TWD200074S - 半導體製造裝置之隔熱組件用支柱 - Google Patents

半導體製造裝置之隔熱組件用支柱

Info

Publication number
TWD200074S
TWD200074S TW107302986F TW107302986F TWD200074S TW D200074 S TWD200074 S TW D200074S TW 107302986 F TW107302986 F TW 107302986F TW 107302986 F TW107302986 F TW 107302986F TW D200074 S TWD200074 S TW D200074S
Authority
TW
Taiwan
Prior art keywords
heat
manufacturing equipment
semiconductor manufacturing
thermal insulation
insulation components
Prior art date
Application number
TW107302986F
Other languages
English (en)
Chinese (zh)
Inventor
Yusaku Okajima
Shuhei Saido
Hidenari Yoshida
Original Assignee
日商國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司
Publication of TWD200074S publication Critical patent/TWD200074S/zh

Links

TW107302986F 2018-02-07 2018-05-28 半導體製造裝置之隔熱組件用支柱 TWD200074S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2018-2488F JP1611561S (enrdf_load_stackoverflow) 2018-02-07 2018-02-07

Publications (1)

Publication Number Publication Date
TWD200074S true TWD200074S (zh) 2019-10-01

Family

ID=63169008

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107302986F TWD200074S (zh) 2018-02-07 2018-05-28 半導體製造裝置之隔熱組件用支柱

Country Status (3)

Country Link
US (1) USD928106S1 (enrdf_load_stackoverflow)
JP (1) JP1611561S (enrdf_load_stackoverflow)
TW (1) TWD200074S (enrdf_load_stackoverflow)

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* Cited by examiner, † Cited by third party
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US2763818A (en) * 1954-10-14 1956-09-18 Westinghouse Electric Corp Lighting arrester
US3019367A (en) * 1957-01-04 1962-01-30 Ohio Brass Co Lighting arrester and gap unit therefor
US3282001A (en) * 1963-05-06 1966-11-01 United States Steel Corp Base construction for supporting a column
US3249719A (en) * 1964-10-16 1966-05-03 Joslyn Mfg & Supply Co High voltage arrester cutout
US3400301A (en) * 1966-05-27 1968-09-03 Joslyn Mfg & Supply Co Lightning arrester in combination with an arrester disconnector containing explosivemeans
US4152089A (en) * 1977-07-07 1979-05-01 Stannard George E Method and apparatus for forming a cast-in-place support column
JPS597584U (ja) * 1982-07-06 1984-01-18 三菱電機株式会社 避雷装置
US4523054A (en) * 1983-04-04 1985-06-11 Interpace Corporation Line-past insulator support system, method of assembly thereof, and clamp for use therein
USD281199S (en) * 1983-05-18 1985-10-29 Prawl William F Safety stand for use in association with hydraulic lift
US4596906A (en) * 1985-04-10 1986-06-24 S&C Electric Company Arrangement for providing independent rotary and linear drive outputs for high-voltage switches
CA2184241C (en) * 1996-08-27 2001-08-14 Robert Theodore Belke Structural support column with a telescopically adjustable head
USD298915S (en) * 1987-06-25 1988-12-13 Rowley Var C Vertically adjustable valve and pipe support
USD354739S (en) * 1993-06-30 1995-01-24 Durham Rodney L Underground storage unit for items sensitive to environmental conditions
US6499916B2 (en) * 1999-04-14 2002-12-31 American Commercial Inc. Compressible support column
KR100360401B1 (ko) * 2000-03-17 2002-11-13 삼성전자 주식회사 슬릿형 공정가스 인입부와 다공구조의 폐가스 배출부를포함하는 공정튜브 및 반도체 소자 제조장치
TW542218U (en) * 2002-10-09 2003-07-11 Foxsemicon Intergated Technolo Substrate supporting rod and substrate cassette using the same
USD544448S1 (en) * 2004-07-30 2007-06-12 The Lamson & Sessions Co. Transition adapter for electrical conduit
USD515521S1 (en) * 2004-10-04 2006-02-21 Emerson Electric Co. Exterior of an electric machine housing
US20060072288A1 (en) * 2004-10-04 2006-04-06 Stewart William P Electric machine with power and control electronics integrated into the primary machine housing
JP6476369B2 (ja) * 2013-03-25 2019-03-06 株式会社Kokusai Electric クリーニング方法、半導体装置の製造方法、基板処理装置及びプログラム
USD770236S1 (en) * 2014-08-14 2016-11-01 Venkateswara Prasad Pattipati Wine bottle holder
SG11201705569PA (en) * 2015-01-07 2017-08-30 Hitachi Int Electric Inc Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
JP1564810S (enrdf_load_stackoverflow) 2016-02-10 2016-12-05
US20170342562A1 (en) * 2016-05-31 2017-11-30 Lam Research Corporation Vapor manifold with integrated vapor concentration sensor
US10415206B1 (en) * 2018-09-11 2019-09-17 James Henry Beam and base for supporting structures
USD905541S1 (en) * 2019-12-12 2020-12-22 RS Transportation Trucking Inc. Adjustable support-stand for chemical hoses

Also Published As

Publication number Publication date
USD928106S1 (en) 2021-08-17
JP1611561S (enrdf_load_stackoverflow) 2018-08-20

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