TWD221941S - Reflector - Google Patents

Reflector Download PDF

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Publication number
TWD221941S
TWD221941S TW110304817D01F TW110304817D01F TWD221941S TW D221941 S TWD221941 S TW D221941S TW 110304817D01 F TW110304817D01 F TW 110304817D01F TW 110304817D01 F TW110304817D01 F TW 110304817D01F TW D221941 S TWD221941 S TW D221941S
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TW
Taiwan
Prior art keywords
reflector
design
inner edge
article
edge reflector
Prior art date
Application number
TW110304817D01F
Other languages
Chinese (zh)
Inventor
原口貴史
Original Assignee
日商紐富來科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商紐富來科技股份有限公司 filed Critical 日商紐富來科技股份有限公司
Publication of TWD221941S publication Critical patent/TWD221941S/en

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Abstract

【物品用途】;本設計物品是一種應用於在晶圓表面上塗布上磊晶膜的半導體製造設備中的反射器。本設計物品用以反射加熱器的熱。本設計物品的加熱器包括碟狀的內緣反射器以及由兩個半環形構件組成的外緣反射器，外緣反射器內側的內周與內緣反射器的外周分別形成有兩個凹陷部，且這些凹陷部排列在彼此分開的位置。;【設計說明】;仰視圖與俯視圖相對稱，故省略仰視圖。【Use of article】;This design article is a reflector used in semiconductor manufacturing equipment where an epitaxial film is coated on the surface of the wafer. This design object is used to reflect the heat from the heater. The heater of this design article includes a dish-shaped inner edge reflector and an outer edge reflector composed of two semi-annular members. Two depressions are formed on the inner circumference of the inner edge of the outer edge reflector and the outer circumference of the inner edge reflector. , and these recessed portions are arranged at positions separated from each other. ;[Design Description];The bottom view is symmetrical to the top view, so the bottom view is omitted.

Description

反射器reflector

本設計物品是一種應用於在晶圓表面上塗布上磊晶膜的半導體製造設備中的反射器。本設計物品用以反射加熱器的熱。本設計物品的加熱器包括碟狀的內緣反射器以及由兩個半環形構件組成的外緣反射器，外緣反射器內側的內周與內緣反射器的外周分別形成有兩個凹陷部，且這些凹陷部排列在彼此分開的位置。The design article is a reflector used in semiconductor manufacturing equipment coated with an epitaxial film on the surface of a wafer. This design item is used to reflect the heat of the heater. The heater of this design article includes a dish-shaped inner edge reflector and an outer edge reflector composed of two semi-annular members, and the inner circumference of the outer edge reflector and the outer circumference of the inner edge reflector are respectively formed with two depressions , and these depressions are arranged at positions separated from each other.

仰視圖與俯視圖相對稱，故省略仰視圖。The bottom view is symmetrical to the top view, so the bottom view is omitted.

TW110304817D01F 2021-08-18 2021-10-26 Reflector TWD221941S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021017778F JP1704966S (en) 2021-08-18 2021-08-18 Reflector
JP2021-017778 2021-08-18

Publications (1)

Publication Number Publication Date
TWD221941S true TWD221941S (en) 2022-11-11

Family

ID=80217242

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110304817D01F TWD221941S (en) 2021-08-18 2021-10-26 Reflector

Country Status (2)

Country Link
JP (1) JP1704966S (en)
TW (1) TWD221941S (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD208205S (en) 2019-05-24 2020-11-11 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Gas channel plate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD208205S (en) 2019-05-24 2020-11-11 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Gas channel plate

Also Published As

Publication number Publication date
JP1704966S (en) 2022-01-14

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