1260720 玟、發明說明： 【發明所屬之技術領域】 π本發明涉及對於安裝了半導體元件（晶片）的薄膜狀 移動的送料輪進行控制的膠帶送料輪控制方法及對該 膠帶送料輪進行控制並安裝半導體的半導體安裝裝置。 【先前技術】 、乂 最j，作為半導體安裝裝置正在普及採用薄膜狀膠帶 ‘裝晶片的TCMTaPeCarrierPackage膠帶載體 作為這種TCP彳式的半導體安裳裝置之―，是在膠册 上用樹脂封裝〔—般指塗佈液體樹 ^ f i 1 1 Λ Ί ^ ρ, ° ^ /¾ ( under 内引線粘合的半導體元件之 化的半導體安妒裝要如 使6亥封裝物熱固 a置。在這類半導體安裝裝置中，對載- I頁疋位精確並偵之处 ί載月豆 照專利文獻D。〜 的裝置已是眾所周知（參 弟’、圖概略表示這種半導體安裝裝置的主 ，包诒進行封裝的封裝要處理工序 工序。 @衣心固化的樹脂固化 在進行封裝工序的部分中，配七 膠帶供應裝置的帶右曰 米自圖中未示的 •有日日片的膠帶1 0 〇送5丨j前方 向）的送料輪丨0〗4 > 一 j方（前頭X方 十4 101和在膠帶100上施加 。而且，還設有對 、張緊輪102 a〜4骖市1 〇〇的表面样 出的熱固性樹脂的封裝 衣$晶片103喷 緊膠帶100的！舒文: 口 土封裝# 104的前後處夾 對夹持器l〇5a、i05b。 1260720 在此封裝工序中，在對於張緊輪102與送料輪1〇1 間的膠帶1。〇加以張力的狀態下，而且，在由丨對夹持: 1〇53和105b對膠帶1〇〇夾緊的狀態下，在進行封裝定2 等之後’由封裝部m在晶M 1G3及其周圍處塗佈樹脂。 由此’晶片1 〇 3由樹脂密封。 的封裝結束之後，1對夹 ，由送料輪101送到樹脂 而且，對於某一個晶片1〇3 持器10 5 a和1 〇 5 b的夾緊就解除 固化工序。 4牯，在樹脂固化工序的後段側所設置的送料 也與侧101同步旋轉’在送料輪101(; 輪ΗΠ)與送料輪1G6 (稱為w輪⑽）之間，= 100無鬆弛地進行膠帶運送。而且，膠帶 二 之r待下:個晶…達封裂位置之後， 下？止’1對夾持器105a和105b進行夾緊動作，在進^ 封裝定位等之後塗佈樹脂。 在進灯 這樣，此半導體安裝裝置的第1送料m 料輪106同步地重覆旋轉、停止 :舁弟2送 八，1與第2送料輪m的驅動诉一 π要 分別靡、衝電動機。而且，上述第i 力源般要 、106構成膠帶接觸面的輪邊緣部廣泛採：「廷：：’1。1 材料形成的所謂橡膠輪。 田矽够、等橡膠 〔專利文獻〕 日本國特開2002 —68550號公報（第6 — 第1圖、第2圖）。 ，、〜〜第7頁、 !260720 作期門述的半¥體女裝裝置中’在封裝工序進行封裝動 行使止踢帶⑽的移動，待封裝動作結束之後，進 ==在，_式膠帶運 苐1达枓輪101前面的膠帶移動路程長， 力并在/、膠帶移動路程中存在導執等對於膝帶移動給與阻 之，員的構件，則封裝動作結束，再開始膠帶100移動時 Β::Γ即使第1送料輪101與第2送料輪⑽同步地同 :疋轉的活，谬帶1〇〇在通過第i送料輪⑻之後，在谬 可10。上容易產生如第六圖的虛線圍成的圓形桓c中所示 的向士側彎曲之類的撓曲（以下，稱為彎曲部W)。 第六圖表示膠帶100產生向上側彎曲部w的實例，但 是在膠帶100的下側沒有從下支撐㈣1〇〇的支援板時厂 也有向下側彎曲的情況。 此外第1送料輪1 〇 1與第2送料輪1 〇 6的膠帶運送 速度由於設定誤差也有微妙的不同情況。特別是第2送料 调106比第1送料輪101，在膠帶運送速度稍慢時，在第γ 送料輪101與第2送料輪106之間的膠帶1〇〇上無張力的 狀態下膠帶被移動。 因此，若在此狀態下膠帶停止移動，則第丨送料輪 101與第2送料輪106之間的膠帶1〇〇上稍微產生鬆弛， 膠帶100的移動處於停止狀態。在此狀態下，若再開始移 動膠帶，則容易岀現上述現象，即通過第1送料輪丨〇 i之 後在膠帶1 0 0上產生彎西部W的現象。 本來’第1送料輪101與第2送料輪106，其外徑（ 1260720 動而達到相同 2送料輪1〇6 ，兩者的輪徑 ，橡膠輪在製 輪直徑）細的，-般是由脈衝電動機驅 膠帶運送速度，若上述帛i送料輪1〇1與第 是橡膠輪，則由於長期使用因橡膠的磨損等 會產生不同，運送速度有微妙的不同。而且 造Ρό 4又其輪徑也會有偏差的情況。 乂據上述理由，弟1送料輪101與第2送料請的 h運达速度有著微妙地不@ ’這可以認為是形成 象’即再開始膠帶移動時’當通過第i送料輪ι〇ι之後， 膠帶100上產生彎曲部w的原因之一。 在這種半導體安裝裝置中，封裳工序後膠帶100要不 鬆弛是很重要的。帛2送料輪1〇6 一般以第i送料輪叫 的膠帶運送速度為基準’膠冑100在第i送料輪與第 2运料輪106之間使膠;f⑽上不產生鬆他地進行膠帶運 送。即第1送料輪101側的扭矩比第2送料輪1〇6的扭矩 要大些。此扭矩之差也可認為是膠帶1〇〇通過第丨送料輪BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a tape feed wheel control method for controlling a film-shaped moving feed wheel on which a semiconductor element (wafer) is mounted, and controlling and mounting the tape feed wheel Semiconductor semiconductor mounting device. [Prior Art] As the semiconductor mounting device, the TCMTAPeCarrierPackage tape carrier that uses the film-like tape to mount the wafer is widely used as the semiconductor device of the TCP type, and is packaged with a resin on the booklet. Generally refers to the coating of liquid trees ^ fi 1 1 Λ Ί ^ ρ, ° ^ / 3⁄4 (under the inner lead-bonded semiconductor components of the semiconductor ampules should be such as the 6 hai package thermoset a. In this class In the semiconductor mounting device, the device for carrying the -I page is accurately detected and the location of the document is D. ~ The device is well known (the younger one, the diagram shows the main body of the semiconductor mounting device, the package) The encapsulation of the package is to be processed in the process. @The core-cured resin is cured in the part where the encapsulation process is carried out, and the right-handed glutinous rice with a seven-tape supply device is not shown in the figure. Send 5丨j front direction) Feeding wheel 丨0〗 4 > One j side (front X square 10 4 101 and applied on the tape 100. Moreover, there are also pairs, tensioning wheels 102 a~4骖1 Thermoset tree The package of the wafer 104 is sprayed with the tape 100! Shu Wen: The front and back of the earth package #104 are clamped to the holders l〇5a, i05b. 1260720 In this packaging process, in the case of the tensioning wheel 102 and the feed wheel 1〇1 of tape 1. In the state of tension, and in the state of being clamped by 丨: 1〇53 and 105b are clamped to the tape 1,, after the package is set to 2, etc. The part m is coated with a resin at the crystal M 1G3 and its surroundings. Thus, the wafer 1 〇 3 is sealed by a resin. After the packaging is completed, a pair of clips is fed to the resin by the feed wheel 101 and, for a wafer 1〇3 The clamping process of the holders 10 5 a and 1 〇 5 b releases the curing process. 4牯, the feed provided on the rear side of the resin curing step is also rotated in synchronization with the side 101 'on the feed wheel 101 (; rim) and feed Between the wheel 1G6 (referred to as the w wheel (10)), the belt is conveyed without slack without a slack. Moreover, the tape 2 is to be held down: after the crystal is reached, after the cracking position, the lower end of the '1 pair of grippers 105a and 105b performs the clamping action, and applies the resin after the positioning of the package, etc. In the case of the lamp, the semiconductor mounting device The first feed m-disc 106 is synchronously repetitively rotated and stopped: the younger brother 2 sends eight, the first and the second feed wheel m are driven by a π, respectively, and the motor is rushed. 106 The edge of the wheel that constitutes the contact surface of the tape is widely used: "Ting::1.1 The so-called rubber wheel formed by the material. Tian Hao, and other rubber [Patent Document] Japanese Patent Laid-Open No. 2002-68550 (No. 6 - Fig. 1 and Fig. 2), , ~~7, !260720 In the half-body women's wear device, the package is moved in the packaging process, and the movement of the kick band (10) is performed. After the end, the inward == in the _-type tape transport 苐 1 in front of the 101 枓 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 101 Then, when the packaging operation is completed and the tape 100 is moved again, Β:: Γ even if the first feeding wheel 101 and the second feeding wheel (10) are synchronized in the same manner: the twirling is performed, and the 谬 tape 1 〇〇 passes the ith feeding wheel (8) In the 谬 10. It is easy to generate a deflection such as a bending of the side as shown in the circular 桓c surrounded by a broken line in the sixth drawing (hereinafter referred to as a curved portion W). The sixth figure shows an example in which the tape 100 generates the upper side bent portion w, but the factory also has a downward bending when the support plate of the lower side is not supported from the lower side of the tape 100. Further, the tape conveyance speeds of the first feed wheel 1 〇 1 and the second feed wheel 1 〇 6 are subtly different depending on the setting error. In particular, when the second conveyance speed 106 is lower than the first feed wheel 101, the tape is moved without tension on the tape 1〇〇 between the γ-feed wheel 101 and the second feed wheel 106 when the tape conveyance speed is slightly slow. . Therefore, when the tape stops moving in this state, the tape 1 is slightly slackened between the second feed roller 101 and the second feed roller 106, and the movement of the tape 100 is stopped. In this state, if the tape is moved again, it is easy to cause the above phenomenon, that is, the phenomenon that the curved west W is generated on the tape 100 after the first feed wheel 丨〇 i. Originally, the 'first feed wheel 101 and the second feed wheel 106 have an outer diameter (the 1260720 is moved to the same 2 feed wheels 1〇6, the wheel diameters of the two, and the rubber wheel is at the diameter of the wheel). When the pulse motor drives the tape transport speed, if the 帛i feed wheel 1〇1 and the first rubber wheel are different, the transport speed is slightly different due to the difference in wear of the rubber due to long-term use. Moreover, there are cases where the wheel diameter is also biased. For the above reasons, the delivery speed of the feed wheel 101 and the second feed is slightly subtle. 'This can be considered as forming the image, ie when the tape is moved again', after passing the ith feed wheel ι〇ι One of the causes of the bending portion w on the tape 100. In such a semiconductor mounting device, it is important that the tape 100 is not slack after the sealing process.帛2 Feeding wheel 1〇6 Generally, based on the tape conveying speed called by the i-th feeding wheel, the glue 100 is glued between the ith feeding wheel and the second conveying wheel 106; the tape is not produced on the f(10). transport. That is, the torque on the first feed wheel 101 side is larger than the torque on the second feed wheel 1〇6. The difference between this torque can also be considered as the tape 1 〇〇 through the third feed wheel
101之後在膠帶100上容易產生第六圖中表示的彎曲部W 的原因之一。 這類彎曲部W，膠帶1〇〇越薄越容易發生。最近，在 部分 T A B ( Tape Automattd Bonding )和 COF ( Chlp OnOne of the causes of the bending portion W shown in the sixth figure is easily generated on the tape 100 after 101. Such a curved portion W, the thinner the tape 1 is, the more likely it is to occur. Recently, in part T A B ( Tape Automattd Bonding ) and COF ( Chlp On
Film)中，往往使周厚度為25/im左右的極薄膠帶，這類 湾谬帶1 00特別容易撓商。若膠帶丨〇〇彎曲成第六圖實例 Γ斤不’則不僅有損傷膠帶100的危險，而且對於該部分所 安裝的晶片103和粘結狀態也會造成不良影響。 即’若膠帶1 〇〇彎曲為第六圖實例所示，在其彎西部 1260720 二上’例如，存在著由於内引線枯合等所點合的晶片1〇3 二可能有切斷晶片103的引線’或者損傷晶片ι〇3的危 Γ”、’，在膠帶⑽通過第1送料輪⑻的階段，因封 二未固化、，由於彎曲部w的快速傾斜部也會產生 :曰C的不良狀況。而且，起因於該彎w 生膠帶從反轉輪和導軌處脫落的不良狀況。 【發明内容】 運送的膠俄:的疋為了解決上述問題’提供了防止間歇 運…：過送料輪之後出現彎曲於未然，能平穩地 送控制方法’同時提供了在採用該膠帶 化片料_ 平穩且適#地進行封裝處理和樹脂固 化處理寻的半導體安裝裝置。 為了達到上述目的，本發明的膠 對第β料輪和 晶片的膠帶移動路程上的第1送料輪以= 吏;^在女裝了 的膠帶移動方Θ t m 在。玄弟1达料輪 … 』方、且設在移動路程上的第2機 超灸轉，從而使膠帶移動，同時 移動、停止的間τ的移動是反復進行 ㈣帶時，IT二二作為踢帶’其厚度採用10〜5。 輪開始轉動比二二:帶^移動時’第2送料 ra.,备‘’达斜㈣開始轉動要早地進行i空制。 ，比該勝帶·輪控制方法中’是娜帶開始軸時， _輪開始旋轉之前僅贿早些_，第2送 料輪控制。蛾，如送侧陶糊，輪 還要前方射莖卜仔土万、比違弟1运料輪 韻蝴嶋⑽纖編觸。為此，即 1260720 使膠帶厚度為〗〇〜Μ _ 册在、隶 m 乂_情m送料輪與第2 ▼在達到不飽也的狀 urn之間的膠 現象於未然。^移動，切止耀帶通過第】送料輪之後發生㈣ 在&樣轉帶送料輪控制方 * 旋轉之時間差最好1定在 V㊣與第2送料輪的開始 取好〜在攸U秒聰秒範圍内 這樣，由於第2送料輪比第！送料輪 2 0·1秒到1·0秒的範圍內，张、 Μ開麵轉的時間設定在從 斤以不會對膠帶的移動 第1送料輪之後能確實防止彎曲之類的現象。’、曰叫，通過 、’'料於還t，敍間歇軸轉帶敍軸，糾進辟2珊輪比第！ 运料輪要反些停止旋轉的控制。 思樣，在膠帶停止移動時，由 r 、仃了苐2送料輪比第丨送料輪要 fe些停止旋轉的控制，膠帶移動一定量 L τ止心贡私動時，第1送料輪的 Γ導第2送_旋轉稍糊使膠帶繼續移動。為此，在第 細丁止的時刻’第i运料輪與第2送料輪之間的膠帶能處於不鬆池 的η大悲。由此，在下一個膠帶 ^ _ 肩始祕過第1送料輪之後，能更加 。隹貫地防止膠帶彎曲之類的現象。 一此外’在上述各發明之外的其他發明點是，第2送料輪經過扭矩連 接裝置（keeper)由電動機驅動，若麵第2補輪旋射，預先設定以 上的扭矩加到此第2送料輪上，& 嫩触扭矩連接裝置使電動機與第2送料輪 之間產生滑動。 由此’膠帶移動開始時和/或停止時，第2送料輪僅旋轉預先設定的 10 1260720 日.，棒撕上梅伽勵蝴㈣。轉， 傳遞到第2送料輪上的扭矩連接裝置由於具有不會將來自電動機的扭矩々 封不動地傳遞給第2送料輪那樣的功能’所以在膠帶±沒有加上不 力，能防止膠帶的損傷於未然。 ° ^ 9 第1送料輪和第2送料輪鄉帶的__轉類構件。 ==獅㈣__啦撕，㈣ 膠T的運迗，同時能使膠帶為廉價品。 守 本發明的半導體安裝裝置具有下類裝置，部件：將來自膠帶供歸置 女裝了晶卿帶送出、對W塗佈樹脂的_置’使由 ' 塗佈的樹脂熱固化的樹脂固化Μ;為使膠帶通過上述封裝蝴= 及弟2袖輪；使設在第：送料輪的膠舞動方向前面㈣2 ’從而使轉義，且為使該膠㈣移動是 ”疋專 移動，而對第i送料輪和第2送料 咐夕動’停止的間歇式 帶送料輪控制裝置，每次間歇移動開始時，進行第”,4似置。取 第i送料輪的開始旋轉要早些的控制。㈣2达料輪的開始旋轉比 此半導體安|裝置在某個^ 待下-個晶糊規_之後，進:二：=開始膠帶移動’ 動。而且，該半導體安裝I置麵 的贼式朦帶移 送料輪比第1纖物_二，歇細各_始時，第2 轉的時刻’由於第2送料輪已處疋轉。為此’在第1送料輪開始旋 ^開始勝帶移動的狀態，所以以送料輪 160720 轉第2送料輪之間的膠 ^ >、、隹持不鬆他的狀態、。由此，即使膠帶厚度為10〜 ㈧的極薄的情況， — 弟1迗料輪的後段側也能確實防止膠帶彎曲之類 兄象，母次驅動時，At A 、 軌處脫落。 ％”穩地開始料運送。能防止膠帶從反轉輪和導 送，比裝置每次間歇移動的膠帶移動停止時，最好進行第2 弟1辦輪要慢些停止旋轉的控制。 這樣，在膠帶的移動停止時，因進行第2送料輪比第1送料輪奸 些停域轉的㈣’料移動—定量並停止膠帶鶴之時，第1送料_ 轉U之後，第2达料輪還處於儘量旋轉補許時間，繼續使勝帶移動。、 為此’在第2機紅糊，如糊_讎之間的膠帶 处方、不U狀L自此’在下—娜帶開始移動時，在通過第1送料輪 之後，更加能確實防止膠帶彎曲之類的現象。 两 上述半導體安裝裝置的其他發明點是，帛）送料輪設置在由封裝裝 置進行的樹脂塗佈後的膠帶移動路程上，第2送料輪設置在由樹脂固= 置進行的樹脂固化結束後的膠帶移動路程上。 衣 由此’能防止由内引線步占合等所結合的晶片的引線切斷，或者損傷 晶片部分’還能防止產生沒13化的樹脂在f曲部分流完的不良狀況。 第1送料輪和第2送料輪，與縣的接觸面為橡賴構件構成。 由此，不是利用在朦帶上設置的鍵輪孔來運送膠帶的，所以没有鍵 輪孔的變形和破損，在極_膠帶運送巾械適應，科能使膠帶為價廉 的產品。 1260720 此外，最好使第1送料輪和第 時為相同扭矩 送料輪為相同直徑，且在相同轉數 採用這種結叙後，各顧料的形成和 到低成本化，同時容易控制。 [實施方式】 驅動方法等變得簡單，達 1 下’挪她你爾_。蝴鶴中說明的 疋f⑽轉送料輪控财法叹制轉帶蝴輪控财 +導體的半導體安裝裝置兩方_容。 女敦 第一圖是說明本發明的半導體 該半導體置_供_ ^ ^_全_圖。 置2、固化所糊職的封裝裝 罟n Μ 3繞卷_化膠帶的膠帶繞卷褒 |帶供應裝置】有下列部件構成··將安裝衫個 刀 虛線所示的圓形框A)是 純、圖中 衣的長❿大的厚度25,的膠帶、在夾有 :::卷^ 夕们十向私i6、導向構件η等構成。 、杳4畛▼丨2，其厚度為1Q〜5G—，對於此厚度的膠帶！2， 七^本體安裝裝置，但是也可以使财度為心m以上的躍帶。在 ^ ^度為Μ·以上_料，不使用本實施形態所述的膠帶送料輪控 !現有抽中的控制方法，或者按照膠帶厚度更換控制方法 13 1260720 此膠帶供縣们使鱗鄉帶麵麵Μ 13分離，並將所分離的間隔帶W間隔帶魏卷盤15齡。 膠帶12以在圓形框A(踢帶供 面， 〜衣置1内的局部放大圖） 供應到下-個工相縣裝置2處。 中所不的狀恶’ 封裝裝置2具有：將來自膠帶供麟 (箭頭X方向）的嶋崎輪21、㈣12上^、施顺方 + 緣W2的表面所絲的晶片11從分配頭23 喷出熱固性樹脂的封裝部24、在 ' 刀配頭23的丽後處夾住膠帶的1對夹持 杰25a、25b。此外，在張力於6壯4 在張力輪22上女裝扭蝴妾裝置，張力輪22用的電 動機經常朝加上反張力的方向（與送料輪21、42的電動機為反方向）旋 轉’在膠帶12上加以張力。此反張力的大小與來自送料輪21、42的張力 相比較，要小些。 樹脂固化裝置3是用加熱爐加熱從封裝裝置2送來的勝帶12，使所 塗饰的樹脂固化。加熱爐30，在該第—圖的實例中，為所謂3級爐的結構 。即’從封裝裝置2所送出的塗佈了樹脂的踢帶12，由麵帶12的前進 方向左右兩側處所設置的2根導軌31a、灿（參照圖示虛線所示的圓形框 夕心^向’且较朝水千乃向（前頭X方向）前進。圓形框B是對於躍帶 12的移動方向為垂直的截面切斷狀態的局部放大圖。 在圖示的虛線所示的圓形框B中’表示了在該加熱爐3〇中所設置的 作為加熱手㈣發熱體35、將來自該發熱體35賴擴⑽熱板％及將熱 14 l26〇72〇 板36所擴散的熱高效照射到膠帶12 f面的熱反射板37 #。這些發熱體 沾、熱板36和熱反射板37在_框B的狀態下沿著從第丨到第3的移動 路私L1〜L3而設置的。但是，在中央的第2移動路程L2巾，各自的位置 關係與圖*的虛線所示的圓形框_位置關係為上下減。 朝箭示X方向前進的第i移動路程L1的膠帶12，其後由於第反轉 輪32而反轉，由於導軌31a、拙的導向，這次朝相反方向（箭印χ，方 向）丽進，由於第2反轉輪33而反轉。反轉的膠帶12由於導執也、妣 的導向而向水平方向（箭印X方向）前進，並從膠帶出口 膠帶繞卷裝置4側。 調 繼刪4蝴咖峨3__軸置的膠 吟入口 41、將觀料導人σ 41从轉帶12送職繞麵44側的 具有驅動力的送料輪42、在_輪42所運送_ 12朝下方向引導那 樣進行導向的導向構材43、在保持鬆他狀態下捲繞由該導向構材犯朝下 方向導向晴12賴《 44、錄_ 4遠瓣 繼相互間不直接重疊而供應間隔㈣的間隔帶供應用卷盤 這些構成要素之外，根據需要可以設置幾铜娜帶η和間隔帶移 進行導向的導向輪48。 口牙夕動 ，…一 稱為第1送料輪9n 〜丨—,（脾此％為第2送料輪42)進行驅動控制。與帶判 裝置50的構成如第二圖中所示。由驅動第工 希 勒钺㈠冉為第2脈衝 15 1260720 Γ"2)、峨㈣1、第2麟_的電纖 動力的傳遞和解除的扭矩連接裝置54所組成。谬帶 7驅 該實施形態中也同時進行張力輪22的驅動控制。 工似置50在 在第2送料輪42與第2脈嶋機52之騎触 ’若在第2送獅上加以預先設以上的扭矩，從 = 到第喃輪42的驅動力就被解除，有關該具體動作在後面說Γ 弟1达機21和第2送料輪42均如第三圖所示的結構和形狀。即 ，上側為驅域61，下_級输6 於防从士 ％動輪61的中心部63和從動 輪62的中心部64均由金屬構材形成 動 瓊°卩65、66均為橡膠類構材。 驅動輪61的周邊部65的截面結 开5壯甘，丨、山,= 、、内側部分有傾斜邊的直角三角 形狀，其尖鳊（=最外方） ^ , 62的周邊部66的寬方向的大致中 心處。在該實施形態中，驅動輪61的周 邊部防的尖端構成為相互接觸。。5的尖端與從動輪62的周 在該實施形態中，驅動輪61和 、R2心心 ^ ⑽犯的中心部63、64的直錢 以，勾為45.4_，中心部63、64的官 A 周邊部65、66的寬LI、L2全部 為|目冋的，在此都為3腿。各個周邊部郎、 的，都為66的直徑方向的厚度均為相同 這樣的半導體安裝裝置，由第 M L 十π 2丨和第2送料輪42重覆旋 4、停止’從轉供絲置丨間歇地送 冲、、，τ 叫衣了晶片11的谬帶12。對於 该迗叫的膠帶12，由封裝裝置2進 、 ,,. ㈢勺封裝，由樹脂固化裝置3進行 加熱處理之後，由膠帶捲繞裝置4捲钱曰 日日片11用樹脂密封的膠帶12。由 16 1260720 封裝裝置2進行封料，在對於張力輪22與第1送料輪之間的膠帶i2 加以張力的狀態下’在進行封裝的位置確定後’由1對央持器25a和娜 夾緊膠帶12並進行封裝。 ^系一個晶片u結束封裝之後，i對爽持 '丄^ ^厶oa彳口◦曰v ^緊就解除’第】送料輪2】和第2送料輪42旋轉，觸]2運送規定 里待下们曰曰片u到達規定的位置後，1對夾持器况和娜再次夾緊 膠帶12，並進行膠帶12的固定等，然後進行封裝。 這樣，該半導體安裝裝置的第^送料輪21和第2送料輪&的兩個 达繼、犯重覆旋轉、停止並間歇運送膠帶12。這兩個送腳、犯 右用相晴物，賴物編，麵論增發生問題 的速度’也有不到規定 使第（麵f 12上產生鬆他。本裝置為了防止膠帶12的鬆他， =:42的速㈣1送編的養娜請〜5%， 她（、空42繼獅嫩置54 間經常物嶋。“2魏42與帛2_電動機52之 部65==輪21與第2補輪42，如上所述，構成膠帶接觸面的周邊 ⑶7 W矽橡膠等橡騎料形成的輪。 k 在第—圖中所示的半導體安裝裝 夕俄 卑1送料輪21與第2送料啥49 二移動路"’第，第3的移—的合計： .’謂帶移動雜中存在㈣12移動郎成阻力（由於料料成 1260720 的）之類的構材，如導執31a和31b。 在該半導體絲裝置中，兩倾料輪21、42的扭矩是相同的，為 〇. 8围。但是，與其他的半導體安裝裝置—樣，最好是第丨送料輪Μ的扭 矩比第2送料輪42的扭矩要大些。假定採用這樣的構成，在封裝結束並 再開始膠帶12的移動時，例如，第1送繼1和第2送料輪42即使同 步同時旋轉’若對於加熱爐3G輔帶12考慮到由於她產生的阻力 ’在膠帶12通過第1送料輪21之後，更容易產生如第六圖中所示的„ 部w。但是’若採用本發明的構成，早些開始駆動第2送料輪42的話，即 使第1送料輪21的扭矩比第2送的扭矩大些，大體上也不合產生 彎曲部W。 曰 如該實施形態那樣，第1送料輪21和第2送料輪42的各個周邊部 65 66疋橡膠材料’由於橡膠的磨損和製造階段外形尺寸精度的偏差 在膠帶運送速度上也會產生不同。特別是第！送料輪Μ比第2送料輪处 的運送速度__，在第丨送料輪21鮮2送料輪42之間 12上在無張力的狀態下進行膠帶職。為此，膠帶運送進行間歇運送動二 的情況，再開始膠帶運误日主，A , _ ' 如上所述，在通過第1送料輪21之德，跟 帶容易產生彎西現象。 夕 本實施形態的半暮譜 一 …又以呈，^•於弟i送料輪21和第2送料扒^ 進行不會引起上述之_帶彎曲卿帶送料輪控制。以下，± 上述第m料輪21和第2送料輪42的控制。 —兄月有關 膠帶u運送時，由比反張力要大的扭矩（該扭矩由第}送料輪& 18 l26〇72〇 3 2送料輪而服）使膠帶12被拉伸，-張力輪22的扭矩連接衫 月、w專。為此’張力輪22朝正向與膠帶12的 時，由張力輪22在膠帶12上__ (進仃轉。這 置對於㈣第2的送繼卜π分输㈣帶送料輪控制裝 产— 疋轉·停止的控制，同時也 订第i送料輪2；[和第2送料輪42各自的 對从 疋轉·丨〒1的定時控制。有關 Θ第1送料輪21和第2送料輪42的控制 進行說明。 …、弟四圖的時間圖邊 第1送料輪21和第2送料輪42的各自對庫&脱1 + 你予 場的脈衝電動機（第1脈 衡電動機51和第2脈衝電動機52)由於電動機 丨％用相同的脈衝速 平釆驅動的，是接受來自第丨脈衝電動機51 “ ^脈衝電動機52的驅動 刀按照相同的轉動速度來工作的，在此考慮到“脈 Γ电動機的動作二送料 輻的動作”，僅就第丨送料輪21和第2送料輪42的動作進行—兒明 第四圖（Α)是表示第1送料輪21的旋韓养，卜^In Film), very thin tapes with a thickness of about 25/im are often used. This kind of bay 谬 belt is especially easy to scratch. If the tape is bent into the sixth example, it does not only have the risk of damaging the tape 100, but also adversely affects the wafer 103 and the bonded state of the portion to be mounted. That is, if the tape 1 〇〇 is bent as shown in the example of the sixth figure, in the west of its bend 1260720, for example, there is a wafer 1〇3 which may be cut due to the inner lead dead or the like. The lead 'or the danger of damaging the wafer ι 3', when the tape (10) passes through the first feed wheel (8), since the seal is uncured, the fast inclined portion of the bent portion w is also generated: 曰C is defective Moreover, it is caused by the unfavorable condition that the bending tape is detached from the reversing wheel and the guide rail. [Summary of the Invention] The sputum of the Russian: the 疋 in order to solve the above problem 'provides the prevention of intermittent transportation...: after the feeding wheel The present invention provides a semiconductor mounting device that performs the encapsulation process and the resin curing process using the taped sheet material in a smooth and suitable manner. In order to achieve the above object, the glue of the present invention is provided. The first feeding wheel on the tape moving path of the beta pulley and the wafer is = 吏; ^ in the women's tape moving square Θ tm in. Xuandi 1 reaches the wheel... 』, and is located on the moving route 2nd machine super moxibustion Turn, so that the tape moves, while the movement between the moving and stopping τ is repeated (4) when the belt is used, the IT two is used as the kick belt's thickness is 10~5. The wheel starts to rotate more than the second two: when the belt moves ^ 2 feeding ra., preparation of ''straight oblique (four) starts to rotate early to carry out i-air system. Compared with the win-in-wheel control method, 'when the na-band starts the axis, the _ wheel begins to rotate before bribing earlier _, The second feeding wheel control. Moth, such as the side of the pottery paste, the wheel should also be in front of the shooter Buzi Tuwan, than the disciplinary 1 transport material rhyme butterfly (10) fiber braided. For this, that is 1260720 make the tape thickness 〗 〇 Μ Μ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ In the & sample transfer belt feed wheel control side * The time difference between the rotations is preferably set at the beginning of the V and the second feed wheel ~ within the range of 攸U seconds Cong seconds, because the second feed wheel is better than the second feed In the range of 2 0·1 second to 1·0 second, the time for opening the sheet and opening the surface is set to the first feeding wheel from the pound to the movement of the tape. After that, it can really prevent the phenomenon of bending and the like. ', howl, pass, ''received in t, the intermittent axis revolving axis, and the 2 wheel is better than the first! The wheel needs to stop rotating. Control. When the tape stops moving, the feeding roller is rotated by r, 仃 2, and the feeding roller is controlled to stop rotating. When the tape moves a certain amount of L τ, the first feeding wheel is stopped. The second guide _ rotates a little paste to make the tape continue to move. For this reason, at the moment of the first squeezing, the tape between the i-th transfer wheel and the second feed wheel can be in the η sorrow of the pool. Therefore, after the next tape ^ _ shoulder is secreted by the first feed wheel, it is possible to prevent the phenomenon of the tape from being bent. In addition, the other inventions other than the above inventions are the second feed wheel. After the torque is connected to the keeper, the motor is driven by the motor. If the second secondary wheel is rotated, the above torque is preset to the second feed wheel. & the tender torque connection device between the motor and the second feed wheel. Produces a slip. Thus, when the tape movement starts and/or stops, the second feed wheel rotates only the preset 10 1260720 days. The rod tears the Meegar butterfly (4). In the torque connecting device that is transmitted to the second feed wheel, the function of transmitting the torque from the motor to the second feed wheel is not transmitted, so that the tape is not weakened, and the tape can be prevented from being damaged. Not before. ° ^ 9 The first feed wheel and the second feed wheel are equipped with __ transfer components. == lion (four) __ tear, (four) glue T's operation, while making tape as a cheap product. The semiconductor mounting device according to the present invention has a device of the following type, and a component: a resin from a tape for placement, a crystal clear tape, and a resin coated with a resin which is thermally cured by a coated resin. In order to make the tape pass the above package butterfly = and the brother 2 sleeves; make the front: (4) 2' of the rubber dance direction of the feeding wheel to be escaping, and to make the glue (four) move is "疋 special movement, and the first The i-feed wheel and the second feeding-stop intermittent belt-feeding wheel control device perform the "fourth" setting every time the intermittent movement starts. Take the start of the rotation of the i-th feeding wheel to be earlier controlled. (4) The starting rotation of the 2 reaches the material wheel. After the semiconductor device is installed, the device is moved to the next. Further, the thief-type transfer belt of the semiconductor mounting surface I is smaller than the first one, and the second feeding timing is at the time of the second rotation. For this reason, the first feed wheel starts to rotate and the belt is moved. Therefore, the feed wheel 160720 rotates the glue between the second feed wheel and the state is not loose. Therefore, even if the thickness of the tape is extremely thin, the thickness of the tape is 10 to 8 (eight), and the rear side of the 1st wheel of the younger one can surely prevent the brother and the like from bending the tape. At the time of the mother-drive, the At A and the rail are peeled off. %" steadily starts the material transport. It can prevent the tape from stopping from the reversing wheel and guiding, and it is better to stop the rotation of the second brother 1 to stop rotating more slowly than when the tape moves intermittently every time the device moves. When the movement of the tape is stopped, the second feed wheel is returned to the first feed wheel, and the fourth feed wheel is returned to the first feed wheel. In the rotation of the time as much as possible, continue to make the winning belt move. For this reason, in the second machine red paste, such as the tape prescription between the paste _ 、, not U-shaped L from here on the next - Na belt began to move, in After the first feed wheel, the phenomenon of the tape being bent can be more reliably prevented. The other invention of the above semiconductor mounting device is that the feed wheel is disposed on the tape moving path after the resin coating by the packaging device. The second feed wheel is disposed on the tape moving path after the resin curing by the resin is completed. The clothes can thereby prevent the lead of the wafer bonded by the inner lead step from being cut, or damage the wafer portion. Can also prevent production The failure of the resin that has not been melted in the f-curved portion. The first feed wheel and the second feed wheel have a contact surface with the county, which is composed of a rubber member. Therefore, the key wheel hole provided on the sling is not used. To transport the tape, so there is no deformation and breakage of the key wheel hole, and the tape can be used as an inexpensive product. 1260720 In addition, it is better to make the first feed wheel and the same torque as the first time. The feed wheels are of the same diameter, and after the same number of revolutions are used, the formation of each of the materials is reduced and the cost is reduced, and it is easy to control. [Embodiment] The driving method and the like become simple, up to 1 Your _ _ 蝴 中 中 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( _ _ ^ ^ _ full _ map. 2, the package of the curing paste 罟 n Μ 3 winding _ tape tape winding 褒 | belt supply device] has the following components ... · will install a knife The circular frame A) shown by the dotted line is pure, thick and long in the figure. 25, the tape, in the folder::: volume ^ eve, ten private i6, guiding member η, etc.., 杳4畛▼丨2, its thickness is 1Q~5G-, for this thickness of tape! 2, Seventh body mounting device, but it is also possible to make the levy of more than m for the financial center. The ^^ degree is Μ·above, the tape feeding wheel control according to the embodiment is not used! The existing pumping control method , or change the control method according to the thickness of the tape 13 1260720 This tape is for the county to separate the scales of the scales Μ 13 and separate the separated spacers W with the Wei reel 15 years old. The tape 12 is in the round frame A ( Kicking belt for the surface, ~ Partial enlargement of the inside of the clothing unit 1) Supply to the next - a two-phase installation of the prefecture county. The packaging device 2 has: from the tape to the collar (arrow X direction) The wafer 11 on the surface of the Mizaki wheel 21, (four) 12 upper, Shishun + edge W2 ejects the thermosetting resin from the dispensing head 23, and the pair of holders of the tape are sandwiched at the rear end of the blade. Jay 25a, 25b. In addition, in the tension of 6 strong 4 on the tension wheel 22, the motor for the tension wheel 22 is often rotated in the direction of adding the back tension (in the opposite direction to the motor of the feed wheel 21, 42). Tension is applied to the tape 12. The magnitude of this back tension is smaller than the tension from the feed wheels 21, 42. The resin curing device 3 heats the ribbon 12 sent from the packaging device 2 in a heating furnace to cure the coated resin. The heating furnace 30, in the example of the first figure, is a structure of a so-called three-stage furnace. In other words, the resin-coated kick band 12 sent from the package device 2 has two guide rails 31a and cans provided on the left and right sides in the advancing direction of the cover tape 12 (see the circular frame on the dotted line shown by the dotted line in the figure). ^ is proceeding toward 'the direction of the water (the front X direction). The circular frame B is a partial enlarged view of the cross-sectional cutting state in which the moving direction of the hop belt 12 is perpendicular. In the frame B, 'the heat which is provided in the heating furnace 3' as the heating hand (4), the heat from the heating element 35, and the heat which is diffused by the hot plate 14 and the hot plate 14 are shown. The heat reflecting plate 37 # is efficiently irradiated onto the surface of the tape 12 f. These heat generating bodies, the hot plate 36, and the heat reflecting plate 37 are in the state of the frame B along the moving path L1 to L3 from the third to the third. However, in the center of the second moving path L2, the positional relationship between the respective positions and the circular frame_position shown by the broken line in Fig.* is reduced up and down. The i-th moving path L1 that advances in the X direction toward the arrow The tape 12 is thereafter reversed by the reverse rotation wheel 32, and this time in the opposite direction due to the guide of the guide rail 31a and the cymbal ( Ink, direction) Lijin, reversed by the second reversing wheel 33. The reversed tape 12 advances in the horizontal direction (arrow X direction) due to the guidance of the guide, and the tape is wound from the tape exit tape. The roll device 4 side is adjusted. The tape feed inlet 41 of the 4 _ 峨 _ _ _ 、 、 、 、 、 、 、 、 、 、 、 、 、 、 σ σ σ σ σ σ σ σ σ The guide member 43 guided by the wheel 42 is guided downward in the downward direction, and is wound in the state of being loosened by the guide member. The guide member is directed downwardly to guide the sun. In addition to the constituent elements of the supply belt reel that does not directly overlap and supply the interval (4), a plurality of copper belts η and a belt pulley for guiding the guide wheels 48 may be provided as needed. The first feed wheel 9n to 丨-, (% of the spleen is the second feed wheel 42) is driven and controlled. The configuration of the band-determining device 50 is as shown in the second figure. The drive is the first work of Heller (1). 2 pulse 15 1260720 Γ " 2), 峨 (4) 1, 2nd _ electric fiber power transmission and release torque connecting device 5 4 components. In the embodiment, the drive control of the tension pulley 22 is also performed at the same time. When the second feed wheel 42 and the second pulse machine 52 are mounted on the second feeding wheel, the driving force of the second feeding lion is preset, and the driving force from the = to the second wheel 42 is released. The specific operation will be described later in the structure and shape of the first embodiment 21 and the second delivery wheel 42 as shown in the third figure. That is, the upper side is the drive domain 61, and the lower-stage transmission 6 is formed by the metal member from the central portion 63 of the anti-slaving wheel 61 and the central portion 64 of the driven wheel 62. material. The cross section of the peripheral portion 65 of the driving wheel 61 is knotted 5 strong, 丨, mountain, =, and the inner portion has a right-angled triangular shape with an inclined side, and its tip (= outermost) ^, the width of the peripheral portion 66 of 62 The approximate center of the direction. In this embodiment, the tips of the peripheral portions of the drive wheels 61 are configured to be in contact with each other. . In the embodiment, the tip end of the fifth end and the driven wheel 62 are in the embodiment, and the straight portions of the center portions 63, 64 of the driving wheels 61 and R2 are (4), and the periphery of the central portion 63, 64 is surrounded by the official A. The widths LI and L2 of the portions 65 and 66 are all "eyes", and are all three legs here. Each of the peripheral portions is a semiconductor mounting device having the same thickness in the diameter direction of 66. The ML ten π 2 丨 and the second feed wheel 42 are repeatedly rotated 4, and the stop is set. The entanglement of the wafer 11 is called τ. The tape 12 of the squeaking is packaged by the packaging device 2, and the (3) spoon is packaged, and after the heat treatment by the resin curing device 3, the tape 12 is wound by the tape winding device 4 and the resin-sealed tape 12 is sealed with the resin. . The sealing device is sealed by the 16 1260720 package device, and in the state where the tape i2 between the tension wheel 22 and the first feed roller is tensioned, 'after the position at which the package is determined' is clamped by the pair of the holders 25a and Na. The tape 12 is packaged. ^After a wafer u finishes the package, i will hold the '丄^ ^厶oa彳口◦曰v ^ tightly to release the 'first】feed wheel 2】and the second feed wheel 42 to rotate, touch the 2 After the cymbal u reaches the predetermined position, the pair of grippers and Na again clamp the tape 12, and the tape 12 is fixed, and then packaged. Thus, the two feed rollers 21 and the second feed wheel & of the semiconductor mounting device repeatedly rotate, stop, and intermittently transport the tape 12. These two feet, the right to use the right thing, the material to edit, the speed of the problem of increasing the face of the face 'can not be stipulated to make the first (face f 12 on the loose. This device in order to prevent the tape 12 loose, =: 42 speed (four) 1 send the preparation of the nursing please ~ 5%, she (, empty 42 followed by the lion set 54 often.) 2 Wei 42 and 帛 2 _ motor 52 part 65 == wheel 21 and The second supply wheel 42, as described above, constitutes a wheel formed by the rubber contact material such as the periphery of the tape contact surface (3) 7 W, rubber, etc. k The semiconductor mounting device shown in the first figure is the oh oh oh 1 feed wheel 21 and the second feed.啥49 二移动路"', the third shift - the total: .. said that there is a movement in the middle of the (four) 12 mobile Lang into resistance (because the material into 1260720), such as the guide 31a and 31b. In the semiconductor wire device, the torque of the two tilting wheels 21, 42 is the same, which is 〇. 8. However, compared with other semiconductor mounting devices, preferably the torque ratio of the second feeding rim The torque of the second feed wheel 42 is larger. Assuming such a configuration, when the packaging is completed and the movement of the tape 12 is resumed, for example, the first delivery 1 The second feed wheel 42 rotates simultaneously while rotating 'if the heating belt 3G auxiliary belt 12 takes into account the resistance generated by her', after the tape 12 passes the first feed wheel 21, it is more likely to produce the portion as shown in the sixth figure. w. However, if the second feed wheel 42 is started to be moved earlier, the bending portion W is substantially not generated even if the torque of the first feed wheel 21 is larger than the torque of the second feed. In the above-described embodiment, the peripheral portions 65 66 of the first feed wheel 21 and the second feed wheel 42 are different in rubber tape material due to the wear of the rubber and the dimensional accuracy of the manufacturing stage, which is different in the tape transport speed. The feeding roller rim performs the tape position in the state of no tension between the second feeding roller 42 and the conveying speed __ at the second feeding wheel. For this purpose, the tape is conveyed intermittently. In the case of the second move, the tape transport error is again started. A, _ ' As mentioned above, in the first pass of the first feed wheel 21, the follower belt is prone to a bend phenomenon. To present, ^• Yudi i feeding wheel 21 and the second feeding 扒^ do not cause the above-mentioned _ belt bending belt feeding wheel control. Hereinafter, ± the control of the mth feeding wheel 21 and the second feeding wheel 42. The torque of the back tension is large (the torque is applied by the [feeding wheel] <18 l26〇72〇3 2 feed wheel) so that the tape 12 is stretched, and the torque of the tension wheel 22 is connected to the shirt, w. 'When the tension wheel 22 is facing forward with the tape 12, the tension wheel 22 is on the tape 12 __ (in the 仃 turn. This is set to (4) the second pass π split (four) with the feed wheel control loading 疋The control of the rotation and the stop also sets the i-th feed wheel 2; [and the timing control of each pair of the second feed wheel 42 from the twist/turn 1). The control of the first feed wheel 21 and the second feed wheel 42 will be described. ..., the time chart of the fourth picture, the first pair of feed wheels 21 and the second feed wheel 42 are separated from each other by the pulse motor (the first pulse motor 51 and the second pulse motor 52) The motor 丨% is driven by the same pulse speed ,, and the drive knives receiving the pulse motor 51 from the 丨 pulse motor 51 are operated at the same rotational speed, and the action of the pulse motor is considered here. The operation of the feed spokes is performed only on the operations of the second feed wheel 21 and the second feed wheel 42. The fourth diagram (Α) indicates the rotation of the first feed wheel 21, and
— 寻·1τ止的弋時，第四圖（B )是表示第2送料輪42的旋轉.停止的定時。第1读粗认 、 、竹輪21直至時刻tl 為正處於停止狀態’在直至該時刻tl進行的封|動作結束，}對爽持器 25a和25b的夾緊動作被解除之後，在同日# (眭刻tn ， -、知始旋轉。另一方 回’系2送料輪42在弟1送料輪21開始旋轉之前^穿 予化Λ〇弟四圖所示早些時 間（△0開始旋轉。即，第2送料輪42開始旋轉時刻為y …△ t。 第2送料輪42開始旋轉的時刻— 和第1遥 1 <啊輪21的開始旋 轉時刻tl之差At，在該實施形態中〇.5秒。 這樣’膠帶送料輪控制裝置50在第！送料輪21 _旋轉之前稍早 19 1260720 些h間（0.5秒）’對於第2送料輪42進行開始旋轉之類的控制 第1纖21開始旋轉時，比此第1送繼要存在於前方的膠帶丨2，’ 由方、第2 l料輪42已處於開始移動的狀態，所以第1送料輪a與第2、英 料輪42之間的勝帶12在不鬆弛的狀態下開始移動。 〃忠 由此’膠帶12從停止狀態變為移動狀態時，在膠帶η通過第1、关 料輪^之後:不會形成第六圖所示的f曲現象或大幅度地減少。 4在第1运料輪21開始旋轉之前儘量稍早些時間（0· 5秒）’第2 送料輪421蝴_時，—财糊，第1纖㈣第2送料輪 42之間邮π 12 ’處於完全沒有獅、加上張力之類狀態。 k樣狀“的“ ’在開始鶴時，對於在第1送料輪2丨與第2送料 輪42之間的勝帶12，士势 ㈣2迗料輪42產生的拉力僅加以一瞬間（0 5秒 在第2送料輪42上，如第二圖所示，在與第2脈衝電動機於 ，I二丑矩連接裝置54 ’所以若在第2送料輪似上加以規定以上的力 ’則從第2脈衝電動機π丨筮 . $第2达料輪42的驅動力傳遞被解除，第2脈 衝電動機52與第2送料輪42之間產生滑動。 由此’在物2上沒有加上不適合的力，能防止存在於 d與第2送料輪42之哪帶i2受到損傷於未然。 如=料形態中’使用能從〇.04·至W範圍内調整的扭矩連 4 ’右加上。」减上的扭矩，則第2脈衝電動機的旋轉力不会直 =傳遞到第2送料輪42處，岐在第2脈衝電動機52與第2送料輪:2之 间座生滑動。通常，躍帶12移動時的扭矩為053·左右。 20 1260720 —At ^在比弟1送料輪21開始旋轉稍早些時間（〇· 5秒）的時刻tl ?1 ^2 ^42 0.5 ti ^ J ^ 21也開始旋轉。铁 1補輪 移動。 、，由弟1送料輪21和第2送料輪42雙方，使膠帶12 而且’構軒’封裝物件的晶片丨丨在到達封裝裝置 之後，第1送料於t規疋位置 ^和弟2送料輪42停止旋轉。此第1送料輪 迗料輪42停止旋轉 口弟 手刻為t2。這樣，第1送料輪21和第2送 停止旋轉之後，鱼 k科輪42 一此同時或者比其稍遲些時間的狀態下，丨對 和25b進行夾腎私从, 人待為25a ”。在第四圖巾，表示了在具有稍遲些時間△ t2 下，1對决掊哭宄 的狀怨 夺為25a和烈13進行夾緊動作的實例。 該夾持器25a和25b進行夾緊動作後，在此狀態下進 ，然後進行封裝動作。該封裝動作結束後 ^位寻處理 動作被解H“ 了又符為25a和25b的夾緊 ’、”同時（時刻t3)，如第四圖（A)所示 „ ^ ^ ^丄 汀不第1送料輪21 開始㈣’在此之前，第2補輪42在料些 t3—Μ時開始旋轉。 如秒)_寺刻 如上返所不，此實施形態的半導體安裝裝置，對於某個晶片η 裝動作結束後，膠帶問妒 、寸 4如㈣，4下-個晶片Η到達規定位 職動，間歇地铜帶12賴。叫她移動中，物= 始移動時，第2送料輪42比第工送料輪21要 吁 旋轉動作。 秒）開始 由此’第1送料輪21開始旋轉的時刻，因由第2送料輪犯膠帶已 21 1260720 開始移動了，所以在第1误钮认…p 、;斗輪21與第2送料輪42之間的膠帶處於不鬆 弓也的狀態。由此，在上述箆]、兰 k料輪21之後，不會產生膠帶12的彎曲現 象，能進行膠帶12的開始移動和平穩地移動。因此，能防止膠帶12從反 轉輪和導軌處脫落。 上述戶'_怨疋不發明的最佳實施實例，但是本發明不限於上述實 施形態，在不脫離本發明要點的範_是能實施各種改型。例如，在上述 實施形態中，是進行谬帶12開始移動時，第2送料輪犯比第！送料輪Μ 早些轉之類定時控制，但是也可進行勝帶12停止移動時，使第丄送料 輪21和第2送料輪42停止旋轉的定時不同之類的控制。這時，停止第2 运枓輪42旋轉的定時比第！送料輪 作，參照第五_日細進购。鋼4嫩。有關該動 在第五圖的時間圖中，第i送 時的定時，盥第-附 和^ 2廷料輪42的開始旋轉 在上、f㈣ 相同’但停止旋轉時的定時與第三圖為不同的。即， 在处的第四圖中，在時刻t2時 停止，伸在^ 4輪21和弟2送料輪42同時 T 丨一仕此弟五圖中，第1送料 ，第2送料认的 日㈣t2時停止旋轉，另一方面 …、调42在比其稍遲些時間△ 止。 〈Δ1:1 — 0·3 秒）在 t2+Mi 時停 〜衩％ 2送料輪42比第1送料輪 β 時停止旋轉H 一 . ⑨些犄間，在時刻t2+Atl 一更崎貫地防止膠帶12的 ，停止膠帶移動時，第】送警m …^12移動-定量後 許時問，從耸] ' 疋#止後，第2送料輪42還旋轉稍 ^攸弟1送料輪21向前面前淮荽从 —者的％帶12繼續移動。為此，即使 22 1260720 假定在第1送料輪21與第2送料輪42夕pg— … 輪42之間存在著膠帶12鬆他的話，在 弟2送料輪4嫌轉停止的時刻，第丨送料輪21與第2送料輪 膠帶12就處於不鬆錄態。由此，在下—個膠帶開始移動日^更㈣產 生第六圖所示的彎曲。因此，能防止膠帶12從反轉輪和導軌處脫落 在設置時間M1停止第2送料輪42日夺，假定第4料121 备盘第2 送料輪42之_膠㈣上還存在獅，由於時間△ t2的存在，轉他θ 也會大幅度地減少。為此，由於再增加膠帶開始移動時的^消^ 12彎曲的概率極高。 月丨示心可 ^吏第2送料輪42比第丄送料輪21稍遲些時間_停止旋轉時，若 ^帶丨2上加以狀以上力的話，因在第2送料輪42與第2脈衝電動機 之間細礙繼54，料帛2麵軸％吻送料輪犯 之間產生滑動，不含在膠帶12上加以不合適的力，就不會損傷躍帶^ 在上述實施形態中，驅動第i送料輪21和第2送料 時間差zu、Mi，對於膠帶開始移動時（參照第四圖）的Μ疋日^ 秒，對於輸酿時（蝴__蝴㈣，广議 亚不限疋於0.5秒或0.3秒，按照適用于本發 狀- 種設定。 〜文衣裝置可有各 但是，心、如最好均設定在叫』秒的範圍内 、Μ1為相同值時’控制電路方面就簡單。當μ - 的情況，若Δί>Λ·Η — / 的合計值是相同 ，構止減不合適方面具有_程 方面’在™梅㈣更糊。終峨要，二二 23 1260720 <Δΐ1 此外’當A t和△七】 錢夾緊解除和央緊動作的開始時亥其他的條件，也可 定時進行控制時，始移動時的第1送料輪21和第2送料輪制— When the search is completed, the fourth diagram (B) is the timing at which the second feed wheel 42 is rotated and stopped. The first reading of the rough recognition and the bamboo wheel 21 is until the time t1 is in the stopped state. "The sealing operation until the time t1 is completed." After the clamping operation of the holders 25a and 25b is released, the same day # ( Engraving tn, -, knowing the rotation. The other side returns to the 'system 2 feed wheel 42' before the rotation of the feed wheel 21 of the younger brother. ^The first time shown in the figure shown in Fig. 4 (△0 starts to rotate. The timing at which the second feed wheel 42 starts to rotate is y ... Δt. The time at which the second feed wheel 42 starts to rotate - the difference between the first rotation 1 < the first rotation of the wheel 21 is at At, in this embodiment. 5 seconds. Thus, the 'tape feed wheel control device 50' starts to control the first fiber 21 before the first feed wheel 21_ is rotated 19 1960720 some h (0.5 seconds). When the rotation is performed, the tape 丨 2, which is present in the front of the first feeding, and the second and second pulleys 42 are in a state of starting to move. Therefore, the first feeding wheel a and the second feeding wheel 42 are The winning belt 12 starts to move in a state where it is not slack. 〃 由此, the tape 12 changes from a stopped state to a moving state. When the tape η passes through the first and second closing wheels ^, the f-curve phenomenon shown in the sixth figure is not formed or is greatly reduced. 4 As early as possible before the first conveying wheel 21 starts to rotate ( 0·5 seconds) 'When the second feeding wheel 421 is _, _, the first fiber (four) and the second feeding wheel 42 between the π 12 ' is completely lion-free, plus tension and the like. "At the beginning of the crane, for the win band 12 between the first feed wheel 2 丨 and the second feed wheel 42, the pull force generated by the squad (four) 2 squeegee 42 is only for a moment (0 5 seconds at the 2nd) As shown in the second figure, the feed wheel 42 is connected to the second pulse motor, and the second pulse motor π is provided with a force equal to or greater than the second feed wheel. $. The transmission of the driving force of the second feed wheel 42 is released, and the second pulse motor 52 and the second feed wheel 42 are slid. Thus, the unsuitable force is not applied to the object 2, and the existence can be prevented. Which belt i2 of d and the second feed wheel 42 is damaged beforehand. If the material type is 'used, the torque can be adjusted from 〇.04· to W. When the torque is reduced, the rotational force of the second pulse motor is not transmitted to the second feed wheel 42 and the seat is slid between the second pulse motor 52 and the second feed wheel: 2. Normally, the torque when the hop belt 12 moves is about 053. 20 1260720 — At ^ The time at which the feed wheel 21 starts to rotate slightly earlier (〇·5 seconds) tl ?1 ^2 ^42 0.5 ti ^ J ^ 21 also starts to rotate. The iron 1 is replenishing the wheel. The two sides of the feed roller 21 and the second feed wheel 42 are both made, so that the tape 12 and the wafer of the packaged article are placed after the package device is reached. 1 Feeding at t gauge position ^ and brother 2 feed wheel 42 stop rotating. This first feed wheel, the picking wheel 42 stops rotating, and the hand is engraved as t2. In this way, after the first feed wheel 21 and the second feed stop rotating, in the state in which the fish k wheel 42 is at the same time or a little later than that, the pair of legs 25b is in a state of 25a. In the fourth figure, an example is shown in which the pair of smashing slaps are 25a and lie 13 with a slightly later time Δt2. The grippers 25a and 25b are clamped. After the action, the user enters in this state, and then performs the encapsulation operation. After the encapsulation operation is finished, the position-seeking processing action is solved by H "the clamping of the 25a and 25b," (time t3), as in the fourth Fig. (A) shows that „ ^ ^ ^ 丄 不 does not feed the first feed wheel 21 (four) 'Before this, the second supplemental wheel 42 starts to rotate when t2 - Μ. If the second is the same as the above, the semiconductor mounting device of this embodiment, after the completion of the operation of a certain wafer η, the tape is asked, the inch 4 is (4), and the next 4 wafers are reached. Intermittent copper strip 12 lie. When she is moving, when the object is moving, the second feed wheel 42 is rotated more than the first feed wheel 21. When the second feed wheel 21 starts to rotate at the time when the first feed wheel 21 starts to rotate, the second feed wheel has moved 21 2160720, so the first wrong button is recognized, the bucket wheel 21 and the second feed wheel 42 are turned on. The tape between them is in a state of not being loose. Thereby, after the above-mentioned 箆], the blue k-hopper 21, the bending of the tape 12 does not occur, and the start movement and smooth movement of the tape 12 can be performed. Therefore, the tape 12 can be prevented from falling off from the reverse wheel and the guide rail. The present invention is not limited to the above-described embodiments, but the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the gist of the invention. For example, in the above embodiment, when the sling 12 starts moving, the second feeding wheel is the first! The timing of the feed rim is changed earlier, but it is also possible to control the timing at which the second feed wheel 21 and the second feed wheel 42 stop rotating when the win 12 is stopped. At this time, the timing of stopping the rotation of the second transport wheel 42 is lower than that of the first! Feeding wheel, refer to the fifth_day purchase. Steel 4 is tender. Regarding the movement in the time chart of the fifth diagram, the timing of the ith delivery, the start rotation of the first-attached rotor 2 is the same as the first and f (four), but the timing when the rotation is stopped is different from that of the third diagram. of. That is, in the fourth picture, at the time t2, it stops at the time of the 4th wheel 21 and the 2nd feeding wheel 42. At the same time, the first feeding, the second feeding, the day (four) t2 When the rotation stops, on the other hand, the adjustment 42 is delayed by a little later than it. <Δ1:1 — 0·3 sec. stop at t2+Mi~衩% 2 When the feed wheel 42 stops rotating H than the first feed wheel β, one of the nine turns, at the time t2+Atl When the tape 12 is stopped, when the tape is stopped, the first message is sent to the policeman. The movement of the tape is adjusted to the time after the quantification, and the second feed wheel 42 is rotated slightly. Moving forward, the Huaiyi from the -% of the belt 12 continues to move. For this reason, even if 22 1260720 assumes that the tape 12 is loose between the first feed wheel 21 and the second feed wheel 42, the second feed wheel 4 is stopped, and the second feed wheel 4 is stopped. The wheel 21 and the second feed wheel tape 12 are in a loose recording state. As a result, the bending of the sixth figure is produced when the next tape starts to move (4). Therefore, it is possible to prevent the tape 12 from falling off from the reversing wheel and the guide rail. The second feeding wheel 42 is stopped at the set time M1, and it is assumed that the lion is present on the second feeding wheel 42 of the fourth material 121. △ The existence of t2, the conversion of θ will also be greatly reduced. For this reason, the probability of bending at the time of starting the movement of the tape is extremely high. The second feeding wheel 42 is slightly later than the second feeding wheel 21. When the rotation is stopped, if the force is applied to the belt 2, the second feeding wheel 42 and the second pulse are used. After the motor is inferior between the 54th, the material 帛 2 axis shaft % kiss feeding wheel slid between the sin, without the unsuitable force on the tape 12, will not damage the hop belt ^ In the above embodiment, the driving i feeding wheel 21 and the second feeding time difference zu, Mi, when the tape starts moving (refer to the fourth figure), the next day, for the delivery time (butterfly__ butterfly (four), the general discussion is not limited to 0.5 Seconds or 0.3 seconds, according to the setting of the hair style - ~ clothes equipment can have each, but the heart, if best set in the range of called "second", Μ 1 is the same value 'control circuit is simple In the case of μ -, if the total value of Δί > Λ · Η — / is the same, the improper aspect of the constitutive reduction has the _ procedural aspect in the TM Mei (four) more paste. Finally, the second 23 2360720 < Δΐ1 In addition, 'When A t and △ seven】 The other conditions of the money clamping release and the start of the central tightening action can also be controlled regularly. When, at the beginning of movement of the first feed rollers 21 and the second feed wheel system
f弟乙迗料輪42的旋轉開始，B 器'25⑽的夹緊動作結束猶前，隨後疋細裝裝置議央持 輪，。也可以解除夹緊之後解除’然後開始第1送料 能更有效的動作，能使半導體絲動作時間更 =42開始旋轉。這樣， ，也可以首先停止第1獅輪21，贿停止同樣，在停止移動時 緊動作。 2运料輪42，最後進行夾 在上述實施形財，對於有難封 發明_帶送料輪控制方法的實例進行了^蝴月旨固化裝置中適用本 制方法不限於這些I置。亦即，膠帶的^明’但本發明_帶送料輪控 處於比該第^送料輪21卿帶前進方夕向^止是由第1送料輪21和 上述第1送料輪21與第2送料輪 y弟2送料輪42進行的， 嶋，或者在㈣編咖^=顺叫在產生阻力 等條件，在踢帶開始移動時通過第！送料=之間轉帶移瞻 帶容易資曲術，本發卿帶送料輪^方動路程中，有膠 在上述實施形態中，第i送料輪 ^泛適周。 相同轉逮，但是也可以使第2送料輪42的麵為相同直徑、 ，或者第2送料輪的轉速比第！送料私21匕弟1廷料輪21的直徑大 〜以的轉速要多，或者綜合上述兩 24 1260720 ，即使同時停 個條件。這樣，能使第2送料輪42側移動較多量的膠帶η 止兩個送料輪21、42,膠帶12也無鬆弛。 66上配置橡膝材料，但是也可 或者即使不設置彈性構件全部 在兩個送料輪21、42的周邊部65、 以設置有彈性的樹脂材料來代替橡膠材料， 用金屬材料形成。 在上述實施形態中，顯示於膠帶12的厚度為1〇〜5一時，最射 於第2送料輪42比第1送料輪21早些開始旋轉進行控制。但是，細The rotation of the younger pick-up wheel 42 begins, and the clamping action of the '25 (10) of the B device ends, and then the fine-armed device holds the center wheel. It is also possible to release the clamp and release it. Then, the first feed can be started more efficiently, and the semiconductor wire operation time can be further changed to 42. In this way, the first lion wheel 21 can be stopped first, and the bribe stops the same, and the movement is stopped when the movement is stopped. The second transfer wheel 42 is finally sandwiched between the above-described embodiments, and the method for controlling the method of the present invention is not limited to these I-sets. That is, the tape of the present invention is provided that the first feeding wheel 21 and the first feeding wheel 21 and the second feeding are in the forward direction of the feeding wheel of the present invention. The wheel y brother 2 feeds the wheel 42, 嶋, or in the (four) 编 咖 ^ = 顺 叫 in the generation of resistance and other conditions, when the kick band begins to move through the first! Feeding = transfer between the belts with the easy to singularity, the hair of the hair with the feeding wheel ^ square moving, there is glue in the above embodiment, the ith feeding wheel ^ general week. The same transfer can be made, but the surface of the second feed wheel 42 can be made the same diameter, or the second feed wheel can be rotated at the same time! Feeding 21 private brothers 1 The diameter of the 1st material wheel 21 is large ~ The number of rotations is much higher, or the above two 24 1260720 are combined, even if the conditions are stopped at the same time. Thus, the tape 2 can be moved by a large amount of the tape on the second feed wheel 42 side to stop the two feed wheels 21 and 42, and the tape 12 is not slack. The rubber-knee material is disposed on the 66, but the elastic member may be formed of a metal material instead of the rubber material in the peripheral portion 65 of the two feed wheels 21 and 42 instead of the rubber material. In the above embodiment, when the thickness of the tape 12 is 1 〇 to 5, the second feed wheel 42 is rotated more than the first feed wheel 21 to control the rotation. But fine
控制在膠帶12的厚度w 2G〜4_ _進行，在防止膠帶12的切 斷和膠帶鬆弛方面更為有效。 如上舰明卿，按照本發·料送料輪·方法，在第i送料 7 1 口疑轉的時刻’第1运料輪與第2送料輪之間存在的膠帶已處於開始 動勺狀心、為此，第1运料輪與第2送料輪之間的膠帶在不鬆他狀態下 開始私動，即使是使用厚度為1Q〜心m _膠帶時，在通過第1送料輪 灸也祕止發生膠㈣、曲現象。因此，能防止膠帶從反轉輪和導軌處 脫落。 牧照本發明的半導體安裝裝置，對於某個晶片的封裝動作結束之後 、’開鱗帶移動’彳rr-個以到達規定位置後，料停止移動那樣，在 進仃這細爾帶鶴時，挪_始移鱗，至少縣厚度為1〇〜5〇 '1、’範Qb^· π 2 輪比第1送料輪要務早些時間旋轉。由此，在第 '、:料輪開始㈣4 ’由於第2送料輪，膠帶已處於開始移動的狀態，第 1廷料輪與第2送料輪之間的膠帶成為在無鬆弛狀態下進行移動。為此， 25 1260720 即使是膠帶厚度至少為10〜50//m之類薄膠帶時，在通過上述之類第1送 料輪之後，也不會發生膠帶彎曲的現象，能平穩地開始膠帶運送。 【圖式簡單說明】 (一） 圖式部分 第一圖是說明本發明的半導體安裝裝置實施形態的整 體構成圖。 第二圖是控制第一圖所示的半導體安裝裝置中的第1 送料輪和第2送料輪的膠帶送料輪控制裝置構成圖。 第三圖是表示第一圖所示的第1送料輪和第2送料輪 的構成的局部剖面圖。 第四圖是說明對第2圖所示的膠帶送料輪控制裝置進 行的第1送料輪和第2送料輪的控制的時間圖。 第五圖是說明對第二圖所示的膠帶送料輪控制裝置進 行的第1送料輪和第2送料輪的控制的時間圖，是表示在 膠帶停止移動時也進行第1送料輪和第2送料輪的停止旋 轉定時控制實例的時間圖。 第六圖是概略地表示說明以往膠帶運送動作的半導體 安裝裝置的主處理工序的圖。 (二） 元件代表符號 1 膠帶供應裝置 2 封裝裝置 3 樹脂固化裝置 4 膠帶繞卷裝置 11 晶片 26 1260720 12 膠帶 21 第1送料輪 22 張力輪 24 封裝部 25a 、25b 1對夾持器 31a 、31b 導執 42 第2送料輪 51 第1脈衝電動機 52 第2脈衝電動機 53 電動機控制部 54 扭矩連接裝置 27The control is carried out at the thickness w 2G to 4__ of the tape 12, and is more effective in preventing the tape 12 from being cut and the tape being slackened. As in the case of Ship Mingqing, according to the hair feed method and method of the present invention, the tape existing between the first transport wheel and the second feed wheel at the time when the i-th feed 7 is suspected to be turned is already at the beginning of the spoon. Therefore, the tape between the first transfer wheel and the second feed wheel starts to move privately in a state where it is not loose. Even when the thickness is 1Q to heart m _ tape, it is also secreted by the first feeding wheel. Glue (four), song phenomenon occurs. Therefore, it is possible to prevent the tape from falling off from the reverse wheel and the guide rail. According to the semiconductor mounting apparatus of the present invention, after the packaging operation of a certain wafer is completed, the 'scaling belt movement' 彳rr- arrives at a predetermined position, and then the material stops moving, and when the crane is moved, Move _ to shift the scale, at least the thickness of the county is 1〇~5〇'1, 'Fan Qb^· π 2 The wheel rotates earlier than the first feed wheel. As a result, at the beginning of the 'th, the start of the wheel (four) 4', the tape has started to move due to the second feed wheel, and the tape between the first and second feed wheels is moved without slack. For this reason, 25 1260720 even in the case of a thin tape having a tape thickness of at least 10 to 50/m, the tape is not bent after passing through the first feed wheel as described above, and the tape conveyance can be smoothly started. BRIEF DESCRIPTION OF THE DRAWINGS (1) Fig. 1 is a block diagram showing an overall configuration of an embodiment of a semiconductor mounting apparatus according to the present invention. The second figure is a configuration diagram of the tape feed wheel control device for controlling the first feed roller and the second feed roller in the semiconductor mounting device shown in the first figure. Fig. 3 is a partial cross-sectional view showing the configuration of the first feed roller and the second feed roller shown in the first figure. Fig. 4 is a timing chart for explaining the control of the first feed roller and the second feed roller which are performed by the tape feed roller control device shown in Fig. 2. Fig. 5 is a timing chart for explaining the control of the first feed wheel and the second feed wheel by the tape feed wheel control device shown in Fig. 2, and shows that the first feed wheel and the second feed are also performed when the tape stops moving. A timing chart of the stop rotation timing control example of the feed wheel. Fig. 6 is a view schematically showing a main processing procedure of a semiconductor mounting device for explaining a conventional tape transport operation. (2) Component symbol 1 Tape supply device 2 Packaging device 3 Resin curing device 4 Tape winding device 11 Wafer 26 1260720 12 Tape 21 First feed wheel 22 Tension wheel 24 Encapsulation portions 25a, 25b 1 Pair holders 31a, 31b Guide 42 second feed wheel 51 first pulse motor 52 second pulse motor 53 motor control unit 54 torque connecting device 27