TWI278606B - Method and system for flow measurement and validation of a mass flow controller - Google Patents

Method and system for flow measurement and validation of a mass flow controller Download PDF

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Publication number
TWI278606B
TWI278606B TW094123260A TW94123260A TWI278606B TW I278606 B TWI278606 B TW I278606B TW 094123260 A TW094123260 A TW 094123260A TW 94123260 A TW94123260 A TW 94123260A TW I278606 B TWI278606 B TW I278606B
Authority
TW
Taiwan
Prior art keywords
volume
data
error
flow rate
pressure
Prior art date
Application number
TW094123260A
Other languages
English (en)
Chinese (zh)
Other versions
TW200613700A (en
Inventor
Stuart A Tison
Sandeep Sukumaran
James Barker
Original Assignee
Celerity Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/887,591 external-priority patent/US7412986B2/en
Application filed by Celerity Inc filed Critical Celerity Inc
Publication of TW200613700A publication Critical patent/TW200613700A/zh
Application granted granted Critical
Publication of TWI278606B publication Critical patent/TWI278606B/zh

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/17—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using calibrated reservoirs

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
TW094123260A 2004-07-09 2005-07-08 Method and system for flow measurement and validation of a mass flow controller TWI278606B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/887,591 US7412986B2 (en) 2004-07-09 2004-07-09 Method and system for flow measurement and validation of a mass flow controller
US10/946,031 US7424895B2 (en) 2004-07-09 2004-09-21 Method and system for flow measurement and validation of a mass flow controller

Publications (2)

Publication Number Publication Date
TW200613700A TW200613700A (en) 2006-05-01
TWI278606B true TWI278606B (en) 2007-04-11

Family

ID=35839722

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094123260A TWI278606B (en) 2004-07-09 2005-07-08 Method and system for flow measurement and validation of a mass flow controller

Country Status (4)

Country Link
EP (1) EP1797489A4 (enExample)
JP (1) JP2008506116A (enExample)
TW (1) TWI278606B (enExample)
WO (1) WO2006017116A2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7757554B2 (en) 2005-03-25 2010-07-20 Mks Instruments, Inc. High accuracy mass flow verifier with multiple inlets
US7474968B2 (en) * 2005-03-25 2009-01-06 Mks Instruments, Inc. Critical flow based mass flow verifier
TWI416619B (zh) * 2006-11-17 2013-11-21 Lam Res Corp 執行實際流動驗證的方法
KR101028213B1 (ko) * 2007-12-27 2011-04-11 가부시키가이샤 호리바 에스텍 유량 비율 제어 장치
US7891228B2 (en) 2008-11-18 2011-02-22 Mks Instruments, Inc. Dual-mode mass flow verification and mass flow delivery system and method
JP5442413B2 (ja) * 2009-12-03 2014-03-12 ルネサスエレクトロニクス株式会社 半導体製造装置および流量制御装置
GB201108854D0 (en) * 2011-05-26 2011-07-06 Spp Process Technology Systems Uk Ltd Mass flow controller monitoring
US10031005B2 (en) * 2012-09-25 2018-07-24 Mks Instruments, Inc. Method and apparatus for self verification of pressure-based mass flow controllers
US11860018B2 (en) * 2020-08-14 2024-01-02 Horiba Stec, Co., Ltd. Rate-of-change flow measurement device
US20230235644A1 (en) * 2022-01-25 2023-07-27 Halliburton Energy Services, Inc. Well testing operations using automated choke control

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3363461A (en) * 1965-05-26 1968-01-16 Peerless Paint & Varnish Corp Method for measuring flow
US4146051A (en) * 1976-01-10 1979-03-27 Lucas Industries Limited Fluid flow control system
EP0547617B1 (en) * 1991-12-18 1996-07-10 Pierre Delajoud Mass flow meter and method
US5684245A (en) * 1995-11-17 1997-11-04 Mks Instruments, Inc. Apparatus for mass flow measurement of a gas
US6119710A (en) * 1999-05-26 2000-09-19 Cyber Instrument Technologies Llc Method for wide range gas flow system with real time flow measurement and correction
US6539968B1 (en) * 2000-09-20 2003-04-01 Fugasity Corporation Fluid flow controller and method of operation
WO2002033361A2 (en) * 2000-10-13 2002-04-25 Mks Instruments, Inc. Apparatus and method for maintaining a constant pressure drop across a gas metering unit

Also Published As

Publication number Publication date
TW200613700A (en) 2006-05-01
WO2006017116A3 (en) 2007-03-01
JP2008506116A (ja) 2008-02-28
WO2006017116A2 (en) 2006-02-16
EP1797489A4 (en) 2008-07-30
EP1797489A2 (en) 2007-06-20

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MM4A Annulment or lapse of patent due to non-payment of fees