TWD176077S - reflective ring component - Google Patents

reflective ring component

Info

Publication number
TWD176077S
TWD176077S TW104306988F TW104306988F TWD176077S TW D176077 S TWD176077 S TW D176077S TW 104306988 F TW104306988 F TW 104306988F TW 104306988 F TW104306988 F TW 104306988F TW D176077 S TWD176077 S TW D176077S
Authority
TW
Taiwan
Prior art keywords
base
view
article
design
ring component
Prior art date
Application number
TW104306988F
Other languages
Chinese (zh)
Inventor
Koichiro Harada
Takeshi Yasui
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD176077S publication Critical patent/TWD176077S/en

Links

Abstract

【物品用途】;本設計的物品是反射環構件，設置在處理晶圓的晶圓處理裝置內，是將載置著被處理晶圓的基座內建的加熱器(熱源)的熱能予以反射用的反射環構件。;【設計說明】;本物品是與基座組合在一起使用，將來自加熱器的熱能朝基座中心方向反射。在本案物品內周形成的四個部位的埋頭孔部，是設置成用來與在基座形成的突起嵌合。;右側視圖與左側視圖對稱、後視圖與前視圖對稱，均省略之。;本設計為不透明。[Use of article]; The article of this design is a reflection ring member, which is installed in a wafer processing device that processes wafers. It reflects the heat energy of the heater (heat source) built into the base on which the wafer to be processed is placed. The reflective ring component used. ;[Design Description];This item is used in combination with the base to reflect the heat energy from the heater toward the center of the base. The four countersunk holes formed on the inner periphery of the article are configured to fit into the protrusions formed on the base. ;The right side view is symmetrical to the left side view, and the rear view is symmetrical to the front view, so they are omitted. ;This design is opaque.

TW104306988F 2015-06-16 2015-12-15 reflective ring component TWD176077S (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2015-13299F JP1545406S (en) 2015-06-16 2015-06-16

Publications (1)

Publication Number Publication Date
TWD176077S true TWD176077S (en) 2016-06-01

Family

ID=55484211

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104306988F TWD176077S (en) 2015-06-16 2015-12-15 reflective ring component

Country Status (3)

Country Link
US (1) USD803917S1 (en)
JP (1) JP1545406S (en)
TW (1) TWD176077S (en)

Families Citing this family (15)

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Publication number Priority date Publication date Assignee Title
US10438795B2 (en) 2015-06-22 2019-10-08 Veeco Instruments, Inc. Self-centering wafer carrier system for chemical vapor deposition
JP1581911S (en) * 2016-10-25 2017-07-24
JP1584906S (en) * 2017-01-31 2017-08-28
JP1584241S (en) * 2017-01-31 2017-08-21
USD828088S1 (en) * 2017-02-09 2018-09-11 Sovaro Coolers, LLC Tumbler rim
JP1598984S (en) 2017-07-31 2018-03-05
JP1598997S (en) 2017-08-31 2018-03-05
JP1598996S (en) 2017-08-31 2018-03-05
JP1598998S (en) 2017-08-31 2018-03-05
USD891923S1 (en) * 2017-11-12 2020-08-04 Yun Lin Container lid
JP1659287S (en) * 2019-10-18 2020-05-11
USD974910S1 (en) * 2020-02-04 2023-01-10 Wilson Sporting Goods Co. Tennis ball container overcap
USD943642S1 (en) * 2020-02-29 2022-02-15 Bmic Llc Perforating apparatus
USD1042374S1 (en) * 2022-03-18 2024-09-17 Applied Materials, Inc. Support pipe for an interlocking process kit for a substrate processing chamber
USD1042373S1 (en) 2022-03-18 2024-09-17 Applied Materials, Inc. Sliding ring for an interlocking process kit for a substrate processing chamber

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US1798246A (en) * 1930-09-19 1931-03-31 Victor Mfg & Gasket Co Gasket
US3414183A (en) * 1966-08-24 1968-12-03 Phillips Petroleum Co Ring-a-rim closures
USD243664S (en) * 1975-11-10 1977-03-15 Hardinge Brothers, Inc. Index ring for a machine tool
USD348836S (en) * 1991-06-06 1994-07-19 Armstrong Containers, Inc. Transportation safety ring for cylindrical containers
US5533924A (en) * 1994-09-01 1996-07-09 Micron Technology, Inc. Polishing apparatus, a polishing wafer carrier apparatus, a replacable component for a particular polishing apparatus and a process of polishing wafers
USD380527S (en) * 1996-03-19 1997-07-01 Cherle Velez Sink drain shield
USD470050S1 (en) * 2001-07-17 2003-02-11 Playtex Products, Inc. Converter ring
WO2004033152A1 (en) * 2002-10-11 2004-04-22 Semplastics, L.L.C. Retaining ring for use on a carrier of a polishing apparatus
USD525127S1 (en) * 2004-03-01 2006-07-18 Kraft Foods Holdings, Inc. Susceptor ring
USD559994S1 (en) * 2005-03-30 2008-01-15 Tokyo Electron Limited Cover ring
USD588078S1 (en) * 2006-06-16 2009-03-10 Tokyo Electron Limited Heat dissipation deterrence link for semiconductor manufacture
USD684551S1 (en) * 2011-07-07 2013-06-18 Phuong Van Nguyen Wafer polishing pad holder
USD709538S1 (en) * 2011-09-30 2014-07-22 Tokyo Electron Limited Focusing ring
USD665491S1 (en) * 2012-01-25 2012-08-14 Applied Materials, Inc. Deposition chamber cover ring
USD698939S1 (en) * 2013-03-14 2014-02-04 Charles River Laboratories, Inc. Lid
USD730734S1 (en) * 2013-07-10 2015-06-02 Gino Rapparini Reinforcement ring for beverage capsule
TWD169790S (en) * 2013-07-10 2015-08-11 日立國際電氣股份有限公司 Part of the vaporizer for substrate processing equipment
USD751398S1 (en) * 2014-06-03 2016-03-15 Tri State Distribution, Inc. Scalloped pharmaceutical closure
JP1546800S (en) * 2015-06-12 2016-03-28

Also Published As

Publication number Publication date
JP1545406S (en) 2016-03-14
USD803917S1 (en) 2017-11-28

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