TWD244122S - 用於電漿處理裝置之電極板 - Google Patents

用於電漿處理裝置之電極板

Info

Publication number
TWD244122S
TWD244122S TW112305980F TW112305980F TWD244122S TW D244122 S TWD244122 S TW D244122S TW 112305980 F TW112305980 F TW 112305980F TW 112305980 F TW112305980 F TW 112305980F TW D244122 S TWD244122 S TW D244122S
Authority
TW
Taiwan
Prior art keywords
holes
design
plasma
outer peripheral
article
Prior art date
Application number
TW112305980F
Other languages
English (en)
Chinese (zh)
Inventor
千葉東南
Original Assignee
日商東京威力科創股份有限公司 (日本)
日商東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商東京威力科創股份有限公司 (日本), 日商東京威力科創股份有限公司 filed Critical 日商東京威力科創股份有限公司 (日本)
Publication of TWD244122S publication Critical patent/TWD244122S/zh

Links

TW112305980F 2023-05-31 2023-11-21 用於電漿處理裝置之電極板 TWD244122S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023011097F JP1762818S (enExample) 2023-05-31 2023-05-31
JP2023-011097 2023-05-31

Publications (1)

Publication Number Publication Date
TWD244122S true TWD244122S (zh) 2026-04-21

Family

ID=89719186

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112305980F TWD244122S (zh) 2023-05-31 2023-11-21 用於電漿處理裝置之電極板

Country Status (2)

Country Link
JP (1) JP1762818S (enExample)
TW (1) TWD244122S (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD178425S (zh) 2016-01-08 2016-09-21 Asm Ip Holding Bv 用於半導體製造設備的電極板
TWD193613S (zh) 2017-08-31 2018-10-21 日商日立全球先端科技股份有限公司 Electrode plate for plasma processing device
TWD195354S (zh) 2017-10-10 2019-01-11 日商荏原製作所股份有限公司 Electrical connection terminal

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD178425S (zh) 2016-01-08 2016-09-21 Asm Ip Holding Bv 用於半導體製造設備的電極板
TWD193613S (zh) 2017-08-31 2018-10-21 日商日立全球先端科技股份有限公司 Electrode plate for plasma processing device
TWD195354S (zh) 2017-10-10 2019-01-11 日商荏原製作所股份有限公司 Electrical connection terminal

Also Published As

Publication number Publication date
JP1762818S (enExample) 2024-02-02

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