JP2008506116A - フロー測定およびマスフロー調整器の検証のための方法およびシステム - Google Patents

フロー測定およびマスフロー調整器の検証のための方法およびシステム Download PDF

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Publication number
JP2008506116A
JP2008506116A JP2007520494A JP2007520494A JP2008506116A JP 2008506116 A JP2008506116 A JP 2008506116A JP 2007520494 A JP2007520494 A JP 2007520494A JP 2007520494 A JP2007520494 A JP 2007520494A JP 2008506116 A JP2008506116 A JP 2008506116A
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Japan
Prior art keywords
data
volume
flow
interval
collecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
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JP2007520494A
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English (en)
Japanese (ja)
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JP2008506116A5 (enExample
Inventor
チゾン，スチュアート・エイ
スクマラン，サンディープ
バーカー，ジェイムズ
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Celerity Inc
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Celerity Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Priority claimed from US10/887,591 external-priority patent/US7412986B2/en
Application filed by Celerity Inc filed Critical Celerity Inc
Publication of JP2008506116A publication Critical patent/JP2008506116A/ja
Publication of JP2008506116A5 publication Critical patent/JP2008506116A5/ja
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/17—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using calibrated reservoirs

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
JP2007520494A 2004-07-09 2005-07-07 フロー測定およびマスフロー調整器の検証のための方法およびシステム Withdrawn JP2008506116A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/887,591 US7412986B2 (en) 2004-07-09 2004-07-09 Method and system for flow measurement and validation of a mass flow controller
US10/946,031 US7424895B2 (en) 2004-07-09 2004-09-21 Method and system for flow measurement and validation of a mass flow controller
PCT/US2005/024084 WO2006017116A2 (en) 2004-07-09 2005-07-07 Method and system for flow measurement and validation of a mass flow controller

Publications (2)

Publication Number Publication Date
JP2008506116A true JP2008506116A (ja) 2008-02-28
JP2008506116A5 JP2008506116A5 (enExample) 2008-08-07

Family

ID=35839722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007520494A Withdrawn JP2008506116A (ja) 2004-07-09 2005-07-07 フロー測定およびマスフロー調整器の検証のための方法およびシステム

Country Status (4)

Country Link
EP (1) EP1797489A4 (enExample)
JP (1) JP2008506116A (enExample)
TW (1) TWI278606B (enExample)
WO (1) WO2006017116A2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011118654A (ja) * 2009-12-03 2011-06-16 Renesas Electronics Corp 半導体製造装置および流量制御装置
JP2012248193A (ja) * 2011-05-26 2012-12-13 Spts Technologies Ltd マスフローコントローラーの監視
JP2022032997A (ja) * 2020-08-14 2022-02-25 株式会社堀場エステック 流量変化率測定装置

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7757554B2 (en) 2005-03-25 2010-07-20 Mks Instruments, Inc. High accuracy mass flow verifier with multiple inlets
US7474968B2 (en) * 2005-03-25 2009-01-06 Mks Instruments, Inc. Critical flow based mass flow verifier
TWI416619B (zh) * 2006-11-17 2013-11-21 Lam Res Corp 執行實際流動驗證的方法
KR101028213B1 (ko) * 2007-12-27 2011-04-11 가부시키가이샤 호리바 에스텍 유량 비율 제어 장치
US7891228B2 (en) 2008-11-18 2011-02-22 Mks Instruments, Inc. Dual-mode mass flow verification and mass flow delivery system and method
US10031005B2 (en) * 2012-09-25 2018-07-24 Mks Instruments, Inc. Method and apparatus for self verification of pressure-based mass flow controllers
US20230235644A1 (en) * 2022-01-25 2023-07-27 Halliburton Energy Services, Inc. Well testing operations using automated choke control

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3363461A (en) * 1965-05-26 1968-01-16 Peerless Paint & Varnish Corp Method for measuring flow
US4146051A (en) * 1976-01-10 1979-03-27 Lucas Industries Limited Fluid flow control system
EP0547617B1 (en) * 1991-12-18 1996-07-10 Pierre Delajoud Mass flow meter and method
US5684245A (en) * 1995-11-17 1997-11-04 Mks Instruments, Inc. Apparatus for mass flow measurement of a gas
US6119710A (en) * 1999-05-26 2000-09-19 Cyber Instrument Technologies Llc Method for wide range gas flow system with real time flow measurement and correction
US6539968B1 (en) * 2000-09-20 2003-04-01 Fugasity Corporation Fluid flow controller and method of operation
WO2002033361A2 (en) * 2000-10-13 2002-04-25 Mks Instruments, Inc. Apparatus and method for maintaining a constant pressure drop across a gas metering unit

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011118654A (ja) * 2009-12-03 2011-06-16 Renesas Electronics Corp 半導体製造装置および流量制御装置
JP2012248193A (ja) * 2011-05-26 2012-12-13 Spts Technologies Ltd マスフローコントローラーの監視
JP2022032997A (ja) * 2020-08-14 2022-02-25 株式会社堀場エステック 流量変化率測定装置
JP7693438B2 (ja) 2020-08-14 2025-06-17 株式会社堀場エステック 流量変化率測定装置

Also Published As

Publication number Publication date
TW200613700A (en) 2006-05-01
WO2006017116A3 (en) 2007-03-01
TWI278606B (en) 2007-04-11
WO2006017116A2 (en) 2006-02-16
EP1797489A4 (en) 2008-07-30
EP1797489A2 (en) 2007-06-20

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