, the X-axis positioning error is generated, and the error caused by the light source (2) incident on the sensor causes the light source to be at the spot of the sensor. Figure 4 shows. Moreover, the positioning mechanism generates a Y-axis positioning error when the pick-up mechanism is clamped or placed, and the error caused by the light source (2) incident on the sensor causes the light source to be at the light spot of the sensor as shown in FIG. Show.

Therefore, the signal processing unit performs arithmetic processing, and the user can convert the processed signal into a Fast Fourier Transform (FFT) according to the demand, and then the vibration frequency of the pick-and-place mechanism (1) can be obtained. In this way, the invention can effectively achieve the substantial benefits such as low cost, high precision, small size, convenient carrying, simple erection and rapid detection.

Through the above, the device designed to detect the X-axis positioning error and the Y-axis positioning error by using the single light source in the pick-and-place mechanism is specifically represented in the above detailed description, but the embodiment is not The equivalents of the invention are intended to be limited to the scope of the invention.

In summary, the present invention provides a device for detecting the X-axis positioning error and the Y-axis positioning error by using a single light source in the pick-and-place mechanism, which is not only innovative in the current industrial type, but also has an overall structural feature and technical application. Innovation, no similar items, value for innovation and full use of the industry, has already met the requirements of the invention patent, 提出 file an application according to law, and ask your office to approve the invention patent, let this The invention was able to benefit the broad masses of the community at an early date.

1‧‧‧ pick-and-place mechanism

11‧‧‧First axis

12‧‧‧second axis

2‧‧‧Light source

21‧‧‧ Beam

3‧‧‧First sensor

4‧‧‧Second sensor

5‧‧‧ Collimating lens

1 is a structural diagram of a measuring optical path of a device for detecting an X-axis positioning error and a Y-axis positioning error by a single light source in a pick-and-place mechanism according to the present invention.

FIG. 2 is a schematic diagram showing the measurement of the collimating lens of the measuring optical path of the present invention.

Figure 3 is a schematic diagram showing the measurement of the front side structure of the measuring optical path of the present invention.

Figure 4 is a schematic diagram of the X-axis positioning error of the sensor of the present invention.

Figure 5 is a schematic diagram of the positioning error of the Y-axis of the sensor of the present invention.

1‧‧‧ pick-and-place mechanism

11‧‧‧First axis

12‧‧‧second axis

2‧‧‧Light source

21‧‧‧ Beam

3‧‧‧First sensor

4‧‧‧Second sensor

Claims (5)

A device for detecting an X-axis positioning error and a Y-axis positioning error by using a single light source in a pick-and-place mechanism, comprising: a light source fixed to a first axis of the pick-and-place mechanism for emitting a light beam; a collimating lens configured Before the light source and on the optical path of the light beam, correcting the light beam into parallel light and illuminating the first sensor or the second sensor; a first sensor for four-quadrant sensing The device is configured to receive the multi-axis spatial degree of freedom of the first axis or the second axis of the pick-and-place mechanism to generate a sensing signal; a second sensor, Configuring a four-quadrant sensor system to receive a position of the light beam, and sensing a multi-axis spatial degree of freedom of the second axis or the first axis of the pick-and-place mechanism to generate a sensing signal; The processing unit is coupled to the first sensor or the second sensor. The signal processing unit receives the output signal of the sensor and performs an arithmetic process to convert the signal into a system processing signal. An item of the first patent application on a single light source to take an X-axis positioning means for positioning the detection error of the Y axis error and the discharge mechanism, wherein the first sensor system can sense the positioning of the X-axis of the first shaft Error and positioning error of the Y-axis. An item of the first patent application a single light source to take an X-axis positioning means for positioning the detection error of the Y axis error and the discharge mechanism, wherein the first sensor system can sense the positioning of the X-axis of the second shaft Error and positioning error of the Y-axis. An item of the first patent application a single light source to take an X-axis positioning means for positioning the detection error of the Y axis error and the discharge mechanism, wherein the second sensor system can sense the positioning of the X-axis of the second shaft Error and positioning error of the Y-axis. An item of the first patent application a single light source to take an X-axis positioning means for positioning the detection error of the Y axis error and the discharge mechanism, wherein the second sensor system can sense the positioning of the X-axis of the first shaft Error and positioning error of the Y-axis.