TWI252353B - Substrate for liquid crystal device and method for fabricating he same, liquid crystal device and method for fabricating the same - Google Patents

Substrate for liquid crystal device and method for fabricating he same, liquid crystal device and method for fabricating the same Download PDF

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Publication number
TWI252353B
TWI252353B TW089112314A TW89112314A TWI252353B TW I252353 B TWI252353 B TW I252353B TW 089112314 A TW089112314 A TW 089112314A TW 89112314 A TW89112314 A TW 89112314A TW I252353 B TWI252353 B TW I252353B
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Taiwan
Prior art keywords
liquid crystal
region
substrate
crystal device
glass substrate
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TW089112314A
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Chinese (zh)
Inventor
Eiji Okamoto
Takumi Seki
Keiji Takizawa
Hideaki Naono
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Seiko Epson Corp
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Publication of TWI252353B publication Critical patent/TWI252353B/en

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133553Reflecting elements
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/13356Structural association of cells with optical devices, e.g. polarisers or reflectors characterised by the placement of the optical elements
    • G02F1/133565Structural association of cells with optical devices, e.g. polarisers or reflectors characterised by the placement of the optical elements inside the LC elements, i.e. between the cell substrates

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Mathematical Physics (AREA)

Abstract

The back substrate opposite the front substrate, of a pair of substrates holding a liquid crystal layer between them, has one surface that includes a flat, smooth area and a roughened area having minute projections. The highest of the projections in the roughened area is below the level of the flat, smooth area.

Description

1252353 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(1) 〔發明之所屬技術領域〕 本發明爲關於液晶裝置用基板、其製造方法、液晶裝 置、其製造方法以及電子機器。 〔習知技術〕 習知以來,可反射型顯示之液晶顯示裝置即已普及, 於如此之液晶裝置中,所採用之反射型顯示是以自然光或 室內照明光等之外光自前面者(觀察者)入射,藉由反射膜將 該光進行反射之反射型顯示。根據如此之構成,因不需要 背照光,具有可謀求低消耗電力之優點。 於此,當上述反射膜之表面爲鏡面狀時,在觀察者欲 辨認之影像上會有背景或室內照明光等之反映,會有顯示 影像看不淸楚的問題產生。因此,將上述反射膜之表面粗 糙面化,使反射光適度散射是一般性之作法。 習知,如此之散射構造係製成以下之構造,即,在玻 璃等基板表面用硏磨劑進行硏磨,使該基板表面上形成有 多數的細微山部和谷部。接著,在該粗糙面化之表面上, 形成上述之反射膜。藉此,反射膜之義面爲,玻璃基板表 面反映之粗糙面。因此,藉由反射膜之反射光,可適度散 射。 然而,根據上述方法時,玻璃基板表面須全面粗糙面 化。因此,有將本來應形成在平坦之平面上的校正標記或 轉換元件等,不得已而形成在粗糙面化的表面上之問題。 此外,爲獲得良好之亂射特性,在粗糙面化之表面上 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -^1 ϋ ·1 al· ϋ ϋ 一·^ I I 1 ·ϋ 1« ϋ I I (請先閱讀背面之注意事3填寫本頁) 祕· 1252353 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明() ,雖希望山和谷能不規則地形成,但在用硏磨劑進行基板 硏磨的方法中,山和谷卻會因應硏磨劑之粒徑或硏磨方向 等而形成規則性。因此,於上述方法中,欲獲得良好之亂 射特性較爲困難。 如此,欲根據習知之方法製作散射構造時,會產生各 種不同的問題。 〔發明開示〕 本發明,係有鑑於上述之情況,其目的爲提供可減少 基板粗糙面化對液晶裝置造成不良影響之晶裝置用基板、 其製造方法、液晶裝置、其製造方法以及電子機器。 爲達成上述目的,該發明,係爲挾持液晶層的一對基 板之中,位於觀察側之相反側之液晶裝置用基板,其特徵 爲前述液晶裝置用基板的表面具有平坦的平坦區域,及被 形成細微的山部與谷部的粗糙面區域,前述粗糙面區域之 前述山部,其頂上部爲含有前述平坦區域的平面以下的高 度。 根據如此之液晶裝置用基板,因形成有選擇性之粗糙 面區域和平坦區域,除了在粗糙面領域上形成具有良好散 射特性之反射膜外另一方面,例如可將形成爲平面狀之所 期待要素行形成在平坦領域上。 另,當考慮到液晶裝置之晶隙時,平坦區域和粗糙面 區域之高低差最好在5 以下。 又,爲獲得良好之亂射特性,於一般,最好是粗糙面 - (請先閱讀背面之注意事 —— 寫本頁) -I §§ I ϋ -ϋ ·1_— 1 I ϋ ϋ 1 ·ϋ % 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 1252353 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(3) 區域之山和谷能不規則性地形成。具體而言,最好是粗縫 面區域之形成如以下:各山部之高度或者是谷不之深度是 有所不同,且,1個山部之頂端和與其鄰接之山部頂端的 距離,會因各山部而有所不同。以規則性形成山部及谷部 時,會因反射角度之光程差造成反射光之染色發生,而引 起顯示特性之惡化。 於此,亦可使指定標記形在上述之平坦區域上。例如 ,可將校正標記或生產控制標記等做爲該指定標記。和形 成在粗糙面區域上時比較,藉由該等標記形成在平坦區域 上之組成,可確實辨識該當標記。 另,針對做爲校正標記而言,例如,在將該當液晶裝 置用基板和其他基板黏合時,有爲使兩基板之相對位置能 吻合之校正標記。其他亦可將在轉換元件或者像素電極等 之形成時,在濾色片或者遮光層之形成時,在定向膜之塗 抹時,在密封材之印刷時,在面板之裁剪或爲驅動液晶裝 置之半導體集成電路之實際安裝時所使用之校正標記形成 在平坦區域上。 另一方面,針對做爲生產控制標E而言,例如,有批 號或機種編號,或將各種製造生產之處理條件等以記號來 表示之標記。其他做爲生產控制標記者,也有將各種資訊 數據化者或條碼化者,亦或界定碼所代表成之二維條碼模 樣化者。 於此,在本發明之平坦區域上,亦可形成配線。於此 ,所謂之配線爲包括以下槪念,例如有源矩陣方式之液晶 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -—.1 ϋ ^ l· κ ϋ ϋ ϋ ϋ ϋ -I ^ ϋ · (請先閱讀背面之注意事$填寫本頁) 1252353 A7 B7 五、發明說明(4) 裝置之掃瞄線或數據線等配線,或者TFT (1252353 INTELLIGENT INTELLECTUAL PROPERTY SECTOR INDIVIDUAL COMPANIES CO., LTD. PRODUCTION A7 B7 V. Technical Field of the Invention (1) The present invention relates to a substrate for a liquid crystal device, a method for producing the same, a liquid crystal device, a method for producing the same, and an electronic device. [Prior Art] Conventionally, a liquid crystal display device having a reflective display has been widely used. In such a liquid crystal device, the reflective display used is a natural light or an indoor illumination light, etc. from the front (observation) The incident type is reflected by the reflective film to reflect the light. According to such a configuration, since backlighting is not required, there is an advantage that power consumption can be reduced. Here, when the surface of the reflecting film is mirror-shaped, there is a problem that the image to be recognized by the observer is reflected by the background or the indoor illumination light, and the display image is inconspicuous. Therefore, it is a general practice to roughen the surface of the above-mentioned reflective film to moderately scatter the reflected light. It is known that such a scattering structure is constructed by honing a surface of a substrate such as glass with a honing agent to form a plurality of fine mountains and valleys on the surface of the substrate. Next, the above-mentioned reflective film is formed on the roughened surface. Thereby, the surface of the reflective film is a rough surface reflected by the surface of the glass substrate. Therefore, the reflected light of the reflective film can be appropriately scattered. However, according to the above method, the surface of the glass substrate must be completely roughened. Therefore, there is a problem that a correction mark or a conversion element which should originally be formed on a flat surface is formed on a roughened surface. In addition, in order to obtain good random radiation characteristics, the paper scale is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) on the rough surface. -^1 ϋ ·1 al· ϋ ϋ 一·^ II 1 ·ϋ 1« ϋ II (Please read the note on the back 3 to fill out this page) Secret · 1252353 A7 B7 Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printing 5, invention description (), although I hope the mountain and valley can be irregular It is formed in the ground, but in the method of honing the substrate with a honing agent, the mountains and valleys form regularity in accordance with the particle size of the honing agent or the direction of honing. Therefore, in the above method, it is difficult to obtain good scattering characteristics. Thus, when a scattering structure is to be produced according to a conventional method, various problems arise. [Invention] The present invention has been made in view of the above circumstances, and an object thereof is to provide a substrate for a crystal device which can reduce the influence of roughening of a substrate on a liquid crystal device, a method for producing the same, a liquid crystal device, a method for producing the same, and an electronic device. In order to achieve the above object, the present invention is a substrate for a liquid crystal device which is located on the opposite side of the observation side of the pair of substrates which hold the liquid crystal layer, and is characterized in that the surface of the substrate for liquid crystal device has a flat flat region and is A rough surface region of the mountain portion and the valley portion is formed, and the mountain portion of the rough surface region has a height equal to or lower than a plane including the flat region. According to such a substrate for a liquid crystal device, in addition to the formation of a selective rough surface region and a flat region, in addition to forming a reflective film having good scattering characteristics in the rough surface region, for example, it can be formed into a planar shape. The feature lines are formed on a flat field. Further, when considering the crystal gap of the liquid crystal device, the height difference between the flat region and the rough surface region is preferably 5 or less. Also, in order to obtain good random shooting characteristics, in general, it is best to rough surface - (please read the note on the back - write this page) -I §§ I ϋ -ϋ ·1_— 1 I ϋ ϋ 1 · ϋ % This paper scale applies to China National Standard (CNS) A4 specification (210 X 297 mm) 1252353 Ministry of Economic Affairs Intellectual Property Office Staff Consumer Cooperative Printed A7 B7 V. Invention Description (3) Regional Mountain and Valley Irregularity Ground formation. Specifically, it is preferable that the rough seam surface region is formed as follows: the height of each mountain portion or the depth of the valley portion is different, and the distance between the top end of one mountain portion and the top end of the mountain portion adjacent thereto, It will vary depending on the mountain. When the mountain portion and the valley portion are formed in a regular manner, the dyeing of the reflected light occurs due to the optical path difference of the reflection angle, which causes deterioration in display characteristics. Here, the designated mark may be formed on the flat area described above. For example, a correction mark or a production control mark or the like can be used as the specified mark. When compared with the case where it is formed on a rough surface area, the mark can be surely recognized by the composition of the marks formed on the flat area. Further, as the correction mark, for example, when the substrate for a liquid crystal device is bonded to another substrate, there is a correction mark for matching the relative positions of the two substrates. In the formation of the conversion element or the pixel electrode, etc., when the color filter or the light shielding layer is formed, when the alignment film is applied, when the sealing material is printed, the panel is cut or the liquid crystal device is driven. A correction mark used in actual mounting of the semiconductor integrated circuit is formed on a flat region. On the other hand, as the production control standard E, for example, there are a lot number or a model number, or a mark indicating the processing conditions of various manufacturing processes and the like by symbols. Others, as production control markers, also have various information dataifiers or bar coders, or two-dimensional bar code modelers represented by code definitions. Here, wiring may be formed on the flat region of the present invention. Here, the so-called wiring includes the following commemoration, for example, the active matrix type liquid crystal paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) - -1 ϋ ^ l· κ ϋ ϋ ϋ ϋ ϋ -I ^ ϋ · (Please read the note on the back first. Fill in this page) 1252353 A7 B7 V. INSTRUCTIONS (4) Wiring of the scan line or data line of the device, or TFT (

Thin Film Traansistor)或 TFD (Thin Film Diode)等所代表之轉換元件 ,液晶驅動用之半導體集成電路之端子等。和形成在粗糙 面區域上時比較,在平坦區域上形成有這些配線之組成時 ,有可抑制各要素特性之不均的優點。 加上,在本發明之平坦區域上,亦可形成有密封材。 於密封材中,通常爲保持基板間之間隙,含有具一定直徑 之球狀或球棒狀之襯墊,但若將密封材形成在粗糙面,就 無法正常發揮襯墊的功能。另,平坦區域上亦可形成爲使 以上所示之各要素或者該以外之要素中的複數種類之組成 〇 另,於上述發明中,粗糙面區域之最大高度Ry値, 算數平均粗糙度R a値,十點平均粗糙度R Z値及平均波 長Sm値最好是在指定之範圍內。具體而言,粗面領域之 最大高度Ry値,算數平均粗糙度R a値,十點平均粗糙 度R z値及平均波長S m値之組合,最好是如下。 首先,最好是將最大高度Ry値爲0 . 2〜3 //m,將 算數平均粗糙度R a値爲0 02〜0 . 3 //m,前述十點 平均粗糙度R z値爲〇 . 1〜2 . 5 //m,前述平均波長 Sm値爲4〜6 0 //m。或者,將最大高度Ry値爲1 . 5 〜2.0//m,將算數平均粗糙度Ra値爲0. 1 5〜 〇 . 3 //m,前述十點平均粗糙度Rz値爲1 . 3〜1 . 8 //m,前述平均波長Sm値爲1 5〜2 5 //m也是可行。 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事<^填寫本頁) 訂-------- 經濟部智慧財產局員工消費合作社印製 1252353 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(5) 更進一步,將最大高度Ry値爲0 · 7〜1 . 2 //m, 將算數平均粗糙度Ra値爲〇. 1〜0.2//m,前述十點 平均粗糙度R z値爲〇 · 5〜1 · 0 //m,前述平均波長 Sm値爲3 5〜5 0 也可,或者是將最大高度Ry値 爲0.6〜1.2/zm,將算數平均粗糙度Ra値爲 0.05〜0· 1 ,前述十點平均粗糙度Rz値爲 0.5〜1 .0//m,前述平均波長Sm値爲1 5〜2 5 // m也是可行。 又,將最大高度R y値爲0 . 4〜1 . 0 // m,將算數 平均粗糙度Ra値爲〇.〇4〜0. 1 Ovm,十點平均粗 糙度Rz値爲0.3〜0.8//m,平均波長Sm値爲8〜 1 5 //m也是可行,考慮將最大高度Ry値爲〇 . 8〜 1 · 5 // m,將算數平均粗糙度R a値爲0. 0 5〜 0.15//m,十點平均粗糙度Rz値爲0.7〜1.3 //m,平均波長Sm値爲8〜1 5//m也行。 於此,一般上,於使用S T N (超對絞絲狀)液晶模 式之液晶裝置中,可獲得反差比高良好顯示特性之視野角 ,是限定於比較狹小的角。換言之,廪理上並不需要使反 射光散射至辨識性不良之廣角度區域。因此,於使用 S T N液晶模之液晶裝置中,最好是所使用之反射膜具有 使反射光絞合在比較狹小範圍之反射特性。故,本發明相 關之液晶裝置用基板若使用S T N液晶模之液晶裝置時, 形成於該當基板上之反射膜反射特性,最好是具有上述之 反射特性,而再決定該當基板之表面形狀。具體而言,於 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) " (請先閱讀背面之注意事 · 11 _填寫本頁) -n ϋ 1 l·· ϋ ϋ ·ϋ · ϋ ϋ ϋ ϋ ϋ ·1 ϋ % 1252353 A7 B7 五、發明說明(6) 液晶層之厚度稍有些誤差就能明顯影響顯示品質之S T N 液晶模式中,最好是在將最大高度R y値及十點平均粗糙 度R z値控制成儘量小的同時,使平均波長S m値變小。 藉此,在控制因粗糙面區域之山部和谷部造成之液晶層厚 度的同時,可獲得所期望之散射特性。加上,藉由將算數 平均粗糙度R a値變小,可控制應對於液晶層厚度及面內 之起伏而產生之不勻。 另一方面,於倂用T N (對絞絲狀)液晶模式或 λ/4板而使用TN模、SH (電極面垂直均勻)液晶模 式之液晶裝置中,可獲得反差比高良好顯示特性之視野角 ,是擴及比較廣之角度。因此,於使用這些液晶模之液晶 裝置中,最好是所使用之反射膜具有使反射光絞合在比較 廣範圍之反射特性。具體而言,本發明相關之液晶裝置用 基板中,藉由十點平均粗糙度R ζ値之增大及平均波長 S m値之減少,兩者中至少有一方實現,可使形成在該基 板上之反射膜,具有上述之反射特性。於使用這些液晶模 式之液晶裝置中,和S T N液晶模式比較,因其液晶層厚 度之不勻對顯示特性之影響較少,故鳥好是平均波長値儘 量小。 ’、 此外,爲解決上述課題,本發明相關之液晶裝置之特 徵爲在上述之任一液晶裝置用基板和對面基板之間,夾持 著液晶層所組成。根據上述之液晶裝置,例如藉由形成在 液晶裝置用基板之平坦區域上之校正標記,可使其和上述 對面基板之位置吻合成高精度外,使因應該當液晶裝置所 -9 - (請先閱讀背面之注意事 I - I I 填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS)A4規格(210 χ 297公釐) 1252353 A7 B7 五、發明說明(7) 採用之液晶模式可任意選擇粗糙面區域之形狀,以獲得良 好之顯示特性。另,本發明亦可根據備有上述液晶裝置之 電子機器的形態來實施。 又,爲解決上述課題,本發明相關之液晶裝置之製造 方法之特徵係夾持液晶層之一對基板之中,位於觀察側之 相反側之一方基板液晶層表面的一部份藉由遮罩材覆蓋, 把前述表面之中,藉由前述遮罩材覆蓋的區域以外的區域 ,粗糙面化成具有微細的山部與谷部的粗糙面區域,而成 爲前述山部的頂上部包含藉由前述遮罩材所覆蓋區域之平 面以下高度的粗糙面區域,以該粗糙面區域與另一方基板 相對方向的方式,接合前述一對基板。根據用這樣的製造 方法所得之液晶裝置用基板來實施時,可獲得與上述同樣 之效果。 另,上述之遮罩材可使用光致抗鈾、還氧樹脂等樹脂 系黏著劑或者塗料等。將該等基板密著性高之材料做爲遮 罩材使用時,可明確遮罩材所覆蓋之區域和這以外之區域 的境界。特別是將和液晶裝置之顯示區域相應對之區域做 爲遮罩材之開口部時,藉由平坦區域和粗糙面區域之境界 明確,可使顯示區域和密封材形成區域之間的空間變窄, 且可顯示區域占液晶裝置之全面的比率變大。此外,尙有 上述所提之光致抗蝕、樹脂系黏著劑、塗料等,可用鹼性 溶液或有機溶煤等容易除去之優點。 另,將上述材料做爲遮罩材使用時,最好是利用苯胺 版、網眼板之印刷版將上述遮罩材印刷在基板上。如此, 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) (請先閱讀背面之注意事3填寫本頁) 寫太 ϋ 1_1 i·— 1 mmml· emmm amm— 一01, I 1_1 ·_ emme 經濟部智慧財產局員工消費合作社印製 1252353 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(8) 可使遮罩材形成爲精度良好在所期望之區域上。另’除此 之外,亦可使用分配器、墨汁噴嘴等之直接描繪裝置來使 遮罩材形成。如此,沒有必要因液晶裝置之模型分別不同 而製作印刷版,故可使製造成本降低。又’因可容易進行 任意形狀之描繪,故於形成特殊形狀之平坦領域時,是特 別適當的方法。 此外,遮罩材之材料,並不限於如上述之樹脂材料等 。例如,使用依指定形狀所裁剪之熔黏性薄膜或者附加黏 著劑之薄膜,藉由該等薄膜的轉印黏貼,來做爲上述遮罩 材也可行。如此,藉由使用複合薄膜等之非常廉價之材料 ,且容易之步驟可形成遮罩材。 另,於上述製造方法中,最好是將前述一方基板包含 具有網狀形狀的第1組成物,及存在於該第1組成物網間 之第2組成物,在進行前述粗糙面化時,使用前述第1組 成物與第2組成物溶出速度相異的處理液,對前述一方基 板施以蝕刻,藉此在藉由前述遮罩材覆蓋區域以外的區域 形成因應前述第1組成物形狀之前述山部及谷部。如此, 在藉由前述遮罩材覆蓋區域以外的區域進行粗糙面化時, 可不需備有真空系之裝置或曝光裝置等高價裝置就可形成 粗糙面化區域。另,做爲上述處理液,例如可使用硝酸、 硫酸、鹽酸、過氧化氫、氫二氟化氨、氟化氛、硝酸氨、 硫酸氨、鹽酸氨等之中任一處理液或者可將複合處理液, 因應做爲處理對象之液晶裝置用基板的原料,以適宜指定 之比例來組合使用。做爲液晶裝置用基板,例如可使用蘇 (請先閱讀背面之注意事 —___ 填寫本頁) > I ϋ ϋ el· i i_i -ϋ ϋ ϋ ϋ 1 ^1 ^1 1· 禮· 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 1252353 A7 B7 五、發明說明(9) 打石灰玻璃、硼矽酸玻璃、鋇矽酸玻璃、鋇鋁矽酸玻璃、 鋁矽酸玻璃等。一般,於僅以氫氟酸(氟化氫氧)水溶液 處理液晶裝置用基板時,因該當基板之全面被均勻蝕刻, 故無法形成粗糙面區域。然而,藉由適當添.加可選擇性溶 出含在液晶裝置用基板中之組成成份的輔助藥品,可形成 具有多數細微之山部和谷部之粗糙面區域。另,混合於處 理液之輔助藥品,並不限於上述者。又,各處理液之種類 或混合比例等,最好是因應做爲處理對象之液晶裝置用基 板之材質進行適當的選定。 於此,在上述製造方法中進行粗糙面化時,藉由前述 一方基板的表面,隔著前述遮罩材使粒狀構件與之衝突, 而在藉由該遮罩材所覆蓋區域的區域形成前述山部和谷部 。即,對一方基板之表面施以所謂的噴砂處理。於此,做 爲遮罩材,例如可使用不銹鋼等金屬板設有開口部者。如 此之遮罩材因於一般上是廉價,且耐久性高,有大幅度降 低製造成本之優點。加上,因遮罩材於噴砂處理後可容易 拆卸,故不需要爲除去遮罩材之另項步驟。 另,於上述之各製造方法中,最好是在前述粗面化後 除去前述遮罩材,對藉由該遮覃材所覆蓋的區域以及前述 粗面區域施以飩刻。藉由如此之鈾刻,可將粗糙面區域之 形狀調整爲所期望之形狀。於此,在遮罩材除去前施以如 此之蝕刻時,會有擴大粗糙面區域和平坦區域之間高低差 的問題產生。其結果,當上述之高低差變得比液晶裝置之 晶隙還大時,就無法將該液晶裝置用基板使用在液晶裝置 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事 裝---- 寫本頁)A conversion element represented by Thin Film Traansistor) or TFD (Thin Film Diode), and a terminal of a semiconductor integrated circuit for liquid crystal driving. When the composition of these wirings is formed on the flat region as compared with the case where it is formed on the rough surface region, there is an advantage that variation in characteristics of the respective elements can be suppressed. Further, a sealing material may be formed on the flat region of the present invention. In the sealing material, generally, a gap between the substrates is maintained, and a spherical or bat-shaped spacer having a certain diameter is contained. However, if the sealing material is formed on a rough surface, the function of the spacer cannot be performed normally. Further, the flat region may be formed such that each of the above-described elements or a plurality of types of the other elements is different. In the above invention, the maximum height Ry of the rough surface region, the arithmetic mean roughness R a Preferably, the ten point average roughness RZ 値 and the average wavelength Sm 値 are preferably within a specified range. Specifically, the combination of the maximum height Ry 粗 of the rough surface area, the arithmetic mean roughness R a 値 , the ten point average roughness R z 値 and the average wavelength S m , is preferably as follows. First, it is preferable to set the maximum height Ry to 0. 2~3 //m, and the arithmetic mean roughness R a 値 is 0 02~0 . 3 //m, the ten-point average roughness R z値 is 〇 1~2 . 5 //m, the aforementioned average wavelength Sm値 is 4~6 0 //m. Or, the maximum height Ry 値 is 1.5 to 2.0 / / m, the arithmetic average roughness Ra 値 is 0. 1 5~ 〇. 3 / m, the aforementioned ten point average roughness Rz 値 is 1. 3~ 1. 8 //m, the aforementioned average wavelength Sm 値 is 1 5~2 5 //m is also feasible. This paper scale applies to China National Standard (CNS) A4 specification (210 X 297 mm) (please read the note on the back first) <^fill this page) Order -------- Ministry of Economic Affairs Intellectual Property Bureau staff consumption Cooperative printing 1252353 A7 B7 Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printing 5, invention description (5) Further, the maximum height Ry 値 is 0 · 7~1. 2 //m, the arithmetic average roughness Ra値〇. 1~0.2//m, the ten-point average roughness R z値 is 〇·5~1 · 0 //m, and the average wavelength Sm値 is 3 5~5 0, or the maximum height is Ry値 is 0.6 to 1.2/zm, the arithmetic mean roughness Ra値 is 0.05 to 0.1, the ten-point average roughness Rz値 is 0.5 to 1.0/m, and the average wavelength Sm値 is 1 5~ 2 5 // m is also possible. Further, the maximum height R y 値 is 0. 4~1 . 0 // m, the arithmetic average roughness Ra 値 is 〇. 〇 4~0. 1 Ovm, the ten-point average roughness Rz 値 is 0.3 to 0.8 / / 5, the average wavelength Sm 値 is 8 ~ 1 5 / / m is also feasible, consider the maximum height Ry 値 8. 8~ 1 · 5 / m, the arithmetic mean roughness R a 値 is 0. 0 5~ 0.15 / / m, ten point average roughness Rz 値 is 0.7 ~ 1.3 / m, the average wavelength Sm 値 is 8 ~ 1 5 / / m also. Here, in general, in a liquid crystal device using the S T N (super-twisted filament) liquid crystal mode, a viewing angle at which the contrast ratio is high and good display characteristics can be obtained, and is limited to a relatively narrow angle. In other words, it is not necessary to scatter the reflected light to a wide angle region with poor visibility. Therefore, in the liquid crystal device using the S T N liquid crystal mode, it is preferable that the reflective film used has a reflection characteristic in which the reflected light is twisted in a relatively narrow range. Therefore, when a liquid crystal device of a liquid crystal device according to the present invention is used as a liquid crystal device of a S T N liquid crystal mode, it is preferable that the reflection property of the reflective film formed on the substrate has the above-described reflection characteristics, and the surface shape of the substrate is determined. Specifically, the Chinese National Standard (CNS) A4 specification (210 X 297 mm) is applied to this paper scale. (Please read the notes on the back first. 11 _Fill this page) -n ϋ 1 l·· ϋ ϋ ·ϋ · ϋ ϋ ϋ ϋ ϋ ·1 ϋ % 1252353 A7 B7 V. Description of invention (6) In the STN liquid crystal mode where the thickness of the liquid crystal layer is slightly inaccurate, the maximum height R y is preferably The tenth point average roughness R z 値 is controlled to be as small as possible while making the average wavelength S m 値 small. Thereby, the desired scattering characteristics can be obtained while controlling the thickness of the liquid crystal layer due to the mountain portions and the valley portions of the rough surface region. In addition, by reducing the arithmetic mean roughness R a , , it is possible to control the unevenness which should be caused by the thickness of the liquid crystal layer and the in-plane undulation. On the other hand, in a liquid crystal device using a TN mode or a SH (electrode surface vertical uniform) liquid crystal mode using a TN (twisted filament) liquid crystal mode or a λ/4 plate, a contrast with high contrast characteristics and high display characteristics can be obtained. The angle is a wide angle. Therefore, in the liquid crystal device using these liquid crystal modes, it is preferable that the reflective film used has a reflection characteristic in which the reflected light is twisted over a relatively wide range. Specifically, in the substrate for a liquid crystal device according to the present invention, at least one of the increase in the ten-point average roughness R 及 and the decrease in the average wavelength S m値 can be performed on the substrate. The upper reflective film has the above-described reflective properties. In the liquid crystal device using these liquid crystal modes, compared with the S T N liquid crystal mode, since the unevenness of the thickness of the liquid crystal layer has less influence on the display characteristics, the average wavelength of the bird is small. In order to solve the above problems, the liquid crystal device according to the present invention is characterized in that a liquid crystal layer is sandwiched between the substrate for liquid crystal device and the opposite substrate. According to the liquid crystal device described above, for example, by the correction mark formed on the flat region of the substrate for the liquid crystal device, the position of the liquid crystal device can be matched with the position of the opposite substrate to be highly accurate, so that the liquid crystal device should be used. Read the note on the back I - II Fill in this page) Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed This paper scale applies China National Standard (CNS) A4 specification (210 297 297 mm) 1252353 A7 B7 V. Invention Description (7 The liquid crystal mode can be used to arbitrarily select the shape of the rough surface area to obtain good display characteristics. Further, the present invention can also be implemented in accordance with the form of an electronic apparatus including the above liquid crystal device. Further, in order to solve the above problems, a method of manufacturing a liquid crystal device according to the present invention is characterized in that a portion of a surface of a liquid crystal layer of a substrate on the opposite side of the observation side is sandwiched by one of the liquid crystal layers. Covering the material, a region other than the region covered by the masking material is roughened into a rough surface region having fine mountain portions and valley portions, and the top portion of the mountain portion is included by the foregoing The rough surface area having a height below the plane of the area covered by the mask material is joined to the pair of substrates so that the rough surface area faces the other substrate. According to the substrate for a liquid crystal device obtained by such a production method, the same effects as described above can be obtained. Further, as the above-mentioned masking material, a resin-based adhesive such as photo-resistant uranium or a resorptive resin, a paint, or the like can be used. When the material having high adhesion to the substrate is used as a cover material, the boundary between the area covered by the cover material and the area other than the cover material can be clarified. In particular, when the region corresponding to the display region of the liquid crystal device is used as the opening portion of the masking material, the space between the flat region and the rough surface region is made clear, and the space between the display region and the sealing material forming region can be narrowed. And the display area accounts for the overall ratio of the liquid crystal device becomes large. Further, the above-mentioned photoresist, resin-based adhesive, paint, and the like can be easily removed by an alkaline solution or organic dissolved coal. Further, when the above material is used as a masking material, it is preferable to print the above-mentioned masking material on a substrate by using a printing plate of an aniline plate or a mesh plate. Thus, the paper size applies to the Chinese National Standard (CNS) A4 specification (210 x 297 mm) (please read the note on the back 3 to fill out this page) Write Taiyi 1_1 i·—1 mmml· emmm amm—一01, I 1_1 ·_ emme Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed 1252353 A7 B7 Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed 5, Invention Description (8) The mask material can be formed with high precision in the desired area . Alternatively, a masking material such as a dispenser or an ink nozzle may be used to form the mask material. Thus, it is not necessary to produce a printing plate because the models of the liquid crystal device are different, so that the manufacturing cost can be reduced. Further, since it is easy to draw an arbitrary shape, it is a particularly suitable method when forming a flat field of a special shape. Further, the material of the masking material is not limited to the above-mentioned resin material or the like. For example, it is also possible to use the film of a fusible film or an additional adhesive cut according to a predetermined shape as the above-mentioned mask by transfer-adhesive of the films. Thus, the mask material can be formed by using a very inexpensive material such as a composite film and an easy step. Further, in the above manufacturing method, it is preferable that the one substrate includes a first composition having a mesh shape and a second composition existing between the first composition nets, and when the roughening is performed, By using the treatment liquid having the difference in the dissolution rate of the first composition and the second composition, the one of the substrates is etched, and the shape of the first composition is formed in a region other than the area covered by the mask. The aforementioned mountain and valley. As described above, when roughening is performed in a region other than the above-mentioned mask covering region, it is possible to form a roughened region without requiring a vacuum-based device or an expensive device such as an exposure device. Further, as the treatment liquid, for example, any treatment liquid such as nitric acid, sulfuric acid, hydrochloric acid, hydrogen peroxide, hydrogen fluoride difluoride, fluorination atmosphere, ammonia nitrate, ammonium sulfate, hydrochloric acid ammonia or the like may be used or may be compounded. The treatment liquid is used in combination at a ratio specified to be suitable as a raw material of the substrate for a liquid crystal device to be treated. As a substrate for a liquid crystal device, for example, you can use Su (please read the note on the back -___ fill this page) > I ϋ ϋ el· i i_i -ϋ ϋ ϋ ϋ 1 ^1 ^1 1· Gift · Paper The scale applies to China National Standard (CNS) A4 specification (210 X 297 mm) 1252353 A7 B7 V. Description of invention (9) Lime glass, borosilicate glass, phthalic acid glass, yttrium aluminum silicate glass, aluminum citrate Glass, etc. In general, when the substrate for a liquid crystal device is treated only with an aqueous solution of hydrofluoric acid (hydrogen fluoride), the entire surface of the substrate is uniformly etched, so that a rough surface region cannot be formed. However, by appropriately adding an auxiliary medicine which can selectively dissolve the constituents contained in the substrate for a liquid crystal device, a rough surface region having a plurality of fine mountain portions and valley portions can be formed. Further, the auxiliary medicine mixed in the treatment liquid is not limited to the above. In addition, it is preferable that the type of the treatment liquid, the mixing ratio, and the like are appropriately selected in accordance with the material of the substrate for the liquid crystal device to be treated. Here, when roughening is performed in the above-described manufacturing method, the granular member is caused to collide with the surface of the one substrate via the mask member, and is formed in a region covered by the mask member. The aforementioned mountain and valley. That is, a so-called sand blasting treatment is applied to the surface of one of the substrates. Here, as the masking material, for example, a metal plate such as stainless steel may be used as the opening. Such a masking material is generally inexpensive and has high durability, and has the advantage of greatly reducing the manufacturing cost. In addition, since the mask material can be easily removed after blasting, no additional steps are required for removing the mask material. Further, in each of the above-described manufacturing methods, it is preferable that the masking material is removed after the roughening, and the region covered by the concealing material and the rough surface region are etched. By such uranium engraving, the shape of the rough surface area can be adjusted to the desired shape. Here, when etching such as before the mask material is removed, there is a problem that the height difference between the rough surface area and the flat area is enlarged. As a result, when the above-described height difference becomes larger than the crystal gap of the liquid crystal device, the liquid crystal device substrate cannot be used in the liquid crystal device. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). (Please read the note on the back first----write this page)

al· in ϋ 一σν,I ϋ I ϋ ϋ I ·1 I 經濟部智慧財產局員工消費合作社印製 1252353 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(10) 上。針對此事,藉由在遮罩材除去後,對粗糙面區域和平 坦區域雙方施以均勻蝕刻,有可抑制雙方高低差擴大之優 點。 又,本發明係位於挾持液晶層的一對基板之中,位於 觀察側之相反側的液晶裝置用基板之製造方法,其特徵爲 :藉由遮罩材覆蓋前述液晶層側表面的一部份,把該當表 面之中,藉由前述遮罩材覆蓋的區域以外的區域,粗化成 具有細微的山部及谷部的粗糙面區域,而成爲前述山部的 頂上部包含藉由前述遮罩材覆蓋的區域平面以下高度之粗 糙面區域。根據該製造方法亦可獲得和上述液晶裝置之製 造方法同樣之效果。 此外,於該液晶裝置用基板之製造方法中,亦可將該 當液晶裝置用基板,包含具有網狀形狀的第1組成物,及 存在於該第1組成物網間之第2組成物,在進行前述粗糙 面化時,使用前述第1組成物與第2組成物溶出速度相異 的處理液,對前述一方基板施以蝕刻,藉此在藉由前述遮 罩材覆蓋區域以外的區域形成因應前述第1組成物形狀之 前述山部及谷部。此外,在進行前述組糙面化時,亦可藉 由對前述液晶裝置用基板的表面,中介著前述遮罩材使粒 狀構件與之衝突,而在藉由該遮罩材所覆蓋區域的區域形 成前述山部和谷部。 於此,在上述液晶裝置用基板之製造方法中,最好是 在前述粗糙面化後除去前述遮罩材,對藉由該遮罩材所覆 蓋的區域以及前述粗糙面區域施以蝕刻。 (請先閱讀背面之注意事 填? 寫本頁) 訂--------- 禮 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 1252353 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(11) 〔圖式之簡單說明〕 第1 A圖爲表示於本發明第1實施形態相關之液晶顯 示裝置製造步驟中,玻璃基板上光致抗蝕所形成之樣子平 面圖。 第1 B圖爲第1 A圖中A — A ’線剖視圖。 第1 C圖爲表示於本發明第1實施形態相關之液晶顯 示裝置製造步驟中,玻璃基板表面所粗糙面化之樣子剖視 圖。 第1 D圖爲表示於本發明第1實施形態相關之液晶顯 示裝置製造步驟中,玻璃基板上光致抗蝕除去後之樣子剖 視圖。 第1 E圖爲表示於本發明第1實施形態相關之液晶顯 示裝置製造步驟中,玻璃基板上金屬膜所形成樣子之剖視 圖。 第1 F圖爲表示於本發明第1實施形態相關之液晶顯 示裝置製造步驟中,玻璃基板上反射膜及校正標記所形成 樣子之剖視圖。 第2圖爲形成在玻璃基板上平坦區域之校正標記以光 學顯微鏡所攝影之照片。 ’、 第3 A圖爲表示於本發明第2實施形態相關之液晶顯 示裝置製造步驟中,玻璃基板上光致抗蝕所形成之樣子平 面圖。 第3 B圖爲第3 A圖中B — B ’線剖視圖。 第3 C圖爲表示於本發明第2實施形態相關之液晶顯 <請先閱讀背面之注意事 I - I I 寫本頁)Al· in ϋ σν, I ϋ I ϋ ϋ I ·1 I Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printing 1252353 A7 B7 Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printing 5, invention description (10). In response to this, by removing the mask material and applying uniform etching to both the rough surface region and the flat region, it is possible to suppress the difference in height difference between the two. Further, the present invention is a method for manufacturing a substrate for a liquid crystal device which is located on a side opposite to the observation side of a pair of substrates which hold the liquid crystal layer, and is characterized in that a part of the side surface of the liquid crystal layer is covered by the mask material And a region other than the region covered by the mask material is roughened into a rough surface region having a fine mountain portion and a valley portion, and the top portion of the mountain portion includes the mask material The rough surface area of the height below the area of the covered area. According to this manufacturing method, the same effects as those of the above-described liquid crystal device manufacturing method can be obtained. Further, in the method for producing a substrate for a liquid crystal device, the substrate for a liquid crystal device may include a first composition having a mesh shape and a second composition existing between the first composition nets. When the roughening is performed, the processing liquid having a different elution speed from the first composition and the second composition is used to etch the one of the substrates, thereby forming an area in a region other than the covering area of the mask. The mountain portion and the valley portion of the shape of the first composition. Further, when the roughening of the group is performed, the granular member may be interposed by interposing the mask on the surface of the substrate for liquid crystal device, and the region covered by the mask may be The area forms the aforementioned hills and valleys. In the method for manufacturing a substrate for a liquid crystal device, it is preferable that the mask member is removed after the roughening, and the region covered by the mask member and the rough surface region are etched. (Please read the note on the back first? Write this page) Order --------- The paper size of the book applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 1252353 A7 B7 Ministry of Economics Printed by the Bureau of the Employees of the Property Bureau. V. Illustrated (11) [Simplified description of the drawings] Fig. 1A is a view showing the photoresist on the glass substrate in the manufacturing process of the liquid crystal display device according to the first embodiment of the present invention. The resulting plan view. Fig. 1B is a cross-sectional view taken along line A - A' in Fig. 1A. Fig. 1C is a cross-sectional view showing the surface of the glass substrate roughened in the manufacturing process of the liquid crystal display device according to the first embodiment of the present invention. Fig. 1D is a cross-sectional view showing the state in which the glass substrate is removed by photoresist in the manufacturing process of the liquid crystal display device according to the first embodiment of the present invention. Fig. 1E is a cross-sectional view showing a state in which a metal film is formed on a glass substrate in the manufacturing process of the liquid crystal display device according to the first embodiment of the present invention. Fig. 1F is a cross-sectional view showing a state in which a reflective film and a correction mark are formed on a glass substrate in the manufacturing process of the liquid crystal display device according to the first embodiment of the present invention. Fig. 2 is a photograph of a correction mark formed on a flat region on a glass substrate photographed by an optical microscope. Fig. 3A is a plan view showing a state in which a photoresist is formed on a glass substrate in the manufacturing process of the liquid crystal display device according to the second embodiment of the present invention. Fig. 3B is a cross-sectional view taken along line B - B' in Fig. 3A. Fig. 3C is a view showing the liquid crystal display according to the second embodiment of the present invention. [Please read the back of the first thing I - I I write this page)

--H ϋ ϋ Ml· ϋ 1 β I ϋ I 1 ϋ I 着· 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 1252353 A7 B7 五、發明說明(12) 示裝置製造步驟中’玻璃基板表面所粗糙面化之樣子剖視 圖。 第3 D圖爲表示於本發明第2實施形態相關之液晶顯 示裝置製造步驟中’玻璃基板上光致抗蝕除去後之樣子剖 視圖。 第3 E圖爲表示於本發明第2實施形態相關之液晶顯 示裝置製造步驟中’玻璃基板上金屬膜所形成樣子之剖視 圖。 第3 F圖爲表示於本發明第2實施形態相關之液晶顯 示裝置製造步驟中’玻璃基板上反射膜及校正標記所形成 樣子之剖視圖。 第4 A圖爲表示於本發明第3實施形態相關之液晶顯 示裝置製造步驟中’玻璃基板上光致抗蝕所形成之樣子平 面圖。 第4 B圖爲第4 A圖中C — C ’線剖視圖。 第4 C圖爲表示於本發明第3實施形態相關之液晶顯 示裝置製造步驟中’玻璃基板表面所粗糙面化之樣子剖視 圖。 ’ 第4 D圖爲表示於本發明第3實施形態相關之液晶顯 示裝置製造步驟中,玻璃基板上光致抗蝕除去後之樣子剖 視圖。 第4 E圖爲表示於本發明第3實施形態相關之液晶顯 示裝置製造步驟中,玻璃基板上金屬膜所形成樣子之剖視 圖。 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事 --- 寫本頁) 訂--------- 經濟部智慧財產局員工消費合作社印製 1252353 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(13) 第4 F圖爲表示於本發明第3實施形態相關之液晶顯 示裝置製造步驟中,玻璃基板上反射膜及校正標記所形成 樣子之剖視圖。 第5 A圖爲表示玻璃基板之組成模式剖視圖。 第5 B圖爲表示於本發明相關液晶裝置用基板之第1 製造方法中,遮罩材所形成之樣子剖視圖。 第5 C圖爲表示於上述之第1製造方法中,玻璃基板 施以第1餓刻之樣子剖視圖。 第5 D圖爲表示於上述之第1製造方法中,玻璃基板 上遮罩材除去後之樣子剖視圖。 第5 E圖爲表示於上述之第1製造方法中,玻璃基板 施以第2蝕刻之樣子剖視圖。 第6 A圖爲於上述之第1製造方法中經第1蝕刻後之 玻璃基板表面以光學顯微鏡所攝影之照片。 第6 B圖爲於上述之第1製造方法中經第2蝕刻後之 玻璃基板表面以光學顯微鏡所攝影之照片。 第7圖爲藉由上述之第1製造方法所形成粗面區域及 平坦區域之樣子以光學顯微鏡所攝影乏照片。 第8圖爲表示藉由上述之第1製造方法所形成粗面區 域及平坦區域之高度測定結果圖表。 第9 A圖爲表示玻璃基板之組成模式剖視圖。 第9 B圖爲表示於本發明相關液晶裝置用基板之第2 製造方法中,遮罩材所形成之樣子剖視圖。 第9 C圖爲表示於上述之第2製造方法中蝕刻過程之 (請先閱讀背面之注意事 I l_iv i I 寫本頁)--H ϋ ϋ Ml· ϋ 1 β I ϋ I 1 ϋ I 着 · This paper scale applies to China National Standard (CNS) A4 specification (210 X 297 mm) 1252353 A7 B7 V. Invention description (12) Device manufacturing In the step, a cross-sectional view of the surface of the glass substrate is roughened. Fig. 3D is a cross-sectional view showing the state after the photoresist removal on the glass substrate in the manufacturing process of the liquid crystal display device according to the second embodiment of the present invention. Fig. 3E is a cross-sectional view showing how the metal film on the glass substrate is formed in the manufacturing process of the liquid crystal display device according to the second embodiment of the present invention. Fig. 3F is a cross-sectional view showing the state in which the reflective film on the glass substrate and the correction mark are formed in the manufacturing process of the liquid crystal display device according to the second embodiment of the present invention. Fig. 4A is a plan view showing a state in which photoresist is formed on a glass substrate in the manufacturing process of the liquid crystal display device according to the third embodiment of the present invention. Figure 4B is a cross-sectional view taken along line C - C ' in Figure 4A. Fig. 4C is a cross-sectional view showing the surface of the glass substrate roughened in the manufacturing process of the liquid crystal display device according to the third embodiment of the present invention. Fig. 4D is a cross-sectional view showing the state in which the glass substrate is removed by photoresist in the manufacturing process of the liquid crystal display device according to the third embodiment of the present invention. Fig. 4E is a cross-sectional view showing a state in which a metal film is formed on a glass substrate in the manufacturing process of the liquid crystal display device according to the third embodiment of the present invention. This paper scale applies to China National Standard (CNS) A4 specification (210 X 297 mm) (please read the note on the back---write this page) Order--------- Ministry of Economic Affairs Intellectual Property Office staff Consumer Cooperatives Printed 1252353 A7 B7 Ministry of Economic Affairs Intellectual Property Office Employees Consumer Cooperatives Printed V. Illustrated (13) Figure 4F shows the reflection on the glass substrate in the manufacturing process of the liquid crystal display device according to the third embodiment of the present invention. A cross-sectional view of the film and the calibration mark. Fig. 5A is a cross-sectional view showing the composition of the glass substrate. Fig. 5B is a cross-sectional view showing a state in which a mask material is formed in the first manufacturing method of the substrate for a liquid crystal device according to the present invention. Fig. 5C is a cross-sectional view showing the glass substrate in a first hungry manner in the first manufacturing method described above. Fig. 5D is a cross-sectional view showing the state in which the mask material on the glass substrate is removed in the first manufacturing method described above. Fig. 5E is a cross-sectional view showing a state in which the glass substrate is subjected to the second etching in the first manufacturing method described above. Fig. 6A is a photograph of the surface of the glass substrate after the first etching in the first manufacturing method described above, which was photographed by an optical microscope. Fig. 6B is a photograph taken by an optical microscope on the surface of the glass substrate after the second etching in the first manufacturing method described above. Fig. 7 is a photograph of a lack of photographs taken by an optical microscope in the form of a rough surface region and a flat region formed by the above-described first manufacturing method. Fig. 8 is a graph showing the results of height measurement of the rough surface region and the flat region formed by the first manufacturing method described above. Fig. 9A is a cross-sectional view showing the composition of the glass substrate. Fig. 9B is a cross-sectional view showing the state in which the mask material is formed in the second manufacturing method of the substrate for a liquid crystal device according to the present invention. Figure 9C shows the etching process in the second manufacturing method described above (please read the notes on the back first. I l_iv i I Write this page)

-ϋ n ϋ IK ϋ If )αιν · in ϋ I I ϋ ϋ an I «r· 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 1252353 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(14) 樣子剖視圖。 第9 D圖爲表示於上述之第2製造方法中鈾刻結束後 之樣子剖視圖。 第9 E圖爲表示於上述之第2製造方法中,玻璃基板 上遮罩材除去後之樣子剖視圖。 第1 Ο A圖爲表示於本發明相關液晶裝置用基板之第 3製造方法中,玻璃基板上配置不銹鋼之樣子平面圖。 第10B圖爲第10A圖中D — D’線剖視圖。 第1 0 C圖爲表示於上述之第3製造方法中,對玻璃 基板表面噴塗有硏磨粉之樣子剖視圖。 第1 0D圖爲表示於上述之第3製造方法中,玻璃基 板上形成有粗面區域及平坦區域之樣子剖視圖。 第1 Ο E圖爲表示於上述之第3製造方法中,玻璃基 板上形成有金屬膜之樣子剖視圖。 第1 0 F圖爲表示於上述之第3製造方法中,玻璃基 板上形成有反射膜及校正標記之樣子剖視圖。 第1 1圖爲表示習知液晶裝置用基板粗糙面之擴大剖 視圖。 第1 2圖爲表示測定本發明相關液晶裝置用基板反射 特性之測定裝置組成範例圖。 第1 3圖爲表示本發明相關液晶裝置用基板反射特性 之圖表。 第14圖爲表示使用本發明相關液晶裝置用基板之液 晶裝置組成範例剖視圖。 (請先閱讀背面之注意事'^:填寫本頁) 裝 激填寫夫-ϋ n ϋ IK ϋ If )αιν · in ϋ II ϋ ϋ an I «r· This paper scale applies to China National Standard (CNS) A4 specification (210 X 297 mm) 1252353 A7 B7 Ministry of Economic Affairs Intellectual Property Office Staff Consumer Cooperative Printed five, invention description (14) look at the cross-sectional view. Fig. 9D is a cross-sectional view showing the state after the uranium engraving in the second manufacturing method described above. Fig. 9E is a cross-sectional view showing the state in which the mask material on the glass substrate is removed in the second manufacturing method described above. Fig. 1A is a plan view showing a state in which stainless steel is placed on a glass substrate in the third manufacturing method of the substrate for a liquid crystal device according to the present invention. Fig. 10B is a cross-sectional view taken along the line D - D' in Fig. 10A. Fig. 10C is a cross-sectional view showing a state in which the surface of the glass substrate is sprayed with the honing powder in the third manufacturing method described above. Fig. 10D is a cross-sectional view showing a rough surface region and a flat region formed on the glass substrate in the third manufacturing method described above. Fig. 1E is a cross-sectional view showing a state in which a metal film is formed on a glass substrate in the third manufacturing method described above. Fig. 10F is a cross-sectional view showing a state in which a reflective film and a correction mark are formed on a glass substrate in the above-described third manufacturing method. Fig. 1 is an enlarged cross-sectional view showing a rough surface of a substrate for a conventional liquid crystal device. Fig. 1 is a view showing an example of a configuration of a measuring device for measuring the reflection characteristics of the substrate for a liquid crystal device according to the present invention. Fig. 1 is a graph showing the reflection characteristics of the substrate for a liquid crystal device according to the present invention. Fig. 14 is a cross-sectional view showing the configuration of a liquid crystal device using a substrate for a liquid crystal device according to the present invention. (Please read the note on the back first) ^^: Fill in this page)

-I ·ϋ ϋ ai-1 ϋ emmm 一· ϋ 1 ϋ eamm I ·ϋ 1« I 譫 本紙張尺度適用中國國家標準(CNS)A4規格(210 χ 297公釐) 1252353 A7 B7 五、發明說明(15) 第1 5圖爲表示使用本發明相關液晶裝置用基板之液 晶裝置之其他組成範例剖視圖。 第1 6 A圖爲表示使用本發明相關液晶裝置之筆記型 電腦範例透視圖。 第1 6 B圖爲表示使用本發明相關液晶裝置之行動電 話範例透視圖。 第1 6 C圖爲表示使用本發明相關液晶裝置之手錶範 例透視圖。 主要元件對照表 (請先閱讀背面之注意事填寫本頁) 寫太 經濟部智慧財產局員工消費合作社印製 1 玻璃基板 13a 光致抗蝕 14 平坦區域 11 粗糙面區域 12a 金屬膜 15 校正標記 12 反射膜 13b 複合薄膜 2 網眼狀構造 3 網眼修飾體 13 遮罩材 10 網絡構造 11a 谷部 17 不銹鋼 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐)-I ·ϋ ϋ ai-1 ϋ emmm 一· ϋ 1 ϋ eamm I ·ϋ 1« I 谵 This paper scale applies to China National Standard (CNS) A4 specification (210 297 297 mm) 1252353 A7 B7 V. Description of invention ( 15) Fig. 15 is a cross-sectional view showing another example of a configuration of a liquid crystal device using a substrate for a liquid crystal device according to the present invention. Fig. 16A is a perspective view showing an example of a notebook computer using the liquid crystal device of the present invention. Fig. 16B is a perspective view showing an example of a mobile phone using the liquid crystal device of the present invention. Fig. 6C is a perspective view showing a wristwatch example using the liquid crystal device of the present invention. Main component comparison table (please read the note on the back of the page) Write the Ministry of Economic Affairs Intellectual Property Office Staff Consumer Cooperative Print 1 Glass substrate 13a Photoresist 14 Flat area 11 Rough surface area 12a Metal film 15 Correction mark 12 Reflective film 13b Composite film 2 Mesh structure 3 Mesh modification 13 Mask material 10 Network structure 11a Valley 17 Stainless steel This paper scale applies to China National Standard (CNS) A4 specification (210 X 297 mm)

-ϋ ϋ h l· I ·1-^°4· ϋ n I ϋ ϋ ^ ϋ I 1252353 A7 B7 五、發明說明(16) 經濟部智慧財產局員工消費合作社印製 18 硏磨粉 6 光倍計 8 液晶層 19〜 23 反射特性 101 遮光層 102 著色層 103 保護層 104 緊密性提昇層 105 透明電極 106 定向膜 107 移相(介質)板 108 偏振光板 100 前面基板 200 背面基板 201 粗糙面區域 202 平坦區域 203 反射電極 204 定向膜 300 密封材 400 液晶 205 反射膜 206 著色層 207 遮光層 205a > 開口部 (請先閱讀背面之注意‘ 裝—— 事寫本頁) -·1 n el· ϋ ϋ I 打04· ·.1 ϋ 1 ϋ I I ϋ .祕· 本紙張尺度適用中國國家標準(CNS)A4規格(210 χ 297公釐) -19- 1252353 A7 B7 五、發明說明(17) 208 保護層 209 緊密性提昇層 210 透明電極 211 移相(介質)板 212 偏振光板 500 背照光 501 螢光管 502 導光板 121 液晶裝置 122 手提電腦 123 輸入部 124 液晶裝置 125 行動電話 126 液晶裝置 127 手錶 ^1 1 ϋ al· ϋ ammmm ϋ-^-reJ ϋ ϋ ϋ ϋ I 1 ϋ I (請先閱讀背面之注意事^^填寫本頁) 經濟部智慧財產局員工消費合作社印製 〔發明實施之最佳形態〕 以下爲參考圖面對本發明之實施形態之說明。 、 A:液晶裝置用基板 於本發明之液晶裝置用基板中,在與液晶層相對方向 之表面側形成有粗糙面區域和平坦區域。於此,所謂粗縫 面區域,係指表面上具有多數細微之突起和凹陷的區域。 另,粗糙面區域之各細微突起以下稱爲山部,粗糙面區域 本纸張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 1252353 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(18) 之各細微凹陷以下稱爲谷部。另一方面,所謂平坦區域, 係指表面平坦之區域。雖於後會詳述之,但於本發明相關 液晶裝置用基板,一方表面之中,在平坦區域形成有校正 標記或轉換元件等。於以下中,首先,將爲要形成這些要 素之平坦區域形狀和其製造方法之槪要同時以範例示之。 另,於以下中,假想由1片玻璃基板所多面取成4片液晶 裝置用基板之狀況。 A — 1 :第1實施形態 於最初,參考第1 A圖〜第1 F圖,對本發明第1實 施形態相關之液晶裝置用基板的製造方法進行說明。另, 於以下所示之各圖中,爲使各層或各構件之大小於圖面上 爲可辨識程度,分別對各層或各構件採用不同比例大小。 首先,準備玻璃基板1。於該玻璃基板1之中,在應 相對於液晶方向之表面上,形成有做爲遮罩材之光致抗蝕 13a。具體而言,於本實施形態中,如第1A圖及第 1 B圖所示,玻璃基板1表面之中,形成著以覆蓋形狀將 液晶裝置之顯示區域所相當之區域以外之區域進行覆蓋之 光致抗蝕1 3 a。另,爲形成該光致抗鈾1 3 a ’例如可 使用苯胺印刷。如後述,由該光致抗飩1 3 a所覆蓋之區 域,將成爲上述之平坦區域。 接著,如第1 C圖所示,玻璃基板1表面之中’非由 光致抗飩1 3 a所覆蓋之區域則粗糙面化。另’對玻璃基 板1表面之粗糙面化處理於後述之。 (請先閱讀背面之注意事 裝 i I 寫本頁) -κι ϋ ϋ ϋ · 1 ϋ 1 1 1_1 Β— 1 祕· 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) ^h=· 1252353 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(19) 然後,如第1D圖所示,除去光致抗蝕13a。其結 果’玻璃基板1之一方表面之中,光致抗蝕1 3 a所形成 之區域爲平坦區域1 4,除此外之區域爲粗糙面區域1 1 〇 接著,如第1 E圖所示,在具有平坦區域1 4和粗縫 面區域1 1之玻璃基板1的全面,形成有具反射性之金屬 膜12a。該金屬膜12a,例如係藉由鋁或者銀等單體 金屬,亦或是以鋁、銀或者鉻等爲主成份之合金形成。 然後,如第1 F圖所示,保留顯示區域所相當之區域 (即,粗面區域)和平坦區域地除去金屬膜1 2 a。該金 屬膜1 2 a之圖案形成,例如可使用光蝕法。如此使圖案 形成之金屬膜1 2 a之中’存在粗縫面區域1 1上之金屬 膜成爲反射膜1 2。於該反射膜1 2表面上,形成有反映 於粗糙面區域1 1之細微山部和谷部之山和谷。即,形成 有爲使到達該當反射膜1 2之光線能以適度散射狀態進行 反射之散射構造。另一方面,平坦區域1 4上之金屬膜係 被圖案形成例如第2圖所示之形狀,做爲校正標記1 5來 使用。另,第2圖形成平坦區域1 4上之校正標記1 5以 光學顯微鏡所攝影之照片。該校正標記1 5,係在進行本 發明相關玻璃基板1以及其他基板之黏合時,爲將各玻璃 基板之位置吻合在所期望之位置上所使用之標記。 於進行以上所示處理後,在形成有反射膜1 2及校正 標記1 5之玻璃基板1表面,形成有爲外加電界於液晶之 電極或定向膜。之後,於該當玻璃基板1上形成有將各液 (請先閱讀背面之注意. M裝 i I 事寫本頁) -i_i i_i el· ϋ ϋ ·_1^rej 1 ϋ 1 1 ϋ ϋ 1 «r. 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) 1252353 A7 B7 五、發明說明(20) 晶裝置之相當於顯示區域之區域圍繞之框狀密封材。然後 中介著該密封材,使該當玻璃基板1和其他玻璃基板黏合 。如此被黏合之一對玻璃基板間,藉由密封材在所圍繞之 區域封入液晶,之後,分別分割各液晶裝置。 於此,在黏合一對玻璃基板之步驟中,可使用上述校 正標記1 5。具體上,如以下所述。在玻璃基板1之相對 方向的其他玻璃基板上,形成有應對於形成在玻璃基板1 之校正標記1 5的校正標記。接著,藉由以吻合狀態黏合 雙方之玻璃基板上的校正標記,使兩玻璃基板之相對性位 置能吻合。於此,在該黏合步驟中,一般是藉由來自校正 標記之反射光來辨識該校正標記。使用該方法時,若校正 標記所形成之玻璃基板表面被粗面時,會使反射光擴散到 辨識方向以外之方向,則校正標記之辨識就變得困難。針 對此事,根據本發明相關之液晶裝置用基板,由於校正標 記1 5是形成在平坦區域,故不會有如此之問題產生。 A — 2 :第2實施形態 接著,參考第3A圖〜第3 F圖',對本發明第2實施 形態相關之液晶裝置用基板的製造方法進行說明。 於本實施形態中,如第3 A圖及第3 B圖所示,在玻 璃基板1表面之2處,形成有做爲遮罩材之圓形光致抗蝕 1 3 a。接著,和上述第1實施形態同樣,如第3 C圖所 示,藉由光致抗蝕1 3 a所覆蓋區域以外之區域被粗糙面 化,然後除去該光致抗蝕13a。其結果,如第3D圖所 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事 裝--- 寫本頁) 訂--------- 經濟部智慧財產局員工消費合作社印製 1252353 A7 B7 五、發明說明(21) 示,藉由玻璃基板1表面之中的光致抗蝕1 3 a所覆蓋之 2個圓形區域爲平坦區域1 4,另一方面除此外之區域爲 粗糙面區域1 1。 接著,和上述第1實施形態同樣,如第.3 E圖所示, 於玻璃基板1之全面形成金屬膜1 2 a。然後,如第3 F 圖所示,保留顯示區域所相當之區域和平坦區域1 4內之 微小部份,除去金屬膜1 2 a。如此被圖案形成之金屬膜 1 2 a之中,顯示區域所相當之區域上的金屬膜1 2 a成 爲反射膜1 2,另一方面,平坦區域1 4上之金屬膜 1 2 a,被圖案形成例如第2圖所示之形狀而成爲校正標 記1 5。以後之製造步驟,係因和上述第1實施形態同樣 ,在此省略說明。 另,於本實施形態及上述第1實施形態中,雖使用光 致抗蝕做爲遮罩材,但除此之外,例如亦可使用環氧樹脂 等樹脂做爲遮罩材。 A - 3 :第3實施形態 接著,參考第4A圖〜第4 F圖,對本發明第3實施 形態相關之液晶裝置用基板的製造方法進行說明。 於本實施形態中,如第4 A圖及第4 B圖所示,在玻 璃基板1各邊之中央部,黏貼有做爲遮罩材之複合薄膜 13b。另,於此,以使用被裁剪爲8mmx45mm之 長方形狀之複合薄膜1 3 b做爲範例。 接著,如第4 C圖所示,和上述第1實施形態同樣’ 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事 一裝 寫本頁)-ϋ ϋ hl· I ·1-^°4· ϋ n I ϋ ϋ ^ ϋ I 1252353 A7 B7 V. Description of invention (16) Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed 18 硏粉粉6 光倍计8 Liquid crystal layer 19 to 23 Reflection characteristics 101 Light shielding layer 102 Colored layer 103 Protective layer 104 Tightness enhancing layer 105 Transparent electrode 106 Orientation film 107 Phase shifting (medium) plate 108 Polarizing plate 100 Front substrate 200 Back substrate 201 Rough surface area 202 Flat area 203 Reflecting electrode 204 Orientation film 300 Sealing material 400 Liquid crystal 205 Reflecting film 206 Colored layer 207 Light-shielding layer 205a > Opening (Please read the back of the note first) - Install this page - -1 n el· ϋ ϋ I Playing 04···1 ϋ 1 ϋ II ϋ . Secret · This paper scale applies to China National Standard (CNS) A4 specification (210 297 297 mm) -19- 1252353 A7 B7 V. Invention description (17) 208 Protective layer 209 Tightening layer 210 Transparent electrode 211 Phase shifting (medium) board 212 Polarizing plate 500 Backlight 501 Fluorescent tube 502 Light guide plate 121 Liquid crystal device 122 Laptop 123 Input portion 124 Liquid crystal device 125 Mobile phone 126 Liquid crystal device 127 Watch ^1 1 ϋ al· ϋ ammmm ϋ-^-reJ ϋ ϋ ϋ ϋ I 1 ϋ I (Please read the note on the back ^^ fill out this page) Ministry of Economic Affairs Intellectual Property Office Staff Cooperatives Printing [Best Mode for Carrying Out the Invention] The following is a description of an embodiment of the present invention with reference to the drawings. A: A substrate for a liquid crystal device In the substrate for a liquid crystal device of the present invention, a rough surface region and a flat region are formed on the surface side in the direction opposite to the liquid crystal layer. Here, the rough surface area refers to a region having many fine protrusions and depressions on the surface. In addition, the fine protrusions in the rough surface area are hereinafter referred to as the mountain part, and the rough surface area is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). 1252353 A7 B7 Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative System 5, each of the fine recesses of the invention (18) is hereinafter referred to as a valley portion. On the other hand, a flat region refers to a region where the surface is flat. As will be described in detail later, in the substrate for a liquid crystal device according to the present invention, a correction mark or a conversion element or the like is formed in a flat region among one surface. In the following, first, the shape of the flat region in which these elements are to be formed and the method of manufacturing the same are shown by way of example. In the following, it is assumed that four liquid crystal device substrates are taken from a plurality of sides of one glass substrate. A - 1 : First Embodiment First, a method of manufacturing a substrate for a liquid crystal device according to a first embodiment of the present invention will be described with reference to FIGS. 1A to 1F. Further, in each of the drawings shown below, in order to make the size of each layer or each member recognizable on the drawing surface, the respective layers or members are respectively used in different scale sizes. First, the glass substrate 1 is prepared. In the glass substrate 1, a photoresist 13a as a mask is formed on the surface to be opposed to the liquid crystal direction. Specifically, in the present embodiment, as shown in FIGS. 1A and 1B, the surface of the glass substrate 1 is covered with a region other than the region corresponding to the display region of the liquid crystal device. Photoresist 1 3 a. Alternatively, for the formation of the photo-induced uranium 1 3 a ', for example, flexographic printing can be used. As will be described later, the region covered by the photoreceptor 13 3 a will become the flat region described above. Next, as shown in Fig. 1C, the region of the surface of the glass substrate 1 which is not covered by the photo-resistance 饨1 3 a is roughened. Further, the roughening treatment of the surface of the glass substrate 1 will be described later. (Please read the note on the back i I write this page) -κι ϋ ϋ ϋ · 1 ϋ 1 1 1_1 Β— 1 Secret · This paper scale applies to China National Standard (CNS) A4 specification (210 X 297 mm) ^h=· 1252353 A7 B7 Ministry of Economic Affairs Intellectual Property Bureau Employees Consumption Cooperative Printed V. Inventive Note (19) Then, as shown in Fig. 1D, the photoresist 13a is removed. As a result, among the one surface of the glass substrate 1, the region where the photoresist 13 3 a is formed is the flat region 14 , and the other region is the rough region 1 1 〇 Next, as shown in FIG. A reflective metal film 12a is formed on the entire surface of the glass substrate 1 having the flat region 14 and the rough surface region 11. The metal film 12a is formed, for example, of a single metal such as aluminum or silver, or an alloy containing aluminum, silver or chromium as a main component. Then, as shown in Fig. 1F, the metal film 1 2 a is removed by leaving the area corresponding to the display area (i.e., the rough area) and the flat area. The pattern of the metal film 12 a is formed, for example, a photo-etching method can be used. The metal film on the rough surface region 1 1 among the metal films 1 2 a formed in the pattern becomes the reflection film 12. On the surface of the reflecting film 12, mountains and valleys which are reflected in the fine mountain portions and valley portions of the rough surface region 11 are formed. Namely, a scattering structure for reflecting the light reaching the reflection film 12 in a moderate scattering state is formed. On the other hand, the metal film on the flat region 14 is patterned to have a shape as shown in Fig. 2, and is used as the correction mark 15 for use. Further, Fig. 2 forms a photograph of the correction mark 15 on the flat region 14 taken by an optical microscope. The correction mark 15 is a mark used to match the position of each glass substrate to a desired position when bonding the glass substrate 1 and other substrates of the present invention. After the above-described processing, on the surface of the glass substrate 1 on which the reflective film 1 2 and the correction mark 15 are formed, an electrode or an alignment film which is electrically connected to the liquid crystal is formed. After that, the liquid is formed on the glass substrate 1. (Please read the back of the note first. M loading i I write this page) -i_i i_i el· ϋ ϋ ·_1^rej 1 ϋ 1 1 ϋ ϋ 1 «r This paper size applies to the Chinese National Standard (CNS) A4 specification (210 x 297 mm). 1252353 A7 B7 V. INSTRUCTIONS (20) The frame-like sealing material surrounding the display area of the crystal device. The sealing material is then interposed to bond the glass substrate 1 to other glass substrates. The liquid crystal is sealed between the glass substrates by the sealing material in the surrounding area, and then the liquid crystal devices are separately divided. Here, in the step of bonding a pair of glass substrates, the above-described correction mark 15 can be used. Specifically, as described below. On the other glass substrate in the opposite direction of the glass substrate 1, a correction mark to be applied to the correction mark 15 formed on the glass substrate 1 is formed. Next, the relative positions of the two glass substrates can be matched by adhering the alignment marks on the glass substrates of both sides in an anastomosis state. Here, in the bonding step, the correction mark is generally recognized by the reflected light from the correction mark. When this method is used, if the surface of the glass substrate formed by the correction mark is rough, the reflected light is diffused in a direction other than the identification direction, and the identification of the correction mark becomes difficult. In the case of the substrate for a liquid crystal device according to the present invention, since the correction mark 15 is formed in a flat region, such a problem does not occur. A-2: Second Embodiment Next, a method of manufacturing a substrate for a liquid crystal device according to a second embodiment of the present invention will be described with reference to FIGS. 3A to 3F. In the present embodiment, as shown in Figs. 3A and 3B, a circular photoresist 1 3 a as a mask is formed on two surfaces of the glass substrate 1. Then, as in the first embodiment, as shown in Fig. 3C, the region other than the region covered by the photoresist 1 3 a is roughened, and then the photoresist 13a is removed. As a result, the paper size of Figure 3D applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please read the note on the back---write this page) --- Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed 1252353 A7 B7 V. Invention Description (21) shows that the two circular areas covered by the photoresist 1 3 a in the surface of the glass substrate 1 are The flat region 14 is on the other hand, except for the region being the rough surface region 1 1 . Next, as in the first embodiment, as shown in Fig. 3E, the metal film 12a is formed over the entire glass substrate 1. Then, as shown in Fig. 3F, the area corresponding to the display area and the minute portion in the flat area 14 are retained, and the metal film 1 2 a is removed. Among the metal films 1 2 a thus patterned, the metal film 1 2 a on the region corresponding to the display region becomes the reflective film 12, and on the other hand, the metal film 1 2 a on the flat region 14 is patterned. For example, the shape shown in FIG. 2 is formed to become the correction mark 15 . The subsequent manufacturing steps are the same as those of the above-described first embodiment, and the description thereof will be omitted. Further, in the present embodiment and the first embodiment, although photoresist is used as the mask material, for example, a resin such as an epoxy resin may be used as the mask material. A - 3: Third Embodiment Next, a method of manufacturing a substrate for a liquid crystal device according to a third embodiment of the present invention will be described with reference to FIGS. 4A to 4F. In the present embodiment, as shown in Figs. 4A and 4B, a composite film 13b as a mask is adhered to the central portion of each side of the glass substrate 1. Further, here, a composite film 1 3 b which is cut into a rectangular shape of 8 mm x 45 mm is used as an example. Next, as shown in Fig. 4C, the same as the above-described first embodiment. 'This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). (Please read the back note first. )

-I- ·1 1^^OJ Μϋ ϋ ϋ ·ϋ ϋ ^1 _1 I 經濟部智慧財產局員工消費合作社印製 1252353 A7 B7 五、發明說明(22) 藉由該複合薄膜1 3 b所覆蓋區域以外之區域被粗糙面化 的同時,然除去複合薄膜13b (第4D圖)。其結果, 藉由玻璃基板1表面之中的複合薄膜1 3 b所覆蓋之4個 矩形區域爲平坦區域1 4,另一方面除此外之區域爲粗縫 面區域1 1。 然後,和上述第1實施形態同樣,粗糙面區域1 1之 中的顯示區域所相當之區域形成爲反射膜1 2,另一方面 ,平坦區域1 4之一部份形成爲校正標記1 5 (第4 E圖 及第4F圖)。以後之製造步驟,係因和上述第1實施形 態同樣,在此省略說明。 B :平坦區域以及粗糙面區域之形成方法 接著,將上述之平坦區域1 4以及粗糙面區域1 1之 具體性形成方法以範例示之。 B — 1 :第1製造方法 首先,參考第5A圖〜第5 E圖,對爲要在玻璃基板 1形成平坦區域1 4以及粗糙面區域1 1之第1製造方法 進行說明。另,以下爲使用鋁矽酸玻璃基板做爲玻璃基板 1時之範例。 於此,第5A圖爲表示玻璃基板1之剖面構造模式圖 。同圖所示,該玻璃基板1,具有網眼狀構造體2,及爲 將該網眼狀構造體2之網眼間塡滿而存在之網眼修飾體3 。此中,網眼狀構造體2,例如藉由矽酸和氧化鋁之共聚 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事寫本頁) 裝 寫太 蕾· 經濟部智慧財產局員工消費合作社印製 1252353 A7 B7 五、發明說明(23) 體所形成,網眼修飾體3,例如由氧化鎂等所形成。 首先,於上述之各實施形態中所示之遮罩材(上述之 各實施形態中之光致抗蝕1 3 a或者複合薄膜1 3 b等) 形成前,對玻璃基板1施以兼具洗淨之蝕刻。具體而言, 玻璃基板1,例如是放在5 w t %程度之氫氟酸(氟化氫 氧)水溶液中,於2 5 °C之溫度下浸漬5秒間程度。 其次,在已均勻施以蝕刻之玻璃基板1表面上之指定 位置,如第5 B圖所示,形成有遮罩材1 3。 接著,玻璃基板1,在30wt%之氫氟酸(氟化氫 氧)水溶液之氧化鋁及氧化鎂之過飽和溶液中,於2 5 °C 之溫度下浸漬3 0秒程度(以下,將該處理稱爲「第1蝕 刻」)。於該處理中,在網眼狀構造體2之中的氧化鋁局 部存在部份,使過飽和溶液中之氧化鋁析出的同時,使在 網眼修飾體3之中的氧化鋁局部存在部份飽和溶液中之氧 化鎂也析出。然後,該析出之結果,如第5 C圖所示,形 成微細之網絡構造1 0。另一方面,藉由網眼狀構造體2 及網眼修飾體3之中,未被處理液飽和溶解之成份(即, 氧化鋁及氧化鎂以外的成份)所形成乏部份,會被氟化氫 氧侵蝕。其結果,玻璃基板1表面之中,在形成有上述網 絡構造1 0區域以外的區域,形成有谷部1 1 a。於此, 第6 A圖,係該階段中,用遮罩材1 3覆蓋區域以外之玻 璃基板1表面樣子以光學顯微鏡所攝影之照片。同圖中, 顏色濃的部份相當於網絡構造1 0,顏色淺的部份相當於 谷部1 1 a。 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事 本頁) 經濟部智慧財產局員工消費合作社印製 1252353 A7 B7 五、發明說明(24) 接著,如第5D圖所示,除去遮罩材1 3。在遮罩材 1 3所形成之區域,因未施以上述之第1蝕刻,故成爲平 坦表面。 其次,對玻璃基板1之全面,施以均勻之蝕刻(以下 ,將該處理稱爲「第2蝕刻」)。例如,準備50wt% 之氫氟酸(氟化氫氧)水溶液和4 Ow t %之氟化氨水溶 液以比重1 : 3所混合之溶液,將玻璃基板1放入該溶液 中,於2 5 °C之溫度下浸漬2 0秒程度。藉由如此之處理 ,使形成在網絡構造1 0和谷部1 1 a之細微突起部去除 。然後,其結果,如第5 E圖所示,玻璃基板1之中的遮 罩材1 3未形成區域,成爲具有平滑山部和谷部之粗糙面 區域1 1。第6 B圖,係該階段中玻璃基板1表面樣子以 光學顯微鏡所攝影之照片。從同圖中亦可判斷出,藉由對 第1蝕刻後之玻璃基板1再加以進行第2蝕刻,和如第 6 A圖所示之經第1蝕刻後之表面比較,其表面形成平滑 之粗面。 又,第7圖,係施以第2蝕刻後之玻璃基板1表面樣 子以光學顯微鏡所攝影之照片。於同圖中,同樣的可確認 遮罩材1 3所形成之區域A爲’平坦的平坦區域1 4,除此 外之區域B爲具有細微山部和谷部之粗糙面區域11。 可是,於遮罩材1 3除去前,對玻璃基板1施以第2 鈾刻之方式亦大致被考量。然而,如此之狀況時,遮罩材 1 3所形成之區域就無法施以第2蝕刻,而所蝕刻的是除 此外之區域。然後,其結果,造成平坦區域1 4和粗糙面 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事 裝--- 寫本頁) _ _'·^-^ -·1 «ϋ I ϋ 1_§ J in 1_1 1_1 n 經濟部智慧財產局員工消費合作社印製 1252353 A7 B7 五、發明說明(2δ) 區域1 1之高低差,伴隨第2蝕刻而擴大。於此’玻璃基 板1之平坦區域1 4和粗糙面區域1 1的高低差’若比液 晶裝置所期望之晶隙還大時’使用該玻璃基板1是無法獲 得該當所期望之晶隙。 針對此事,於本實施形態中,因是在遮罩材1 3除去 後對玻璃基板1之全面進行第2鈾刻’故可避免造成平坦 區域1 4和粗糙面區域1 1之高低差的擴大。第8圖,係 第7圖所示之玻璃基板1表面之表面形狀(高度)測定結 果圖表。如第8圖所示,根據上述步驟,可控制玻璃基板 1表面之中的平坦區域14和粗糙面區域之高低差在1 // m程度。於此,因一般液晶裝置之晶隙爲5 // m程度, 根據上述步驟所得之玻璃基板1,可毫無問題地做爲一般 液晶裝置之基板來使用。 B — 2 :第2製造方法 其次,參考第9A圖〜第9 E圖,對爲要在玻璃基板 1形成平坦區域1 4以及粗面區域1 1之第2製造方法進 行說明。另,以下爲使用蘇打石灰玻璃基板做爲玻璃基板 1時之範例。 該玻璃基板1係如第9 A圖所示,從具有網眼狀構造 體2,及爲將該網眼狀構造體2之網眼間塡滿而存在之網 眼修飾體3之觀點來看,雖是和上述第1製造方法中之玻 璃基板1同樣,但從網眼狀構造體2是由矽酸形成,另一 方面網眼修飾體3是由鹼性金屬或鹼性土類金屬形成之觀 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事^填寫本頁) 訂-------- 經濟部智慧財產局員工消費合作社印製 1252353 A7 B7 五、發明說明(26) 點來看,則和上述第1製造方法中之玻璃基板1不同。 (請先閱讀背面之注意事β 首先,在遮罩材1 3形成於應形成之平坦區域1 4前 ,對玻璃基板1施以兼具洗淨之蝕刻。具體而言,玻璃基 板1,是放在5wt%程度之氫氟酸(氟化氫氧)水溶液 中,於2 5 °C之溫度下浸漬5秒間程度。接著,係如第 9 B圖所示,在玻璃基板1之中的應形成平坦區域1 4之 區域,形成有遮罩材1 3 (光致抗蝕1 3 a或者複合薄膜 1 3 b 等)。 其次,該玻璃基板1,在含有氫氟酸(氟化氫氧)爲 3 Owt%、氧化氨爲45wt%之水溶液中,於2 5°C 之溫度下浸漬1 5秒程度。於此,如第9 C圖所示,構成 玻璃基板1成份之中,網眼修飾體3溶出於上述處理液之 速度,比網眼狀構造體2溶出於該當處理液之速度還快。 因此,當玻璃基板1浸漬在上述之處理液時,如第9 D圖 所示,施以蝕刻之區域(即,非遮罩材所覆蓋之區域)’ 係成爲具有因應網眼狀構造體2而形成之山部和谷部之粗 面區域。之後,如第9 E圖所示,除去遮罩材1 3 ’得到 具有平坦區域1 4和粗面區域1 1之破璃基板1。 經濟部智慧財產局員工消費合作社印製 B—3:第3製造方法 其次,參考第1 〇A圖〜第1 0 F圖,對爲要在玻璃 基板1形成平坦區域14以及粗面區域11之第3製造方 法進行說明。另,以下爲使用蘇打石灰玻璃基板做爲玻璃 基板1時之範例。 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 1252353 A7 B7 五、發明說明(27) 首先,在玻璃基板1之一方表面側,配置具有開口之 不銹鋼板17。該不銹鋼板1 7,係具有做爲遮罩材之功 能者,如第1 0A圖及第1 〇 B圖所示,其在應形成粗面 區域11之區域具有開口部。 其次,如第10C圖所示,多數之硏磨粉18,中介 著上述不銹鋼板1 7噴塗在玻璃基板1之表面。於該步驟 中,玻璃基板1表面之中,在應對不銹鋼板1 7開口部之 區域,藉由硏磨粉1 8之衝突而形成有多數之凹陷。另一 方面,在不銹鋼板1 7所覆蓋之區域,因沒有硏磨粉1 8 之衝突,故成爲原本之平坦表面。 接著,洗淨玻璃基板1。即,除去噴塗在該玻璃基板 1之硏磨粉18或藉由硏磨粉18之衝突所產生之玻璃粉 。接著,藉由將該玻璃基板1浸漬在指定處理液中,對該 當玻璃基板1之全面施以均勻蝕刻。做爲上述之指定處理 液,例如使用氫氟酸(氟化氫氧)(5 0 w t % )和氟化 氨水溶液(4 0 w t % )其比重爲1 : 3所混合之處理液 〇 根據以上之處理,如第1〇 d圖m示,可得到平坦區 域1 4和粗糙面區域1 1選擇性形成之玻璃基板1。之後 ,和上述第1製造方法同樣,如第1 Ο E圖所示,在玻璃 基板1上形成金屬膜1 2 a。然後’該金屬膜1 2 a被圖 案形成,如第1 0 F圖所示,形成有反射膜1 2及校正標 記1 5。 如以上說明,於第1〜第3製造方法中,藉由除去玻 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) "丨# (請先閱讀背面之注意事'^填寫本頁) _裝-----^ — 1— 訂------- % 經濟部智慧財產局員工消費合作社印製 1252353 A7 B7 五、發明說明(2δ) 璃基板1表面之多數的細微區域使粗糙面區域11之谷部 形成。其結果於根據上述製造方法各所得之玻璃基板1中 ,粗糙面區域1 1之中的頂上部高度並不超過具有平坦區 域之平面。 然而,做爲液晶裝置用基板使用之習知玻璃基板,具 有規則性形成之山部和谷部的粗糙面區域。即,如第1 1 圖所示,在習知玻璃基板之粗糙面,形成有大致同一高度 之山部(或者同一深度之谷部),且,各山部保持大致同 一之間隔來形成。因此,當互相平行之光線Α及光線Β以 某種角度入射於該粗糙面時,於山部反射之光線A的反射 光程,係對於谷部反射之光線B的反射光程僅較短(i + j)。接著,因由該光程差所產生之光的干擾,使所顯示 之影像產生有不爲所要之變色的問題。 針對此事,於本發明相關之液晶裝置用基板中,是不 會發生如此之問題。即,於上述第1及第2製造方法中, 因應網眼狀構造體2之形狀有不規則之粗糙面形成在玻璃 基板1上,又,於上述第3製造方法中,因應硏磨粉1 8 之衝突形狀有不規則之粗糙面形成在破璃基板1上。因此 ,於第1、第2及第3製造方法之任一方法中,各山部之 高度及各谷部之深度也是不同,且,1個山部頂上和與其 鄰接之山部頂上之距離也會因各山部有所不同地形成粗糙 面區域1 1。其結果,能使於該當粗糙面區域1 1上形成 之反射膜1 2,具有良好之散射特性。 再者,並不受限於如此之粗面區域1 1形成在玻璃基 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事 裝· — — I 寫本頁) amme 1 I 一08.* · _1 I ·ϋ ϋ ϋ ϋ 經濟部智慧財產局員工消費合作社印製 1252353 A7 B7 五、發明說明(29) 板1之表面,平坦區域1 4之玻璃基板1之表面仍是平坦 。因此,可將期望形成在表面上之要素,例如校正標記 1 5等,形成在該平坦區域1 4上。 C:反射膜之反射特性 對根據上述各製造方法所製造,在粗面區域上反射膜 所形成之玻璃基板1的反射特性進行說明。 第1 2圖,係表示測定反射特性之裝置。如同圖所示 ,於該測定裝置中,從對玻璃基板1之法線方向2 5 °之 角度,光線5照射在該當玻璃基板1。接著,藉由玻璃基 板1上之反射膜1 2所反射之光線的強度,使用光倍計6 進行測定。於此,使光倍計6和玻璃基板1之法線方向邊 變更成Θ角度,邊進行反射光之測定。另,於該測定中, 因接近做爲液晶裝置之使用狀況,如第1 2圖所示,在玻 璃基板1之反射膜所形成之表面側,以相對方向配置和該 當基材同一材料之玻璃基板2 (厚度爲0 · 7mm程度) ,以液晶層被夾持在兩基板間之狀態進行測定。 於此,對在上述第1或者第2製查方法中,蝕刻處理 液種類、蝕刻時間等之條件不同之複數的玻璃基板1,進 行上述之測定。同樣的,對在第3 2製造方法中,硏磨劑 粒徑及數量等條件不同之複數的玻璃基板1,進行上述之 測定。其結果,根據上述各製造方法所得到之玻璃基板1 的代表性反射特性,爲第1 3圖所示之反射特性。第1 3 圖,係針對上述各玻璃基板1,將光倍計角度<9和使用光 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事 --- 寫本頁) -I ϋ i_i l·» ϋ 1 1 1 H ϋ mm— ϋ , 經濟部智慧財產局員工消費合作社印製 1252353 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(30) 倍計所測定之反射光強度的關係圖表化者。另,於第1 3 圖中之符號1 7及1 8,係表示爲要進行比較,習知以來 之市販反射板的反射特性。但是,.該種反射板,係爲於一 對基板間密封液晶後,對基板以之後附加方式黏貼者。即 ,並非是設在如實施形態之液晶層側,而是設在與此之相 反側,關於這點期待能留意。 如同圖所示,根據由上述製造方法所得之玻璃基板1 時,藉由簡易之製造步驟,判斷是可獲得和習知反射板同 樣或者較其以上之良好反射特性。具體而言.如下。 首先,以第1 3圖所示之反射特性1 9來看時,顯現 著在和實際做爲液晶裝置使用時之視野角之相當角度的大 部份,所觀測之反射光的強度比市販反射板還強。因此, 根據已使用由具有該反射特性1 9之玻璃基板1所得到之 液晶裝置用基板的液晶裝置,可獲得良好的顯示特性。 其次,以第1 3圖所示之反射特性2 0及2 3來看時 ,顯現著在比較狹小範圍可觀測到強度較強之反射光。於 此,在採用S T N (超對絞絲狀)液晶模式之液晶裝置中 ,藉由高反差來獲得良好顯示品質之視野角,原理上被限 定在比較狹小範圍。換句話說、不需要強度較強之光線使 其反射至比可得到良好顯示品質之視野角還廣的角度區域 。因此,具有第1 3圖之反射特性2 0或者2 3之玻璃基 板1,可適宜做爲使用S T N液晶模式之液晶裝置的基板 〇 此外,於第1 3圖之反射特性2 1及2 2,和其他反 (請先閱讀背面之注意事 —— 寫本頁) -MM MB I I * I ΜΙΜ Μ· I MM MM I 雅 祕 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -33 - 1252353 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(31) 射特性比較,顯現著在比較廣之範圍可觀測到某種程度強 度之反射光.。於此,在採用T N (對絞絲狀)液晶模式或 者S Η (電極面垂直均勻)液晶模式之液晶裝置中,可獲 得比較廣之視野角。因此,具有第1 3圖之反射特性2 1 或者2 2之玻璃基板1,可恰好做爲使用Τ Ν液晶模式或 者S Η液晶模式之液晶裝置的基板。另,這些玻璃基板1 之反射特性,係可視爲與具有第1 3圖之反射特性1 7或 者1 8之習知液晶裝置用基板同樣或者是較其以下。然而 ,於第1 3圖中做爲比較對象所使用之習知反射板,係如 上述,位置於和液晶相反側。使用如此之反射板時,因會 造成通過液晶層反射在該當液晶裝置用基板表面之光線和 反射到反射膜之光線的光程差,故會有顯示影像產生雙重 影之問題。針對此事,於本發明相關之液晶裝置用基板中 ,因在液晶側形成有反射膜,故不會發生如此之問題。因 此,以總體性來看,具有第1 3圖之反射特性2 1或者 2 2之玻璃基板,是較可適宜做爲液晶裝置用基板。 其次,本件發明者對具有上述各反射特性(符號1 9 〜2 3 )之各個玻璃基板1,使用表面粗糙度計將表示粗 面區域表面形狀之各特徵量進W 了計測。以下說明係做爲 測定對象之各特徵量的內容。 (1 )最大高度R y 該最大高度R y,係表示從粗糙面區域之最高山部頂 上部至同區域之最深谷部谷底之高低差的特徵量。 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事 良_____LI- 寫本頁) 訂--------- 祕 1252353 A7 ____B7 五、發明說明(32) (2 )算術平均粗糙度R a 該算術平均粗糙度R a係將從指定之平均線到表示粗 縫縫面區域表面形狀之測定曲線之偏差絕對値進行合計後 ,所平均之値。 (3 )十點平均粗度R z 該十點平均粗糙度Rz ,係爲從指定之平均線來看時 ,依順序選擇高的5個山部頂上部之高度平均値和依順序 選擇深的5個谷部谷底之深度平均値的和。 (4 )平均波長S m 其特徵量係表示超過以平均線做爲中心線之指定非感 應帶的山部或者谷部之周期平均波長。另,於本實施形態 中,具有上述最大高度Ry之1%寬幅的帶狀區域,將以 平均線做爲中心線之區域設定成上述非感應帶,進行平均 波長之測定。 另,對這些各特徵量,於JISY Japanese Industrial Standards) B0601 — 19 9 4、ISO (International Organization for Standardization) 4 6 8 — 1 9 8 2、 IS 0 3274— 1975、 IS 0 4287/1 — 1984、IS 0 4287/2 — 1984、 IS 04288-1985 中有詳述。 對具有上述第1 3圖所示反射特性1 9之玻璃基板1 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事 本頁) 經濟部智慧財產局員工消費合作社印製 1252353 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(33) ,進行上述各特徵量之測定結果,最大高度Ry = 0 . 7 5 // m,算術.平均粗糙度R a = 0 . 0 9 # m,十點平均粗縫 度 Rz = 0.7 //m,平均波長 Sm=l 7 //m。 又,具有反射特性2 0之玻璃基板1的各特徵量,最 大高度Ry = 0 . 6 0 //m,算術平均粗糙度R a = 〇.〇8//m,十點平均粗糙度Rz = 〇.45//m,平均 波長Sm = 1 1 //m。如上述,具有反射特性2 0之玻璃 基板1,對採用S T N液晶模式之液晶裝置是適宜的基板 。由此可知,採用S T N液晶模式之液晶裝置所使用基板 的粗面區域,最好是最大高度Ry及R z能儘量爲小之形 狀。再者,藉由使算術平均粗糙度R a變小,可抑制應對 於液晶層厚度之內面起伏所造成之不勻。 其次,具有反射特性2 1之玻璃基板1的各特徵量, 最大高度Ry = 1.75//m,算術平均粗糙度Ra = 0.24//m,十點平均粗糙度Rz = 1.57em,平均 波長 Sm=22//m。 具有反射特性2 2之玻璃基板1的各特徵量,最大高 度Ry = 0.9 5//m,算術平均粗糙·度Ra = 〇. 1 2 //m,十點平均粗糙度Rz=O.85//m,平均波長Sm 二如上述,具有反射特性22之玻璃基板1, 對採用T N型或者S Η型液晶模式之液晶裝置是恰好的基 板。由此可知,採用Τ Ν型或者S Η型液晶模式之液晶裝 置所使用基板的粗糙面區域,最好是將十點平均粗糙度 R ζ變得比較大之形狀,或者是將平均波長S m變得比較 (請先閱讀背面之注意事 裝· — I 寫本頁)-I- ·1 1^^OJ Μϋ ϋ ϋ ·ϋ ϋ ^1 _1 I Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed 1252353 A7 B7 V. Invention Description (22) Area covered by the composite film 1 3 b The composite film 13b (Fig. 4D) is removed while the other regions are roughened. As a result, the four rectangular regions covered by the composite film 1 3 b on the surface of the glass substrate 1 are the flat regions 14 and on the other hand, the other regions are the rough regions 11 . Then, similarly to the above-described first embodiment, a region corresponding to the display region among the rough surface regions 1 1 is formed as the reflection film 12, and on the other hand, a portion of the flat region 14 is formed as the correction mark 15 ( Figure 4E and Figure 4F). The subsequent manufacturing steps are the same as those in the first embodiment described above, and the description thereof will be omitted. B: Method of Forming Flat Area and Rough Surface Area Next, a specific method of forming the flat area 14 and the rough surface area 1 1 described above will be exemplified. B-1: First Manufacturing Method First, a first manufacturing method for forming the flat region 14 and the rough surface region 1 1 on the glass substrate 1 will be described with reference to FIGS. 5A to 5E. In the following, an example in which an aluminosilicate glass substrate is used as the glass substrate 1 is used. Here, Fig. 5A is a schematic cross-sectional structural view showing the glass substrate 1. As shown in the figure, the glass substrate 1 has a mesh-like structure 2 and a mesh-formed body 3 in which the mesh of the mesh-like structure 2 is filled. Here, the mesh-like structure 2, for example, by the copolymerization of tannic acid and alumina, is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please read the note on the back first) ) Loading Tailei · Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed 1252353 A7 B7 V. Invention Description (23) Formed by the body, the mesh modification 3 is formed, for example, by magnesium oxide. First, before the formation of the mask material (the photoresist 13 a or the composite film 13 b in each of the above embodiments), the glass substrate 1 is washed. Net etching. Specifically, the glass substrate 1 is, for example, placed in an aqueous solution of hydrofluoric acid (hydrogen fluoride) of about 5 w % and immersed at a temperature of 25 ° C for about 5 seconds. Next, as shown in Fig. 5B, a mask member 13 is formed at a predetermined position on the surface of the glass substrate 1 which has been uniformly etched. Next, the glass substrate 1 is immersed in a supersaturated solution of alumina and magnesium oxide in a 30 wt% aqueous solution of hydrofluoric acid (hydrogen fluoride) at a temperature of 25 ° C for 30 seconds (hereinafter, this treatment is called "First etching"). In this treatment, a portion of the alumina in the mesh-like structure 2 is locally present, and the alumina in the super-saturated solution is precipitated, and the localized portion of the alumina in the mesh-modified body 3 is partially saturated. Magnesium oxide in the solution also precipitated. Then, as a result of the precipitation, as shown in Fig. 5C, a fine network structure 10 is formed. On the other hand, among the mesh-like structure 2 and the mesh-formed body 3, a component which is not saturated with the treatment liquid (that is, a component other than alumina and magnesium oxide) is formed, and hydrogen fluoride is formed. Oxygen attack. As a result, among the surfaces of the glass substrate 1, a valley portion 11a is formed in a region other than the region where the network structure 10 is formed. Here, Fig. 6A is a photograph taken by an optical microscope with the surface of the glass substrate 1 outside the region covered with the mask material 13 in this stage. In the same figure, the part with a thick color corresponds to the network structure 10, and the portion with a light color corresponds to the valley portion 1 1 a. This paper scale is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) (please read the note on the back page first). Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed 1252353 A7 B7 V. Invention Description (24) Next, as shown in Fig. 5D, the mask material 13 is removed. In the region where the mask member 13 is formed, since the first etching described above is not applied, it is a flat surface. Next, uniform etching is applied to the entire surface of the glass substrate 1 (hereinafter, this process is referred to as "second etching"). For example, preparing a 50 wt% aqueous solution of hydrofluoric acid (hydrogen fluoride) and a solution of 4 Ow % of an aqueous solution of ammonium fluoride in a specific gravity of 1:3, and placing the glass substrate 1 in the solution at 25 ° C. Immerse at a temperature of 20 seconds. By such processing, the fine protrusions formed in the network structure 10 and the valley portion 1 1 a are removed. Then, as shown in Fig. 5E, the mask material 13 in the glass substrate 1 is not formed, and is a rough surface region 1 1 having smooth mountains and valleys. Fig. 6B is a photograph taken by a light microscope in the surface of the glass substrate 1 at this stage. It can also be judged from the same figure that the second etching is performed on the glass substrate 1 after the first etching, and the surface is smoothed as compared with the surface after the first etching as shown in FIG. 6A. Rough surface. Further, Fig. 7 is a photograph taken by an optical microscope after the surface of the glass substrate 1 after the second etching is applied. In the same figure, it is confirmed that the region A formed by the mask member 13 is a flat flat region 14, and the region B is a rough surface region 11 having a fine mountain portion and a valley portion. However, the method of applying the second uranium engraving to the glass substrate 1 before the removal of the mask material 13 is also generally considered. However, in such a case, the area formed by the mask member 13 cannot be subjected to the second etching, and the area to be etched is a region other than the other. Then, as a result, the flat area 14 and the rough surface paper size apply to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please read the note on the back - write this page) _ _ '·^-^ -·1 «ϋ I ϋ 1_§ J in 1_1 1_1 n Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed 1252353 A7 B7 V. Invention Description (2δ) Area 1 1 height difference, accompanied by 2nd etching And expand. When the height difference Δ between the flat region 14 and the rough surface region 1 1 of the glass substrate 1 is larger than the desired crystal gap of the liquid crystal device, the desired crystal gap cannot be obtained by using the glass substrate 1. In view of this, in the present embodiment, since the second uranium engraving is performed on the entire surface of the glass substrate 1 after the mask member 13 is removed, the difference between the flat region 14 and the rough surface region 1 1 can be avoided. expand. Fig. 8 is a graph showing the results of the surface shape (height) measurement of the surface of the glass substrate 1 shown in Fig. 7. As shown in Fig. 8, according to the above steps, the height difference between the flat region 14 and the rough surface region among the surfaces of the glass substrate 1 can be controlled to about 1 // m. Here, since the crystal gap of the liquid crystal device is about 5 // m, the glass substrate 1 obtained by the above steps can be used as a substrate of a general liquid crystal device without any problem. B - 2 : Second Manufacturing Method Next, a second manufacturing method for forming the flat region 14 and the rough surface region 1 1 on the glass substrate 1 will be described with reference to Figs. 9A to 9E. In addition, the following is an example when a soda lime glass substrate is used as the glass substrate 1. The glass substrate 1 is as shown in Fig. 9A, from the viewpoint of having the mesh-like structure 2 and the mesh-modified body 3 in which the mesh of the mesh-like structure 2 is filled. Although the glass substrate 1 is the same as the glass substrate 1 in the first manufacturing method described above, the mesh structure 2 is formed of tannic acid, and the mesh modified body 3 is formed of an alkali metal or an alkaline earth metal. The paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please read the note on the back first) Fill in the page. Order-------- Ministry of Economic Affairs Intellectual Property Office staff consumption Cooperatives Printed 1252353 A7 B7 V. Inventive Note (26) The point is different from the glass substrate 1 in the above first manufacturing method. (Please read the cautions on the back side first. First, before the mask material 13 is formed in the flat region 14 to be formed, the glass substrate 1 is subjected to both etching. Specifically, the glass substrate 1 is It is placed in an aqueous solution of hydrofluoric acid (hydrogen fluoride) at a concentration of 5 wt%, and immersed at a temperature of 25 ° C for 5 seconds. Then, as shown in Fig. 9B, the glass substrate 1 should be flat. In the region of the region 14 4, a mask material 13 (photoresist 1 3 a or a composite film 1 3 b, etc.) is formed. Next, the glass substrate 1 contains hydrofluoric acid (hydrogen fluoride) at 3 Owt%. In an aqueous solution of 45 wt% of ammonia oxide, it is immersed at a temperature of 25 ° C for about 15 seconds. Here, as shown in Fig. 9 C, the constituents of the glass substrate 1 are formed, and the mesh modified body 3 is dissolved. The speed of the treatment liquid is faster than the speed at which the mesh structure 2 is dissolved in the treatment liquid. Therefore, when the glass substrate 1 is immersed in the treatment liquid described above, the etched area is applied as shown in Fig. 9D. (ie, the area covered by the non-masking material)' is a mountain formed by the mesh-like structure 2 And the rough surface area of the valley. After that, as shown in Fig. 9E, the mask material 1 3 ' is removed to obtain the glass substrate 1 having the flat area 14 and the rough area 1 1. Cooperative Printing B-3: Third Manufacturing Method Next, a third manufacturing method for forming the flat region 14 and the rough surface region 11 on the glass substrate 1 will be described with reference to FIGS. 1A to 10F. In addition, the following is an example when using a soda lime glass substrate as the glass substrate 1. This paper scale applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 1252353 A7 B7 V. Invention Description (27) First, in On one side of the glass substrate 1, a stainless steel plate 17 having an opening is disposed. The stainless steel plate 17 has a function as a mask material, as shown in Figs. 10A and 1B, which should be The region in which the rough surface region 11 is formed has an opening portion. Next, as shown in Fig. 10C, a plurality of honing powders 18 are sprayed on the surface of the glass substrate 1 via the stainless steel plate 71. In this step, the glass substrate 1 is coated. Among the surface, in response to stainless steel plate 1 7 open In the area of the part, a large number of depressions are formed by the collision of the honing powder 18. On the other hand, in the area covered by the stainless steel plate 17, there is no conflict of the honing powder 18, so it becomes the original flat surface. Next, the glass substrate 1 is washed, that is, the glass powder sprayed on the glass substrate 1 or the glass powder generated by the collision of the honing powder 18 is removed. Then, the glass substrate 1 is immersed in the designation. In the treatment liquid, the glass substrate 1 is uniformly etched uniformly. As the above specified treatment liquid, for example, hydrofluoric acid (hydrogen fluoride) (50 wt%) and aqueous ammonia solution (40 wt%) are used. The treatment liquid having a specific gravity of 1:3 is subjected to the above treatment, and as shown in Fig. 1D, a glass substrate 1 in which the flat region 14 and the rough surface region 1 1 are selectively formed can be obtained. Thereafter, as in the first manufacturing method described above, a metal film 1 2 a is formed on the glass substrate 1 as shown in Fig. 1E. Then, the metal film 1 2 a is formed by a pattern, and as shown in Fig. 10F, a reflection film 12 and a correction mark 15 are formed. As described above, in the first to third manufacturing methods, the Chinese National Standard (CNS) A4 specification (210 X 297 mm) is applied by removing the size of the glass paper. "丨# (Please read the note on the back first) ^ Fill in this page) _装-----^ — 1— 订------- % Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed 1252353 A7 B7 V. Invention Description (2δ) Glass substrate 1 surface Most of the fine areas form the valleys of the rough surface area 11. As a result, in the glass substrate 1 obtained in each of the above-described manufacturing methods, the height of the top portion in the rough surface region 1 1 does not exceed the plane having the flat region. However, a conventional glass substrate used as a substrate for a liquid crystal device has a rough surface region of a mountain portion and a valley portion which are regularly formed. That is, as shown in Fig. 1, a mountain portion (or a valley portion of the same depth) having substantially the same height is formed on a rough surface of a conventional glass substrate, and each of the mountain portions is formed at substantially the same interval. Therefore, when the mutually parallel rays and the rays are incident on the rough surface at an angle, the reflected optical path of the light A reflected in the mountain is only shorter than the reflected optical path of the light B reflected by the valleys ( i + j). Then, due to the interference of the light generated by the optical path difference, there is a problem that the displayed image is not discolored. In view of this, in the substrate for a liquid crystal device according to the present invention, such a problem does not occur. In other words, in the first and second manufacturing methods, the irregular surface is formed on the glass substrate 1 in accordance with the shape of the mesh structure 2, and in the third manufacturing method, the honing powder 1 is used. The conflicting shape of 8 has an irregular rough surface formed on the glass substrate 1. Therefore, in any of the first, second, and third manufacturing methods, the height of each mountain portion and the depth of each valley portion are also different, and the distance between the top of one mountain portion and the top portion of the mountain portion adjacent thereto is also A rough surface area 1 1 will be formed differently for each mountain. As a result, the reflective film 12 formed on the rough surface region 1 1 can have good scattering characteristics. Furthermore, it is not limited to such a rough surface area 1 1 formed on the glass basic paper scale applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please read the note on the back first - I Write this page) amme 1 I 08.* · _1 I ·ϋ ϋ ϋ ϋ Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printed 1252353 A7 B7 V. Invention description (29) Surface of board 1, flat area 1 4 glass The surface of the substrate 1 is still flat. Therefore, an element which is desired to be formed on the surface, such as the correction mark 15 or the like, can be formed on the flat region 14. C: Reflection characteristics of the reflective film The reflection characteristics of the glass substrate 1 formed by the reflective film produced in the rough surface region by the above respective production methods will be described. Fig. 12 is a view showing a device for measuring reflection characteristics. As shown in the figure, in the measuring apparatus, the light 5 is irradiated onto the glass substrate 1 from an angle of 2 5 ° to the normal direction of the glass substrate 1. Next, the intensity of the light reflected by the reflection film 12 on the glass substrate 1 was measured using a light multiplier 6. Here, the measurement of the reflected light is performed while changing the normal direction of the light double meter 6 and the glass substrate 1 to the Θ angle. In addition, in this measurement, as the liquid crystal device is used, as shown in FIG. 2, the glass of the same material as the substrate is disposed on the surface side of the reflective film formed on the glass substrate 1. The substrate 2 (having a thickness of about 0. 7 mm) was measured in a state in which the liquid crystal layer was sandwiched between the substrates. Here, in the above-described first or second inspection method, the above-described measurement is performed on a plurality of glass substrates 1 having different conditions such as the type of etching treatment liquid and the etching time. Similarly, in the third manufacturing method, the glass substrate 1 having a plurality of conditions such as the particle size and the number of the honing agent is subjected to the above measurement. As a result, the representative reflection characteristics of the glass substrate 1 obtained by the above respective production methods are the reflection characteristics shown in Fig. 3 . Figure 1 3 shows the application of the Chinese National Standard (CNS) A4 specification (210 X 297 mm) for each of the above-mentioned glass substrates 1 with the light multiplier angle <9 and the use of the light paper size (please read the back of the note first)事--- Write this page) -I ϋ i_i l·» ϋ 1 1 1 H ϋ mm— ϋ , Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printed 1252353 A7 B7 Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printing 5 OBJECT OF THE INVENTION (30) A graph showing the relationship between the intensity of reflected light measured by the multiplier. Further, the symbols 1 7 and 18 in Fig. 1 show the reflection characteristics of the commercially available reflectors which have been conventionally compared. However, such a reflector is a method in which a liquid crystal is sealed between a pair of substrates, and the substrate is attached in a subsequent manner. That is, it is not provided on the liquid crystal layer side as in the embodiment, but on the opposite side, and it is expected that attention can be paid to this point. As shown in the figure, according to the glass substrate 1 obtained by the above-described production method, it is judged by a simple manufacturing step that good reflection characteristics which are the same as or higher than those of the conventional reflecting plate can be obtained. Specifically, the following. First, when viewed from the reflection characteristic 1 shown in Fig. 3, most of the angles of the angle of view of the viewing angle when actually used as a liquid crystal device appear, and the intensity of the reflected light observed is higher than that of the market. The board is still strong. Therefore, according to the liquid crystal device using the substrate for a liquid crystal device obtained from the glass substrate 1 having the reflection property 19, good display characteristics can be obtained. Next, when viewed from the reflection characteristics 20 and 2 shown in Fig. 3, it is observed that reflected light having a strong intensity can be observed in a relatively narrow range. Thus, in a liquid crystal device employing a S T N (super-twisted filament) liquid crystal mode, a viewing angle of good display quality is obtained by high contrast, which is limited in principle to a relatively narrow range. In other words, the stronger light is not required to be reflected to an angular area wider than the viewing angle at which good display quality can be obtained. Therefore, the glass substrate 1 having the reflection characteristics 20 or 23 of Fig. 3 can be suitably used as the substrate of the liquid crystal device using the STN liquid crystal mode, and the reflection characteristics 2 1 and 2 2 in Fig. 3 are And other counters (please read the note on the back - write this page) -MM MB II * I ΜΙΜ Μ· I MM MM I The standard paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ) -33 - 1252353 A7 B7 Ministry of Economic Affairs, Intellectual Property Bureau, Staff Consumer Cooperatives, Printing 5, Inventions (31) Comparison of the characteristics of the radiation, showing a certain degree of intensity of reflected light in a relatively wide range. Here, in a liquid crystal device using a T N (twisted filament) liquid crystal mode or an S Η (electrode surface perpendicularly uniform) liquid crystal mode, a wider viewing angle can be obtained. Therefore, the glass substrate 1 having the reflection characteristics 2 1 or 2 2 of Fig. 3 can be used as a substrate of a liquid crystal device using a liquid crystal mode or an S Η liquid crystal mode. Further, the reflection characteristics of these glass substrates 1 can be regarded as the same as or lower than those of the conventional liquid crystal device substrate having the reflection characteristics 17 or 18 of Fig. 3. However, the conventional reflecting plate used as a comparison object in Fig. 3 is as described above, and is positioned on the opposite side to the liquid crystal. When such a reflecting plate is used, the optical path difference between the light reflected on the surface of the liquid crystal device substrate and the light reflected to the reflecting film through the liquid crystal layer is caused, so that there is a problem that the display image is double-imaged. In this case, in the substrate for a liquid crystal device according to the present invention, since a reflective film is formed on the liquid crystal side, such a problem does not occur. Therefore, in general, the glass substrate having the reflection characteristics 2 1 or 2 2 of Fig. 3 is suitably used as a substrate for a liquid crystal device. Then, the inventors of the present invention measured the respective characteristic amounts indicating the surface shape of the rough region using the surface roughness meter for each of the glass substrates 1 having the above-described respective reflection characteristics (symbols 19 to 2 3 ). The following description is made as the content of each feature amount of the measurement target. (1) Maximum height R y The maximum height R y represents a feature amount from the top of the highest mountain portion of the rough surface region to the height difference of the valley bottom of the deepest valley portion of the same region. This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please read the note on the back first _____LI-write this page) Order --------- Secret 1252353 A7 ____B7 Five (Invention) (32) (2) Arithmetic mean roughness R a The arithmetic mean roughness R a is obtained by summing the absolute deviations from the specified average line to the measurement curve indicating the surface shape of the rough seam surface area. The average number. (3) Ten-point average roughness R z The ten-point average roughness Rz is the height average of the tops of the five tops of the mountain that are selected in order from the specified average line, and the depth is selected in order. The average depth of the depths of the valleys of the five valleys. (4) The average wavelength S m is a characteristic amount indicating a period average wavelength exceeding a mountain portion or a valley portion of a designated non-inductive zone centered on the average line. Further, in the present embodiment, the strip-shaped region having the width of 1% of the maximum height Ry is set to the non-inductive zone as the center line as the center line, and the average wavelength is measured. In addition, for each of these feature quantities, in JISY Japanese Industrial Standards) B0601 - 19 9 4, ISO (International Organization for Standardization) 4 6 8 - 1 9 8 2, IS 0 3274-1975, IS 0 4287/1 - 1984, Details are given in IS 0 4287/2 — 1984, IS 04288-1985. For the glass substrate 1 having the reflection characteristic of the above-mentioned Figure 3, the paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please read the note on the back page first) Property Bureau employee consumption cooperative printing 1252353 A7 B7 Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printing 5, invention description (33), the measurement results of the above characteristics, the maximum height Ry = 0. 7 5 // m, arithmetic The average roughness R a = 0 . 0 9 # m, the ten-point average rough degree Rz = 0.7 //m, and the average wavelength Sm=l 7 //m. Further, each feature quantity of the glass substrate 1 having the reflection characteristic 20, the maximum height Ry = 0. 6 0 // m, arithmetic mean roughness R a = 〇.〇8//m, ten point average roughness Rz = 〇.45//m, average wavelength Sm = 1 1 //m. As described above, the glass substrate 1 having the reflection characteristics 20 is a suitable substrate for a liquid crystal device employing the S T N liquid crystal mode. From this, it is understood that the rough surface area of the substrate used in the liquid crystal device of the S T N liquid crystal mode is preferably such that the maximum heights Ry and R z are as small as possible. Further, by making the arithmetic mean roughness R a small, it is possible to suppress the unevenness caused by the inner surface undulation of the thickness of the liquid crystal layer. Next, each feature amount of the glass substrate 1 having the reflection property 21, the maximum height Ry = 1.75//m, the arithmetic mean roughness Ra = 0.24//m, the ten-point average roughness Rz = 1.57em, and the average wavelength Sm = 22//m. The characteristic quantity of the glass substrate 1 having the reflection characteristic 2 2, the maximum height Ry = 0.9 5 / / m, the arithmetic mean roughness · Ra = 〇. 1 2 / m, ten point average roughness Rz = O.85 / /m, average wavelength Sm As described above, the glass substrate 1 having the reflection characteristics 22 is a good substrate for a liquid crystal device using a TN type or S Η type liquid crystal mode. Therefore, it is understood that the rough surface area of the substrate used in the liquid crystal device of the Τ-type or S-type liquid crystal mode is preferably a shape in which the ten-point average roughness R ζ is relatively large, or the average wavelength S m is Become a comparison (please read the note on the back first - I write this page)

a— Mmmmm —Hi ϋ · i·— I § ϋ ϋ I 祕 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -30 - 1252353 A7 經濟部智慧財產局員工消費合作社印製 _________Β7_____ 五、發明說明(34) 小之形狀。 又,具有反射特性2 3之玻璃基板1的各特徵量,最 大高度Ry = 0 . 9 8 //πί,算術平均粗糙度R a = 〇· 1 3//m,十點平均粗糙度Rz = 0.80//m,平均 波長 Sm=42//m。 如此,因應形成在液晶裝置之基板(玻璃基板1 )粗 面區域的形狀,而決定形成在該當區域反射膜之反射特性 。因此,最好是因應欲採用之液晶模式而決定粗糙面區域 之表面形狀,然後選定上述各製造方法之各種條件。 D :變形例 以上爲該發明之實施形態的說明,但上述各實施形態 究竟只是範例而已,在不.脫離本發明之主旨範圍,對上述 實施形態可加以變形。做爲變形例,可考量如以下者。 (1 )於上述實施形態中,在玻璃基板1平坦區域上,雖 然形成有爲使該當玻璃基板和其他基板之位置吻合 所使用的校正標記,但是,亦可形成使用於其他如 以下用途之校正標記。即,亦可將使用於以下用途 之校正標記形成在平坦區域上,例如,轉換元件等 之形成步驟用或像素電極等之形成用;濾色鏡之著 色層、保護層或者遮光層等之形成用;定向膜塗抹 用;密封材印刷用;裁板用;驅動激勵實際安裝用 等。 又,形成在平坦區域上的,並不限於校正標記。即 (請先閱讀背面之注意事填寫本頁) 一裝 訂--------- ^ 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 1252353 A7 B7 五、發明說明(35) ,也可使其他應形成在平坦表面上之各種要素形成 在平坦區域上。例如,也可使生產控制標記等形成 在平坦區域上。所謂生產控制標記,是指爲控制液 晶裝置之製造生產所使用之標記,例批號、機種編 號,或者是將各種製造生產之處理條件記號化之標 記。再者,這些生產控制標記,亦可係爲被數値化 者或條碼化者,或者是代表界定碼等之2維條碼模 式化者。 再者,形成於平坦區域上者並不限於是標記。例如 ,若爲使用於有源矩陣方式液晶裝置之基板時,亦 可在平坦區域上形成掃瞄線或數據線等之配線或代 表TFT、TFD之轉換元件等。更進一步的,亦 可使液晶驅動用半導體集成電路之端子形成在平坦 區域上,亦可形成爲密封材。另,平坦區域之形狀 ,並不限於上述第1〜第3實施形態所示之形狀, 平坦區域之形狀最好是因應形成於其表面上之要素 形狀等。 (2 )於上述實施形態中,校正標記1 5雖是藉由爲形成 反射膜1 2之金屬膜a而形成,但亦可藉由爲 使形成於玻璃基板1之其他層或構件形成之材料, 來形成校正標記1 5。即,例如,藉由遮光板形成 用之鉻或濾色鏡形成用之顏料抗蝕劑,再者,藉由 轉換元件之形成用以鉬爲主成份之金屬等,來形成 校正標記1 5。lit對上述之生產控制標記等亦是同 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事填寫本頁) 裝 -I ·ϋ 1· n I iai^WJ· mmmmm I ϋ _1 1 ϋ 經濟部智慧財產局員工消費合作社印製 1252353 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(36) 樣。 E:液晶裝置之組成 接著,說明利用上述各實施形態相關之液晶裝置用基 板組成液晶裝置之例子。另,以下係爲無源矩陣方式液晶 裝置之組成範例。 (1)反射型液晶裝置 第1 4圖,係爲使用本發明相關液晶裝置用基板之反 射型液晶裝置的組成模式範例剖視圖。如同圖所示,該液 晶裝置係爲隔著密封材3 0 0使前面基板1 〇 〇和背面基 板2 0 0接合,在兩基板間封入液晶4 0 〇而組成者。液 晶4 0 0 ^係例如具有指定之扭轉角的絲狀液晶。於此, 在第1 4圖中,本發明相關之液晶裝置用基板爲使用背面 基板2 0 0。 在前面基板1 0 0之內側(液晶4 0 0側)表面,形 成有遮光層1 0 1、著色層1 0 2及保護層1 〇 3。著色 層102,係爲將著色有任一 R (紅色)、G (綠色)、 B (藍色)之樹脂材料配置排列成指定之圖案者。遮光層 1 0 1,係遮蓋來自著色層1 0 2著色圖案間之間隙的光 線之層。又,保護層103,係不僅保護著色層102, 並扮演使著色層之各著色圖案間的高低差平坦化之角色。 再者,將覆蓋保護層1 0 3表面之緊密性提昇層1 〇 4做 爲底墊,以形成複數透明電極1 0 5。該透明電極1 0 5 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) · (請先閱讀背面之注意事 € 寫本頁) 裝 ill·!訂·! II--- 禮 1252353 A7 B7 五、發明說明(37) ,係爲往指定方向延展形成帶狀之電極,藉由例如I τ〇 等透明導電材料所形成者。在形成有這些透明電極1 0 5 之緊密性提昇層1 0 4表面,藉由定向膜1 0 6覆蓋著。 該定向膜1 0 6,係爲具有聚醯亞胺等之有機薄膜,並施 以不外加電壓時所規定之液晶定向方向的摩擦處理。另一 方面,在前面基板1 0 0之外側表面,配置有移相(介質 )板107及偏振光板108。 另一方面,爲本發明相關液晶裝置用基板之背面基板 2 〇 〇,係於其內側表面具有粗面區域2 0 1和平坦區域 2 0 2。接著,在粗糙面區域2 0 1形成有複數之反射電 極203。具體上,各反射電極203係往與上述透明電 極1 0 5延展方向交叉之方向延展的帶狀電極。在形成有 該反射電極2 0 3之背面基板2 0 0表面,覆蓋著和上述 定向膜106同樣之定向膜204。 於如此之組成中,來自前面基板1 0 0側之外光線, 按照偏振光板1 08、移相(介質)板1 07、前面基板 1 0 0、著色層1 0 2及液晶4 0 0之順序通過後,藉由 反射電極2 0 3反射,沿著和前述相反之路徑從前面基板 1 0 0射出光線。接著,藉此進行反射型顯示。此時,因 應外加在透明電極1 0 5和反射電極2 0 3間之電壓而控 制液晶4 0 0之定向狀態,故可控制顯示影像之明狀態和 暗狀態。 另,雖於第1 4圖中是將無源矩陣方式之液晶裝置做 爲範例,但本發明亦可適用於備有代表TFT、TFD等 本紙張尺度適用中國國家標準(CNS)A4規格(210 χ 297公釐) (請先閱讀背面之注意事 裝--- 填寫本頁) 經濟部智慧財產局員工消費合作社印製 1252353 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(3δ) 轉換元件之有源矩陣方式之液晶裝置。此時,於第1 4圖 之反射電極2 0 3例如形成爲矩形狀,中介著切換元件接 續於配線。另,於設有做爲轉換元件之T F Τ的液晶裝置 中,是不需要形成在前面基板1 0 0之透明電極1 0 5的 圖像形成。 又,於該狀況時,各種之配線或如上述之切換元件等 ,最好是形成在做爲本發明相關之液晶裝置用基板的背面 基板200之中的平坦區域202。另,於此所謂之配線 ,其槪念係除掃瞄線或信息線外,尙包含具備液晶驅動用 之半導體集成電路之端子等。 另,應形成在平坦區域2 0 2上之這些要素,是藉由 和第1 Ε圖及第1 F圖中由金屬膜1 2 a之圖案形成而形 成校正標記1 5之同樣的步驟而形成。即,指定之膜(例 如透明導電材料的膜)在包含有平坦區域2 0 2之背面基 板2 0 0上形成後,藉由對該膜施以蝕刻或光蝕法等,使 被圖案形成爲所期望形狀之配線形成在平坦區域2 0 2上 〇 又,形成在背面基板2 0 0上之要素,並不限於此。 例如,第1 4圖所示之密封材'3 0 0,亦可形成在背面基 板200之平坦區域202上。 (2 )半透過反射型液晶裝置 於第1 4圖所示之反射型液晶裝置中,雖有藉由低電 力就可驅動之優點,但在外光線並不充分的狀況下卻產生 (請先閱讀背面之注意事 裝--- 寫本頁)A— Mmmmm —Hi ϋ · i·— I § ϋ ϋ I The secret paper scale applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -30 - 1252353 A7 Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative print _________Β7_____ V. Description of invention (34) Small shape. Further, each feature quantity of the glass substrate 1 having the reflection characteristic 23, the maximum height Ry = 0. 9 8 // πί, arithmetic mean roughness R a = 〇 · 1 3 / / m, ten point average roughness Rz = 0.80 / / m, the average wavelength Sm = 42 / / m. Thus, in response to the shape of the rough surface region of the substrate (glass substrate 1) of the liquid crystal device, the reflection characteristics of the reflective film formed in the region are determined. Therefore, it is preferable to determine the surface shape of the rough surface region in accordance with the liquid crystal mode to be used, and then select various conditions of the above respective manufacturing methods. D: Modifications The above embodiments of the present invention have been described. However, the above embodiments are merely examples, and the above embodiments may be modified without departing from the spirit and scope of the invention. As a modification, the following may be considered. (1) In the above embodiment, the correction mark used to match the position of the glass substrate and the other substrate is formed in the flat region of the glass substrate 1, but may be used for other corrections as follows. mark. In other words, the correction mark used for the following application may be formed on a flat region, for example, for forming a conversion element or the like, or for forming a pixel electrode or the like; forming a color layer, a protective layer, or a light shielding layer of the color filter; Oriented film coating; sealing material printing; cutting board; driving excitation for actual installation. Further, the formation on the flat area is not limited to the correction mark. That is (please read the note on the back to fill out this page). Binding--------- ^ This paper scale applies to China National Standard (CNS) A4 specification (210 X 297 mm) 1252353 A7 B7 V. Invention Note (35), it is also possible to form other elements which should be formed on a flat surface on a flat area. For example, it is also possible to form a production control mark or the like on a flat area. The production control mark refers to a mark used for controlling the production and production of the liquid crystal device, such as a batch number, a model number, or a mark which marks the processing conditions of various manufacturing processes. Furthermore, these production control flags may be either digitizers or bar coders, or 2-dimensional bar code avatars representing code definitions and the like. Furthermore, the formation on the flat area is not limited to being a mark. For example, when it is used for a substrate of an active matrix type liquid crystal device, wiring such as a scanning line or a data line or a conversion element representing a TFT or a TFD may be formed in a flat region. Further, the terminal of the semiconductor integrated circuit for liquid crystal driving can be formed in a flat region or as a sealing material. Further, the shape of the flat region is not limited to the shapes described in the first to third embodiments, and the shape of the flat region is preferably a shape of an element formed on the surface thereof. (2) In the above embodiment, the correction mark 15 is formed by forming the metal film a of the reflective film 12, but may be formed of other layers or members formed on the glass substrate 1. , to form a correction mark 15 . Namely, for example, a chrome or a color filter for forming a light shielding plate is used, and further, a correction mark 15 is formed by forming a metal such as molybdenum as a main component of the conversion element. Lit is also applicable to the above-mentioned production control mark, etc., in accordance with the Chinese National Standard (CNS) A4 specification (210 X 297 mm). (Please read the back of the note first.) -I ·ϋ 1· n I iai^WJ· mmmmm I ϋ _1 1 ϋ Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printed 1252353 A7 B7 Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printing 5, invention description (36). E: Composition of liquid crystal device Next, an example in which a liquid crystal device is constituted by the substrate for a liquid crystal device according to each of the above embodiments will be described. In addition, the following is an example of the composition of a passive matrix type liquid crystal device. (1) Reflective liquid crystal device Fig. 14 is a cross-sectional view showing a configuration of a reflective liquid crystal device using a substrate for a liquid crystal device according to the present invention. As shown in the figure, the liquid crystal device is formed by bonding the front substrate 1 〇 and the rear substrate 200 to each other via a sealing material 300, and sealing the liquid crystal 40 〇 between the substrates. Liquid crystal 4 0 0 ^ is, for example, a filamentous liquid crystal having a specified twist angle. Here, in Fig. 14, the substrate for a liquid crystal device according to the present invention uses the back substrate 200. On the inner side of the front substrate 100 (the side of the liquid crystal 40 side), a light shielding layer 110, a colored layer 1 0 2, and a protective layer 1 〇 3 are formed. The colored layer 102 is a structure in which a resin material colored with any of R (red), G (green), and B (blue) is arranged in a predetermined pattern. The light-shielding layer 1 0 1 is a layer covering the light from the gap between the colored layers of the colored layer 1 0 2 . Further, the protective layer 103 not only protects the colored layer 102 but also plays a role of flattening the level difference between the respective colored patterns of the colored layer. Further, the adhesion promoting layer 1 〇 4 covering the surface of the protective layer 110 is used as a underpad to form a plurality of transparent electrodes 105. The transparent electrode 1 0 5 This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) · (Please read the back of the note first) Write this page ill·! II--- Etiquette 1252353 A7 B7 V. Inventive Note (37) is to form a strip-shaped electrode in a specified direction, formed by a transparent conductive material such as I τ〇. The surface of the adhesion promoting layer 10 4 on which the transparent electrodes 1 0 5 are formed is covered by the alignment film 106. The alignment film 106 is an organic film having a polyimine or the like and is subjected to a rubbing treatment in a liquid crystal orientation direction which is not required when a voltage is applied. On the other hand, a phase shifting (medium) plate 107 and a polarizing plate 108 are disposed on the outer surface of the front substrate 100. On the other hand, the back substrate 2 〇 基板 of the substrate for a liquid crystal device according to the present invention has a rough surface region 20 1 and a flat region 2 0 2 on the inner surface thereof. Next, a plurality of reflective electrodes 203 are formed in the rough surface region 2 0 1 . Specifically, each of the reflective electrodes 203 is a strip-shaped electrode that extends in a direction intersecting the direction in which the transparent electrode 105 extends. The surface of the rear substrate 200 on which the reflective electrode 203 is formed is covered with the alignment film 204 similar to the above-described alignment film 106. In such a composition, the light from the side of the front substrate 100 side is in the order of the polarizing plate 108, the phase shifting (medium) plate 107, the front substrate 100, the colored layer 1 0 2, and the liquid crystal 4500. After passing, the light is emitted from the front substrate 100 along the opposite path as reflected by the reflective electrode 302. Then, a reflective display is performed thereby. At this time, the orientation state of the liquid crystal 400 is controlled in accordance with the voltage applied between the transparent electrode 105 and the reflective electrode 2 0 3, so that the bright state and the dark state of the display image can be controlled. In addition, although the passive matrix type liquid crystal device is taken as an example in FIG. 14, the present invention can also be applied to the Chinese National Standard (CNS) A4 specification (210) which is provided with the representative TFT, TFD, and the like. χ 297 mm) (Please read the note on the back first---fill this page) Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printed 1252353 A7 B7 Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printing 5, invention description (3δ An active matrix type liquid crystal device that converts components. At this time, the reflective electrode 203 in Fig. 14 is formed, for example, in a rectangular shape, and the switching element is connected to the wiring. Further, in the liquid crystal device provided with T F 做 as the conversion element, image formation of the transparent electrode 1 0 5 formed on the front substrate 1000 is not required. In this case, it is preferable that the wiring or the switching element as described above is formed in the flat region 202 in the back substrate 200 which is the substrate for a liquid crystal device according to the present invention. Further, the term "wiring" as used herein refers to a terminal including a semiconductor integrated circuit for driving a liquid crystal, in addition to a scanning line or an information line. Further, these elements to be formed on the flat region 220 are formed by the same steps as the formation of the correction mark 15 by the pattern of the metal film 1 2 a in the first and first F patterns. . That is, after the specified film (for example, a film of a transparent conductive material) is formed on the back substrate 200 including the flat region 220, the pattern is formed by etching or photo-etching the film. The wiring of the desired shape is formed on the flat region 2 0 2 and the element formed on the back substrate 200 is not limited thereto. For example, the sealing material '300' shown in Fig. 14 may also be formed on the flat region 202 of the rear substrate 200. (2) The transflective liquid crystal device has the advantage of being driven by low power in the reflective liquid crystal device shown in Fig. 4, but is generated when the external light is insufficient (please read first) Note on the back --- write this page)

-ϋ 1· al· ϋ ϋ H ϋ I ϋ 1 ϋ ϋ I 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) ττΤΤτ 1252353 A7 B7 五、發明說明(39) 顯示會變暗之問題。於以下所示之半透過反射型液晶裝置 中,在外光線充分的狀況下時進行反射型顯示,另一方面 在外光線並不充分的狀況下時進行半透過型顯示。 第1 5圖,係爲使用本發明相關液晶裝.置用基板之反 射型液晶裝置的組成模式範例剖視圖。另,第1 5圖所示 液晶裝置之中,對與第1 4圖所示液晶裝置共同部份標示 爲同一符號並省略其說明。 在背面基板2 0 0之內側(液晶4 0 0側)表面之中 的粗糙面區域2 0 1,形成有具開口部2 0 5 a之反射膜 205。接著,在該反射膜205所形成之之背面基板 2 0 0表面,形成有著色層2 0 6及遮光層2 0 7。於第 1 5圖中,做爲遮光層207,雖使用R、G、B3色之 著色層2 0 6所疊成者,但除此之外,亦可藉由樹脂黑色 顏料或多層鉻設置另外遮光層2 0 7。又,覆蓋著色層 2 0 6及遮光層2 0 7之保護層2 0 8爲,將因應背面基 板2 0 0上之粗面區域2 0 1所形成在著色層2 0 6上的 山部和谷部平坦化者。再者,將覆蓋保護層2 0 8之緊密 性提昇層2 0 9做爲底墊,以形成複數透明電極2 1 0。 各透明電極2 1 0,係延展於和前面基板1 0 0上之透明 電極1 0 5交叉方向者,例如藉由I TO等形成者。 另一方面,在背面基板2 0 0外側表面,黏貼有移相 (介質)板2 1 1及偏振光板2 1 2。接著,在偏振光板 2 1 2之外側,配置有背照光5 0 0。該背照光5 0 0 ’ 係具有做爲光源之螢光管5 0 1及將來自螢光管5 0 1之 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事3填寫本頁) 裝 訂--------- 經濟部智慧財產局員工消費合作社印製 1252353 A7 B7 五、發明說明(40) 光線導引到背面基板2 0 0之全面的導光板5 0 2。除此 之外,亦可使用LED (發光二極管)或EL (電致發光 )做爲背照光5 0 0。 於如此之組成中,自前面基板1 0 0側入射之光線係 通過偏振光板1 0 8、移相(介質)板1 0 7、透明電極 210及著色層206等到達反射膜205,藉由該反射 膜2 0 5反射後,依照和之前相反的路徑從前面基板 1 0 0射出光線。 另一方面,從背照光5 0 0射出之光線,係通過偏振 光板2 1 2、移相(介質)板2 1 1而成爲指定之偏振光 ,之後通過設於反射膜2 0 5之開口部2 0 5 a、著色層 206、液晶400、前面基板100、移相(介質)板 10 7及偏振光板1 〇 8。接著,藉此進行穿透型顯示。 另,於第1 5圖中,雖是藉由將各像素分別的開口部 2 0 5 a設置於反射膜2 0 5以實現穿透型顯示,但亦可 如下。即,替代設置開口部205a,亦可藉由將反射膜 2 0 5之厚度爲1 5〜2 0 nm,使其功能是做爲反射率 8 5%前後,穿透率1 〇%前後之半参透反射板。 又’雖於第1 5圖中是將無源矩陣方式之液晶裝置做 爲範例,但本發明亦可適用於備有代表T F T、T F D等 轉換元件之有源矩陣方式之液晶裝置。此時,於第1 5圖 之透明電極1 〇 5例如形成爲矩形狀,隔著轉換元件接續 於配線。另,於設有做爲轉換元件之T F T的液晶裝置中 ,是不需要形成在前面基板1 0 0之透明電極1 〇 5的圖 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事填寫本頁) 丨_裝 % 經濟部智慧財產局員工消費合作社印製 1252353 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(41) 像形成。另,於該狀況時,各種之配線等最好是形成在背 面基板2 0 0之中的平坦區域2 0 2上。 於上述(1 )及(2)所示之液晶裝置中,在前面基 板1 0 0和背面基板2 0 0進行接合時,可使用形成在該 當背面基板2 0 0之校正標記。該校正標記因形成在背面 基板2 0 0之中的平坦區域2 0 2,故可使背面基板 2 0 〇和前面基板1 0 0之位置高精度吻合。其結果,可 減少雙重影或顯示模糊,實現反差比高之顯示。 F :電子機器 其次,對應用以上範例所示之液晶裝置的電子機器進 行說明。如上述這些液晶裝置,係被使用在各種不同之環 境下,且適合於需耗電低之攜帶型機器。 首先,第16A圖爲表示電子機器個例之手提電腦的 組成透視圖。如該圖所示,在手提電腦1 2 2主體之上側 ,設置有本發明相關之液晶裝置1 2 1,此外,在下側設 置輸入部1 2 3。於一般上,大部份是將觸摸板設置在該 種之手提電腦顯示部之前面。因此,在以往,只要是攜帶 型,於顯示部大部份是利用穿透型液晶裝置,但由於透過 型液晶裝置,因需時常利用背照光,而耗電量大,使電池 壽命變短。針對此事,本發明相關之液晶裝置,係亦爲反 射型亦爲半穿透反射型,因顯示是明亮且鮮豔,故適宜於 手提電腦。 其次,第1 6 B圖爲表示電子機器個例之行動電話的 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -ϋ ·ϋ 1 ml· ϋ 1 ϋ^OJ Bi I a.— 1 ϋ ϋ I (請先閱讀背面之注意事^填寫本頁) 禮 1252353 A7 ____ B7 五、發明說明(42) 組成透視圖。如該圖所示,在行動電話1 2 5主體之前面 上方部,設置有本發明相關之液晶裝置1 2 4。行動電話 之使用是不論在室內或室外,而是在所有的環境。特別是 在汽車內使用較多,但是夜間之車內是非常暗。因此,做 爲其之顯示裝置,最好是使用以耗電量低之反射型顯示爲 主,然後視需要可利用輔助光之穿透型顯示的半穿透反射 型之液晶裝置,即,如第1 5圖所示之液晶裝置。於該液 晶裝置1 2 4中,不論是反射型顯示亦或是透過型顯示都 比習知之液晶裝置還明亮,可成爲反差比高之高品味顯示 〇 接著,第1 6 C圖爲表示電子機器個例之手錶組成透 視圖。如該圖所示,在手錶1 2 7主體之中央,設置有本 發明相關之液晶裝置1 2 6。於手錶用途上重要之觀點爲 高級感。該液晶裝置126,明亮且反差高是理所當然, 因由光線之波長所造成之特性變化亦少且變色小。因此, 和習知之液晶裝置比較,其可獲得超高級感之顯示。 (請先閱讀背面之注意事 本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐)-ϋ 1· al· ϋ ϋ H ϋ I ϋ 1 ϋ ϋ I This paper scale applies to China National Standard (CNS) A4 specification (210 X 297 mm) ττΤΤτ 1252353 A7 B7 V. Description of invention (39) Display will be dimmed The problem. In the transflective liquid crystal device shown below, the reflective display is performed when the external light is sufficient, and the transflective display is performed when the external light is not sufficient. Fig. 15 is a cross-sectional view showing a configuration of a reflective liquid crystal device using a substrate for liquid crystal mounting according to the present invention. In the liquid crystal device shown in Fig. 15, the same portions as those of the liquid crystal device shown in Fig. 4 are denoted by the same reference numerals, and their description will be omitted. A reflective film 205 having an opening portion 2 0 5 a is formed in the rough surface region 20 1 on the inner surface of the rear substrate 200 (the liquid crystal side 40). Next, a colored layer 205 and a light-shielding layer 207 are formed on the surface of the back substrate 200 formed by the reflective film 205. In Fig. 15, as the light shielding layer 207, although the color layer of the R, G, and B colors is overlapped by the color layer 206, in addition, it may be provided by a resin black pigment or a plurality of layers of chromium. Shading layer 2 0 7. Moreover, the protective layer 208 covering the colored layer 060 and the light-shielding layer 207 is a mountain portion formed on the colored layer 205 in response to the rough surface region 20 1 on the back substrate 2000. The valley is flattened. Further, a tightness enhancing layer 2 0 9 covering the protective layer 202 is used as a bottom pad to form a plurality of transparent electrodes 2 1 0. Each of the transparent electrodes 2 10 is extended in a direction intersecting with the transparent electrodes 1 0 5 on the front substrate 100, for example, by I TO or the like. On the other hand, a phase shifting (medium) plate 2 1 1 and a polarizing plate 2 1 2 are adhered to the outer surface of the rear substrate 200. Next, on the outer side of the polarizing plate 2 1 2, backlight 0 0 0 is disposed. The backlight 5 0 0 ' has a fluorescent tube 50 1 as a light source and the paper size from the fluorescent tube 5 0 1 is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please Read the back of the note first 3 fill this page) Binding --------- Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printing 1252353 A7 B7 V. Invention description (40) Light guide to the back substrate 2 0 0 The comprehensive light guide plate 5 0 2 . In addition to this, LED (Light Emitting Diode) or EL (Electro Luminescence) can also be used as backlight 50. In such a composition, the light incident from the side of the front substrate 1000 passes through the polarizing plate 108, the phase shifting (medium) plate 107, the transparent electrode 210, the coloring layer 206, and the like to reach the reflective film 205. After the reflection film 205 is reflected, light is emitted from the front substrate 100 in accordance with the path opposite thereto. On the other hand, the light emitted from the backlight 105 is passed through the polarizing plate 2 1 2, the phase shifting (medium) plate 2 1 1 to become a designated polarized light, and then passed through the opening portion of the reflecting film 250. 2 0 5 a, colored layer 206, liquid crystal 400, front substrate 100, phase shifting (medium) plate 10 7 and polarizing plate 1 〇8. Next, a penetrating display is performed thereby. Further, in Fig. 15, the transmissive display is realized by providing the opening portion 2 0 5 a of each pixel to the reflective film 2 0 5 , but it may be as follows. That is, instead of providing the opening portion 205a, the thickness of the reflective film 2 0 5 may be 15 to 20 nm, so that the function is as before and after the reflectance of 85%, and the transmittance is 1% or so. Reflect the reflector. Further, although the passive matrix type liquid crystal device is taken as an example in Fig. 15, the present invention is also applicable to an active matrix type liquid crystal device including conversion elements such as T F T and T F D . At this time, the transparent electrode 1 〇 5 in Fig. 15 is formed, for example, in a rectangular shape, and is connected to the wiring via a conversion element. Further, in the liquid crystal device having the TFT as the conversion element, it is not necessary to form the transparent electrode 1 〇 5 of the front substrate 1000. The paper size of the paper is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297).公) (Please read the note on the back to fill out this page) 丨_装% Ministry of Economic Affairs Intellectual Property Bureau Employees Consumption Cooperative Printed 1252353 Ministry of Economic Affairs Intellectual Property Bureau Employees Consumption Cooperative Printed A7 B7 V. Invention Description (41) Image form. Further, in this case, various wirings and the like are preferably formed on the flat region 2 0 2 among the back substrate 200. In the liquid crystal device shown in the above (1) and (2), when the front substrate 100 and the rear substrate 200 are joined, a correction mark formed on the back substrate 200 can be used. Since the correction mark is formed in the flat region 2 0 2 of the back substrate 200, the position of the back substrate 20 〇 and the front substrate 100 can be accurately matched. As a result, double shadow or display blur can be reduced, and display with high contrast ratio can be realized. F: Electronic machine Next, an electronic machine to which the liquid crystal device shown in the above example is applied will be described. Such liquid crystal devices as described above are used in various environments and are suitable for portable machines requiring low power consumption. First, Fig. 16A is a perspective view showing the composition of a portable computer of an example of an electronic apparatus. As shown in the figure, a liquid crystal device 1 2 1 according to the present invention is provided on the upper side of the main body of the portable computer 1 2 2, and an input unit 1 2 3 is provided on the lower side. In general, most of the touch panels are placed in front of the display portion of the laptop. Therefore, in the past, as long as it is a portable type, a transmissive liquid crystal device is used in most of the display unit. However, since the transmissive liquid crystal device often uses backlighting, the power consumption is large, and the battery life is shortened. In view of this, the liquid crystal device according to the present invention is also of a reflective type and a transflective type, and is suitable for a portable computer because the display is bright and vivid. Secondly, Figure 16B shows the paper size of the mobile phone that shows an example of an electronic device. The Chinese National Standard (CNS) A4 specification (210 X 297 mm) - ϋ · ϋ 1 ml · ϋ 1 ϋ ^ OJ Bi I A.— 1 ϋ ϋ I (Please read the note on the back ^ fill this page) Gift 1252353 A7 ____ B7 V. Invention Description (42) Compose the perspective. As shown in the figure, a liquid crystal device 1 2 4 according to the present invention is provided above the front surface of the main body of the mobile telephone 1 2 5 . The use of mobile phones is whether indoors or outdoors, but in all environments. Especially in cars, it is very dark, but the car at night is very dark. Therefore, as the display device for the display device, it is preferable to use a transflective type liquid crystal device which mainly uses a reflective type display having a low power consumption and then can use a transmissive display of auxiliary light as needed, that is, The liquid crystal device shown in Fig. 15. In the liquid crystal device 1 24, both the reflective display and the transmissive display are brighter than the conventional liquid crystal device, and the contrast display can be made high. The first picture shows the electronic device. The watches of the examples form a perspective view. As shown in the figure, a liquid crystal device 1 2 6 according to the present invention is provided at the center of the main body of the wristwatch 1 27 . An important point of view for the use of watches is a sense of quality. It is a matter of course that the liquid crystal device 126 is bright and has a high contrast, and the change in characteristics due to the wavelength of the light is small and the discoloration is small. Therefore, compared with the conventional liquid crystal device, it is possible to obtain a super-high-level display. (Please read the note on the back first.) Printed by the Intellectual Property Office of the Ministry of Economic Affairs, the Consumers' Cooperatives. This paper scale applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm).

Claims (1)

12523531252353 %年工月ti:丨修(愁)正本 第8 9 1 1 23 1 4號專利申請案 中文申請專利範圍修正本 民國9 4年2月5日修正 1 · 一種液晶裝置用基板,是在基板的表面,設有: 由平坦狀區域所形成的平坦區域、及形成有微細狀山部與 谷部的粗面區域,前述粗面區域內的前述山部,其頂上部 爲含有前述平坦區域的平面以下之高度的液晶裝置用基板 ,其特徵爲: 在前述平坦區域內的局部與前述粗面區域之前述基板 表面’分別形成材料相同的金屬膜,並由該金屬膜在前述 粗面區域形成用於反射型顯示的反射膜,且由該金屬膜在 前述平坦區域形成有指定的標記。 2 ·如申請專利範圍第1項之液晶裝置用基板,其中 Βϋ述指定的標記,係校正標記。 3 ·如申請專利範圍第1項之液晶裝置用基板,其中 前述指定的標記,係工程管理標記。 4 ·如申請專利範圍第1項之液晶裝置用基板,其中 在前述平坦區域形成有配線。 5 .如申請專利範圍第1項之液晶裝置用基板,其中 在前述平坦區域形成有密封材。 6 ·如申請專利範圍第1 、2、3、4或5項之液晶 裝置用基板,其中前述粗面區域之最大高度Ry係0 . 2 至3//m、前述算術平均粗糙度Ra係〇 . 0 2至0 · 3 “ m、前述十點平均粗糙度R z係0 · 1至2 . 5 // m, 2 1252353 前述平均波長S m係4至6 Ο // m。 7 .如申請專利範圍第1 、2、3、4或5項之液晶 裝置用基板’其中述粗面區域之最大局度Ry係1 · 5 至2 . 0 a m、前述算術平均粗糙度R a係〇 . 1 5至 0 · 3 μ m、前述十點平均粗糙度R z係1 . 3至1 · 8 μ m,前述平均波長S m係1 5至2 5 // m。 8 ·如申請專利範圍第1 、2、3 、4或5項之液晶 裝置用基板,其中前述粗面區域之最大高度Ry係0 · 7 至1 · 2 // m、前述算術平均粗糙度R a係〇 . 1至 〇· 2//m、前述十點平均粗糙度Rz係0 · 5至1 ·〇 M m,前述平均波長S m係3 5至5 0 // m。 9 ·如申請專利範圍第1、2、3、4或5項之液晶 裝置用基板’其中bu述粗面區域之最大局度Ry係0 . 6 至1 . 2//m、前述算術平均粗糙度Ra係〇 . 05至 〇.1 5//m、前述十點平均粗糙度Rz係〇 · 5至 1 · 0 // m,前述平均波長S m係1 5至2 5 // m。 1〇.如申請專利範圍第1 、2 、3 、4或5項之液 晶裝置用基板,其中前述粗面區域之最大高度R y係 〇.4至1 · 0 // m、前述算術平均粗糙度R a係 〇.04至0 . 1 0//m、前述十點平均粗糙度Rz係 〇· 3至0 · 8//m,前述平均波長Sm係8至1 5//m 〇 1 1 .如申請專利範圍第1 、2、3 、4或5項之液 晶裝置用基板’其中則述粗面區域之最大局度R y係 -2- 3 1252353 〇· 8至1 · 5 // m、前述算術平均粗糙度R a係 〇· 05至0 · 15//m、前述十點平均粗糙度Rz 〇· 7至1 · 3 // m,前述平均波長S m係8至1 5 〇 1 2 · —種液晶裝置,其特徵爲: 挾持液晶層來構成液晶裝置的一對基板中的其中 的基板’是申請專利範圍第1至1 1項之任一項之液 置用基板’前述液晶裝置用基板之形成前述平坦區域 述粗面區域的基板表面,是配置成前述液晶層側。 1 3 . —種液晶裝置的製造方法,係於一對基板 持液晶層而成的液晶裝置的製造方法,其特徵爲: 具有: 將前述一對基板之中,位於觀察側的相反側之一 板之前述液晶層側的表面的一部份,藉由遮罩材覆蓋 程;和 在前述表面之中,由前述遮罩材所覆蓋之區域以 區域具有微細狀的山部與谷部,對由前述遮罩材所覆 區域以外的區域進行粗化,而使前述山部的頂上部形 含由前述遮罩材覆蓋之區域的平面以下的高度的工程 去除前述遮罩材的工程;和 在前述基板表面形成金屬膜的工程;和 藉由去除前述金屬膜,使前述金屬膜殘留於前述 化後的區域、及被前述之遮罩構件所覆蓋之區域內的 區域,而同時分別在被前述遮罩材所覆蓋的區域內形 一方 晶裝 及前 間挾 方基 的工 外的 蓋之 成包 ;和 經粗 部分 成指 -3- 4 41252353 定標記,及在前述經粗面化的區域內形成反射型顯示所採 用之反射膜的工程;及 以該粗面區域與另一方基板相對方向的方式,接合前 述一對基板的工程。 1 4 .如申請專利範圍第1 3項之液晶裝置的製造方 法,其中前述一方基板,含有:具有網狀形狀的第1組成 物、及存在於該第1組成物之網間的第2組成物, 前述粗面化的工程,是使用於前述第1組成物與前述 第2組成物處形成不同溶出速度的處理液,對前述一方基 板施以蝕刻,藉此在由前述遮罩材所覆蓋之區域以外的區 域,形成對應前述第1組成物之形狀的前述山部及谷部。 1 5 ·如申請專利範圍第1 3項之液晶裝置之製造方 法,其中前述粗面化工程,是藉由隔著前述遮罩材使粒狀 構件衝擊前述一方基板的表面,而在由該遮罩材所覆蓋之 區域以外的區域形成前述山部及谷部。 1 6 ·如申請專利範圍第1 3、 1 4或1 5項之液晶 裝置的製造方法,其中在前述遮罩材的去除工程之後,對 由該遮罩材所覆蓋之區域以及經前述粗面化的區域施以蝕 刻。 1 7 . —種液晶裝置用基板之製造方法,其特徵爲: 具有: 藉由遮罩材覆蓋基板表面之局部的工程;和 在前述表面之中,由前述遮罩材所覆蓋之區域以外的 區域具有微細狀的山部與谷部,對由前述遮罩材所覆蓋之 -4- 5 1252353 區域以外的區域進行粗化,而使前述山部的頂上部形 含由前述遮罩材覆蓋之區域的平面以下的高度的工程 去除前述遮罩材的工程;和 在前述基板表面形成金屬膜的工程;和 藉由去除前述金屬膜,使前述金屬膜殘留於前述經粗 的區域、及被前述遮罩構件所覆蓋之區域內的部分區 而同時分別在被前述遮罩材所覆蓋的區域內形成指定 ,及在前述經粗面化的區域內形成反射型顯示所採用 射膜的工程。 1 8 .如申請專利範圍第1 7項之液晶裝置用基 製造方法,其中前述基板,含有:具有網狀形狀的第 成物、及存在於該第1組成物之網間的第2組成物, 前述粗面化的工程,是使用於前述第1組成物與 第2組成物處形成不同溶出速度的處理液,對前述基 以蝕刻,藉此在由前述遮罩材所覆蓋之區域以外的區 成對應前述第1組成物之形狀的前述山部及谷部。 1 9 ·如申請專利範圍第1 7項之液晶裝置用基 製造方法,其中前述粗面化工程,是藉由隔著前述遮 使粒狀構件衝擊前述基板的表面,而在由該遮罩材所 之區域以外的區域形成前述山部及谷部。 2 0 .如申請專利範圍第1 7、 1 8或1 9項之 裝置用基板之製造方法,其中在前述遮罩材的去除工 後,對由該遮罩材所覆蓋之區域以及經前述粗面化的 施以蝕刻。 成包 ;和 化後 域, 標記 之反 板之 1組 前述 板施 域形 板之 罩材 覆蓋 液晶 程之 區域 -5-%年工月ti:丨修(愁)本本8 9 1 1 23 1 4 Patent Application Revision of Chinese Patent Application Revision of the Republic of China on February 5, 1949 1 · A substrate for a liquid crystal device, which is on the substrate The surface is provided with: a flat region formed by a flat region, and a rough region formed with a fine mountain portion and a valley portion, wherein the mountain portion in the rough surface region has a flat portion A substrate for a liquid crystal device having a height below the plane, wherein a metal film having the same material is formed in a portion of the flat region and the substrate surface of the rough surface region, and the metal film is formed in the rough surface region. A reflective film for a reflective display in which a specified mark is formed in the flat region. 2. The substrate for a liquid crystal device according to the first aspect of the patent application, wherein the designated mark is a correction mark. 3. The substrate for a liquid crystal device according to claim 1, wherein the designated mark is an engineering management mark. 4. The substrate for a liquid crystal device according to claim 1, wherein the wiring is formed in the flat region. 5. The substrate for a liquid crystal device according to claim 1, wherein a sealing material is formed in the flat region. 6. The substrate for a liquid crystal device according to claim 1, 2, 3, 4 or 5, wherein the maximum height Ry of the rough surface region is 0.2 to 3/m, and the arithmetic mean roughness Ra is 〇 0 2 to 0 · 3 " m, the aforementioned ten-point average roughness R z is 0 · 1 to 2. 5 // m, 2 1252353 The aforementioned average wavelength S m is 4 to 6 Ο // m. In the liquid crystal device substrate of the first, second, third, fourth or fifth aspect of the patent range, the maximum locality Ry of the rough surface region is 1 · 5 to 2.0 mm, and the arithmetic mean roughness R a is 〇. 5 to 0 · 3 μ m, the aforementioned ten-point average roughness R z is 1.3 to 1 · 8 μ m, and the aforementioned average wavelength S m is from 1 5 to 2 5 // m. 8 · As claimed in the patent range The substrate for liquid crystal device of item 2, 3, 4 or 5, wherein the maximum height Ry of the rough surface region is 0 · 7 to 1 · 2 // m, and the arithmetic mean roughness R a is 〇. 1 to 〇· 2 / / m, the aforementioned ten point average roughness Rz is 0 · 5 to 1 · 〇 M m, the aforementioned average wavelength S m is 3 5 to 5 0 / m m. 9 · Patent Application Nos. 1, 2, 3 , 4 or 5 items of liquid crystal device substrate 'where bu The maximum locality Ry of the rough surface region is 0.6 to 1.2./m, the arithmetic mean roughness Ra is 〇. 05 to 1.1 5//m, and the above ten-point average roughness Rz is 〇·5 The above-mentioned average wavelength S m is from 1 5 to 2 5 // m. 1〇. The substrate for a liquid crystal device according to claim 1, 2, 3, 4 or 5, wherein the aforementioned coarse The maximum height of the surface area R y is 〇.4 to 1 · 0 // m, the arithmetic mean roughness R a is 〇.04 to 0. 1 0//m, and the above ten-point average roughness Rz is 〇·3 To 0·8//m, the average wavelength Sm is 8 to 15/m 〇1 1 . The substrate for liquid crystal device of the first, second, third, fourth or fifth aspect of the patent application' The maximum degree of the region R y is -2- 3 1252353 〇 · 8 to 1 · 5 // m, the arithmetic mean roughness R a is 〇 · 05 to 0 · 15 / / m, the above ten point average roughness Rz 〇·7 to 1 · 3 // m, the above-mentioned average wavelength S m is 8 to 15 〇 1 2 · a liquid crystal device characterized by: holding a liquid crystal layer to constitute a substrate of a pair of substrates of the liquid crystal device 'is one of the scope of patent application Nos. 1 to 1 The liquid crystal substrate of the above-mentioned liquid crystal device substrate is formed on the liquid crystal layer side by the surface of the substrate on which the rough region is formed in the flat region. A method for producing a liquid crystal device according to the present invention is a method for producing a liquid crystal device in which a liquid crystal layer is held on a pair of substrates, and is characterized in that: one of the pair of substrates is located on the opposite side of the observation side a portion of the surface of the board on the side of the liquid crystal layer is covered by a masking material; and among the aforementioned surfaces, the area covered by the masking material has a mountainous portion and a valley portion having a fine shape, a process of removing the region other than the region covered by the masking material, and removing the height of the top portion of the mountain portion from the plane of the region covered by the masking material to remove the masking material; a process of forming a metal film on the surface of the substrate; and removing the metal film to leave the metal film in the region after the region and the region covered by the mask member, while being In the area covered by the masking material, a package of one crystal and a front cover of the square base are formed; and the thick portion is indicated by the finger -3- 4 41252353, and the roughening is performed in the foregoing Forming a reflective film for reflective display of the mining project in the region; and as to the roughened surface of the substrate region and the other of the opposite directions, the pre-engagement of said pair of substrates engineering. The method of manufacturing a liquid crystal device according to claim 13 wherein the one substrate comprises a first composition having a mesh shape and a second composition existing between the nets of the first composition. The roughening process is a treatment liquid for forming a different elution rate between the first composition and the second composition, and etching the one substrate to cover the mask material. In the region other than the region, the mountain portion and the valley portion corresponding to the shape of the first composition are formed. The method of manufacturing a liquid crystal device according to claim 13 wherein the roughening process is performed by impinging the granular member against the surface of the one of the substrates via the mask member. The area other than the area covered by the cover material forms the aforementioned mountain portion and valley portion. The method of manufacturing a liquid crystal device according to claim 13, wherein after the removal of the mask material, the area covered by the mask material and the rough surface The area is etched. A method of manufacturing a substrate for a liquid crystal device, comprising: a part of covering a surface of a substrate with a mask; and a surface of the surface covered by the mask material The region has a fine mountain portion and a valley portion, and a region other than the -4- 5 1252353 region covered by the mask material is roughened, and the top portion of the mountain portion is covered by the mask material. a process of removing the height of the region below the plane of the region; and a process of forming a metal film on the surface of the substrate; and removing the metal film to leave the metal film in the rough region and A partial region in the region covered by the mask member is simultaneously designated in the region covered by the mask material, and a project for forming a film for the reflective display in the roughened region. The method of manufacturing a liquid crystal device according to claim 17, wherein the substrate comprises: a first object having a mesh shape and a second composition existing between the nets of the first composition; In the above-described roughening process, a treatment liquid having a different elution rate is formed in the first composition and the second composition, and the base is etched to be outside the region covered by the mask member. The mountain portion and the valley portion corresponding to the shape of the first composition are formed. The method for manufacturing a liquid crystal device according to claim 17, wherein the roughening process is performed by the surface of the substrate by the grain member interposed therebetween. The area other than the area forms the aforementioned mountain and valley parts. The manufacturing method of the substrate for a device according to claim 17, wherein after the removal of the mask material, the area covered by the mask material and the rough The surface is etched. In the package, the post-integration field, the set of the counter-plates of the mark, the cover of the aforementioned plate-applying plate covers the area of the liquid crystal process -5-
TW089112314A 1999-06-24 2000-06-22 Substrate for liquid crystal device and method for fabricating he same, liquid crystal device and method for fabricating the same TWI252353B (en)

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