TWD198930S - 基板搬運用保持墊之部分 - Google Patents

基板搬運用保持墊之部分

Info

Publication number
TWD198930S
TWD198930S TW107305727F TW107305727F TWD198930S TW D198930 S TWD198930 S TW D198930S TW 107305727 F TW107305727 F TW 107305727F TW 107305727 F TW107305727 F TW 107305727F TW D198930 S TWD198930 S TW D198930S
Authority
TW
Taiwan
Prior art keywords
article
substrate
design
annular portion
case
Prior art date
Application number
TW107305727F
Other languages
English (en)
Chinese (zh)
Inventor
Toru Tokimatu
Akihiro Teramoto
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TWD198930S publication Critical patent/TWD198930S/zh

Links

TW107305727F 2018-04-20 2018-09-26 基板搬運用保持墊之部分 TWD198930S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2018-8791F JP1625994S (enrdf_load_stackoverflow) 2018-04-20 2018-04-20

Publications (1)

Publication Number Publication Date
TWD198930S true TWD198930S (zh) 2019-08-01

Family

ID=65519221

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107305727F TWD198930S (zh) 2018-04-20 2018-09-26 基板搬運用保持墊之部分

Country Status (3)

Country Link
US (1) USD922609S1 (enrdf_load_stackoverflow)
JP (1) JP1625994S (enrdf_load_stackoverflow)
TW (1) TWD198930S (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD973609S1 (en) 2020-04-22 2022-12-27 Applied Materials, Inc. Upper shield with showerhead for a process chamber
US12080522B2 (en) 2020-04-22 2024-09-03 Applied Materials, Inc. Preclean chamber upper shield with showerhead
US12100577B2 (en) 2019-08-28 2024-09-24 Applied Materials, Inc. High conductance inner shield for process chamber

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1025681S1 (en) * 2020-12-08 2024-05-07 Darin Lee Mays Table part
JP1705916S (enrdf_load_stackoverflow) * 2021-07-09 2022-01-25
JP1705915S (enrdf_load_stackoverflow) * 2021-07-09 2022-01-25

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD328210S (en) * 1990-02-22 1992-07-28 Dyment Limited Display rack module
USD453000S1 (en) * 2000-05-11 2002-01-22 Yugenkaisha Shinjo Seisakusho Clinch nut
USD451374S1 (en) * 2000-05-18 2001-12-04 Yugenkaisha Shinjo Seisakusho Clinch nut
USD463968S1 (en) * 2001-02-08 2002-10-08 Emhart Llc Deadbolt
TWD121115S1 (zh) * 2005-03-30 2008-01-21 東京威力科創股份有限公司 遮護環
USD559993S1 (en) * 2005-03-30 2008-01-15 Tokyo Electron Limited Cover ring
TWD113217S1 (zh) * 2005-03-30 2006-10-01 東京威力科創股份有限公司 遮護環
USD642676S1 (en) * 2006-10-27 2011-08-02 Resmed Motor Technologies Inc Flexible motor sleeve
US20080275499A1 (en) * 2007-05-02 2008-11-06 Brackett Ted J Non-Pneumatic Tourniquet Device
USD679013S1 (en) * 2008-05-02 2013-03-26 Precision Medical Devices, Llc Non-pneumatic tourniquet device
USD635246S1 (en) * 2010-03-26 2011-03-29 Oriel Therapeutics, Inc. Dose disk for dry powder inhalers
USD697224S1 (en) * 2012-10-26 2014-01-07 Paragonix Technologies Inc. Lid for a tissue transport system
TWD156726S (zh) * 2012-11-15 2013-11-01 台灣福興工業股份有限公司 鎖具套盤
USD736261S1 (en) * 2012-11-29 2015-08-11 Cummins Inc. Shroud
USD738935S1 (en) * 2014-07-15 2015-09-15 Henry C. Chu Cap for air compressor
USD755038S1 (en) * 2014-08-13 2016-05-03 Luke Bolton Multi-fit cover plate
TWD168721S (zh) * 2014-10-09 2015-07-01 台灣福興工業股份有限公司 鎖具蓋
JP1579613S (enrdf_load_stackoverflow) * 2017-01-25 2017-06-19
USD867576S1 (en) * 2017-05-24 2019-11-19 Christina Hewitt Cap for medical breathing apparatuses
USD878548S1 (en) * 2018-11-16 2020-03-17 Brandi Lane Side indent nasal airway

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12100577B2 (en) 2019-08-28 2024-09-24 Applied Materials, Inc. High conductance inner shield for process chamber
USD973609S1 (en) 2020-04-22 2022-12-27 Applied Materials, Inc. Upper shield with showerhead for a process chamber
US12080522B2 (en) 2020-04-22 2024-09-03 Applied Materials, Inc. Preclean chamber upper shield with showerhead

Also Published As

Publication number Publication date
JP1625994S (enrdf_load_stackoverflow) 2019-03-04
USD922609S1 (en) 2021-06-15

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