TW591071B - Halogenated anti-reflective coatings - Google Patents

Halogenated anti-reflective coatings Download PDF

Info

Publication number
TW591071B
TW591071B TW91103606A TW91103606A TW591071B TW 591071 B TW591071 B TW 591071B TW 91103606 A TW91103606 A TW 91103606A TW 91103606 A TW91103606 A TW 91103606A TW 591071 B TW591071 B TW 591071B
Authority
TW
Taiwan
Prior art keywords
polymer binder
monomer
composition
independently
polymer
Prior art date
Application number
TW91103606A
Other languages
English (en)
Inventor
Tomoyuki Enomoto
Kenichi Mizusawa
Shinya Arase
Rama Puligadda
Original Assignee
Brewer Science Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US09/679,661 priority Critical patent/US6495305B1/en
Application filed by Brewer Science Inc filed Critical Brewer Science Inc
Application granted granted Critical
Publication of TW591071B publication Critical patent/TW591071B/zh

Links