1232297 玖、發明說明： 【發明所屬之技術領域】 本發明係有關於用在篩選工作件以反應藉由檢查裝置所 產生的檢查結果之裝置及方法。 本申凊案係請求曰本專利申請案第2003_46894號的優先 權"亥申明案的内谷於此併入本案以為參考資料。 【先前技術】 傳統地，使用CCD攝影機（其中” CCD”代表”電耦合元件,，） 的影像處理裝置，係用於執行檢查諸如包括電容器及感應 器之晶片的不同工作件的外觀，其係於複數種電子裝置中 使用。忒等檢查工作件之外觀的檢查裝置係配備篩選（或選 擇或為分類）裝置，用於將經檢查工作件分類成良好產品及 有缺陷產品以反應檢查結果，其之一實例係於曰本專利申 請公開案第2002-48725號中揭露。亦即，作動此筛選裝置 ，藉由CCD攝影機徹底地檢查外觀的工作件，係經由一傾 斜地向下伸長之輸送路徑輸送至一轉台之上表面的外周圍 部分，其中當轉台轉動時該等工作件係在轉台上轉動。於 此，每一工作件藉使用一產生空氣吹送之卸放元件，朝向 一指定位置卸放以反應其之檢查果。 然而，前述的筛選裝置在將一工作件輸送至轉台時有所 問題存在，該一工作件會意外地自轉台落下，或是其會在 轉台上滾動或旋轉，並且無法精確地設定至一位在轉台上 的指定位置。如此造成反應檢查結果將工作件精確分類作 O:\87\87925 DOC4 1232297 業的困難性。 【發明内容] -目的在於提供用於筛選完成檢查之工作件的 其能夠確實地分類並精確地輸送至指定位置 以反應檢查結果。 罝 本發明之工作件篩.選裝置基本上包括一”傾斜”的斜坡用 於連績地輸送，，完成檢查，，的m送單元（例如，一 輸运台）其中複數個工作件保持空間詩暫時地保持來自 ㈣連續輸送的工作件，於其間以指定的節距配置因此該 等工作件係經連續輸送，並提供跳動抑制壁用於抑制工作 件在斜坡與工作件保持空間之間在一指定位置處意外地跳 動，以及-卸放單元用於將自輸送單元輸送至該處的每一 工作件’在一指定卸放位置處卸放以反應藉由一檢查單元 所產生的檢查結果。 亦即’將完成檢查的工作件經由斜坡轉送至輸送單元之 工作件保持空間，接著，其經進—步輸送並卸放。此外， 本發明之特徵在於在斜坡與輸送單元之工作件保持空間之 間配置-跳動抑制壁，為了抑制工作件意外地朝向外側跳 動0 因此，即使當劇烈地自斜坡輸送工作件時，其能夠確實— 並安全地於工作件保持空間中保持該工作件，不致導致朝. 向外側跳動。藉由輸送單元輪送工作件，接著，藉由卸放 單元在指定的卸放位置處適當地卸放以反應其之檢查結果 。因此，能夠確實地分類並鑑別介於良好，.產品與有缺陷產 0 \87\87925.DOC4 12322971232297 (1) Description of the invention: [Technical field to which the invention belongs] The present invention relates to a device and a method for screening work pieces to reflect an inspection result produced by an inspection device. This application is a request for the right of priority of this patent application No. 2003_46894 " Inner valley of the Hai Shenming case is hereby incorporated into this case for reference. [Prior art] Conventionally, an image processing device using a CCD camera (where "CCD" stands for "electrically coupled element,") is used to perform inspection of the appearance of different work pieces such as a wafer including a capacitor and a sensor. Used in multiple electronic devices. The inspection devices that inspect the appearance of work pieces are equipped with screening (or selection or classification) devices for classifying the work pieces into good products and defective products to reflect the inspection results. An example of this is disclosed in Japanese Patent Application Laid-Open No. 2002-48725. That is, the work piece which operates the screening device to thoroughly check the appearance by the CCD camera is conveyed through an obliquely downwardly elongated conveyance. The path is conveyed to the outer peripheral part of the upper surface of a turntable, where the work pieces are rotated on the turntable when the turntable is rotated. Here, each work piece is directed to a designated position by using a discharge element that generates air blow. Discharge to reflect its inspection results. However, the aforementioned screening device has problems in conveying a work piece to the turntable. The work piece may accidentally fall from the turntable, or it may roll or rotate on the turntable, and it cannot be accurately set to a specified position on the turntable. This results in the reaction check result accurately classifying the work piece as O: \ 87 \ 87925 DOC4 1232297 [Summary of the invention]-The purpose is to provide a work piece for screening completed inspections that can be reliably classified and accurately transported to a designated location to reflect the inspection results. 工作 Workpiece of the present invention The sieve.selection device basically includes a "inclined" slope for continuous delivery, completion of inspection, and an m-sending unit (for example, a transport table) in which a plurality of work pieces maintain a space. Poems temporarily remain from ㈣ Continuously conveyed work pieces are arranged at a specified pitch during these operations. Therefore, these work pieces are continuously conveyed and a runout suppression wall is provided to prevent the work pieces from being accidentally accidentally located at a specified position between the slope and the work piece holding space. Runout, and-the unloading unit is used to transfer each work piece from the transport unit there to a unloading at a designated unloading position in response to a The inspection result produced by the inspection unit. That is, the work piece that has completed the inspection is transferred to the work piece holding space of the conveying unit via the slope, and then it is conveyed and unloaded step by step. In addition, the present invention is characterized by A runout suppression wall is arranged between the work piece holding space of the conveying unit and the work piece to prevent the work piece from unexpectedly bouncing toward the outside. Therefore, even when the work piece is conveyed from the ramp violently, it can be surely and securely held by the work piece. Keeping the work piece in the space will not cause it to bounce outward. The work piece is rotated by the conveying unit, and then the discharge unit is appropriately discharged at the designated discharge position to reflect the inspection result. Therefore , Can be accurately classified and identified between good, products and defective products 0 \ 87 \ 87925.DOC4 1232297
之底盤係經設定大體上與辅助輸送部分之上表面同高度 於此’構成一開口用以部分地切去中空部分之周圍壁？ 係位在輔助輸送部分之上表面的正上方。 土The chassis is set to be approximately the same height as the upper surface of the auxiliary conveying section. Here, is an opening formed to partially cut off the surrounding wall of the hollow section? It is positioned directly above the upper surface of the auxiliary conveying section. earth
防止工作件意外地偏離位置及滾動； ’能夠將中空部分的 上表面。因此，能夠 並且能夠確實地以一籲 適當位置將工作件朝向該辅助輸送單元輸送。 此外，在輸送單元之側表面與中空部分之周圍表面間配 置一間隙，換言之，介於工作件保持空間與輸送單元之一 部分間的開口，用於將工作件轉送至該辅助輸送單元，藉 此當輸送單元受轉動時，能夠在輸送單元與外罩之間將工 作件接住。由於存在上述間隙，所以輸送單元能夠平穩地 轉動而不致直接地與外罩之中空部分的周圍表面接觸。 再者，容許工作件排放的一排放通道，.係配置在輸送單 O:\87\87925.DOC4 -9- 1232297 下“則#對於該輔助輸送單元轉動’因此能夠將盔 法輸送至該輔助&技留一 …、 卸放至外側“早疋之工作件，安全地經由排放通道 ”如上所述’當該輸送單元無法將工作件輸送至辅助輸送 早疋因此工作件仍留存在工作件保持空間中時，能夠安全 字作件、·.：由排放通道卸放至外側。亦即，能夠避免該 無法輸送至輔助輪送單元並仍留存在工作件保持空間中的 工作件’發生對自斜坡導入新近之另外工作件造成阻礙無 :進入，作件保持空間中的狀況，以及避免發生複數個工 4件錯>地進人相同的工作件保持㈣中的狀況。因此， 能夠避免因無法鏗別工作件之對準狀況而無法與工作件之 對準狀況相符地連續產生檢查結果的不相容情況發生。 再者，輸送單元及輔助輸送單元在相互會合的指定位置 處：於相對移動速度下彼此相互配合；並且卸放單元能夠 將被自輔助輸送單元輸送至該處的工作件卸放。亦即，在 二位置處大體上係固定在相同的相對移動速 作件定位在輸送單元巾以及在辅助輸料元中詩接受工 作件的位置。因此，能夠平穩無困難地將工作件自輸送單 疋輪运至輔助輪送單元（亦即，自輸送台至筛選台）。 :發明之-工作件篩選方法，根本上包括三步驟，亦即 ’一第-輪❹制於㈣斜坡連續地輸送完成檢查之工 作件第二输送步驟用於獨立地放置該等自斜坡連續地 輸达的工作件，進入複數個工作件保持空間中，該等空間 係連續地坐落在接近斜坡處並於其間以指'定的節距配置， O:\87\87925.DOC4 -10- 1232297 =二空間結合一跳動抑制壁用於抑制工作件自空間跳 :以及卸放步驟用於在-指定位置處卸放該每 工作件’與其之檢查結果相一致。 根據工作件篩選方法1連續地自斜坡轉送至輸送單元 =二作件，能夠確實並安全地保持在每1作件保持 ::之内御 i’不致意外地跳動到輸送單元之外側；因此， :―工作件能夠確實地藉由輸送單元輪送，並 中接受篩選。 如上所述，其之特徵在於輸送單元移動一與一工作件命 持空間對應的節距的時間，經設^短於每_卫作件自斜域 轉送的時間間隔。亦即’甚至當下個工作件係在介於相鄰 工作件保持空間之間的―中間位置處自斜坡供給時，不久 即到下個工作件保持空間用以安全地將下個玉作件保持於 其中。因A，能夠確實地避免發生工作件無法保持在工作 件保持空間中的情況’或是複數個工作件錯誤地保持在相 同工作件保持空間中的情況。亦gp，能夠防止卫作件跳動 到輸达單兀之外側；i能夠冑免發生無法鑑別工作件之對 準員序因為複數個工作件能夠確實地防止錯誤地保持在 相同的工作件保持空間中。 【實施方式】 本發明將相關於伴隨圖式經由實例作進一步地詳細說明。 圖^系為一前視圖，顯示本發明之一較佳具體實施例之配 備:筛選單S 4G的—外觀檢查裝置1G。外觀檢查裝置10之 下部分係藉由一方形板狀底座12所建構而成，軌道11係鋪 O:\87\87925.DOC4 1232297 設在該底座上。一工作件供給單元2〇、一檢查單元3〇、以 及筛選單元40係配置在底座12之上表面上，致使能夠沿著 圖1中左右方向上之軌道11而自由地調整其之位置。 工作件供給單元20之下部分係藉由一與執道丨丨嚙合的移 動載運器21建構而成，藉此藉由沿著該執道丨丨而移動該移 動載運器21，能夠將該工作件供給單元2〇設定在底座^上 的一任意位置。此外，能夠藉由調整螺釘（未顯示）以一三維 定位方式調整該移動載運器21，其能夠於一垂直方向上或 下移動J並能夠於與圖丨之紙張垂直的一方向上前後地移動 (/、中月j側代纟月向）。具有一馬達的一振動產生器^，係 附裝在移動載運器21之上表面上。用於將一工作件15(見圖 5)輸运至檢查單元3〇的一進料器23，係附裝在振動產生器 ^之上表面上。進料器23之尖端部分突出並係朝向該檢查 早元3 0伸長。 用於暫時地保持工作件！ 5的一漏斗2 4係配置在該進料器 23上’以及用於將保持在漏斗24中的工作件15供給至該進 ^23的一供給滑槽25，係配置在漏斗24之-下端部部分 7亦即’當傳動該振動產生器以同時該漏斗Μ係將工 車月向進料23供給時’振動該進料器23致使工作件 對：檢查單元3〇移動。因此，-系列之工作件係線性地 :連續地朝向進料器23之尖端部分移動。 二Ϊ:7"30係安裝在該外觀檢查裝置1〇中，其之用於執 仃4双查作業的主 體係配置在-移動載運器31之上表面上， 為糸與執道11喃合並能夠沿著位在，底座12上的軌道 O:\87\87925.DOC4 -12- 1232297 11固定在-任意的位置處。移動載運器31之上側部分，係 稍微朝向工作件供給單元20之進料器23的尖端部分彎曲。 一平板狀的底板32係附裝至移動載運器3丨之上側部分的上 端部，致使其之上表面係朝向進料器23傾斜。使用作為用 於將”完成檢查”之工作件15自檢查單元3〇卸放的一斜坡（或 為一坡道）的一卸放滑槽33，係附裝至底板32之中心區域。 此外，構成一傳動孔34用以穿·過底板32之中心區域，俾便 獲付一工作件1 5之下表面的影像。 … 卸放滑槽33係附裝至位在移動載運器3丨之側邊的傳動孔_ 34之周圍部分，其中其之該表面係構成為類似一通道，其 之杈截面係與一半環形狀相一致。配備用於在工作件15之 個別側邊上獲得影像之複數構件的一圓筒狀互連構件35 , 係附裝在底板32之上表面上，其中其係構成一與該進料器-23及卸放滑槽33互連的一路徑。 四具CCD攝影機36a及36b(為了方便起見，圖“堇顯示二 攝影機；然而，實際上提供有四具攝影機），係沿著環繞互籲 連構件3 5之周圍於其間以相等間隔配置，為了獲得自進料 器23之尖端部分、自其之個別側邊落下之工作件丨5的影像· 。此外，二CCD攝影機36c及30d係分別地配置在互連構件 3 5之上側邊及下側邊，為了獲得工作件丨5之相關於其之上 表面及下表面的影像。亦即，本具體實施例經設計用以獲 _ 得工作件15在六側邊上的影像。當然，本具體實施例能夠 經修改用以僅提供四具CCD攝影機36a及36b，因而實現對 工作件1 5之四側邊作檢查。可交替地，其'能夠經修改用以 O:\87\87925.DOC4 -13 - 1232297 將四具CCD攝影機36a及36b與一附加的CCD攝影機結合， 用於獲得工作件15之一上表面影像或是一下表面影像，因 而實現對工作件1 5之五側邊作檢查。 一反射鏡38a係經由一托架37a配置位在互連構件35之上 表面的上方。亦即，CCD攝影機36c能夠藉由反射鏡38a之 反射而能夠獲得工作件15之上表面的一影像。同樣地，一 反射鏡38b係經由一托架37b配置位在底板32之下表面的下 方，因此，CCD攝影機36(1能夠藉由反射鏡38b之反射而能 夠獲得工作件15之下表面的_景彡像。 筛選單元40係根據由CCD攝影機3以、3仍、…所產生的 影像收集結果，藉由一控制裝置（未顯示）控制，因此其能夠 疋成工作件15之篩選作業。圖丨至3及圖6中所示係為篩選單 元40的細節，其中該篩選單元4〇包括一位在其之下側邊中-的移動載運器，以及一輸送台42，以及一位在其之上側 邊中的師選（或分類）台43。移動載運器41係與執道"唾合， ，、月b夠&著位在底座12上的執道丨丨而能夠經調整位在適當籲 位置。具體地’其包含一具有一電動馬達的傳動機構44， 可轉動地傳動該輸送台42、以及一具有一電動馬達的傳動， 機構45，可轉動地傳動該篩選台43。 輸送台42係安裝在一外罩46中，其係配置在位於工作件 供給單元20之側邊中該移動載運器〇之上表面的末端部分 上°其包含一具有輪齒及凹口 47的齒輪狀轉動主體，該等 輪齒及凹口 47於其間係以指定的節距可交替地且周圍地配 置。轉動主體之一中心卓由4 R在咖/由^ . 8係與傳動機構44之電動馬達的 O:\87\87925.DOC4 • 14 - 1232297 傳動軸44a互連，因此該電動馬達一經傳動則該輸送台42 係於-順時針方向”a"(由篩„元4〇之±側邊觀視）轉動。 :此構成母凹口 47，其之上游側表面（於輸送台42之轉 動方向上觀視）係沿著輸送台42之一直徑方向配置，以及其 之下游側表面係朝向輸送台42之下游側邊傾斜。 環狀中空部分49係構成在外罩46之上表面上，因此該 輪运台42係以一可轉動方式容納在該中空部分49中。一工 作件保持空間50係由中空部分49之一周圍壁及一底部 49b(見圖4及圖6)，以及輸送台42之每一凹口 47所包圍，因一. 此藉由該等凹口 47所界定的複數個工作件保持空間，係於 該中空部分49中環繞著輸送台42周圍地配置。於此，由每 一凹口 47所界定的底部49b之一部分的面積，係設定為足夠 地大於將一工作件15容納於其中的一指定面積。 與卸放滑槽33之下端部部分連通的一孔46a，係構成在外 罩46之一端部處。亦即，卸放滑槽33之斜坡係經由孔46&與 中空部分49之内側（亦即，工作件保持空間5〇之内側）連通。_ 偶然地’中空部分49之周圍壁49a及輸送台42係分別地設定 至指定高度或是較高位置，俾便確實地防止受驅使激烈地， 自卸放滑槽33卸放之工作件15跑開。如此建構一跳動抑制^ 壁’用於抑制工作件15意外地跳動。 ~ 例如’當工作件15之指定尺寸界定為1公厘χ 0.5公厘χ 〇.5 公厘時，較佳地將中空部分49之周圍壁49a的高度及輸送台 42之高度設定為20公厘或更高。此外，如圖4B及圖6中所示 ，輸送台42係配置在中空部分49之内側，對著周圍壁49a具 O:\87\87925 DOC4 -15 - 1232297 有間隙49d #便防止工作件i 5意外地夾住在外罩μ與輸送 〇 42之間’具體地’間隙49d係構成在與孔仏連通的指定 位置處’其係接近中空部分49之周圍與於方向乂，上轉動的 輪送台42結合，俾便朝向篩選台43輸送工作件15，因此能 夠確實地防止經輸送的工作件15意外地夹住在外罩仏與輸 送台42之間。間隙49d係構成在壁術上，位在一與孔偏接 近的至少部分對應的—區域中；具體地，間隙_係構成在 壁49a上’位在於方向”a”上的一區域中，其之範圍係自接 近孔46a的至少部分朝向接近篩選台43的部分。於此狀況中m ’較佳地，介於中空部分49之底部桃與間隙_之下端部 間所量測的高度係設定為8公厘或更高。 如圖4中所示，與篩選台43相對配置的中空部分49之底部， 49b的相對部分，係經切割為—孤狀，其μ送台u部分地 自底部49b突出，並因而位在篩選台43的上方。此外，於本 ㈣t使㈣為_㈣部分（或是一旁通部分）並且其之尖 端部分係向下地配置（見圖4中的左側部分）的一排放通道# 49c ’係在輸送台42之轉動方向的下游側邊中沿著底部桃 之截斷部分的外周圍而構成。再者，一工作件取回部分（未. 顯示)用於取回經由排放通道49c輸送至該處的該工作㈣ ’係配置在排放通道49e之下端部部分中。因此，當經由卸 放滑槽33輸送工作件15同時一經傳動該傳動機構44而轉動 輸运台42時，將工作件15經由孔術引導進入該工作件保持 空間50中，並在轉動該輸送台42時在中空部分Μ之底部_ 上轉動。 O:\87\87925.DOC4 -16- 1232297 師選台43係經由其之—_心糾與傳動機構以一傳動 :“5a互連。師選台43之上表面與中空部分钧之底部4外相 父在高度上係為降低的，因此當其之外㈣部分大^ 中空部分49之底部49b之截取部分相配合時，㉟篩選台^ 係在箭頭方向，’b”（亦即，由圖2中的上側邊觀視的反時針方 向）上轉動。—玉作件接受部分…係配置在該筛選台43之 上表面上的周圍部分中，為了接受由輸送台42所輸送的工 作件15 H作件接受部分43a仙橡膠板製成，俾便防止 工作件15在其上滑動。 么一位置谓測感應器52係配置在篩選台43上方，接近輸送 。42的一指定位置處，俾便偵測被輸送至篩選台u上的工 作件15。此外，四排氣裝置53a、53b、53c及53d係配置位 在與輸送台42相對的篩選台43之外周圍部分上方，並沿著 該部分於其間的指定距離處。再者，一良好產品儲存盒及一 有缺陷產品儲存盒（未顯示），係配置在篩選台43之末端部分 下方，垂直地與該等排氣裝置53a、53b、53c及53d相對。 丨 師選台43接受藉由輸送台42連續地輸送至該處的該等工 作件1 5 ,因此工作件丨5係在其間指定的距離處，周圍地配· 置在工作件接受部分43a之上表面上；因而，其分別地被輸 迗至前述的該等盒中。具體地，當根據該檢查單元30所產 生之檢查結果，而鑑別該工作件15為一良好產品時，例如 ’當工作件15越過該良好產品儲存盒時，啟動該排氣裝置 5 3 a用以將工作件1 5吹送進入該良好產品儲存盒。當鑑別該 工作件1 5為一有缺陷產品時，例如，當工作件1 5越過該有 O:\87\87925 DOC4 -17- 1232297 缺陷產品储存盒時，啟動該排氣裝置別用以將工作件15 吹达進入該有缺陷產品儲存盒。因此，能夠鑑別介於良好 產品與有缺陷產品間的該等工作件Η，其係精確地被分別 輸达至良好產品儲存盒及有缺陷產品儲存盒。其他的排氣 裝置53c及53d係適當地啟動用以將工作件15吹送進入對應 的產品儲存盒，以反應缺陷之程度及類型。 〜 外觀檢查裝置1〇進-步包括電氣控制元件，諸如中央處 理單元（mi)'唯讀記憶體（軸）、以及隨機存取記憶體 (RAM)，以及包括除了前述機電元件的ccd攝影機（例如， 36a)之-影像處理元件。該影像處理元件對由攝影機 (例如，叫所獲得的影像執行科處理作業，俾便鑑別介 於良好產品與有缺陷產品間的該等卫作件15。此外，該影 像處理元件係配備-顯示螢幕用於放大及顯示每_工作件 15之六側邊（或是六角形的結構）；因此，操作貢能夠觀視影 像用以視覺上地判斷該工作件15係為一良好產品或為一有 缺陷產品。 接者，將說明利用前述外觀檢查裝置1〇對一待檢查之工 作件15之一實例（見圖5)，諸如-電容器晶片進行外觀檢查 及篩選。在檢查之前，該等卫作件15係保持在工作件供給 單元20之漏斗24之前；接著，開啟外觀檢查裝置1〇之一電 力開關（未顯示），因而分別地啟動前述的單元及元件用以執 行指定的動作。於工作件供給單元2〇中，將指定數目的工 作件1 5，經由供給滑槽25自漏斗24供給至進料器23。 一經傳動該振動產生Prevent the work piece from accidentally deviating from position and rolling; ’It can move the upper surface of the hollow part. Therefore, the work piece can and can be reliably conveyed toward the auxiliary conveying unit in a proper position. In addition, a gap is arranged between the side surface of the conveying unit and the surrounding surface of the hollow portion, in other words, an opening between the work piece holding space and a portion of the conveying unit for transferring the work piece to the auxiliary conveying unit, thereby When the conveying unit is rotated, the work piece can be caught between the conveying unit and the cover. Due to the aforementioned clearance, the conveying unit can smoothly rotate without directly contacting the surrounding surface of the hollow portion of the housing. In addition, a discharge channel that allows the discharge of work pieces is arranged under the conveying order O: \ 87 \ 87925.DOC4 -9-1232297 "then #for the auxiliary conveying unit to rotate 'so that the helmet method can be conveyed to the auxiliary & Technical leave one ..., unloaded to the outside "early work piece, safely via the discharge channel" as described above 'when the conveying unit cannot convey the work piece to the auxiliary conveyance early work piece so the work piece remains in the work piece When it is in the holding space, it is possible to make a safe piece, ...: unloading from the discharge channel to the outside. That is, it can prevent the work piece that cannot be transported to the auxiliary rotation unit and still remains in the work piece holding space. The introduction of another new work piece from the slope causes no obstacles: entry, the condition in which the work piece is kept in the space, and the avoidance of multiple work and 4 mistakes > entering the same work piece while in the middle of the work piece. Therefore, it can be avoided The incompatibility of the inspection results occurs continuously because the alignment status of the work piece cannot be distinguished and cannot be consistent with the alignment status of the work piece. Furthermore, the conveying unit and the auxiliary conveying unit are in At the designated position of the rendezvous: cooperate with each other at the relative moving speed; and the unloading unit can unload the work pieces transported there from the auxiliary conveying unit. That is, the two positions are generally fixed at the same position. The relative moving fast work piece is positioned at the position of the conveying unit towel and the poem accepting the work piece in the auxiliary conveying unit. Therefore, the work piece can be smoothly and without difficulty transported from the conveying single wheel to the auxiliary rotating unit (that is, (From the conveying table to the screening table).: Invention-The work piece screening method basically includes three steps, that is, the first conveying wheel is continuously produced on the ramp and the work piece is inspected. The second conveying step is used for These work pieces that are continuously delivered from the slope are independently placed into a plurality of work piece holding spaces, which are continuously located near the slope and arranged at a designated pitch therebetween, O: \ 87 \ 87925.DOC4 -10- 1232297 = Two spaces combined with a run-out suppression wall for suppressing the self-space jump of the work piece: and a discharging step for the placement of each work piece at the -designated position 'and its inspection results According to the work piece screening method 1, continuous transfer from the slope to the conveying unit = two pieces, which can be surely and safely maintained at every one piece holding :: within Yui 'will not accidentally jump to the outside of the conveying unit ; Therefore: ―The work piece can be reliably rotated by the conveying unit and accepted for screening. As described above, it is characterized in that the conveying unit moves a time corresponding to a pitch corresponding to the work piece holding space, which is set by ^ Shorter than the time interval for each piece of work to be transferred from the oblique field. That is, 'even when the next work piece is supplied from the slope at the middle position between the holding spaces of adjacent work pieces, it will arrive soon. Work piece holding space for safely holding the next jade piece in it. Because of A, it can be reliably avoided that the work piece cannot be held in the work piece holding space 'or multiple work pieces are erroneously held in The situation where the same work piece remains in space. Also gp, can prevent the guard piece from jumping to the outside of the delivery unit; i can avoid the occurrence of unidentifiable alignment of work pieces because multiple work pieces can be reliably prevented from being held in the same work piece holding space by mistake in. [Embodiment] The present invention will be further described in detail with reference to accompanying drawings via examples. Figure ^ is a front view showing the equipment of a preferred embodiment of the present invention: Screening list S 4G-Appearance inspection device 1G. The lower part of the visual inspection device 10 is constructed by a square plate-shaped base 12, and the track 11 is laid on the base O: \ 87 \ 87925.DOC4 1232297. A work piece supply unit 20, an inspection unit 30, and a screening unit 40 are arranged on the upper surface of the base 12, so that the positions can be freely adjusted along the track 11 in the left-right direction in FIG. The lower part of the work piece supply unit 20 is constructed by a mobile carrier 21 that engages with the road 丨 丨, thereby moving the mobile carrier 21 along the road 丨 丨 to carry out the work The component supply unit 20 is set at an arbitrary position on the base ^. In addition, the mobile carrier 21 can be adjusted in a three-dimensional positioning manner by an adjusting screw (not shown), which can move J in a vertical direction or down, and can move forward and backward in a direction perpendicular to the paper of FIG. 丨 ( /, Zhongyue j side generation 纟 month direction). A vibration generator ^ having a motor is attached to the upper surface of the mobile carrier 21. A feeder 23 for transporting a work piece 15 (see FIG. 5) to the inspection unit 30 is attached to the upper surface of the vibration generator ^. The tip portion of the feeder 23 protrudes and is extended toward the inspection element 30. For temporarily holding work pieces! A funnel 2 of 5 is arranged on the feeder 23 ′, and a supply chute 25 for supplying the work piece 15 held in the funnel 24 to the feeder 23 is arranged at the lower end of the funnel 24 Part 7 is 'when the vibration generator is driven to supply the truck with a feed 23 at the same time as the hopper M system' to vibrate the feeder 23 to cause the work piece pair: the inspection unit 30 to move. Therefore, the work pieces of the-series are linearly moved continuously toward the tip portion of the feeder 23. The 2nd: 7 " 30 is installed in the visual inspection device 10, and the main system for performing 4 double inspections is arranged on the upper surface of the mobile carrier 31, and is merged with the 11 It can be fixed along the track O: \ 87 \ 87925.DOC4 -12-1232297 11 on the base 12 at any position. The upper portion of the moving carrier 31 is slightly bent toward the tip portion of the feeder 23 of the work piece supply unit 20. A flat plate-like bottom plate 32 is attached to the upper end portion of the upper side portion of the mobile carrier 3, so that its upper surface is inclined toward the feeder 23. A discharge chute 33, which is a slope (or a ramp) for removing the work piece 15 for "completion inspection" from the inspection unit 30, is attached to the center area of the bottom plate 32. In addition, a transmission hole 34 is formed to pass through the central area of the bottom plate 32, and an image of the lower surface of the work piece 15 is obtained. … The discharge chute 33 is attached to the surrounding part of the transmission hole _ 34 located on the side of the mobile carrier 3 丨, wherein the surface thereof is configured like a passage, and the branch cross-section thereof is in the shape of a half ring Agree. A cylindrical interconnecting member 35 provided with a plurality of members for obtaining images on individual sides of the work piece 15 is attached to the upper surface of the base plate 32, which constitutes a connection with the feeder-23 and A path interconnected by the discharge chute 33. The four CCD cameras 36a and 36b (for convenience, the figure "shows two cameras; however, four cameras are actually provided) are arranged at equal intervals along the periphery of the interconnecting member 35, In order to obtain an image of the work piece 5 falling from the tip portion of the feeder 23 and its individual sides. In addition, two CCD cameras 36c and 30d are arranged on the side of the interconnecting member 35 and On the lower side, in order to obtain images of the work piece 5 related to its upper and lower surfaces. That is, this specific embodiment is designed to obtain images of the work piece 15 on the six sides. Of course, This specific embodiment can be modified to provide only four CCD cameras 36a and 36b, thus enabling inspection of the four sides of the work piece 15. Alternatively, its' can be modified to O: \ 87 \ 87925 .DOC4 -13-1232297 Combining four CCD cameras 36a and 36b with an additional CCD camera for obtaining an upper surface image or a lower surface image of one of the work pieces 15, thus realizing the five to five sides of the work piece An inspection mirror 38a is The bracket 37a is disposed above the upper surface of the interconnecting member 35. That is, the CCD camera 36c can obtain an image of the upper surface of the work piece 15 by the reflection of the mirror 38a. Similarly, a mirror 38b It is arranged below a lower surface of the base plate 32 via a bracket 37b. Therefore, the CCD camera 36 (1) can obtain the _view image of the lower surface of the work piece 15 by the reflection of the reflecting mirror 38b. Screening unit 40 is controlled by a control device (not shown) based on the image collection results generated by the CCD camera 3, 3, and so on, so that it can be used for the screening work of the work piece 15. Figures 丨 3 and 6 Shown are the details of the screening unit 40, where the screening unit 40 includes a mobile carrier in the side below it, and a conveyor 42, and a station in the side above it. The teacher selects (or classifies) the platform 43. The mobile carrier 41 is in line with the ruling ", 、, b, 月 &bu; ” the ruling on the base 12 can be adjusted to the appropriate position. Specifically, it includes a transmission mechanism 44 having an electric motor, The conveying table 42 is rotatably driven, and a transmission mechanism 45 having an electric motor is rotatably driving the screening table 43. The conveying table 42 is installed in an outer cover 46 and is disposed in the work piece supply unit 20 In the side portion of the upper surface of the mobile carrier, the upper part includes a gear-shaped rotating body having gear teeth and notches 47, and the gear teeth and the notches 47 may be spaced at a specified pitch therebetween. Alternately and peripherally arranged. The center of one of the rotating bodies is connected by 4 R in the coffee / by ^. 8 series and O: \ 87 \ 87925.DOC4 of the electric motor of the transmission mechanism 44 • 14-1232297 transmission shaft 44a, Therefore, once the electric motor is driven, the conveying table 42 is rotated in a clockwise direction "a" (viewed from the side of the screen by the side of the screen). : This constitutes the female notch 47. Its upstream side surface (viewed in the direction of rotation of the conveying table 42) is arranged along one of the diameter directions of the conveying table 42, and its downstream side surface faces downstream of the conveying table 42 Slanted. The ring-shaped hollow portion 49 is formed on the upper surface of the outer cover 46, so that the wheel platform 42 is accommodated in the hollow portion 49 in a rotatable manner. A work piece holding space 50 is surrounded by a peripheral wall of a hollow portion 49 and a bottom portion 49b (see Figs. 4 and 6), and each notch 47 of the conveying table 42, because of this. A plurality of work piece holding spaces defined by the mouth 47 are arranged in the hollow portion 49 around the conveying table 42. Here, the area of a portion of the bottom portion 49b defined by each of the notches 47 is set to be sufficiently larger than a designated area in which a work piece 15 is accommodated. A hole 46a communicating with the lower end portion of the discharge chute 33 is formed at one end portion of the cover 46. That is, the slope of the discharge chute 33 communicates with the inside of the hollow portion 49 (that is, the inside of the work piece holding space 50) via the hole 46 &. _ Occasionally, the surrounding wall 49a of the hollow portion 49 and the conveying table 42 are respectively set to a designated height or a higher position, so as to prevent the drastically driven drivable work piece 15 from the self-unloading chute 33. Run away. A runout suppressing wall 'is constructed in this way to prevent the work piece 15 from jumping unexpectedly. ~ For example, when the designated size of work piece 15 is defined as 1 mm x 0.5 mm x 0.5 mm, the height of the surrounding wall 49a of the hollow portion 49 and the height of the conveying table 42 are preferably set to 20 mm % Or higher. In addition, as shown in FIG. 4B and FIG. 6, the conveying table 42 is arranged inside the hollow portion 49, and O: \ 87 \ 87925 DOC4 -15-1232297 has a gap 49d facing the surrounding wall 49a. 5 The 'specific' gap 49d is accidentally caught between the outer cover μ and the conveyance 42. It is formed at a designated position communicating with the hole 仏. It is close to the periphery of the hollow portion 49 and rotates in the direction 乂. When the table 42 is coupled, the work piece 15 is conveyed toward the screening table 43, so that the conveyed work piece 15 can be reliably prevented from being caught between the outer cover 仏 and the conveyance table 42 accidentally. The gap 49d is formed on the wall, and is located in an area corresponding to at least part of the hole that is closer to the hole; specifically, the gap _ is formed in a region on the wall 49a 'located in the direction "a", which The range is from at least part of the access hole 46 a toward the part approaching the screening stage 43. In this case, m 'is preferable that the height measured between the bottom peach of the hollow portion 49 and the lower end of the gap_ is set to 8 mm or higher. As shown in FIG. 4, the bottom portion of the hollow portion 49 and the opposite portion of 49b disposed opposite to the screening stage 43 are cut to be solitary, and the μ sending stage u partially protrudes from the bottom 49b, and thus is located in the screening Above the stage 43. In addition, a discharge channel # 49c 'where ㈣ is a _㈣ part (or a bypass part) and its tip part is arranged downward (see the left part in FIG. 4) is connected to the rotation of the conveying table 42 The downstream side of the direction is formed along the outer periphery of the truncated portion of the bottom peach. Furthermore, a work piece retrieving part (not shown) is used to retrieve the work 输送 'which is transported there via the discharge passage 49c, and is disposed in an end portion below the discharge passage 49e. Therefore, when the work piece 15 is conveyed through the discharge chute 33 while the conveying table 42 is rotated through the transmission mechanism 44, the work piece 15 is guided into the work piece holding space 50 via the hole technique, and the conveyance is rotated. The table 42 rotates on the bottom _ of the hollow portion M. O: \ 87 \ 87925.DOC4 -16- 1232297 The teacher selection platform 43 is used to drive it through the _ heart correction and transmission mechanism: "5a interconnected. The upper surface of the teacher selection platform 43 and the bottom of the hollow section 4 The Foreign Minister ’s height is reduced, so when the outer part 大 is large ^ the hollow 49 49 is cut off at the bottom 49b, the ㉟ screening platform ^ is in the direction of the arrow, 'b' (that is, from the figure 2 in the counterclockwise direction on the upper side). —The jade workpiece receiving part ... is arranged in the surrounding part on the upper surface of the screening table 43. The workpiece receiving part 43a is made of rubber sheet in order to receive the work piece 15H conveyed by the conveying table 42. The work piece 15 is prevented from sliding on it. The one-position detection sensor 52 is arranged above the screening table 43 and is close to the conveyance. At a designated position of 42, the work piece 15 which is sent to the screening table u is detected. In addition, the four exhaust units 53a, 53b, 53c, and 53d are arranged above and around the portion outside the screening table 43 opposite to the conveying table 42 and along the portion at a specified distance therebetween. Furthermore, a good product storage box and a defective product storage box (not shown) are arranged below the end portion of the screening table 43 and are vertically opposed to the exhaust devices 53a, 53b, 53c, and 53d.丨 The teacher selection platform 43 accepts the work pieces 1 5 continuously conveyed to it by the conveying table 42. Therefore, the work pieces 丨 5 are at a specified distance therebetween, and are arranged around the work piece receiving portion 43a. On the top surface; therefore, they are entered into the aforementioned boxes separately. Specifically, when the work piece 15 is identified as a good product according to the inspection result generated by the inspection unit 30, for example, 'when the work piece 15 passes the good product storage box, the exhaust device 5 3 a is activated for To blow the work piece 15 into the good product storage box. When the work piece 15 is identified as a defective product, for example, when the work piece 15 passes over the defective O: \ 87 \ 87925 DOC4 -17-1232297 defective product storage box, the exhaust device is activated to not Work piece 15 blows into the defective product storage box. Therefore, it is possible to identify such work pieces between the good product and the defective product, which are accurately delivered to the good product storage box and the defective product storage box, respectively. The other exhaust devices 53c and 53d are appropriately activated to blow the work piece 15 into the corresponding product storage box to reflect the degree and type of the defect. ~ The visual inspection device 10 further includes electrical control elements such as a central processing unit (mi) 'read-only memory (axis), and random access memory (RAM), and a ccd camera including the aforementioned electromechanical elements ( For example, 36a)-image processing element. The image processing element performs a processing operation on an image obtained by a camera (for example, the obtained image), thereby identifying the work piece 15 between a good product and a defective product. In addition, the image processing element is equipped with a display The screen is used to zoom in and display six sides of each work piece 15 (or a hexagonal structure); therefore, the operation can view the image to visually judge whether the work piece 15 is a good product or a Defective products. Next, an example of using the aforementioned visual inspection device 10 to inspect a work piece 15 to be inspected (see FIG. 5), such as-capacitor wafers for visual inspection and screening. Prior to inspection, such health The work piece 15 is held in front of the hopper 24 of the work piece supply unit 20; then, a power switch (not shown) of the visual inspection device 10 is turned on, so that the aforementioned units and components are separately activated to perform the specified actions. In the work piece supply unit 20, a specified number of work pieces 15 are supplied from the hopper 24 to the feeder 23 through the supply chute 25. Once the vibration is transmitted,
供給至進料器2 3的每一工作件1 5， O:\87\87925.DOC4 -18- 1232297 器22而被轉運至進料器23之尖端部分，因此其被自進料器 23之尖端部分卸放進入空間中。當工作件15通過互連構件 35之中心部分並落下時，該CCD攝影機36a至36d相關於工 作件15之個別側邊擷取影像，因而未影響拍照。根據相關 於工作件1 5之六側邊的影像，操作影像處理元件用以鑑別 該工作件1 5係為一良好產品或為一有缺陷產品。根據相關 於與外部尺寸、污物、瑕疵、及是否黏附於其上的異常物 質有關的指定基準，比較，，經照相，，工作件15而執行鑑別。 於此狀況中，在影像處理元件之螢幕上顯示相關於工作件 1 5之六側邊所擷取的”放大 影像；因此，操作員能夠偵測 工作件1 5之任一部分上的缺陷。 經鑑別介於一良好產品與一有缺陷產品之間的該工作件 15，係落下進入該卸放滑槽33中，沿著下降並接著經由孔 46a落下進入篩選單元4〇之工作保持空間5〇中。由於形成環 繞該工作保持空間50的跳動抑制壁，甚至當工作件15以激 烈地落入該工作保持空間50時，能夠將工作件15確實地安 置進入該工作保持空間财。之後，該卫作件_由該輸 送台42輸送朝向該篩選台43。Each work piece 15, O: \ 87 \ 87925.DOC4 supplied to the feeder 23 is transferred to the tip portion of the feeder 23, so it is transferred from the feeder 23 The tip part is discharged into the space. When the work piece 15 passes through the center portion of the interconnecting member 35 and falls, the CCD cameras 36a to 36d capture images on the respective sides of the work piece 15 and thus do not affect the photographing. Based on the images related to the six sides of the work piece 15, the image processing element is operated to identify whether the work piece 15 is a good product or a defective product. The identification is performed based on specified standards relating to external dimensions, dirt, flaws, and abnormal substances adhered thereto, by photographing, and by work piece 15. In this case, the "magnified image" captured on the six sides of the work piece 15 is displayed on the screen of the image processing element; therefore, the operator can detect defects on any part of the work piece 15. The work piece 15 identified between a good product and a defective product is dropped into the discharge chute 33, descends and then falls through the hole 46a into the work holding space 50 of the screening unit 40. Since the bounce suppression wall is formed around the work holding space 50, even when the work piece 15 falls into the work holding space 50 fiercely, the work piece 15 can be surely placed into the work holding space. After that, the The work piece is conveyed by the conveying platform 42 toward the screening platform 43.
如為所需該空間因而為 O:\87\87925.DOC4 安置進入每一工作件保持 工作件所佔用或為空的。 -19- 1232297 當該輸送台42轉動時’該卫作件i5係轉動地輸送至與筛 選台43相對的中空部分49之指定位置時，由於前述中空部 分49之底部49b之截去部分’工作件15自然地^在篩選㈣ 之上表面上，並接著在篩選台43轉動時轉動地輸送。於此 ，篩選台43之上表面在高度上，係較中空部㈣之底部_ 為低；因此，能夠平穩地將工作件15自輸送台仰送至篩 選台43。 在中空部分49之指定位置處，該輸送台42於該處與篩選 台43會合，輸送台42之前述凹口 47的開口方向，大體上係 與輸送工作件15的篩選台43之相對移動方向配合；因此， 能夠確實並完全地執行輸送工作件15。於此狀況下，輸送 台42及篩選台43二者大體上具有相同的轉速，於中空部分 49之扣定位置處，該輸送台42於該處與篩選台會合。意 外地，當該輸送台42無法安全地將工作件15輸送至該篩選 台43上時，工作件15自動地經由排放通道49〇朝向工作件復 原部分排放。If needed, the space is therefore O: \ 87 \ 87925.DOC4 Placed into each work piece to keep the work piece occupied or empty. -19- 1232297 When the conveying table 42 rotates, 'The work piece i5 was conveyed to the designated position of the hollow portion 49 opposite to the screening table 43 due to the truncated portion of the bottom 49b of the aforementioned hollow portion 49' The work piece 15 is naturally on the upper surface of the screen ㈣, and is then conveyed while the screen 43 is rotated. Here, the upper surface of the screening platform 43 is lower in height than the bottom of the hollow part ㈣; therefore, the work piece 15 can be smoothly lifted from the conveying platform to the screening platform 43. At the designated position of the hollow portion 49, the conveying table 42 meets the screening table 43 there. The opening direction of the aforementioned notch 47 of the conveying table 42 is generally the relative movement direction of the screening table 43 of the conveying work piece 15. The cooperation; therefore, the conveyance work piece 15 can be performed reliably and completely. Under this condition, the conveying table 42 and the screening table 43 have substantially the same rotation speed, and at the fixed position of the hollow portion 49, the conveying table 42 meets the screening table there. In addition, when the conveying table 42 cannot safely convey the work piece 15 to the screening table 43, the work piece 15 is automatically discharged toward the work piece restoration part via the discharge passage 49o.
I 工作件15間的良好產品經連續地輸送，藉由篩選台“而 接近上述儲存盒，其分別地藉由排氣裝置53a朝向良好產品· 儲存盒吹送，同時有缺陷產品藉由排氣裝置53b朝向有缺陷· 產品儲存盒吹送。因此，能夠確實並精確地鑑別介於良好 產品與有缺陷產品之間的該等工作件15，其係經適當地分 類並輸送至對應的儲存盒中。於此，經供給位在篩選台C 之上表面上的該等工作件15，係連續地在位置偵測感應器 52下方輸送，於感應器下方其之位置受連《續地偵測；接著 O:\87\87925.DOC4 -20- 1232297 其係藉由排氣裝置53a之排氣而被吹送。 於上述篩選單元40中，該"完成檢查”的工作件15係暫時 ，保持在藉由輸送台42所界定的工作件保持空間50中，·接 著’其被輸送位在該篩選台43上。此外，在介於卸放滑槽 /、作保持空間50之間的路徑中，配置跳動抑制壁，為 了防止工作件15跳離其間。因此，當將工作件15自卸放滑 槽33輸送至該輸送台42上時，能夠確實地防止工作件Η意 外地朝向外側跳動；因此，工作件15能夠確實並安全地保 持在該工作保持空間50中。 本具體實施例經設計致使中空部分49之底部49b所設定 问度大體上與篩選台43之上表面配合，以及輸送台 42及篩選台43二者經設定大體上在指定位置處具有相同轉 速，於該處輸送台42與篩選台43會合。此外，輸送台42之 大體上係與篩選台43之相對移動方向 凹口 47的開口方向 配合’其中該工作件15係於輸送台42與筛選台43會合的指 定位置處於其上移動。因此，其能夠平穩地將工作件15自 輸送台42輸送至篩選台…因此，能夠精確地將介於良好 產πσ與有缺陷產品間的該等工作件1 $分類。 例將篩選台43建構為一轉動台 此，能夠使用一線性輸送裝置， 速度，並用以降低因離心力的影 本具體實施例經設計用以提供二台，亦即，輸送台似 筛選台43,然而，能夠修改本具體實施例致使1作件_ 由輸送台42接受直接篩選（或直接分類）。此外，本具體實^ ’並不必然地加以限制。因 為了增加對工作件15的篩選 響。再者，能夠使用一線性 O:\87\87925.DOC4 '21 - 1232297 輸运裝置，取代該輸送台42用以固定篩選台43之轉動。 本發明能具體化為複數種形式，而不致背離其之精神或 基本的特性，因此本具體實施例係為說明性的而不具限制 由於本發明之犯等係藉由附加的申請專利範圍加以界 定而非由前述說明所以，並且所有的變化係涵蓋於申請 專利範圍之邊界與領域，或是該等邊界與領域之等效部分 因而意欲由申請專利範圍所包含。 【圖式簡單說明】 本發明之該等及其他的目的、觀點及具體實施例，將相 關於以下的圖式詳細地加以說明，其中： 圖^係為一前視圖，顯示本發明之一較佳具體實施例之配 備一篩選單元的一外觀檢查裝置； 圖2係為一平面圖，顯示該篩選單元； 圖3係為一側視圖，顯示該篩選單元； 圖4A係為一平面圖，顯示一外罩具有一中空部分甩於將 一輸送台保持於其中； 圖4B係沿著圖4A中線A-A，所取的一橫截面視圖； 圖5係為一透視圖，顯示一接受檢查及篩選的工作件；以 及 ， 圖6係為一橫截面視圖，顯示圖丨中所示與一工作件結合 之筛選單元的内部結構。 …〇 【圖式代表符號說明】 10 外觀檢查裝置 11 執道 O:\87\87925.DOC4 -22- 1232297 12 底座 15 工作件 20 工作件供給單元 21 移動載運器 22 振動產生器 23 進料器 24 漏斗 25 供給滑槽 30 檢查單元 31 移動載運器 32 底板 33 卸放滑槽 34 傳動孔 35 圓筒狀互連構件 36a CCD攝影機 36b CCD攝影機 36c CCD攝影機 36d CCD攝影機 37a 托架 37b 托架 38a 反射鏡 38b 反射鏡 40 篩選單元 41 移動載運器 O:\87\87925.DOC4 -23 - 1232297 42 輸送台 43 篩選（或分類）台 43a 工作件接受部分 44 傳動機構 44a 傳動軸 45 傳動機構 45a 傳動軸 46 外罩 46a 子L 47 輪齒及凹口 48 中心轴 49 環狀中空部分 49a 周圍壁 49 b 底部 49c 排放通道 49d 間隙 50 工作件保持空間 51 中心軸 52 位置偵測感應器 53a 排氣裝置 53b 排氣裝置 53c 排氣裝置 53d 排氣裝置 O:\87\87925 D0C4 -24-I Good products between the 15 work pieces are continuously conveyed and approach the storage box through the screening table, which is blown toward the good products and storage boxes by the exhaust device 53a, and defective products are exhausted by the exhaust device. 53b is blown toward the defective product storage box. Therefore, the work pieces 15 between the good product and the defective product can be accurately and accurately identified, which are appropriately classified and transported to the corresponding storage box. Here, the work pieces 15 supplied on the upper surface of the screening table C are continuously conveyed under the position detection sensor 52, and their positions under the sensor are continuously detected. O: \ 87 \ 87925.DOC4 -20-1232297 It is blown by the exhaust of the exhaust device 53a. In the above-mentioned screening unit 40, the work piece 15 of "Completed Inspection" is temporarily kept in the borrow In the work piece holding space 50 defined by the conveying table 42, it is then placed on the screening table 43. In addition, in the path between the discharge chute and the work holding space 50, a runout suppressing wall is provided to prevent the work piece 15 from jumping therebetween. Therefore, when the work piece 15 is transferred from the discharge chute 33 to the conveying table 42, the work piece Η can be surely prevented from accidentally jumping toward the outside; therefore, the work piece 15 can be reliably and safely held at the work hold. In space 50. This specific embodiment is designed so that the set angle of the bottom portion 49b of the hollow portion 49 substantially matches the upper surface of the screening platform 43, and both the conveying platform 42 and the screening platform 43 are set to have substantially the same rotation speed at a specified position. At this point, the conveying table 42 meets the screening table 43. In addition, the conveying table 42 is generally matched with the opening direction of the notch 47 in the relative moving direction of the screening table 43, wherein the work piece 15 is moved above a designated position where the conveying table 42 and the screening table 43 meet. Therefore, it can smoothly convey the work pieces 15 from the conveying table 42 to the screening table ... Therefore, it can accurately classify these work pieces 1 $ between the good production πσ and the defective products. For example, the screening table 43 is constructed as a rotating table. Here, a linear conveying device can be used. The speed and the specific example for reducing the centrifugal force are designed to provide two, that is, the conveying table is similar to the screening table 43. However, this specific embodiment can be modified so that 1 work_ is directly screened (or directly sorted) by the conveyor 42. In addition, the present embodiment is not necessarily limited. In order to increase the screening response to work piece 15. Furthermore, a linear O: \ 87 \ 87925.DOC4 '21-1232297 transport device can be used instead of the conveying table 42 to fix the rotation of the screening table 43. The present invention can be embodied in a plurality of forms without departing from the spirit or basic characteristics thereof. Therefore, the specific embodiment is illustrative and not restrictive. The offense of the present invention is defined by the scope of additional patent applications. Instead of the foregoing description, and all changes are covered by the boundaries and fields of the patent application scope, or equivalent parts of these boundaries and fields are therefore intended to be covered by the patent application scope. [Brief description of the drawings] These and other objects, viewpoints, and specific embodiments of the present invention will be described in detail in relation to the following drawings, in which: Figure ^ is a front view showing a comparison of the present invention A specific embodiment of an appearance inspection device equipped with a screening unit; Figure 2 is a plan view showing the screening unit; Figure 3 is a side view showing the screening unit; Figure 4A is a plan view showing a cover A hollow part is thrown to hold a conveying table therein; FIG. 4B is a cross-sectional view taken along the center line AA of FIG. 4A; FIG. 5 is a perspective view showing a work piece subjected to inspection and screening ; And FIG. 6 is a cross-sectional view showing the internal structure of the screening unit combined with a work piece shown in FIG. 丨. … 〇 [Illustration of Symbols in the Schematic Diagrams] 10 Appearance Inspection Apparatus 11 Doing O: \ 87 \ 87925.DOC4 -22- 1232297 12 Base 15 Workpiece 20 Workpiece Supply Unit 21 Mobile Carrier 22 Vibration Generator 23 Feeder 24 Funnel 25 Supply chute 30 Inspection unit 31 Mobile carrier 32 Base plate 33 Discharge chute 34 Drive hole 35 Cylindrical interconnecting member 36a CCD camera 36b CCD camera 36c CCD camera 36d CCD camera 37a bracket 37b bracket 38a reflection Mirror 38b Mirror 40 Screening unit 41 Mobile carrier O: \ 87 \ 87925.DOC4 -23-1232297 42 Conveyor table 43 Screening (or sorting) table 43a Workpiece receiving section 44 Transmission mechanism 44a Transmission shaft 45 Transmission mechanism 45a Transmission shaft 46 Outer cover 46a Sub-L 47 Gear teeth and notches 48 Center shaft 49 Ring-shaped hollow portion 49a Surrounding wall 49 b Bottom 49c Drain channel 49d Clearance 50 Working piece holding space 51 Center shaft 52 Position detection sensor 53a Exhaust device 53b Row Air device 53c Exhaust device 53d Exhaust device O: \ 87 \ 87925 D0C4 -24-