TWD191199S - Part of the vacuum suction pad - Google Patents
Part of the vacuum suction padInfo
- Publication number
- TWD191199S TWD191199S TW106304046F TW106304046F TWD191199S TW D191199 S TWD191199 S TW D191199S TW 106304046 F TW106304046 F TW 106304046F TW 106304046 F TW106304046 F TW 106304046F TW D191199 S TWD191199 S TW D191199S
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- vacuum
- vacuum suction
- design
- suction
- Prior art date
Links
- 238000002347 injection Methods 0.000 title 1
- 239000007924 injection Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract description 14
- 239000012790 adhesive layer Substances 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 2
- 239000010410 layer Substances 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 239000007779 soft material Substances 0.000 abstract description 2
- 238000007664 blowing Methods 0.000 abstract 1
- 229920001296 polysiloxane Polymers 0.000 abstract 1
- 230000003068 static effect Effects 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 abstract 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2017-6855F JP1587815S (https=) | 2017-03-31 | 2017-03-31 | |
| JP2017-006855 | 2017-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD191199S true TWD191199S (zh) | 2018-06-21 |
Family
ID=60002421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW106304046F TWD191199S (zh) | 2017-03-31 | 2017-07-14 | Part of the vacuum suction pad |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP1587815S (https=) |
| TW (1) | TWD191199S (https=) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD204260S (zh) | 2019-01-17 | 2020-04-21 | 荷蘭商Ａｓｍ Ｉｐ 控股公司 | 通氣基座 |
| TWD206688S (zh) | 2019-01-17 | 2020-08-21 | 荷蘭商Ａｓｍ Ｉｐ 控股公司 | 通氣基座 |
| US11404302B2 (en) | 2019-05-22 | 2022-08-02 | Asm Ip Holding B.V. | Substrate susceptor using edge purging |
| US11764101B2 (en) | 2019-10-24 | 2023-09-19 | ASM IP Holding, B.V. | Susceptor for semiconductor substrate processing |
| US11961756B2 (en) | 2019-01-17 | 2024-04-16 | Asm Ip Holding B.V. | Vented susceptor |
| USD1031676S1 (en) | 2020-12-04 | 2024-06-18 | Asm Ip Holding B.V. | Combined susceptor, support, and lift system |
-
2017
- 2017-03-31 JP JPD2017-6855F patent/JP1587815S/ja active Active
- 2017-07-14 TW TW106304046F patent/TWD191199S/zh unknown
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD204260S (zh) | 2019-01-17 | 2020-04-21 | 荷蘭商Ａｓｍ Ｉｐ 控股公司 | 通氣基座 |
| TWD206688S (zh) | 2019-01-17 | 2020-08-21 | 荷蘭商Ａｓｍ Ｉｐ 控股公司 | 通氣基座 |
| USD958764S1 (en) | 2019-01-17 | 2022-07-26 | Asm Ip Holding B.V. | Higher temperature vented susceptor |
| US11961756B2 (en) | 2019-01-17 | 2024-04-16 | Asm Ip Holding B.V. | Vented susceptor |
| US11404302B2 (en) | 2019-05-22 | 2022-08-02 | Asm Ip Holding B.V. | Substrate susceptor using edge purging |
| US12406871B2 (en) | 2019-05-22 | 2025-09-02 | Asm Ip Holding B.V. | Substrate susceptor using edge purging |
| US11764101B2 (en) | 2019-10-24 | 2023-09-19 | ASM IP Holding, B.V. | Susceptor for semiconductor substrate processing |
| USD1031676S1 (en) | 2020-12-04 | 2024-06-18 | Asm Ip Holding B.V. | Combined susceptor, support, and lift system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP1587815S (https=) | 2017-10-10 |
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