TWD191654S - 電漿腔室襯墊 - Google Patents

電漿腔室襯墊

Info

Publication number
TWD191654S
TWD191654S TW106306300F TW106306300F TWD191654S TW D191654 S TWD191654 S TW D191654S TW 106306300 F TW106306300 F TW 106306300F TW 106306300 F TW106306300 F TW 106306300F TW D191654 S TWD191654 S TW D191654S
Authority
TW
Taiwan
Prior art keywords
view
plasma chamber
section
chamber liner
drawn based
Prior art date
Application number
TW106306300F
Other languages
English (en)
Chinese (zh)
Inventor
艾瑞克木原 生野
Original Assignee
美商應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商應用材料股份有限公司 filed Critical 美商應用材料股份有限公司
Publication of TWD191654S publication Critical patent/TWD191654S/zh

Links

TW106306300F 2017-04-28 2017-10-27 電漿腔室襯墊 TWD191654S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29/602,211 2017-04-28
US29/602,211 USD838681S1 (en) 2017-04-28 2017-04-28 Plasma chamber liner

Publications (1)

Publication Number Publication Date
TWD191654S true TWD191654S (zh) 2018-07-11

Family

ID=63682353

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106306300F TWD191654S (zh) 2017-04-28 2017-10-27 電漿腔室襯墊

Country Status (3)

Country Link
US (1) USD838681S1 (enrdf_load_stackoverflow)
JP (1) JP1614744S (enrdf_load_stackoverflow)
TW (1) TWD191654S (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1593817S (enrdf_load_stackoverflow) * 2017-03-28 2017-12-25
USD875055S1 (en) * 2017-04-28 2020-02-11 Applied Materials, Inc. Plasma connector liner
USD882536S1 (en) * 2017-04-28 2020-04-28 Applied Materials, Inc. Plasma source liner
USD875054S1 (en) * 2017-04-28 2020-02-11 Applied Materials, Inc. Plasma connector liner
USD875053S1 (en) * 2017-04-28 2020-02-11 Applied Materials, Inc. Plasma connector liner
JP1638504S (enrdf_load_stackoverflow) * 2018-12-06 2019-08-05

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD583838S1 (en) 2007-09-19 2008-12-30 Riley Power, Inc. Grinding chamber side liner

Family Cites Families (19)

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Publication number Priority date Publication date Assignee Title
US5846332A (en) * 1996-07-12 1998-12-08 Applied Materials, Inc. Thermally floating pedestal collar in a chemical vapor deposition chamber
US6170429B1 (en) * 1998-09-30 2001-01-09 Lam Research Corporation Chamber liner for semiconductor process chambers
US6234219B1 (en) * 1999-05-25 2001-05-22 Micron Technology, Inc. Liner for use in processing chamber
US7011039B1 (en) * 2000-07-07 2006-03-14 Applied Materials, Inc. Multi-purpose processing chamber with removable chamber liner
JP5567392B2 (ja) * 2010-05-25 2014-08-06 東京エレクトロン株式会社 プラズマ処理装置
JP5837178B2 (ja) 2011-03-22 2015-12-24 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 化学気相堆積チャンバ用のライナアセンブリ
USD658693S1 (en) * 2011-03-30 2012-05-01 Tokyo Electron Limited Liner for plasma processing apparatus
USD658692S1 (en) * 2011-03-30 2012-05-01 Tokyo Electron Limited Liner for plasma processing apparatus
USD678228S1 (en) * 2011-03-30 2013-03-19 Tokyo Electron Limited Chamber block
USD658691S1 (en) * 2011-03-30 2012-05-01 Tokyo Electron Limited Liner for plasma processing apparatus
US8627796B2 (en) 2011-04-21 2014-01-14 Eaton Corporation Pivot foot for deactivating rocker arm
USD699692S1 (en) * 2012-01-19 2014-02-18 Applied Materials, Inc. Upper liner
CN107833848B (zh) 2013-04-30 2021-12-07 应用材料公司 具有空间分布的气体通道的气流控制衬垫
USD716239S1 (en) * 2013-11-06 2014-10-28 Applied Materials, Inc. Upper chamber liner
USD717746S1 (en) * 2013-11-06 2014-11-18 Applied Materials, Inc. Lower chamber liner
USD716240S1 (en) * 2013-11-07 2014-10-28 Applied Materials, Inc. Lower chamber liner
JP1546801S (enrdf_load_stackoverflow) * 2015-06-12 2016-03-28
JP1546799S (enrdf_load_stackoverflow) * 2015-06-12 2016-03-28
JP1564934S (enrdf_load_stackoverflow) * 2016-02-26 2016-12-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD583838S1 (en) 2007-09-19 2008-12-30 Riley Power, Inc. Grinding chamber side liner

Also Published As

Publication number Publication date
USD838681S1 (en) 2019-01-22
JP1614744S (enrdf_load_stackoverflow) 2018-10-01

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