TWD245322S - 基板處理裝置的加熱機用隔熱器 - Google Patents

基板處理裝置的加熱機用隔熱器

Info

Publication number
TWD245322S
TWD245322S TW114300858F TW114300858F TWD245322S TW D245322 S TWD245322 S TW D245322S TW 114300858 F TW114300858 F TW 114300858F TW 114300858 F TW114300858 F TW 114300858F TW D245322 S TWD245322 S TW D245322S
Authority
TW
Taiwan
Prior art keywords
processing apparatus
substrate processing
heat insulation
heating unit
surround
Prior art date
Application number
TW114300858F
Other languages
English (en)
Chinese (zh)
Inventor
藤森弘貴
Original Assignee
日商國際電氣股份有限公司 (日本)
日商國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商國際電氣股份有限公司 (日本), 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司 (日本)
Publication of TWD245322S publication Critical patent/TWD245322S/zh

Links

TW114300858F 2024-08-28 2025-02-26 基板處理裝置的加熱機用隔熱器 TWD245322S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2024-017786 2024-08-28
JP2024017786F JP1790715S (enExample) 2024-08-28 2024-08-28

Publications (1)

Publication Number Publication Date
TWD245322S true TWD245322S (zh) 2026-07-01

Family

ID=94392462

Family Applications (1)

Application Number Title Priority Date Filing Date
TW114300858F TWD245322S (zh) 2024-08-28 2025-02-26 基板處理裝置的加熱機用隔熱器

Country Status (2)

Country Link
JP (1) JP1790715S (enExample)
TW (1) TWD245322S (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN307120587S (zh) 2021-09-09 2022-02-18 株式会社国际电气 基板处理装置用遮蔽件
USD1003834S1 (en) 2021-06-28 2023-11-07 Kokusai Electric Corporation Heat insulator cover of semiconductor manufacturing apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1003834S1 (en) 2021-06-28 2023-11-07 Kokusai Electric Corporation Heat insulator cover of semiconductor manufacturing apparatus
CN307120587S (zh) 2021-09-09 2022-02-18 株式会社国际电气 基板处理装置用遮蔽件
CN307491734S (zh) 2021-09-28 2022-08-09 应用材料公司 遮蔽环升降组合

Also Published As

Publication number Publication date
JP1790715S (enExample) 2025-02-06