TWI221199B - Probing method, testing apparatus and testing method of semiconductor device - Google Patents
Probing method, testing apparatus and testing method of semiconductor device Download PDFInfo
- Publication number
- TWI221199B TWI221199B TW92105687A TW92105687A TWI221199B TW I221199 B TWI221199 B TW I221199B TW 92105687 A TW92105687 A TW 92105687A TW 92105687 A TW92105687 A TW 92105687A TW I221199 B TWI221199 B TW I221199B
- Authority
- TW
- Taiwan
- Prior art keywords
- terminal
- detection
- contact
- detection terminal
- inspection
- Prior art date
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Measuring Leads Or Probes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002070529A JP3898074B2 (ja) | 2002-03-14 | 2002-03-14 | プロービング装置並びに半導体装置の検査装置及び検査方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200305726A TW200305726A (en) | 2003-11-01 |
TWI221199B true TWI221199B (en) | 2004-09-21 |
Family
ID=28035064
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW92105687A TWI221199B (en) | 2002-03-14 | 2003-03-14 | Probing method, testing apparatus and testing method of semiconductor device |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP3898074B2 (ja) |
CN (1) | CN1288737C (ja) |
TW (1) | TWI221199B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007088203A (ja) | 2005-09-22 | 2007-04-05 | Tokyo Electron Ltd | ウエハ検査装置およびウエハ検査方法、ならびにコンピュータプログラム |
CN112540278B (zh) * | 2019-09-05 | 2024-08-16 | 泰瑞达亚洲股份有限公司 | 测试半导体器件的设备和方法 |
-
2002
- 2002-03-14 JP JP2002070529A patent/JP3898074B2/ja not_active Expired - Fee Related
-
2003
- 2003-03-13 CN CN 03120525 patent/CN1288737C/zh not_active Expired - Fee Related
- 2003-03-14 TW TW92105687A patent/TWI221199B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP3898074B2 (ja) | 2007-03-28 |
CN1288737C (zh) | 2006-12-06 |
JP2003273175A (ja) | 2003-09-26 |
TW200305726A (en) | 2003-11-01 |
CN1445833A (zh) | 2003-10-01 |
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Legal Events
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MM4A | Annulment or lapse of patent due to non-payment of fees |