TWI221199B - Probing method, testing apparatus and testing method of semiconductor device - Google Patents

Probing method, testing apparatus and testing method of semiconductor device Download PDF

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Publication number
TWI221199B
TWI221199B TW92105687A TW92105687A TWI221199B TW I221199 B TWI221199 B TW I221199B TW 92105687 A TW92105687 A TW 92105687A TW 92105687 A TW92105687 A TW 92105687A TW I221199 B TWI221199 B TW I221199B
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TW
Taiwan
Prior art keywords
terminal
detection
contact
detection terminal
inspection
Prior art date
Application number
TW92105687A
Other languages
English (en)
Chinese (zh)
Other versions
TW200305726A (en
Inventor
Kunio Matsudaira
Original Assignee
Ricoh Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Kk filed Critical Ricoh Kk
Publication of TW200305726A publication Critical patent/TW200305726A/zh
Application granted granted Critical
Publication of TWI221199B publication Critical patent/TWI221199B/zh

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Measuring Leads Or Probes (AREA)
TW92105687A 2002-03-14 2003-03-14 Probing method, testing apparatus and testing method of semiconductor device TWI221199B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002070529A JP3898074B2 (ja) 2002-03-14 2002-03-14 プロービング装置並びに半導体装置の検査装置及び検査方法

Publications (2)

Publication Number Publication Date
TW200305726A TW200305726A (en) 2003-11-01
TWI221199B true TWI221199B (en) 2004-09-21

Family

ID=28035064

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92105687A TWI221199B (en) 2002-03-14 2003-03-14 Probing method, testing apparatus and testing method of semiconductor device

Country Status (3)

Country Link
JP (1) JP3898074B2 (ja)
CN (1) CN1288737C (ja)
TW (1) TWI221199B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007088203A (ja) 2005-09-22 2007-04-05 Tokyo Electron Ltd ウエハ検査装置およびウエハ検査方法、ならびにコンピュータプログラム
CN112540278B (zh) * 2019-09-05 2024-08-16 泰瑞达亚洲股份有限公司 测试半导体器件的设备和方法

Also Published As

Publication number Publication date
JP3898074B2 (ja) 2007-03-28
CN1288737C (zh) 2006-12-06
JP2003273175A (ja) 2003-09-26
TW200305726A (en) 2003-11-01
CN1445833A (zh) 2003-10-01

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