TWI287101B - Magnetic sensor and orientation sensor - Google Patents

Abstract

In an orientation sensor (500) of the present invention, a magnetic sensor (600) for detecting 3 axial components of the geomagnetic vector and an inclination sensor (700) for detecting inclination of 3 axial directions are integrated upon one substrate. The magnetic sensor (600) comprises a plurality of magnetic detection elements, and several of the elements thereof are fixed by a polyimide film having thermo contractility and are standing from the surface of the substrate while the polyimide film is heated.

Description

1287101 Case No. 92 ii 〇 夕 夕 夕 f f 曰 曰 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 The information is a position information display system that rotates in response to the change in the position of the mobile phone, and a geomagnetic detection technology that is used by the position information display system. [Prior Art] The current position is displayed on the terminal device, for example, the guidance system mounted on the vehicle uses G P S (G 1 〇 b a 1 P 〇 s i t i ο n i n s s t e m : global positioning system). The GPS system transmits the difference in arrival times of radio waves from the satellites to the users through four or more satellites through the control station on the ground, and measures the current position. Further, the traveling direction can be obtained by calculating the amount of movement in an integrated manner based on, for example, a signal from a gyroscope and a GPS. The current position and direction of travel measured by GPS and gyroscope are displayed on the display simultaneously with the map data. However, in the above navigation system, the speed of the gyro and GPS is about 40km or more. The amount of movement of the speed, so there is a time difference between the starting point (display location) and the measurement location, and it is accumulated by integration. In order to eliminate this error, it is displayed in the original state or enlarged due to the rotation calculation. Although the signal received by the calculation process is processed by the signal from the gyroscope itself, the information itself has an error time number, so the error will be calculated by the numeracy of the instrument, and the error will be maintained. As the vehicle moves, the map data displayed on the display will also be purely in the left and right direction of the fish. 1 1 constitutive 3s ju < ~ 俺 glaze (scr ο 1 1) and display now

$5 page 314553 Revised version.ptc 92112640^月β日 1287101 Revision V. Invention description (2) 2 f : Ζ ί, sometimes the direction of the vehicle and the direction of movement of the map data will not produce discomfort. Moreover, the azimuth detecting device is not easy to be small and small, and it is not possible to use a special sentence or a coma. Therefore, the conventional position display 3 in the mobile phone is used in the portable terminal device, and in particular, it is difficult to apply to the magnetic force i: i: the position display function of the device is used as an important Ur magnetic sensor to form a small [Disclosed] The identification = the technology of providing the magnetic sensor and the orientation sensor in the f in the portable terminal device. -^ ^ . 悲 悲 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The magnetic detecting element is characterized in that: a Du*, Licaihua's element is MR (MagnetoResistant:) and is attached to a film having heat shrinkability. By making M R7G pieces or Ray: §: - μ , ττ and ι 70 70 pieces (Hal 1 element) on the substrate, the type 7 geomagnetic sensor can be used. By using the heat shrinkability of the film, a small-scale MR element or a Hall element can be formed on the soil board j. According to another aspect of the present invention, there is provided a magnetic sensor which is based on an i-plate ί::: a magnetic detecting element for measuring an axial direction component of a magnetic force vector, a horse magnetic detecting element system MR element or a Hall Components, and solid ---------

314553 Revised.ptc Page 6

Amendment 1287101 __ Case No. 92112640 V. Description of invention (3) Attached to a film having heat shrinkability. By using the heat shrinkability of the film, a small-scale MR element or a Hall element can be formed on the substrate. Preferably, the magnetic detecting element is fixed to a polyimide film which is at least partially fixed to the substrate and is formed at a predetermined angle with respect to the surface of the substrate. The predetermined angle may, for example, also be perpendicular to the surface of the substrate. For example, in the magnetic force measurement of the three axes, in order to detect the magnetic components in the X-axis direction and the γ-axis direction, the two magnetic detecting elements are configured to stand upright on the surface of the substrate, and the magnetic detecting elements are also on the surface of the substrate. Can be configured to form an angle of 9 互. A magnetic detecting element that detects a magnetic component in the Z-axis direction is formed on the surface of the substrate, and the Z-axis magnetic detecting element does not have to be fixed to the polyimide film. As another example of the three-axis sensor, a magnetic detecting element may be formed to stand upright on the surface of the substrate, and the magnetic force in the one-axis direction may be detected as 'a magnetic detecting element is formed on the surface of the substrate, and vertical is detected respectively. The two-axis component of the magnetic field and the horizontal magnetic field. Preferably, the magnetic detecting element is constructed by heating and shrinking the polyimide film and forming an angle with respect to the surface of the substrate. By using the heat shrinkability of the imine, the magnetic detecting element can be lifted from the surface of the substrate from the surface of the polyimide film opposite to the side opposite to the side of the magnetic detecting element, and can be fixed to the pressing. member. By heating to a high temperature, the polyimide has a very stable heat-bonding property to the crucible. Therefore, the pressing member is preferably formed of ruthenium from the viewpoint of the adhesion to the styrene. Similarly, the substrate can also be formed of tantalum. Another aspect of the present invention provides an orientation sensor integrally formed with a geomagnetic sensor and a tilt sensor on a substrate, wherein the geomagnetic sensing

314553 revision _ptc

•^^9^12640 1287101 曰5, invention description (4) The device has the three-axis component of the three-axis component of the β-magnet, the two-axis component of the geomagnetic orientation, and the tilt sensor The magnetism of the $ knife is used to perform the tilting of the three axes in one substrate. Azimuth sensor. Magnetic six, "formed into a very small ^, ... such as _ / 扎 force sense and tilt sensor most premature t-board. A plurality of magnetic squeegee A is made by magnetically loosening the horizontal surface of the substrate, and the yttrium imide film is formed on the substrate. Hungry 兀仟 can also be fixed in another aspect of the invention. It provides a magnetic 烕 哭 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The component system 惊I is stunned, and its k# is an ancient 2 or a Hall element, and is formed on a surface having a predetermined angle with respect to the surface of the substrate. For example, the bevel is used to cut the sidewall of the cut line formed by the Shihua wafer. ...the last name: Although the side J' of the pre-twist angle at the etched portion is formed by utilizing the characteristics of the material, the magnetic detecting element may be formed on the side wall. Further, any combination of the above elements, or variations thereof, between methods, devices, and the like, are also included in the scope of the present invention. [Embodiment] (First Embodiment) Hereinafter, a first embodiment of the present invention will be described based on the drawings. The purpose of the first embodiment is to provide a location information display system capable of displaying the map information and the current location of the holder in a small portable terminal device, mainly at the same time as the mobile phone, and with the portable The azimuth of the terminal device moves to rotate the map information, and enables the portable terminal device

314553 Revised. .ptc Page 8

shift? The direction of travel, often towards the preset specific direction in the plane of the display section, can be eliminated as much as possible by the position of the receiver from the geomagnetic side 1287101. Error capital ~ come: tired! . The i-th diagram shows a block diagram of the system of the invention of the invention: mounted on a mobile phone. In the figure, the GPS# receiver of the external structure, i can be used as the position detector to calculate the current longitude and latitude. The GPS satellite wave received by the antenna is used to measure the component. The geomagnetism of the mechanism, the laminated magnetic field detecting coil substrate on the upper and lower sides of the core 3: the sensor substrate of the magnetic coil substrate 5. Here, although the system? The gate type magnetic sensor is used as the orientation detection = : Γ is also a flux-to-flux type magnetic sensor, and it is not disclosed, for example, in Japanese Patent Laid-Open No. 9-43322, and the special Kaiping 1 1 - 1 1 88 9 2 The magnetic power test in the number is crying ^ ^ 阏 阏 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , No matter which one is the best. 1 τ is small and sensitive. Qiu Jun 2! If the solution shows the magnetic force detected in the magnetic sensor ΓΓ 曰 / 曰: The sensor core 3 is made by cutting the amorphous sheet into a ring Ϊ Of : A thin iron plate is wound into a toroidal core (toroidal C〇il) to form an amorphous core. The 2k/th coil substrate 4 includes a first detecting coil substrate 41 having a coil pattern 41a for forming a component magnetic field detecting coil in the x-axis direction;

-SS_92]J2640

Jzl 'yir v/t»n v〇) 1287101 _ and /, the second detection of the coil substrate 42 having the coil pattern 4 2 a for forming the component magnetic field detecting coil in the x-axis direction. The first detecting coil substrate 41 has two tantalum coil substrates 411 stacked one above the other so as to be electrically connected to each other. Each of the X-coil substrates 411 is formed with an X-coil pattern 41a for the y-axis component magnetic field detecting coil on the surface of the epoxy substrate, and a through hole 41b for connecting the terminals of the respective yoke patterns 41a is formed at the peripheral portion. Similarly, the first private coil substrate 42 has two Y-coil substrates 42 sandwiched by the lower and lower sides of the sensor core 3, and the Y-coil substrates 42 are tied to the oxygen. The surface of the substrate forms a turn coil pattern 42 a for the γ-axis direction component magnetic field detecting coil, and a through hole 42 b for connecting the terminals of the Y coil patterns 42 a is formed at the peripheral portion. Further, the excitation coil substrate 5 has two excitation coil substrates 51 and 52 which are stacked so as to be electrically connected to each other with the sensor core 3 interposed therebetween. Each of the excitation coil substrates 5B is formed on the surface of the epoxy substrate to form an excitation coil case 5 1 a $ 2 a ', and a peripheral hole portion is formed to connect the respective excitation coil patterns, and the end = through holes 51b, 52b . In the magnetic force detecting unit 1 , the sensor core 3, the magnetic field detecting coil substrate 4, and the exciting coil substrate 5 are sequentially stacked around the sensor core 3, and pressed to form a layer. In the magnetic force detecting portion 1 , , the sensor core 3 is saturated by passing an alternating current to the periphery of the sensor core 3 . In the state where it is not affected by the external magnetic field, the timing at which the sensor core 3 is saturated appears to be exactly equal when facing the positive direction of the alternating current and toward the negative direction. However, when the magnetic flux from a certain direction passes through the sensor core 3, the magnetic field overlaps in the positive or negative direction as described above.

1287101 Case No. ggii264〇 Year of the Lunar New Year--- V. Invention Description (7) The magnetic field generated by the iron core 3 causes the sensor core 3 to saturate in this direction early. The sensing coil ' is wound around the sensor core 3 and the external is detected as an imbalance of saturation as a voltage. By vertically arranging the two sets of sensing coils (X coil and Y coil), the output voltage of the magnetic field component corresponding to the X-axis direction and the magnetic field component of the Y-axis direction can be detected. The component symbol 6 is a CPU that performs predetermined arithmetic processing based on the position signal from the input GPS receiving unit and the orientation signal from the magnetic sensor 2 and measures the position (longitude and latitude and orientation) and from the map. The information recording unit 7 reads the map information 'consistent with the current position information and displays it on the display 9 1 of the position information display unit 9 simultaneously with the current index. At the same time, the position information display unit 9 uses the synthesized sound to pronounce and display the current position, direction, and the like. The position information from the GPS receiving unit 1 and the position information from the magnetic sensor 2 complement each other. The orientation information can be obtained by calculation from the change of the location information of the GPS# receiving unit 1 caused by the movement of the portable terminal device. Comparing the orientation information with the orientation information from the magnetic sensor 2 and setting the orientation information from the magnetic sensor 2 to the timing, the starting point can be calculated. Thereby, the position information of the GPS receiving unit 1 can be sent back to the starting time point, and the integrated and accumulated error information can be returned to the map information display processing unit 8 to be displayed on the display 91. The current map information rotates the reel at a desired angle as needed, and the current direction of the map (the direction in which the magnetic sensor is directed) is often displayed on the map information of the current location toward the upper side of the display. Reference:

314553 Rev.pt.ptc Page 11 1287101 92112640-Multiple f winters_Revision __- V. Description of the invention (8) Figure to illustrate. The azimuth signal from the magnetic force sensing is taken as the analogy value of the detected geomagnetism into the X-axis direction (East-west direction) magnetic field vector value and the Y-axis direction (North-South direction) magnetic field vector value and input to the CPU 6. . The CPU 6 converts the input signal A/D into a digital signal. The magnetic field vector values in the X-axis direction and the Y-axis direction can improve the decomposition ability by using predetermined correction parameters stored in the EEP-ROM. When the north magnetic pole direction is set to 0 degrees, the direction of the resultant vector T (in the direction in which the magnetic sensor is directed) of the magnetic field vector value X1 in the X-axis direction and the magnetic field vector value Y1 in the γ-axis direction is oriented in the direction. The rotation angle (azimuth angle can be obtained by the following formula: Θ -tan"1 Xl/Yl When calculating the azimuth angle, the calculation logic of the correction parameter can be used without the magnetic p value in each direction. The calculation process of the map information display processing unit 8 is described with reference to Figs. 4 to 6. For example, now, the holder of the portable terminal device is located at the corner of the University of Engineering, Central University, and faces the northeast (square station). The direction of the latitude and longitude map information can be called by the recording unit 7 by the position signal from the GP»receiving unit. (Refer to the first information and then divide the current position P as the center. Select the map information that matches the display. ==200 points X 2 0 0 points. ^The large map of the map A is only made up of the azimuth angle β obtained by the magnetic sensor=select Rotate the $^ message clockwise (see Figure 5) Then 'is displayed on the display 91 when the map around the display clock time direction resource processing unit 8 of the selected map information line A toward the azimuth stalks by the rotation correction processing and displayed (refer to FIG. 6, eight results, wins

_ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ When the azimuth of the traveling direction is changed in accordance with the movement of the portable terminal, the map information display processing unit 8 performs the same processing as described above, and often displays the map information in the traveling direction toward the upper side of the display. These series of processes can be performed at high speed and instantaneously. Further, when the map information display processing unit 8 rotates the map information according to the azimuth angle, it is not necessary to rotate the characters or symbols included in the map information displayed on the display 91, but to the top of the display. The direction is maintained in the original positional relationship. Further, in Fig. 6, it is not necessary to perform such processing, and characters and the like are also rotated and displayed in azimuth. Characters or symbols marked in the horizontal direction maintain the mark in the horizontal direction even when the map information is rotated. This makes it easy to identify information such as characters. The destination can also be input by using a button or the like of the portable terminal device. At this time, the shortest path to the destination or the required time can be calculated based on the map information, and the information can be displayed on the display of the position information display unit by the sound output unit. Further, if the position information of the received or measured GPS receiving unit and the position information of the magnetic sensor are temporarily recorded, the trajectory of the portable terminal device can be confirmed based on the information. According to the first embodiment of the present invention, the following effects can be obtained. Since the azimuth detecting mechanism used in combination with the GPS position detecting mechanism employs a geomagnetic sensor using a flux gate type magnetic sensor or a Hall element or a magnetoresistive element, wherein the flux gate type magnetic sensor is used in The upper layer of the sensor core

314553 Revised Edition.ptc Page 13 1287101 Case Number 11264〇? 4一车夕月芦曰 Revision 5, Invention Description (10) Stacked magnetic field detection coil substrate and excitation coil substrate sensor substrate, so can be The small portable terminal device, especially the display of the mobile phone, displays the map information and the correct current location of the holder. Since the map information is rotated by the map information processing mechanism according to the azimuth angle obtained by the magnetic field vector value of the magnetic sensor, the moving direction of the portable terminal device can often face the display unit plane. The preset specific direction is displayed, and the direction of the map information is consistent with the direction of travel', which not only does not give the user an uncomfortable feeling, but also dynamically understands the correct orientation and position. Furthermore, since the position information of the G p S is complemented by the orientation information of the geomagnetic sensor, the error accumulation hole accumulated by the integration method can be eliminated as much as possible and a highly precise position display system can be provided. The features of the first embodiment are limited to the following items. (Item 1 - 1) A position information display system, characterized in that the portable terminal device is provided with: a position detecting mechanism that detects a position based on a GPS signal; and an azimuth detecting mechanism that detects a position by a geomagnetic sensor The geomagnetic sensor utilizes a flux sensor or a Hall element or a magnetoresistive element composed of a sensor substrate on which a magnetic field detecting coil substrate and an exciting coil substrate are stacked under the sensor core. The calculus mechanism corrects the position information of the position detecting mechanism by using the position detecting mechanism; the map information storage mechanism storing the map information; the position information display mechanism, and simultaneously displaying the current position determined according to the calculating mechanism; ^ The map information; and the display processing mechanism, along with the change of the position of the current position, so that the map information displayed by the location information display mechanism is based on

314553 Revised Edition .ptc

Page 14 Case No. 92112640 9 eve of the year ^^ n V. Description of the invention (11) ^ The output signal of the azimuth detecting mechanism is changed. When the orientation is changed due to the movement of the portable terminal device, a reel; the processing mechanism rotates the map information, and displays the display portion in the position information, so that the current position of the portable terminal device is often oriented toward a predetermined specific direction in the plane of the display portion To display the direction of travel (items 1 to 2) as described in (item 1 _ 1 ). The magnetic field detection coil of the above-mentioned flux gate type magnetic sensor = system, including: magnetic field detection with X-axis direction component a first detecting coil substrate for forming a coil; a second detecting coil substrate having a coil pattern for forming a magnetic field in the Y-axis direction; wherein the double-up, coil-shaped substrate has The loop coil pattern for forming the exciting coil is formed at the edge of the substrate of the line sensor, and the position information = perforation described in (Item 3) is connected to each coil pattern. Wherein, the current position of the portable terminal device is such that the upper direction in the plane of the display portion of the mechanism is often displayed as a traveling party (item 4). The display mechanism is scooped into the right f-display system, and the display mechanism, a by the sound: two = shirt image and character, etc. and / or moving travel conditions can be invited to see the display mechanism, and now = (item 1 5) If (the project ^ is now displayed by sound at the same time. In the middle, the position information is displayed by the position information display system, and the map information is entered by the above display processing mechanism, and the word is in the message. The metasystem is maintained on the upper I = turn processing, and is included in the map in the specific direction to perform the above rotation = two

1287101 Case No. 92112640 $ 年彡月# 曰___ V. The positional relationship before the invention description (12). (Items 1 - 6) The position information display system described in (Item 1), wherein the magnetic sensor decomposes the geomagnetism into a magnetic field component in the X-axis direction and a magnetic field component in the Y-axis direction, and takes this as an analog value. The signal is outputted, and the calculation mechanism performs digital conversion of the analog signal and measures the current orientation, and the display processing mechanism uses the current azimuth angle when the north magnetic pole direction is set to 0 degrees as the rotation angle. Rotate the map information in the desired direction. (Items 1 - 7) The position information display system as described in (Item 1), wherein the position information display means displays the shortest path to the destination or the required time. (Second Embodiment) A geomagnetic sensor is conventionally used in order to measure the magnetic orientation of an observation point. The geomagnetic sensor is placed on the horizontal plane at the observation point, and the two-axis component of the geomagnetic vector on the horizontal plane is detected. The magnetic orientation is calculated from the two-axis component detected by the geomagnetic sensor. The use of map information in portable machines such as mobile phones and portable terminal devices is expanding. Therefore, it is possible to imagine that the geomagnetic sensor is assembled in a portable machine, and a small-sized and high-performance geomagnetic sensor can be obtained. The inventors of the present invention have completed the present invention based on the above findings, and an object thereof is to provide a small-sized and high-performance geomagnetic sensor. A certain aspect of the second embodiment relates to a flux gate type magnetic sensor. The utility model is provided with a magnetic detecting unit and a signal processing unit, wherein the magnetic detecting unit includes a sensor coil (X coil, Y coil) and is used for generating the same

314553 Revised version ptc Page 16 1287101 V. Invention description (13) --: ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ The toroidal coil 'and the signal processing electromagnetic force detecting portion is also the output signal of the measuring portion. The substrate layers may be formed by integrating a plurality of substrate layers, a Y coil, and a ring pattern and a substrate pattern to form a sensor coil (X coil, signal processing circuit = coil portion). The directionality depends on the x-coil and the Y-coil, and is independent of the alternating magnetic field: 镅ί. Each directional dependency circuit includes a ··· and stem- _ Pl· frequency and one is turned on, and the other is turned off. a first type, a type of switch; an active first integration circuit that integrates the output of the first analog switch; an active second integration circuit that integrates the output of the second analog switch; a differential amplifier having a difference between the circuit and the second integrating circuit; and an A/D converter for converting the output of the differential amplifier into a digital signal. The flux gate type magnetic sensing of the second embodiment will be described using FIG. Fig. 7 is a configuration diagram of a flux gate type magnetic sensor 300; which displays the X coil pattern 4 1 a of the magnetic force detecting portion 1 第 shown in Fig. 2 and corresponds to the far pattern 4 1 a. Signal processing circuit 2 0 0. X line Although one end of the pattern 4 1 a is grounded, it may be connected to the positive side of the operational amplifier of the first integrating circuit 24 and the second integrating circuit 26. The signal processing circuit 2 0 0 is shown in FIG. The mode configuration includes: a first analog switch 2 0; a second analog switch 2 2 ; an active first integration circuit 2 4 ' integrating the output of the first analog switch 20 to output the first analog switch 2 2 An active second integration circuit 26 that is integrated to amplify the first product

314553 Rev. ptc Page 17 1287101 Revision 、5, Invention Description (14) Differential amplifier 28 of the difference between the sub-circuit 2 4 and the second integration circuit 26; and converting the output of the differential amplifier 28 into a digital position Signal A/D converter 30. The integral constants of the first integrating circuit 24 and the second integrating circuit 26 and the differential amplifier 28 are determined by the capabilities of the A/D converter 30. In the signal processing circuit 200, the period of the first analog switch 20 and the second analog field is turned on/off in accordance with the frequency f 对应 corresponding to the alternating current: 。. The respective output voltages are integrated in the second integration circuit 26 by the second interpolation, and are amplified by the difference of the differential amplification circuit 24, whereby the corresponding X-axis direction device 28 can be obtained. Equal output voltage. The output voltage is digitized by the A/D converter 30 from the field component, and the data transfer ratio of the magnetic component in the X-axis direction is converted to another, and the signal processing circuit 200 corresponds to the X coil. With the unillustrated ~CPU part. They are set independently, but the same processing is applied to the Y-coil detected by the Y coil. ‘Annual can also be processed by the output Φ signal detected by the X coil and the γ coil, and the digital data corresponding to the X-axis direction and the Y-axis side of 6 ^ ^ can be obtained, and the magnetic orientation can be known. According to the second embodiment of the present invention, the signal processing for the specific magnetic orientation in the flux gate magnetic sensor can be implemented. IU ^ The characteristics of the second embodiment are limited to the following items: item 0 (item 2 - 1 ) - a kind of geomagnetic sensor' which has the flux of the ancient, 1 force measurement and signal processing unit The brake plastic magnetic sensor, the Shen μ, τ ^ force is the tear j: & p is the XY coil and the toroidal coil used to generate the 4, ^, parent flow magnetic field of the XY coil excitation, and the signal The processing circuit is configured to process the magnetic force k 〃 detection unit

314553 Revised Edition Work Correction 1287101 Case No. 9211264Q ^年夕月#日五, Invention Description (15) The signal generator is characterized in that the signal processing circuit includes two directivity independently set corresponding to the XY coil. In the dependent circuit, each of the directional memory circuits includes: first and second analog switches that are configured to turn on one of the signals output from the respective coils according to the frequency of the alternating magnetic field, and turn off the other analog switch An active first integrating circuit that integrates an output; an active second integrating circuit that integrates an output of the second analog switch; a differential amplifier that amplifies a difference between the first integrating circuit and the second integrating circuit; And an A/D converter that converts the output of the differential amplifier into a digital signal. (Item 2 - 2) - A geomagnetic sensor comprising a flux gate type magnetic sensor having a magnetic detecting portion and a signal processing portion, wherein the magnetic detecting portion includes an XY coil and is used to generate the XY a loop coil of an alternating magnetic field excited by a coil, wherein the signal processing circuit is configured to process an output signal of the magnetic force detecting portion, wherein the magnetic detecting portion is formed by integrating a plurality of substrate layers, and the substrates are The layer system respectively forms a coil portion of the XY coil and the loop coil according to the substrate pattern, and the signal processing circuit includes the XY coil corresponding to the XY coil.

Page 19 314553 Revised Edition. ptc 1287101 Case No. 9211264〇7 夕夕夕月曰 Correction _ V. Invention Description (16) Two Directional Dependent Circuits Set Up Each Directional Dependent Circuit Contains: a first and a second analog switch that turns on a signal output from a corresponding coil and turns off the other of the frequency of the alternating magnetic field; and an active first integrating circuit that integrates the output of the first analog switch; An active second integration circuit that integrates the output of the second analog switch; a differential amplifier that amplifies the difference between the first integration circuit and the second integration circuit; and A that converts the output of the differential amplifier into a digital signal /D converter. (Third Embodiment) An object of the third embodiment is to realize a smaller magnetic force sensor. Hereinafter, a description will be given of a technique in which a magnetic sensor and an azimuth sensor of the magnetic sensor are assembled into a small size. Fig. 8 is a view showing the configuration of the orientation sensor 500 in the third embodiment of the present invention. The position sensor 500 is provided with a magnetic sensor 600, a tilt sensor 700, a barometric sensor 800, and a temperature sensor 900, and has a detection position, an orientation, and High level and other functions. In the azimuth sensor 500, the magnetic sensor 600, the tilt sensor 700, the barometric sensor 800, and the temperature sensor 900 may be separately formed, but Mounted in a portable terminal device or the like, preferably built on a single substrate to form a small

314553 Revised Edition.ptc Page 20 V. Invention Description (17). The magnetic sensor 600 has at least three magnetic force detecting elements for detecting the three-axis component of χγζ of each magnetic force vector. The tilt sensor 7 〇 〇 preferably has a function of detecting the tilt angle of the substrate, and can detect the tilt angle of the χγΖ2 3 axis direction. The inclination angle in the X-axis direction may also be referred to as a pitch angle (pitch, a n g 1 e ) ', and the inclination angle in the γ-axis direction is referred to as a roll angle a n g 1 e ). The barometric sensor 8 〇 is used to detect the pressure of the outside air. The overflow is sensed as 900 to detect the temperature. The detected temperature is used to correct the drift of the output of the magnetic sensor 60 〇 caused by temperature drift. The ninth figure shows a schematic diagram of an example of the tilt sensor 700. Tilt Sense 70 0 has a weight of 7〇2. When an acceleration component is applied to the weight 7 〇 2, a skew is generated on the supporting member 704 supporting the weight 70 2, and the skew is detected by a resistor and the inclination is measured. In the figure, although only one p supporting member 7〇4 is shown, the weight 70 2 is preferably supported by the plurality of solid holding members 704 from the three-axis direction of the χγζ. Preferably, the support members 704 are comprised of piezoelectric elements. The tilt sensor 7 is used to detect the tilt angle of the XYZi 3-axis direction. Since the inclination of the magnetic sensor 6 〇 检测 is detected as the inclination angle of the lining, it is possible to correct the inclination angle in the X-axis and γ-axis directions. Fig. 10 is a schematic view showing an example of the magnetic sensor 600. The magnetic 2 sensing type 600 system includes: a first magnetic detecting element 6〇2 having a function of a 3-axis magnetic sensor and measuring a magnetic component in the X-axis direction; The second magnetic force detecting element 6 〇 4 of the magnetic component in the Y-axis direction and the third magnetic force detecting element 6 〇 6 for detecting the magnetic component in the z-axis direction. In the first and second embodiments, the flux type magnetic force is utilized.

314553 Correction Orphan Page 21 1287101 Case No. 9211261 V. Description of Invention (18) Correction The example of detecting the magnetic component of the X-axis direction and the γ-axis direction by the detector is described as "中中". The flux gate type magnetic sensor will become larger in composition because it requires a toroidal core to start and circle. Therefore, there is no problem in installing a flux-type damper in a vehicle that has a sufficient space for installation. f = It is built into a small terminal device such as a mobile phone, and it is necessary to change from rice to rice. The relationship between other built-in components is spent on the configuration of the frame. On the other hand, it is known that a magnetoresistance effect element such as an MR element and a magnetic induction element such as a band element are smaller than a flux gate type magnetic sensor. However, in the past, both the head and the tail have been produced simultaneously. An MR component or a Hall component that can be mounted in a portable=1 device is not an easy task. In the third embodiment of the first terminal, a technique for forming the magnetic sensor 600 into a small size is provided, and in particular, the magnetic sensor 60 〇 is tilted and tilted, and the other senses of the temple are simultaneously measured. A technique formed on a substrate. In the magnetic sensor 600, at least the first magnetic force detecting element 6 is preferably an MR element or a Hall element, and the third force detecting element 6 0 6 is also the same. It is more advantageous for the MR element or the Hall element to form the magnetic sensor 6 by a series of semiconductor processes by forming all of the magnetic force detecting elements into MR elements or Hall elements. r The first magnetic sensing element 6 〇 2 and the second magnetic sensing element form a box on the surface of the substrate 6 1 0 ☆ 接 a a 〇, 相 里 也 也 本 本 本 & & & & 疋 , , , , , , , And the two-axis magnetic force of the ίίίΓ I direction in the direction of the α-axis direction of the 9-axis direction is respectively formed. The magnetic-sensing element 6 0 2 and the second magnetic-measuring element 侔6 04 are preferably attached to the substrate 6丨. π夕主士 ν a column of the piece & R1r^ # $ ^ The surface forms a substantially upright state. Further, on the surface of the substrate 610, the first phase is a magnetic sensing element 602 and a second magnetic sensing element.

Case 5 Tiger 9211264Π

1287101 V. INSTRUCTION OF THE INVENTION (19) It is preferable to arrange the direction parallel to the respective surfaces to be 9 〇. . The third magnetic force detection: the member = is formed on the surface of the substrate 61, and the magnetic force perpendicular to the surface of the substrate (the Z-axis direction) is detected as eight

Each magnetic n element has a general 4-aF ea) i L

The magnetoresistive film of the film structure represented by My0z. The magnetic film system has a magnetic permeability of 1,0 0 0, 〇 〇 〇 1 e or more, and is composed of a rare earth and a nano-sized magnetic metal powder capable of detecting a magnetic field of 丨# τ or more. In the process of the magnetic detecting element, it is preferable to form the magnetic detecting element of the MR element or the Hall element on the substrate, and then the formed magnetic detecting element is fixed to the polyimide film. In this example, the first magnetic sensing element 602 and the first magnetic sensing element 604 are affixed to the polyimide film. The region of the polyaniline ruthenium film to part J is fixed to the substrate. The polyimide film has a property of shrinking by adding a predetermined amount of heat. In the third embodiment, the heat shrinkage property of the polyimide film is used, and after the magnetic detecting element is fixed to one surface of the polyimide film, the region where the magnetic detecting element is fixed is fixed to A portion of the region between the regions on the substrate is heated in a line shape and contracted to bend the region to which the magnetic detecting element is fixed in a desired direction. Thus, a magnetic detecting element which is substantially erected on the surface of the substrate 61 can be produced. Hereinafter, a method of forming the first magnetic force detecting element 602 in the substrate upright will be described. Further, the second magnetic force detecting element 604 can be erected by the same method. In the magnetic sensor 600 shown in Fig. 10, the two magnetic detecting elements 6 0 2 and 60 4 are formed upright, but in other examples,

314553 Revised Edition.ptc Page 23

::: The magnetic detecting element is formed on the plane of the substrate 610, and one w measuring element is formed upright on the substrate 6 1 G. At this time, as long as the two magnetic force detecting elements formed on the plane of the soil counter 6 1 , detect the vertical magnetic field and the horizontal magnetic field of the magnetic force vector, and the magnetic detecting elements which are formed upright, the components perpendicular to the magnetic fields are detected. Just fine. The following is a description of the steps for producing the magnetic sensor 6 〇〇 shown in Fig. 1 . Fig. 11(a) is a view showing a state in which the first magnetic detecting element 602 is formed in the first cymbal substrate 62A. Further, although not shown, in this step, the second magnetic force detecting element 604 and the third magnetic force detecting element 605 are simultaneously formed on the first slab substrate 6 2 〇 at the same time. Each of the magnetic force detecting elements is formed by a semiconductor process. Fig. 11(b) is a view showing a state in which the polyimide film 6 2 2 is adhered to the first magnetic force detecting element 602. For example, when a polyimine mixed with a cerium oxide is used, the polyimide film 6 2 2 can be thermally bonded to the first lithium substrate 6 2 2 by heating to approximately 3 6 . The polyimine film 6 2 2 above the first magnetic force detecting element 602 will cooperate with the shape of the first magnetic detecting element 602 to generate cracks by etching. Further, enthalpy existing under the first magnetic force detecting element 602 is removed by etching. At this time, the polyimide film 6 2 2 located above the third magnetic detecting element 6 0 6 which is not required to stand upright is preferably removed by etching. In addition, the wiring and circuit components required in each of the magnetic force detecting elements are formed on the first ruthenium substrate 6 2 0 or the polyimide film 6 2 2 〇 11 (c) is a polyimide film 6 2 2 Above view. In the Juju

314553 Rev.pt.ptc Page 24 1287101 Case No. 92112640 修正 Amendment V. Description of the Invention (21) The amine film 6 2 2 is formed into a rectangular bent region 6 26 which is cracked at three sides. The bent region 626 is formed by forming a crack so as to cover at least the first magnetic force detecting element 602 below. The bent region 626 may be formed after the polyimide film 6 2 2 is adhered to the first ruthenium substrate 6 2 0 as described above, but may be formed before bonding. The first 1 (d) diagram is a schematic view showing a state in which the polyimide film 6 2 2 is bent upward and the first magnetic detecting element 602 is erected. The polyimide film 6 2 2 has a property of heat shrinkage when heated to a high temperature. In this embodiment, the characteristic is utilized, and one of the polyimine film 622 is heated, and the first magnetic force detecting member 6 02 is erected. The polyimide film 6 2 2 which is perpendicular to the surface of the first ruthenium substrate 62 亦可 can also be bent downward. The field ..., Fig. 1 1 (e) is a schematic view showing the state of the amine film 622 of the second ruthenium substrate 6 24 . The second layer of the yttrium imine film 622 is bonded to the portion of the polyimide film 622 which is in contact with the polyimide film 622, and is formed into an opening 628, and the film 622 The function of the pressing member. The fixed polyimine is detected on the side of the detecting element 6 0 2 , and the first magnetic force is fixed to the pressing member. In addition, the surface of the polyimide film 622 is a stone substrate 624, and the second 24th of the magnetic force detecting element _ can also be used to make the second magnetic substrate 622 of the first magnetic detecting element 6〇H. And can be fixed in the side of the 醯 醯 矽 624 624 ( ( 按压 按压 ( ( ( ( ( ( ( ( 622 622 622 622 622 622 622 622 622 622 622 622 622 622 622 622 622 622 622 622

Page 25 1287101 12640 $ 年月月〆曰 Amendment 5. Invention Description (22) The above process is used to form a first magnetic force detecting element 602 that stands upright on the surface of the substrate. In order to produce the magnetic sensor 600 shown in Fig. 10, it is preferable to simultaneously form the second magnetic detecting element 604. In addition, the second lithography substrate 624 may also etch other portions as needed to retain only the portions of the pressing members for fixing the first magnetic force detecting element 602 and the second magnetic detecting element 604. The area is removed. Further, in the third embodiment, the use of the tantalum substrate and the polyimide film to form a magnetic sensor having an integrated structure contributes to downsizing of the magnetic sensor. Further, since other sensors, that is, a tilt sensor and a barometric sensor, can be formed on the substrate, a very small orientation sensor can be produced as a whole. Figure 1 2 (a) shows a schematic diagram of the dream wafer 65 before cutting. On the Shihwa wafer 650, a dicing line for cutting the wafer into a wafer is formed by the ruling. Figure 1 2 (b) shows a partial cross-sectional view of the wafer 650. With the etching property of the crucible, the side wall 656 of the dicing line 652 is formed with an inclination of about 67 degrees with respect to the plane parallel to the surface of the wafer. In the figure, the broken line is the cutting line at the time of cutting. The 1 2 (c) diagram is a schematic view showing a state in which the magnetic force detecting element 645 is formed on the side wall 65 of the cutting line 652. Thus, the magnetic force detecting element 653 is formed on the surface having a predetermined angle with respect to the surface of the lithium circle 650, that is, the three-axis magnetic sensor can be easily fabricated. Further, since the magnetic force detecting element 650 is not formed to be perpendicular to the surface of the slab substrate, the detected magnetic component is corrected in accordance with the angle of the slope (67 degrees). Magnetic sensor mounted on a portable terminal device, not only for inspection

314553 Rev.pt.ptc Μ m

J raw ill Page 26 1287101 Case No. ^2112640

Amendment 5, invention description (23) Knowing the natural magnetic field, it is also possible to detect the dynamic magnetic field generated in the portable terminal device, or in the city and in the developed area of the transportation network. Therefore, in order to extract only the components of the natural magnetic field, it is necessary to remove the dynamic magnetic component from the detected magnetic component. When the conventional two-axis magnetic sensor is used, since the magnetic field strength cannot be obtained, it is impossible to efficiently remove the magnetic component of the turbulence. On the other hand, since the magnetic force sensing steam 60 of the present embodiment can detect the magnetic component in the three-axis direction, the magnetic field strength can be measured. For example, in the magnetic force sensor 600, when a predetermined magnetic field intensity is set and recorded in advance in the recording portion, and a magnetic component exceeding the set intensity is detected, the magnetic force component can be judged as noise and eliminated. Thus, since the magnetic sensor 600 detects the strength of the magnetic field, it can be automatically calibrated according to the calculation of C P U 6 . Further, when the geomagnetic component is detected, the magnetic force sensing, ~ in reality, it is necessary to correct the tilting component by using the output value of the tilt sensor. When the conventional 2-axis tilt sensing Is (acceleration sensor) is used, only the correction data of the X-axis and the γ-axis direction is obtained, and the tilt of the tilt sensor itself cannot be detected. Therefore, when using a 2-axis tilt sensor, it is necessary to adjust the Z-axis component of the tilt sensor to the state of 〇, that is, to calibrate the tilt=sensor in a horizontal state to correct The detected value of magnetic sensing. The tilt sensor 70 of the embodiment is capable of detecting the 3-axis direction calibration ': another': the user does not need to set the tilt sensor in parallel, in order to utilize the weight 702 , can also tilt sensor 7〇〇 and j

Correction and Invention Description (24) A slanting force sensor 6 is formed on a substrate while being miniaturized. When the sensor 700 is used, the user can unconsciously utilize the cpu6: the automatic tilt angle calibration is performed, and the output of the sensor 600 can be obtained.巾 礤 礤 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可display. For example, it is also possible to install JAVA (registered trademark: Claw Spit) and other applications in the early installation, and install and display the map information. When it is missing, as in ^, to enter: the description can also be built into the portable terminal device::: Form:. With the cooperation, to determine the position of the portable terminal device = device too ... *, in which case, the portable terminal device is best *b with: the size of the body to enlarge or reduce the display allocation The transmitted τ is also carried by the air pressure sensor 800 in the portable:: the height at which the portable terminal device is located. The measurement of the air pressure and the device vary depending on the climate of Ik. Therefore, it is best to pre-set the relationship between the ground surface, the value of the pressure, and the rise of the air pressure above the ground surface, i (absolute gas). (tab 1 e ) is recorded in the recording section. = 目 versus milk pressure) The relationship between pressure and relative air pressure can also be calculated in the form of a formula, absolutely in the air. The CPU 6 misplaces the recording unit and the relative air pressure according to the output value of the gas sensor 8〇〇, and specifies the height, and the absolute air pressure value, and specifically specifies the portable terminal device, the 纬C latitude and the

1287101 Case No. 92112640 Redundant ^year t月#曰 Amendment _ V. Invention description (25) Degree), the result can be judged which floor of the building. For example, when it is judged that it is located on the third floor of the building, it will display the storefront information on the third floor of the building in the display of the portable terminal device, and the portable terminal device with high convenience can be realized by the user. . By forming a three-axis magnetic sensor 600, a three-axis tilt sensor 700, or the like on a substrate, the high-precision orientation sensor 500 can be formed to be extremely small. In addition, although the orientation sensor 500 is mainly illustrated by being assembled in a portable terminal device, those skilled in the art can easily understand that it can also be assembled in a vehicle or other large mobile device. in. (Industrial Applicability) As described above, the present invention can be utilized in a device for displaying position information, and a magnetic sensor or an orientation sensor incorporated in the display device.

314553 Revised Edition.ptc Page 29 1287101 92Π2640 New Year April 〆S Amendment

314553 Rev.pt.ptc Page 30 1287101 Case No. 92112640 The 曰 correction diagram briefly illustrates the state of the polyimine film adhered to the top of the component; the 1 1 (c) diagram is a view of the polyimide film 1st (1) is a schematic view showing a state in which the polyimide film is bent upward and the first magnetic detecting element is erected; the 1st (e) figure is shown on the side of the second substrate. Schematic diagram of the state of polyimine. The 1 2 (a) diagram shows a schematic diagram of the wafer before cutting; the 1 2 (b) diagram shows a partial cross-sectional view of the wafer; the 1 2 (c) diagram shows the magnetic force formed on the sidewall of the cutting line. A schematic diagram of the state of the sensing element. [Description of main component symbols] 1 GPS receiving unit (position detecting mechanism) 2 Geomagnetic sensor (orientation detecting mechanism)

3 sensor core 4 magnetic field detecting coil substrate 5 exciting coil substrate 6 CPU 7 map information recording unit 8 map information display processing unit 9 position information display portion 20 first analog switch 22 second analog switch 24 first integrating circuit 26 second Integral circuit 28 Differential amplifier 30 A/D converter 41 First detection coil substrate 41a X-axis direction component magnetic field detection coil formation coil pattern 41b Through hole 411 X coil substrate 42 Second detection coil substrate 42a Y-axis direction component Magnetic field detecting coil forming coil pattern 42b through hole 421 Y coil substrate 5 Bu 5 2 exciting coil substrate 51a, 5 1 b through hole page 31 314553 modified version ptc 1287101 case number 92121640 f 夕年彡月声日_correction BRIEF DESCRIPTION OF THE DRAWINGS 91 Display 100 Magnetic detecting portion 200 Signal processing circuit 500 Azimuth sensor 600 Magnetic sensor 602 First magnetic detecting element 604 Second magnetic detecting element 606 Third magnetic detecting element 610 Substrate 620 First 夕 substrate 622 polyimide film 624 second substrate 626 is bent region 628 opening portion 650 seconds Cut line 654 652 656 magnetic detecting element supporting member 704 side wall 702 of the weight sensor tilt sensor 700 a temperature sensor 900, page 32800 Pressure

314553 Revised Edition .ptc

Claims (1)

1287101 Case No. 9211264g_^^^ I Month θ Patent application scope - a type of geomagnetic sensor is built in a portable plate to form a device for detecting the direction of the device, and in the detection of the device, the characteristics are: glaze component of the force plant =:, magnetic detection The component is a magnetoresistive (MR) component and is attached to a film having heat shrinkability. The member or the Hall device is provided with a magnetic detecting element having a component for detecting an axial direction, and is characterized in that the magnetic detecting element is a magnetoresistive (MR) element or is fixed to have heat shrinkability. film. The magnetic sensor of the second aspect of the invention, wherein the detecting component is fixed to fix at least a portion of the magnetic film of the imine, and is opposite to the substrate The surface is formed by agglomeration. The top cymbal angle = _^ range of the thief's magnetic force _ device 'where' the above-mentioned magnetic force = element is formed by heating the poly (tetra) film and thermally shrinking it, forming an angle with respect to the surface of the substrate. 5. Please! The magnetic sensor of the range of $3, wherein the surface of the polyimine film on the opposite side of the side of the fixed magnetic force iii is fixed in 6. The magnetic sensor of the fourth item, wherein the magnetic side is fixed The surface of the polyimide film on the opposite side is fixed to the magnetic sensor of the fifth aspect, wherein the pressing sputum is formed by ruthenium. 4 314553 Rev.pt.ptc Page 33 1287101 Case No. 92112640 He 曰 Amendment 6. Patent application scope 8. If the application for special components is 9. If the application is special, the above-mentioned 10. azimuth and tilt magnetic vector The sensor system 11. If the application of the special force detecting element 1 2. The magnetic direction component is a surface of the magnetic resistance of the magnetic sensor of the sixth item, wherein the pressing force is formed. A magnetic sensor according to any one of items 2 to 8, wherein the substrate is formed of tantalum. The sensor is integrally formed with a geomagnetic sensing sensor on a substrate, wherein the geomagnetic sensor has a magnetic detecting element that detects each axial component of the 3-axis component, and the tilt detects the 3-axis. The tilt of the direction. The orientation sensor of item 10, wherein the plurality of magnetic members are fixed to the polyimide film. The sensor is a magnetic detecting element having a substrate that detects an axis of a magnetic force vector, wherein the magnetic detecting element (MR) element or the hall element is formed on a slope having a predetermined angle with respect to the substrate. 314553 Revised. .ptc第34页