TWI284195B - Capacitance-based position sensor - Google Patents
Capacitance-based position sensor Download PDFInfo
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- TWI284195B TWI284195B TW091133076A TW91133076A TWI284195B TW I284195 B TWI284195 B TW I284195B TW 091133076 A TW091133076 A TW 091133076A TW 91133076 A TW91133076 A TW 91133076A TW I284195 B TWI284195 B TW I284195B
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- Taiwan
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Links
- 239000003990 capacitor Substances 0.000 claims abstract description 36
- 230000033001 locomotion Effects 0.000 claims abstract description 29
- 238000003860 storage Methods 0.000 claims description 77
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- 238000000429 assembly Methods 0.000 claims description 22
- 230000009471 action Effects 0.000 claims description 13
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- 238000010168 coupling process Methods 0.000 claims description 12
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- 238000006073 displacement reaction Methods 0.000 description 18
- 238000000034 method Methods 0.000 description 7
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- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/043,970 US7142500B2 (en) | 2002-01-11 | 2002-01-11 | Sensor with varying capacitance based on relative position between objects |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200301818A TW200301818A (en) | 2003-07-16 |
| TWI284195B true TWI284195B (en) | 2007-07-21 |
Family
ID=21929857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW091133076A TWI284195B (en) | 2002-01-11 | 2002-11-11 | Capacitance-based position sensor |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7142500B2 (https=) |
| EP (1) | EP1327861B1 (https=) |
| JP (1) | JP4143420B2 (https=) |
| KR (1) | KR101012981B1 (https=) |
| CN (1) | CN100425943C (https=) |
| DE (1) | DE60336282D1 (https=) |
| SG (1) | SG107623A1 (https=) |
| TW (1) | TWI284195B (https=) |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7075317B2 (en) * | 2004-08-06 | 2006-07-11 | Waters Investment Limited | System and method for measurement of small-angle or small-displacement |
| KR100647724B1 (ko) * | 2004-10-28 | 2006-11-28 | 주식회사알에프윈도우 | 이동형 무선 사설교환장치 |
| US7343813B1 (en) * | 2005-02-15 | 2008-03-18 | Harrington Richard H | Multicapacitor sensor array |
| CN101410690B (zh) * | 2006-02-21 | 2011-11-23 | 赛博光学半导体公司 | 半导体加工工具中的电容性距离感测 |
| US7893697B2 (en) * | 2006-02-21 | 2011-02-22 | Cyberoptics Semiconductor, Inc. | Capacitive distance sensing in semiconductor processing tools |
| US7808061B2 (en) * | 2006-07-28 | 2010-10-05 | Hewlett-Packard Development Company, L.P. | Multi-die apparatus including moveable portions |
| DE112007002309T5 (de) | 2006-09-29 | 2009-07-30 | Cyberoptics Semiconductor, Inc., Beaverton | Substratähnlicher Teilchensensor |
| US20080246493A1 (en) * | 2007-04-05 | 2008-10-09 | Gardner Delrae H | Semiconductor Processing System With Integrated Showerhead Distance Measuring Device |
| GB2448821A (en) * | 2007-04-24 | 2008-10-29 | Seiko Instr Inc | Differential capacitive proximity detector |
| JP2008292446A (ja) * | 2007-04-24 | 2008-12-04 | Seiko Instruments Inc | 近接検出装置及び近接検出方法 |
| US20090015268A1 (en) * | 2007-07-13 | 2009-01-15 | Gardner Delrae H | Device and method for compensating a capacitive sensor measurement for variations caused by environmental conditions in a semiconductor processing environment |
| US7570066B2 (en) * | 2007-11-01 | 2009-08-04 | Seagate Technology Llc | Simultaneous detection of in-plane and out-of-plane position displacement with capacitive sensors |
| US20090206846A1 (en) * | 2008-02-14 | 2009-08-20 | Sanchez Francisco J | Capacitor-based position sensor for vehicle |
| EP2112518A1 (en) * | 2008-04-25 | 2009-10-28 | ALSTOM Technology Ltd | Brush wear monitor |
| US7898266B2 (en) | 2008-06-04 | 2011-03-01 | Seagate Technology Llc | Probe with electrostatic actuation and capacitive sensor |
| JP5522961B2 (ja) * | 2009-03-17 | 2014-06-18 | オリンパス株式会社 | 慣性駆動アクチュエータのキャリブレーション方法及び慣性駆動アクチュエータ装置 |
| US8661901B2 (en) | 2009-03-19 | 2014-03-04 | Hewlett-Packard Development Company, L.P. | Three phase capacitance-based sensing |
| US8272266B2 (en) * | 2009-04-09 | 2012-09-25 | Hewlett-Packard Development Company, L.P. | Gyroscopes using surface electrodes |
| US9658053B2 (en) | 2010-03-09 | 2017-05-23 | Si-Ware Systems | Self calibration for mirror positioning in optical MEMS interferometers |
| US8656778B2 (en) | 2010-12-30 | 2014-02-25 | Rosemount Aerospace Inc. | In-plane capacitive mems accelerometer |
| JP5524170B2 (ja) * | 2011-12-09 | 2014-06-18 | 株式会社東芝 | 記憶装置 |
| US20130320466A1 (en) * | 2012-05-31 | 2013-12-05 | Analog Devices, Inc. | Package for Damping Inertial Sensor |
| US9250143B2 (en) * | 2012-09-19 | 2016-02-02 | College Park Industries, Inc. | Multicapacitor force/moment sensor arrays |
| JP6386477B2 (ja) * | 2013-01-28 | 2018-09-05 | シーウェア システムズＳｉ−Ｗａｒｅ Ｓｙｓｔｅｍｓ | 光ｍｅｍｓ干渉計におけるミラー位置の自己校正 |
| WO2014120206A1 (en) * | 2013-01-31 | 2014-08-07 | Hewlett-Packard Development Company, L.P. | Sensor having particle barrier |
| WO2014144533A1 (en) * | 2013-03-15 | 2014-09-18 | Applied Materials, Inc. | Position and temperature monitoring of ald platen susceptor |
| CN104677390B (zh) * | 2013-11-26 | 2017-09-29 | 林立 | 电容式传感器及组合电容式位移测量传感系统 |
| CN104238573B (zh) * | 2014-08-21 | 2017-08-25 | 衡括流体动力实验室（北京）有限公司 | 动力提供装置及系统 |
| CN104268967A (zh) * | 2014-09-29 | 2015-01-07 | 深圳市爱普特微电子有限公司 | 基于电容式传感器的安全门禁方法和装置 |
| TWI575232B (zh) * | 2015-06-12 | 2017-03-21 | 財團法人工業技術研究院 | 感測裝置 |
| JP2018519960A (ja) * | 2015-07-12 | 2018-07-26 | ペイシェンツ ペンディング リミテッド | 一体化されたプランジャ位置検知部を有する液体送達システムのためのカバー、および対応する方法 |
| TWI577974B (zh) * | 2016-02-04 | 2017-04-11 | 台灣艾華電子工業股份有限公司 | 位置感測器及其可變式電容組件 |
| CN107462142B (zh) * | 2016-06-03 | 2019-09-17 | 清华大学 | 电容式接触型位移测量传感器及传感系统 |
| CN106705937B (zh) * | 2016-12-13 | 2019-11-15 | 国家电网公司 | 基于差分电容的电压杆塔倾斜监测系统及其方法 |
| CN109742998A (zh) * | 2018-12-24 | 2019-05-10 | 维沃移动通信有限公司 | 振动组件、马达控制方法及终端 |
| CN109916284A (zh) * | 2019-03-01 | 2019-06-21 | 维沃移动通信有限公司 | 一种位置检测方法及终端设备 |
| CN113116162B (zh) * | 2019-12-31 | 2023-10-03 | 浙江苏泊尔家电制造有限公司 | 烹饪器具和烹饪器具的控制方法 |
| CN112325756A (zh) * | 2020-09-04 | 2021-02-05 | 山东休普动力科技股份有限公司 | 自由活塞发动机动子位移传感器、动子识别系统及方法 |
| US20230143537A1 (en) * | 2021-11-11 | 2023-05-11 | Taiwan Semiconductor Manufacturing Company Limited | Semiconductor processing tool and method of operation |
| EP4425189A1 (en) * | 2023-03-01 | 2024-09-04 | Murata Manufacturing Co., Ltd. | Capacitive mems device |
| CN117674536B (zh) * | 2024-01-30 | 2024-06-04 | 基合半导体（宁波）有限公司 | 对焦马达、对焦马达的闭环控制方法及摄像设备 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE34741E (en) * | 1986-04-04 | 1994-09-27 | Mitutoyo Corporation | Electrode structure for capacitance-type measurement transducers |
| US4879508A (en) * | 1986-04-04 | 1989-11-07 | Mitutoyo Corporation | Capacitance-type measuring device for absolute measurement of positions |
| CH670306A5 (https=) * | 1986-11-13 | 1989-05-31 | Hans Ulrich Meyer | |
| US4893071A (en) * | 1988-05-24 | 1990-01-09 | American Telephone And Telegraph Company, At&T Bell Laboratories | Capacitive incremental position measurement and motion control |
| CH685214A5 (fr) * | 1991-10-15 | 1995-04-28 | Hans Ulrich Meyer | Capteur capacitif de position. |
| CN2117588U (zh) * | 1992-03-18 | 1992-09-30 | 水利部、能源部地质勘探机电研究所 | 平板电容式位移传感器 |
| US5418771A (en) * | 1993-02-25 | 1995-05-23 | Canon Kabushiki Kaisha | Information processing apparatus provided with surface aligning mechanism between probe head substrate and recording medium substrate |
| JP3625530B2 (ja) * | 1995-06-12 | 2005-03-02 | ヒューレット・パッカード・カンパニー | 位置検出装置及び位置検出方法 |
| US5708367A (en) * | 1995-07-10 | 1998-01-13 | Tousson; Eliahou | Digital position sensor |
| JPH1038508A (ja) * | 1996-07-22 | 1998-02-13 | Hewlett Packard Co <Hp> | 位置検出装置及び位置決め装置 |
| EP0836076B1 (fr) * | 1996-10-11 | 2002-05-22 | Brown & Sharpe Tesa S.A. | Dispositif de mesure de dimension capacitif |
| US5896232A (en) | 1997-08-07 | 1999-04-20 | International Business Machines Corporation | Highly efficient and compact frontlighting for polarization-based reflection light valves |
| US6868726B2 (en) * | 2000-01-20 | 2005-03-22 | Analog Devices Imi, Inc. | Position sensing with improved linearity |
| US6738336B2 (en) * | 2001-05-16 | 2004-05-18 | Hewlett-Packard Development Company, L.P. | Data storage device |
| US6509620B2 (en) * | 2001-05-31 | 2003-01-21 | Hewlett-Packard Company | Flexure coupling block for motion sensor |
| US6504385B2 (en) | 2001-05-31 | 2003-01-07 | Hewlett-Pakcard Company | Three-axis motion sensor |
| US6776042B2 (en) | 2002-01-25 | 2004-08-17 | Kinemetrics, Inc. | Micro-machined accelerometer |
-
2002
- 2002-01-11 US US10/043,970 patent/US7142500B2/en not_active Expired - Fee Related
- 2002-11-08 SG SG200206767A patent/SG107623A1/en unknown
- 2002-11-11 TW TW091133076A patent/TWI284195B/zh not_active IP Right Cessation
-
2003
- 2003-01-07 JP JP2003001388A patent/JP4143420B2/ja not_active Expired - Fee Related
- 2003-01-10 EP EP03250162A patent/EP1327861B1/en not_active Expired - Lifetime
- 2003-01-10 KR KR1020030001511A patent/KR101012981B1/ko not_active Expired - Fee Related
- 2003-01-10 DE DE60336282T patent/DE60336282D1/de not_active Expired - Lifetime
- 2003-01-13 CN CNB031016022A patent/CN100425943C/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN100425943C (zh) | 2008-10-15 |
| SG107623A1 (en) | 2004-12-29 |
| JP4143420B2 (ja) | 2008-09-03 |
| DE60336282D1 (de) | 2011-04-21 |
| US7142500B2 (en) | 2006-11-28 |
| CN1497237A (zh) | 2004-05-19 |
| EP1327861A1 (en) | 2003-07-16 |
| US20030133372A1 (en) | 2003-07-17 |
| EP1327861B1 (en) | 2011-03-09 |
| TW200301818A (en) | 2003-07-16 |
| KR20030061337A (ko) | 2003-07-18 |
| KR101012981B1 (ko) | 2011-02-10 |
| JP2003214807A (ja) | 2003-07-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |