TW200408024A - Tape material-feeding wheel control method and semiconductor installation device - Google Patents

Abstract

The present invention provides a tape material-feeding wheel control method and semiconductor installation device, which can prevent the intermittently delivered tape from being bent after starting to move to pass through a material-feeding wheel. A motor control member drives and controls a first pulse motor and a second pulse motor, so as to control a first material-feeding wheel and a second material-feeding wheel to rotate and stop. Whenever the intermittently delivered tape is moved, it is controlled such that the second material-feeding wheel is rotated earlier than the first material-feeding wheel by a predefined time (such as 0.5 second).

Description

200408024 发明, Description of the invention: [Technical field to which the invention belongs] ^ The present invention relates to a tape feeding wheel control method for controlling a feeding wheel for moving a film-shaped tape on which a semiconductor element (wafer) is mounted, and to control the tape feeding wheel and Semiconductor mounted semiconductor [prior art] Women's clothing. Recently, it has been used as a semi-movable and mounted chip package. The conductor mounting device is popularly using the thin film tape TCP [Tape Carrier Package tape carrier ^ ^ ^ ^ ^ ^ (;;;;; After combining the semiconductor elements, the package is heat-set to the semiconductor mounting device. In this type of semiconductor ㈣ ^ In the text ring device, the installation knows the carrier accurately ... and makes it stop correctly (Patent Document 1). ^ ^ (^ Figure 6 schematically shows the main points of such a semiconductor mounting device, including the steps of encapsulating and encapsulating. The ten-coating process and the curing process of the resin curing process of the packaging tree are part of the encapsulation process. The tape is provided to the feeding wheel 101 and the tape X 2 of the tape (with the wafer not shown) in the Y + M Θ garden. In addition, the tensioning roller 10 that applies the tension also recognizes the thermosetting resin encapsulation portion 104 that is set on the surface of the adhesive tape 100... 1 105b ^ 104 predecessor 200408024 In this package, the state "under tension of the tape ⑽ between the tensioning wheel 1G2 and the feed, and in the state of being clamped by a pair: ι-and 105b to the tape 10. In the clamped state, after entering: and so on, the encapsulation section Π is coated with resin on and around the wafer, and the wafer 103 is sealed with resin. In addition, after the packaging of a certain wafer 103 is completed, the clamping of one pair of clamps is released, and it is sent to the resin curing step by the feeding wheel 101. & Well, the feeding wheel 1 provided on the rear side of the resin curing process also rotates synchronously with the feeding ^ m, and the feeding wheel 10 (referred to as the first; feeding wheel 101) and the feeding wheel 1G6 (referred to as the second feeding) Between the wheels 1G6), the tape 100 is conveyed without loosening the tape. In addition, after the tape advances, after the next wafer 103 reaches the packaging position, the tape is stopped and the clamps 105a and 105b are clamped, and the resin is applied after positioning in the package. In this way, the first feeding wheel 101 and the second feeding wheel 106 of the semiconductor mounting apparatus repeatedly rotate and stop synchronously, and intermittently transport the tape 100. Generally, the driving sources for the first feed wheel 101 and the second feed wheel 106 are pulse motors. In addition, the above-mentioned ith and 帛 2 feed wheels m 1 06 are widely used as so-called rubber wheels formed of rubber materials such as silicone rubber at the edge portions of the wheels which constitute the contact surface of the tape. / '[Patent Literature] ^ Japanese Patent Laid-Open No. 2002-68550 (pages 6 to 7, pages 1 and 2).鄕 (J24 In the above-mentioned semiconductor mounting device, stop the tape during the operation! During the clothing process, enter the packaging and move the tape to move the tape 100. ^ After the sealing operation is completed, if it is placed on the cap button Ίη Enter the smart intermittent operation ^ The tape travel distance f in front of Kelun 101, or a component such as a long force in the tape movement path, then the sealing heart will block the tape movement, the heart motion ends, and then start the tape When the 100 moves, two or two, even if 1 feeding wheel 101 is synchronized with the second feeding wheel 同 = same = turn After passing the first! Feeding wheel 10, the valley on the rubber π 0 is easily generated as surrounded by the dotted line in the sixth figure The sixth figure shown in the circular frame C shows an example in which the tape 100 has an upward bent portion w, and it may be bent downward when there is no support plate that supports the tape 100 from below. Folding such as upward f-curving (hereinafter referred to as the bent portion w). In addition, the tape conveying speed of the first and second feeding wheels 101 and 106 may be slightly different due to a setting error. Especially the first The 2 feeding wheel 106 is 101 than the first feeding wheel. When the conveying speed is slightly slower, the tape is moved without tension on the tape 丨 00 between the first Gongda 101 and the second feeding wheel 106. Therefore, if the tape stops moving in this state, the first A slight slack occurs on the adhesive tape 100 between the 1 feeding wheel 101 and the second feeding wheel 丨 〇6, and the movement of the adhesive tape 100 is stopped. In this state, if the tape is started to move again, the above phenomenon is likely to occur. That is, the phenomenon of the bent portion W on the adhesive tape 100 is generated after passing the first feeding wheel 100. Originally, the outer diameters of the first feeding wheel 101 and the second feeding wheel 106 are the same (200408024). As 19 丄 /, 疋 is driven by a pulse motor to achieve the same rubber transportable speed. If the above 箆] ,, ^ 1m μ 2 ⑽ are rubber wheels, then because of the length The wear and other factors will be different, and the conveying speed will be different. Also, the diameter of the rubber wheel may be different during the restraining stage. Based on the above reasons, the first tape conveying speed has a subtle Image, that is, when the tape movement is resumed, It is considered that one of the reasons for the difference between the curved feed w feed wheel 101 and the second feed wheel log is that after the above-mentioned present situation has passed through the first feed wheel 101.

^ ③Semiconductor mounting I is centered. It is important that the adhesive 100 is not loosened after packaging. f 2 feeding wheel 106-Generally, the tape feeding is performed on the cymbal 100 without the slackness between the i feeding wheel 1G1 and the second feeding wheel 106 based on the tape feeding speed of the first feeding wheel 101. That is, the torque on the side of the first feeding wheel 101 is higher than the torque of the second feeding wheel 106. The difference in this torque can also be considered that the tape 100 is prone to bend on the tape 100 after passing the first feeding wheel 101. One of the reasons for W. & Eight such bends M W, the thinner the tape i⑽, the more likely it is to occur. Recently, in some T A B (Tape Aut⑽attd B〇nding) and c〇F (Chb plus

In Fhni), a very thin tape with a thickness of about 25 m is used, and this thin tape 100 is particularly easy to flex. If the haze zone 100 is bent into the sixth figure: :::, there is a danger of damage to the false claim, and it will also have an adverse effect on the B-sheet 103 and the bonding state installed in this part. That is, if the adhesive tape 100 is bent as shown in the example of the sixth figure, on its bent portion: For example, there are wafers that are spotted due to internal coffee, etc. The wafer may be cut off or the wafer may be damaged. The belt has just passed the stage of the first feeding wheel igi, because of the second seal :: not yet cured: the rapid incline of the curved portion w may also cause the occurrence of the bad :: brother. Moreover, 'because of the bending part w, the defect that the rubber reversing wheel and the guide part fall off may be caused. [Inventive content] / The purpose of the present invention is: to solve the problem of the reflection of the $ + + .... After providing the batch conveyance control method to prevent intermittent conveyance of rI π and f-curve after passing the material wheel, it is possible to smoothly transport privately-owned tape conveyance: = :::: The semiconductor installation of processing and the like; the processing and the resin fixation are performed. The purpose of the present invention is to control the erroneous tape feeding wheel: == the feeding wheel is controlled ^ so that it is set on the moving path where the film is installed The tape moving direction of the second feed is forward, and the feed roller rotates on the first feed roller, so that the tape moves: _ on the second /: feed: wheel-move, stop the rest movement. As the ^ m movement is repeated, the wheel start rotation ratio Γ:: Γ㈣ When the belt starts to move, the second feeding is performed. Therefore, the Jing belt === *? Controls early. Feeder control. As a result, at the 4th point 4i, the tape feed such as the start of rotation is still on the front side (the time when the ^ is sent ^ = rotation, there is a state where the K-warp of the first feed wheel 〃 I is in a state of starting to move. For this reason, In other words, when the thickness of the tape is 10 to 50 // m, the thickness of the tape between the first feeding wheel and the second feeding wheel is not loosened, which can prevent the tape from bending after passing through the first feeding wheel. In this method of controlling the tape feed wheel, it is best to set the time difference between the start of the first feed wheel and the second feed wheel to a predetermined time in the range from 0.1 second to 1.0 second. Thus, since the second The time when the feeding wheel starts to rotate earlier than the first feeding wheel is set in the range from 0.1 second to 1.0 second, so it will not affect the movement of the tape. At the same time, it can prevent the bending and the like after passing the first feeding wheel. In addition, each time the intermittent movement of the tape stops, it is better to control the second feed wheel to stop rotation slower than the first feed wheel. In this way, when the tape stops moving, the second feed wheel ratio is performed. 1st delivery The wheel should be controlled slowly to stop rotation. When the tape moves a certain amount to stop the tape movement, after the rotation of the first feeding wheel stops, the second feeding wheel also rotates for a while to continue the tape movement. To this end, the second feeding wheel stops At this time, the tape between the first feeding wheel and the second feeding wheel can be kept in a slack state. Therefore, when the next tape starts to move, after passing the first feeding wheel, it is possible to more reliably prevent the curved surface of the tape and the like. In addition, in addition to the inventions described above, the second feeding wheel is driven by a motor through a torque connection device (keeper), and if the second feeding wheel rotates, the above-mentioned torque is added to this in advance. On the second feeding wheel, the torque connection device causes a slip between the motor and the second feeding wheel. As a result, when the tape movement starts and / or stops, the second feeding wheel only rotates by a preset 200408024 = 1 'wide time' 'In the turn, there will be a situation where the force is increased. However, the force 2 Nana Emei secretly transmitted the torque from Crane Machine to Wei, the second rounder, and there was no increase in the light movement belt.' This prevents the damage of the belt from moving. The contact surfaces of the 1st and 2nd feeding wheels of the L and the tape are rubber-like members. &Quot; Ejing refers to the sacrifice butterfly W, and the material should be transported with extremely thin rubber. At the same time, the adhesive tape can be made into a cheap product. The semiconductor wire device of the present invention is provided with components, components: sending out the adhesive tape from the wafer, and applying resin sealing material to the wafer; ^ Grease coating device; material moving distance set for passing through the above-mentioned sealing device and resinizing device; set on the above-mentioned tape transfer scale and referred to the second feeding wheel; The second ^ wheel 'in front of the tape movement direction causes the tape to move, and in order to move the material repeatedly, stop and turn the movement, and control the belt wheel and the second feed wheel ^ Break ^ With the feeding wheel control relay, each time _ the beginning of the shift, the "feeding wheel opening scale = the first feeding wheel's starting rotation should be controlled earlier. f. Comparison This semiconductor security cracking device starts to wait for a chip to finish the packaging operation, _specify the position M, and move the miscellaneous belt axis. And: Satoshi installation device in the intermittent movement of this type of _ feeding wheel as soon as possible than the feeding wheel of the younger brother 1 to help the younger brother 2 Μ 疋 mattress. For this reason, at the moment of the second feed rotation, since the second feeding wheel is already in a state where the phosphine starts to rotate, it is extremely thin and wins 50 // m between the feeding wheel and the second feeding wheel. Situation ,,,,,,, and _ status'%. Therefore, even if the turning thickness is 10 ~, each time the turning, the s and material 1 are on the level side, and the track of the fortune company turns and bends off. , Ground open scale belt 11 to send. It can prevent the rotation of the reversing wheel and the guide tape. The feed feeding office Muke_shut_return The feed control of the first feed wheel should be slower and stop the rotation control. Get the orderer. At the time when the movement of 4 stops, the second feed wheel is more expensive than the first feed wheel.

For the 疋 η 2 lion wheel is still turning as far as possible _ Nippon Steel, continue · belt movement. ^ At the time when the fine 2 feed wheel stops, the phenomenon such as f-curving of the tape is more surely prevented after the tape between the first and second feed wheels. Other inventions of the above-mentioned semiconductor mounting device are that the 送 i feeding wheel is provided on the roughly coated material shaft _ performed by the packaging device, and the 帛 2 feeding wheel is provided on the butterfly curing device.

After the cured resin is placed, the tape moves on the path. Therefore, it is possible to prevent the lead wire of the wafers bonded by the inner leads, occupants, etc. from being cut off, or the wafer portion may be damaged, and the failure of the uncured surface to flow in the part will also be caused. The first feeding wheel and the first 2Feeding wheel, the contact surface of the scale belt is made of rubber-like members. Therefore, the sprocket hole provided on the kick belt is used to transport the false belt, so there is no deformation and damage of the key wheel hole. It can also be adapted during transportation, and at the same time, it can make the material cheap. 12 200408024 In addition, it is better to make the first feeding wheel and the second translation rough Guping Z transport wheel to have the same diameter, and at the same number of revolutions It is the same torque. The method and the like become simple. With this structure, the formation and driving of various feeding wheels can be reduced in cost and easy to control. [Embodiment] Hereinafter, embodiments of the present invention will be described. The content described in this embodiment includes two aspects of the tape feed wheel control method of the present invention and a semiconductor mounting device using the winch tape feed wheel control method and mounting a semiconductor. Chapter 1-Description of the present invention and half-material silk packaging The full-hearing composition of the _ is implemented. The conductor installation device is provided by a tape supply device, a Japanese film, a U-shaped package, a resin-encapsulated tree-curing device, and a heat-cured tape. The top LI has a configuration of a belt feeding wheel control device (not shown) in the first figure, and the outline of these two components will be described. Tape supply device} The following components are structured. Referring to the figure, the round frame A) is the place. The thickness of the tape is 25 " m, and it is 7 pounds on the wheel under the condition of π 13 in the center ..., reel 14, reel The space of the spacer 13 is composed of the reel 15, the reel 15, the guide _17, etc. The riding belt 12 has a thickness of 1 ◦ ~ _. The thickness of this thickness is 2, and this semiconductor mounting device, but Also make the tape with a degree of 50 or more. When manufacturing tapes that are more than ^, the tape feeding wheel age control method described in this embodiment is not used, and the stripping method in the prior art or the tape thickness should be replaced. Control Method

13 200408024 This adhesive tape supply device 1 makes the pull-pull at the "Sang Fang"; 骖 f supplies the adhesive tape 12 and the spacer 13 on the reel 14 and separates the separated spacer height 13 from the spacer to wind the reel. 15 is wound. On the other hand, the adhesive tape 12 is supplied to the packaging device 2 in the next step in a state shown in the circular frame A (a partial enlarged view of the adhesive tape 1). It has a feed wheel 21 for driving the tape u from the tape supply device 丨 to the front (in the direction of the arrow X), a tension wheel 22 ′ that often applies reverse tension to the tape 12, and a surface for the tape 12. The mounted wafer 11 ejects the thermosetting resin sealing portion 24 from the distribution head 23, and a pair of clamping degrees σ 25a 25b that clamps the tape at the rear of the blade head 23. In addition, a torque is mounted on the tension wheel 22 The connection device, the electric table crane used for the tension wheel 22 is rotated in the direction of adding reverse tension (in the opposite direction to the motor of the feeding wheel 2 and 42) to apply tension on the adhesive tape 12. The tension of the feeding wheels 21 and 42 is smaller than that of the feeding wheels. The fat curing device 3 is a heating furnace that heats the adhesive tape 12 sent from the packaging device 2 to make the coated tree visible. The heating furnace 3G, in this __th example, is a structure that contacts a level 3 furnace from the packaging device. 2 The resin-coated win belt 12 is directly guided by the two guide rails 31a provided on the left and right sides of the kick belt 12 in the direction of advancement, and the frame (refer to the circular frame B shown by the dotted line in the figure). Moving in the horizontal direction (direction of arrow χ). The circular frame β is a partially enlarged view of the cut-off state of the cross section of the tape 2]. The circular frame B shown by the dotted line in FIG. 7F shows The thin plate 36 provided in the heating grate is used to heat his body 35, _ scale 5 and heat

The heat effect of 14 厶 厶%% 3 is applied to the heat reflection plate 37 on the back of the tape i2. The hairpin 35, the hot plate 36, and the yoke ™ are set in the state of the circular frame B along the movement from the i-th to the third. However, in the center of the second moving distance l2, the respective positions ~ the position of the circular frame B, which is indicated by the dashed line toward the front, are opposite to each other. Wheel 3 ^ The tape 12 of the first movement path L1, which was advanced in the universal direction, was then reversed due to the first reversal. 'Because of the guidance and the guidance of Chan, this time in the opposite direction (arrow mark χ, Fang, Zeng It is reversed by the second reversing wheel 33. The reversed tape 12 advances in the horizontal direction (arrow mark X direction) due to the guides 31a and 31b =, is discharged from the tape outlet 34, and is sent to the 骖 π winding device 4 The W-winding device 4 has an adhesive W inlet 4 which is initially opposite to the tape outlet of the resin curing device 3. The tape 12 introduced from the tape 41 is fed to the winding reel such as the side with driving force. The feed wheel 42, the guide belt 43 guided by the sample feed lamp in the downward direction of the winch belt η conveyed by the feed wheel 42, the coiled guide guided by the ribs of the guide frame in the downward direction while being kept loose, and 2 In the case of the winding reel 44 and the winding tape & winding tape η, the spacer tape supply reel that supplies the spacer tape 46 so that the winning tapes do not overlap directly with each other. Requires several guide wheels 48 that can guide the adhesive tape 12 and spacer tape 4: The control device 5G drives and controls the feed wheel 21 (this is referred to as the first feed wheel ⑴) and the feed wheel 42 (this is referred to as the second feed wheel 42). As shown in the figure. The pulse motor driving the i-th feed wheel 21 is the i-pulse machine 51), the 2 lion 42 __ shaft (Edition 2 service:

15 200408024 Motor 52), control enough! A motor control unit µ of the second pulse motor and a torque connection device 54 for transmitting and releasing driving force. In this embodiment, the tape feed wheel control device 50 also performs the scroll control of the tension wheel 22 at the same time. A torque connection device 54 ′ disposed between the second feeding wheel 42 and the second pulse motor 52 is provided with the above-mentioned torque being applied to the second feeding wheel 42 to drive the second pulse motor π to the second feeding wheel 42. The force is released, and the specific action will be described later. Number! Each of the feeding wheel 21 and the second feeding wheel 42 has a structure and a shape as shown in the third figure. That is, the upper side is the driving wheel 61, and the ™ is the driven wheel 62. The central portion 63 of the driving wheel 61 and the central portion 64 of the driven wheel 62 are both formed of a metal structure, and the peripheral portions 65 and 66 are rubber-based materials. The cross-sectional structure of the peripheral portion 65 of the driving wheel 61 is a right-angled triangle shape with an inclined side on the inner side, and its tip (= outermost side) hits the middle of the peripheral portion of the driven wheel 62 at approximately two places in the width direction. In this embodiment, the tip of the peripheral portion 65 of the driving wheel 61 and the tip of the peripheral portion 66 of the driven wheel are configured to contact each other. In this embodiment, the straight lines 鸣 _ of the casters 61 and 62 are both the width of the central portions 63, 64 and the width of the peripheral portions [M are all the same, here are three sides . All the surrounding ones are 2 ·. The thicknesses in the direct direction of 66 are all the same. The semiconductor mounting member is intermittently fed from the tape supply device i by the i-th feeding wheel 21 and the first rotation and stop. The tape 12 with the wafer 11 is rotated repeatedly. On the other side, send out the 嶋 12, the noodles, and the continuation device 3… After the processing, the wafer is wound by the tape winding device 4 and the tape is sealed with a tree seal. by

16 200408024 When the packaging device 2 performs packaging, the tape η between the tension roller 22 and the} th feeding wheel 2i is tensioned. After the position of the packaging is determined, the tape is clamped by the U holder and the tape. 12 and packaging. ^ And 'After packaging for a certain chip 11 is completed! Release of the center holders 25a and 25b. The first extension wheel 21 and the second feed wheel 42 are rotated, and the tape 12 is conveyed to a predetermined position. After a wafer 11 reaches a predetermined position, a pair of holders 25a and 25 are tightened again. W 12, and fix the error band 12 and so on, and then package. The two Γ1 42 of the first feeding wheel 21 and the second feeding wheel 42 of the body-in-law device of the sample body 4 repeatedly rotate, stop, and intermittently transport the tape η. These two feeding wheels 21 and 42 have the same right and the same punching speed, that is, if the same rotation speed is used to move the medium, there will be no problems in theory. In principle, the two feeding wheels 21 and 4 A f 12 The speed is also less than the predetermined value, which causes the center of the second feeding wheel 42 to be set on the tape 12. In order to prevent the tape 12 from slackening, the speed is better than the conveying speed of the first feeding wheel 21 It should be 0.01 ~ 5% faster, and M2 ~ 0.5% faster. Therefore, the torque connection device 54 β provided on the # 枓 wheel 42 side is operated in a dynamic (working) state. That is, the time is often in a sliding state. The simple wheel 42 and the 65th part of the second pulse motor 52 are 66 and 66. The so-called rubber wheel is made of rubber materials such as lumps and perimeters. The tape movement distance between the semiconductor mountings shown in the first figure is the third, the first feed wheel 21 and the second feed wheel 42, and there is a 12 t moving path of the tape in the tape shaft path. The total distance of cymbals is long and constitutes resistance such as 17 ZUU4U «U24 due to friction, etc., such as guide rail 31M〇31b. In Wu Hai Semiconductor's Ansang installation, there is a 0 Wu. The torque of Yi 2 and 42 is the same, because the moment is larger than that of the second semiconductor, and it is better that the torque of the first feed wheel 21 is higher. The torque of the feed wheel 42 is larger. Assume that With this restart of the adhesive tape 12, it seems that the tape 12 is rotated at the same time, tearing, and tearing, * '* 1. The copper 21 and the second Na 42 are the same. The adhesive tape 12 in the adhesive tape 12_1 takes into account the friction due to friction. After the contact force is generated on the first feeding wheel 21, it is easier to think about it. As a result, Chu Genggu is easy to produce, as shown in the sixth figure: "," "Right adopt the structure of the present invention, and start driving the second feeding wheel 42 earlier. , That is, the torque of the feeding wheel 21 & Chu 9 bending part w.) The torque ㈣2 is greater than the torque of the weaving wheel 42. Generally, only the centrifugal force is generated. The first feeding wheel 21 and the second feeding wheel 42 Each peripheral part is made of rubber material. Due to the abrasion of the rubber and the deviation of the outer dimension accuracy in the manufacturing stage, the speed of the tape will also be different. The speed of the first feed material 2 feeding wheel 42 is "Xiao Xu Lai, the belt 12 between the feeding wheel 21 and the second feeding wheel 42 is transferred in a tension-free state. To this end, In the case where the material is intermittently transported, the tape is still transported. As described above, after the age 丨 the feed wheel ，, the tape is prone to warp. The semiconductor mounting device of this embodiment is for the i-th feed wheel 2m and The second feeding wheel is controlled by the tape feeding wheel 1 which will not cause the above-mentioned materials, and mainly describes the control of the first feeding wheel 21 and the second feeding wheel 42. When the tape 12 is transported, the back tension is greater than the back tension. The torque (this torque is sent by the first feeding wheel u 18 200408024 Γ2 _) Jing 12 coffee, the secret shirt Lianxian set 7, _. For this' tension_ 响 靖靖 动 —she this w, n ^ C force The H-belt feeding wheel control device 50 rotates the first and second feeding infeeds ^ m21 and 42 respectively. The stop control also simultaneously stops the rotation of each of the feeding wheel 21 and the second feeding wheel 42. For the first and second feed wheels 21 and 42, the first and fourth time diagrams of the four rounds of the electric motor Γ1 and the second feed wheel 42 respectively correspond to the pulse motor (the first pulse car = = Edita 2) _ 糊 娜 __ 's pulse speed is 2 moves, the coffee comes from the i-th pulse motor 51 and the second pulse The operation of the driving speed of the motor 52 is the same as the rotation speed, and the operation of this wheel "is only ..." The operation of the pulse motor = feeding ★ Only the operation of the feeding wheel 21 and the second feeding wheel 42 will be described. The fourth picture (Α) shows the i-th feed wheel 2

) Bn Timing of the stopper, the fourth picture (B 疋 Table 4 Timing of rotation and stop of the feeding wheel 42. The i-th feeding wheel is in the stop state until makeup can be performed until tl 25 and the time reaches U After the sealing operation is finished, after the clamping action of one pair of clamps 5a and 25b is released ... The surface m, before and after the start of rotation, the other brother 2 reaches the feed wheel 42 before the first feed wheel 21 starts to rotate , Ρ 间 (△ 〇 begins to spin. That is, the second, 倂, and the heart, as shown in the fourth figure earlier—4 卩 4 2 The starting rotation time is tl—At. The second feeding wheel 42 starts the turning time The start of rotation of the slave 1 feeding wheel 21 is Δΐ = 0.5 seconds in this embodiment. In this way, the 'belt feeding wheel control device 50' is earlier 19 200408024 (0 · 5 seconds), when the _ wheel 21 starts to rotate 2: The wheel 42 is started to control such as rotation. To this end, 'Because the second feeding wheel 42 has been / the wheel 21 must exist in front of the tape. Between the wheel 42 _ Moving 嶋, so the first feeding wheel 21 and the second feeding belt 12 start to move without loosening. The heart stop state becomes moving. In the state, when the tape 12 passes through the i-th, two, and the \, the bending phenomenon shown in the sixth figure will not be formed or greatly reduced. ^, Try as early as possible before the material wheel 21 starts to rotate (〇 · 5 seconds), the second game ;, "" 2 When the rotation starts, it is usually 42 ^ here, ^ 12 between the 1st Dakota fantasy and the second material wheel is in complete lack, plus tension The condition of Wei Qi, Mei Shi, when the tape 12 'between the butterfly 嶋 M and the pulling force generated by the second feeding wheel 42 is only added to the younger brother =). However, on the second Na 42, as the following: _ *, F · 5 shirts are provided with a torque connection device 54, so if the 2nd, 2nd, 2nd, 2nd, 2nd pulse motor 52 is broken, 4th is added to the 2nd transport wheel 42, then the 2nd pulse _ machine 52 to the second feeding wheel _ Chuan j's force balance motor 52 and the second feeding wheel 42 slip between ^ & spear, brother 2 pulses' Therefore, no inappropriate force is added to the tape 12, which can prevent The deposit 21 and the second make-up wheel 42 of _Xian 12 were touched by the material. In the connection form, a torque that can be adjusted from the range is used to connect to the "February 2 feed wheel 42", but the second service punches the motor Heart 2 delivery Sliding. Generally, the torque when the tape 12 moves is about 0.0553 coffee. "20 200408024 4 samples at a time 5 seconds earlier than the rotation of the feeding wheel 21 of the brother 1) ^ 42 '" * ° · 5 ^ "Turn around. Finally, the second feed wheel 21 and the second feed wheel 42 are double-moved. Furthermore, I, and the wafer U constituting the T-packaged object is stopped at the specified position in Satoshi Seki 2 after the first supplementary wheel 21 and the second feeding wheel 42 stop rotating. The timing for stopping the rotation of the first feeding wheel 21, the second feeding wheel, and the 42 h is to find. In this way, the first feeding wheel a and the second feeding wheel commit a spin, and at the same time or in a state slightly later than that, 丨 remove the holder b from the stapler |, and move. The silk figure towel shows an example of the clamping action of the m holder at 25: 25b with the shape energy of the blue office. After the cores 5a and a perform the clamping operation, in this state, processing such as positioning is performed. _After the loading operation is completed, the clamping of 1 pair of grippers such as He and Mo :: release, at the same time (at the moment, as shown in the fourth picture ⑷㈣ ^ 疋 turn 'Before' the second feed wheel 42 is earlier At the time of time (△ wind 5 seconds), U-At begins to rotate. ^ ^^^ The semiconductor mounting device in the form of a semiconductor device, for the sealing of a certain wafer η, moves ^ ㈣, and waits for the next wafer π to arrive After the stand is set up, the Emperor's movement is stopped and it is carried out intermittently. ☆ The movement of Gong 2. During this intermittent movement, when the adhesive tape 12 starts to move, the second feeding wheel 49 ^ # y 'is more than the first feeding wheel 21 Earlier (0.5 seconds) started the square turn movement. Σ Therefore, at the moment when the first feeding _ 91 and d started to rotate, the second feeding wheel 42 tape has started to move privately. 200404024 The tape between the i-th feeding wheel 21 and the second feeding wheel 42 is in a relaxed state. Therefore, after the above-mentioned first feeding wheel 21, the rotation belt 2 is not produced, and the tape 12 can be started to move. And smooth movement. Therefore, it can prevent the tape 12 ~ * from falling off at the runner and the guide rail.

The above description is only the best implementation example of the present invention, but the present invention is not limited to the above-mentioned implementations-various modifications can be implemented without departing from the scope of the present invention. For example, when the user “knowledge” is performing timing control such as when the tape 12 starts to move, the second feeding wheel commits a timing earlier than the first feeding wheel M. However, when the tape 12 stops moving, the first _ Wheel 2! And the second feed wheel 42 stop rotating at different timings. At this time, the timing of stopping the rotation of the second supplementary wheel 42 is longer than the setting of the stop of the rotation of the second feeding wheel & -OFF_ / ^ The start timing of the bamboo sprout U and the second feed wheel 42 is the same as the third figure, but the timing when the rotation is stopped is different from the third figure. In the fourth tree, in the time system, the first feeding wheel 21 and the second feeding wheel 42 are used. However, in the fifth figure, the 'first feeding wheel 21 stops rotating at time t2, and the other one—the younger brother 2 makes up for heart Some time ⑽ (△ ㈣ 3 seconds) at ㈣tl, brother 2 feed wheel 42 Lang Zhihan M worm wheel 21 a little later, at time like △ «" Ding Zhihong turn, can more accurately prevent the 12 ^ table pool That is, the tape 12 is moved by 1%, and when the tape is stopped, the first feeding wheel 21 rotates. After a long time, ten rewards _ τ After the second, the feeding wheel 42 also rotates slightly. 21 goes ahead, the author's ㈣12 continues righteousness. For this reason, even

22 200408024 Assume that there is a loose tape i2 between the first feeding wheel U and the second feeding wheel 42. When the rotation of the second feeding wheel 42 stops, the first feeding wheel 21 feeds at 21 ° and the second feeding The adhesive tape 12 between the wheels 42 is in a non-relaxed state. As a result, when the next glue book starts to move, it is more difficult to produce the bend shown in the sixth figure. Therefore, 'the tape 12 can be prevented from being detached from the reversed thin guide rail at the setting time ΔQing 2 feeding wheel 42. It is assumed that there is still slack on the tape 12 between the first and second feeding wheels 42, due to the existence of time 2 , The amount of other pines will also be greatly reduced. For this reason, the probability of starting the bending of the adhesive tape is extremely high because of further increase. [t 'Eliminate the tape and make the second feeding wheel 42 slightly later than the i-th feeding wheel 21. If "the mosquito or more force is applied to the tape 12, there is a torque connection device between the second feeding wheel ⑫" right 52 54, so between the second pulse motor culprit and the second Z motive ^ ^ ^ If you put an inappropriate force on the tape, it will not damage the tape 12. 2 time difference δΓ △ 贝 ΓΓ 'drive The daily observations M and ^ of the timings of the first feeding wheel 21 and the second feeding wheel 42 are for the second when the tape starts to move (refer to the fourth figure), and to the Δ1 mosquito when the movement of the reel is stopped (see the fifth figure). In order to display is not limited to 0.5 seconds or 0.3 seconds, follow the settings applicable to-设定. There may be various body-mounting devices. However, it is best to set them in the range of α ~~, and which one is appropriate.仏 Two · ^ 's case ’If it is as such, it has the same degree in terms of preventing him from being inappropriate = the same value, the same aspect, and it is more favorable when the seal is broken. In addition, if necessary, it may also be "23 200408024 < Δΐ1". Also, "when M and the heart are for a long time of u seconds or due to other reasons, the start time and the middle of the clamping release and clamping action" may be Timing. For example, during the control of the %%, the 10th, and the second feeding wheel 42 when the tape starts to move, the rotation σσ of the second feeding wheel 42 starts at the side of the packaging device 2 The clamping action of the Japanese people 25a and 25b ends and the holding side 2W & sew off a little on the front side, the red turn of the feeding wheel 21 is turned. It is also possible to release the clamp _, and as soon as the brother 2 reaches the wheel 42, it starts to rotate. In this way, this more effective action ’can make the semiconductor Anxiang more secret at first glance. Similarly, in the stop state, the i-th feeding wheel 21 may be stopped first. 'Stop the second feed wheel 42 and finally sandwich it in the above-mentioned embodiment.' For the application of the Honshu Nasa Xieqi ship to the packaging device and resin curing device, the butterfly belt feed wheel control I Device. That is, the movement and stop of the adhesive tape are performed by the first feeding wheel 21 and the second feeding wheel which is in the forward direction of the belt forward direction, such as the transport wheel 21, and the first feeding wheel 21 and the second feeding wheel are guilty of There is resistance in the moving distance of the kick belt, or the kick belt moves a long distance between the first transport wheel 21 and the second feeding wheel criminal: Fortune, when moving after losing 1] Feeding wheel 2] Later in the journey, there are kicking and easy bowing shafts ... Brother L month's feeding wheel control methods can be widely applied. In the above embodiment, the first feeding wheel 21 and the second feeding wheel 42 have the same diameter and the same rotation speed, but the diameter of the second feeding wheel 42 may be larger than the diameter of the first feeding wheel M, or the second feeding wheel The rotation speed is higher than the speed of the first feeding wheel & or the above two 24 conditions are combined. In this way, the second feeding can be stopped at the two feeding wheels 2: 、, 42, and the adhesive tape 12: without moving the adhesive tape 12 more than 1 'even if stopped at the periphery of the two feeding wheels 2 and 42 at the same time. There are _ trees _ instead of oak _, or they can be formed of metal materials. Do not sigh all the elastic members. In the above embodiment, it is shown on the false belt. The second feed wheel 42 is earlier than the first 丨 feed wheel 21 / iG ~ 5G when it ’s best.

Controlled by the thickness of the adhesive tape 12, is a marriage sister. However, it is carried out in the range of 20 to 40 mm, preventing the 12 tapes of the tape from breaking and tape # 1 岭 岭 effective. 12 _ As mentioned above, Gu Benfa _ Kehu wheel is green, and in the i-th system = start to lie down 'the first feed wheel and the second miscellaneous ⑶ there is a turn belt is already in the _ Ί core' the first] feed wheel and the second The cymbals between the feeding wheels begin to move without being slack. ^ Even when the belt is __ with a ruggedness, the rubber does not curl at the pass and the feeding wheels. So ’can prevent the tape from going from the reversing wheel and the guide.

Fall off.卩 = ,,, The semiconductor device of the present invention is set, for a certain "after the end of the mounting operation ° 々V㈣ '4 next-after the wafer reaches a predetermined position, the tape stops moving, so in this kind of rugged belt transfer, At the beginning of the glue shift_f, the thickness of the tape is at least 10 ~ 50 scoops. The second feeding wheel can rotate slightly earlier than the first feeding wheel. Therefore, when the & 2 feeding wheel, the tape is in a state of starting to move, and the tape between the 2nd feeding wheel of the 1st wheeler is moved without slack. For this reason,

25 200408024 2 When the thickness of the tape is at least .5, it can be smoothly and smoothly transported by the county where the tape will not occur even after passing through the above-mentioned wheel. Illusion [Simplified description of the diagram] (I) Schematic part The first diagram is a diagram illustrating the structure of a semiconductor body of the present invention. The dress is placed in a full state—the figure is a partial cross-section of the structure that controls the semi-feeding shown in the first figure: the tape feeding wheel control of the first wheel ^. The first feeding wheel and the second The first diagram of the feeding wheel illustrates the timing chart of the first feeding_ ^ 4 σ k 枓 of the wheel control device and the second feeding wheel of the 4,4 & + line of the tape shown in Figure 2. The timing chart of the control of the tape feeding wheel control device shown in the second figure is that the feeding of the tape stops moving = the control of the two feeding Γ wheels is a time chart of the example of the second feeding wheel and the timing control during the second sand table. The sixth figure of the stop spinner is a diagram schematically showing the main process 4 of the conventional mounting device. The semiconductor (2) of the operation symbol of the component 1 tape supply device 2 packaging device 3 resin curing device ^ tape winding device 11 26 200408024 12 Tape 21 First feed wheel 22 Tension wheel 24 Encapsulation 25a, 25b One pair of holders 31a, 31b Guidance 42 Second feed wheel 51 First pulse motor 52 Second pulse motor 53 Motor control unit 54 Torque connection Device 27

Claims (1)

200408024 Pick up and apply for patent Fan Gu 1. A tape feeding wheel control method of the tape travel distance & flute square, women's clothing with crystal wheel tape moving direction Γ square wheel, and the first feeding 2Feeding wheel-The second tape that is rotated and set on the moving path can be moved repeatedly in order to make the feeding wheel and the aforementioned 2: 1; stop the intermittent movement, the first! The brother 2¾ is controlled by the feeding wheel; it is characterized in that the above-mentioned tape uses the intermittently moving tape each time it starts to move, the control is: 7th ΓΓ; the rotation of the feeding wheel starts early. * Term: Description: The time difference between the control side of the tape feeding wheel is set to be within the range of 3.2 U · 1 second to 1.0 second from the start of the rotation of Q i D 1 and the second feeding wheel. The manufacturing method is characterized in that the belt feeding wheel control described in item 1 or 2 controls the aforementioned two ::::: each time the moving tape stops moving '4. Rushen II ΓΓ: The wheel lags and stops rotating. The method is characterized in that it is driven by the control unit of the above-mentioned 2M erroneous tape feed wheel, and the second feed wheel is subjected to a preset torque by the motor through a torque connection device. Generated between wheels; 'moving r connection-setting' makes the above-mentioned electricity 5 as described in the patent application (fflchu) method, which is characterized in that the control surface of the tape feeding wheel described in (1) above is made of rubber materials The remaining 'wheel' and the tape of the 帛 21 material wheel are connected to 28 1 7 ('· β; 6 · —a semiconductor mounting device, which has the following devices, and the components will come from the tape supply device. Ling T will send out the tape with the wafer, and then you will be able to coat your Japanese and Japanese films with a resin packaging device; make the packaging device apply Ji, f WS to cure the resin curing device with a month; make the above | T through the above-mentioned tape movement path; &-set the resin curing device and set the above-mentioned tape movement path, and wheel; the first 1 material roller and the second feeding on the top of the The second feed wheel rotates ... The upward movement in the forward direction can reverse the movement of the tape, and in order to make the transfer of the tape dry and up: the intermittent movement of the stop, the tape feeding wheel control device that controls the first feeding == feeding wheel; Start :, feed = control of the rotation of the knee belt feed wheel control device in each intermittent movement. The first feed wheel mentioned above starts to spin early. 7. As described in item 6 of the scope of patent application, it is characterized by the aforementioned tape feed wheel. The clothes are placed on the w μ ... the tape that moves intermittently on the kitchen ... people ... feeds' to perform the control of the second feed wheel's hysteresis and stop rotation. The heart is 1 ~ rf 軏 $ L. Please refer to the 6th or 7th of the patent scope. The semiconductor mounting container is characterized in that the first fill wheel is set in the tree sealed by the aforementioned resin curing device, and the material wheel is set in the movement path of the tape after the completion of the curing by the aforementioned return tree. 29 200408024 As claimed in patent application No. 6, it is characterized in that the aforementioned first feeding wheel and the semiconductor mounting device described above are made of rubber material. 1 逑 The second feeding wheel is connected with tape, and the contact surface is 1 0. No. of patent applications Wherein said first feed wheel, and at the same speed and the same moment of handcuffs. 7 of the aforementioned 2, [pi] feed wheel installed equipment to pick up the same straight One, such as hypophosphorous page drawings ·· 30