TWD179497S - 真空吸附墊片 - Google Patents
真空吸附墊片Info
- Publication number
- TWD179497S TWD179497S TW105300056D01F TW105300056D01F TWD179497S TW D179497 S TWD179497 S TW D179497S TW 105300056D01 F TW105300056D01 F TW 105300056D01F TW 105300056D01 F TW105300056D01 F TW 105300056D01F TW D179497 S TWD179497 S TW D179497S
- Authority
- TW
- Taiwan
- Prior art keywords
- view
- design
- substrate
- adsorption
- vacuum
- Prior art date
Links
- 238000001179 sorption measurement Methods 0.000 title abstract 8
- 239000000758 substrate Substances 0.000 abstract 6
- 239000012790 adhesive layer Substances 0.000 abstract 2
- 239000012530 fluid Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 238000005498 polishing Methods 0.000 abstract 1
- 229920001296 polysiloxane Polymers 0.000 abstract 1
- 229920002635 polyurethane Polymers 0.000 abstract 1
- 239000004814 polyurethane Substances 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000007779 soft material Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 abstract 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2015-15208F JP1550113S (ja) | 2015-07-08 | 2015-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD179497S true TWD179497S (zh) | 2016-11-11 |
Family
ID=56008292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW105300056D01F TWD179497S (zh) | 2015-07-08 | 2016-01-07 | 真空吸附墊片 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP1550113S (ja) |
| TW (1) | TWD179497S (ja) |
-
2015
- 2015-07-08 JP JPD2015-15208F patent/JP1550113S/ja active Active
-
2016
- 2016-01-07 TW TW105300056D01F patent/TWD179497S/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JP1550113S (ja) | 2016-05-23 |
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