TW548245B - A process for treating aqueous waste containing copper and copper CMP particles - Google Patents

A process for treating aqueous waste containing copper and copper CMP particles Download PDF

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Publication number
TW548245B
TW548245B TW089116683A TW89116683A TW548245B TW 548245 B TW548245 B TW 548245B TW 089116683 A TW089116683 A TW 089116683A TW 89116683 A TW89116683 A TW 89116683A TW 548245 B TW548245 B TW 548245B
Authority
TW
Taiwan
Prior art keywords
stream
copper
liquid
cmp
solid particles
Prior art date
Application number
TW089116683A
Other languages
English (en)
Chinese (zh)
Inventor
Thuy Nguyen
Dustin Kimbel James
Deon Eugene Campbell
Michael Andrew Frisch
Duan Marie Brady
Original Assignee
Koch Microelectronic Service C
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koch Microelectronic Service C filed Critical Koch Microelectronic Service C
Application granted granted Critical
Publication of TW548245B publication Critical patent/TW548245B/zh

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C02F1/444—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F9/00—Multistage treatment of water, waste water or sewage
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/28—Treatment of water, waste water, or sewage by sorption
    • C02F1/283—Treatment of water, waste water, or sewage by sorption using coal, charred products, or inorganic mixtures containing them
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/52—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/66—Treatment of water, waste water, or sewage by neutralisation; pH adjustment
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2101/00—Nature of the contaminant
    • C02F2101/10—Inorganic compounds
    • C02F2101/20—Heavy metals or heavy metal compounds
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/12—Nature of the water, waste water, sewage or sludge to be treated from the silicate or ceramic industries, e.g. waste waters from cement or glass factories
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S204/00—Chemistry: electrical and wave energy
    • Y10S204/13—Purification and treatment of electroplating baths and plating wastes

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Separation Of Suspended Particles By Flocculating Agents (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
TW089116683A 1999-08-19 2000-08-17 A process for treating aqueous waste containing copper and copper CMP particles TW548245B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/377,196 US6398964B1 (en) 1999-08-19 1999-08-19 Process for treating aqueous waste containing copper and copper CMP particles

Publications (1)

Publication Number Publication Date
TW548245B true TW548245B (en) 2003-08-21

Family

ID=23488149

Family Applications (1)

Application Number Title Priority Date Filing Date
TW089116683A TW548245B (en) 1999-08-19 2000-08-17 A process for treating aqueous waste containing copper and copper CMP particles

Country Status (3)

Country Link
US (1) US6398964B1 (fr)
EP (1) EP1078887A1 (fr)
TW (1) TW548245B (fr)

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US6916428B2 (en) * 2003-10-03 2005-07-12 Amia Corporation Photo-chemical remediation of Cu-CMP waste
US7491337B2 (en) * 2004-04-23 2009-02-17 Jeffbrad Investments Pty Limited Method and apparatus for removing contaminants from water
US7722841B2 (en) * 2006-04-25 2010-05-25 General Electric Company Polymeric chelant and coagulant to treat metal-containing wastewater
WO2016184249A1 (fr) * 2015-05-21 2016-11-24 成都虹华环保科技股份有限公司 Système de traitement de liquide de décapage d'étain à l'acide nitrique
WO2016184248A1 (fr) * 2015-05-21 2016-11-24 成都虹华环保科技股份有限公司 Système de traitement de liquide de décapage à l'acide nitrique
CN104831280A (zh) * 2015-05-21 2015-08-12 成都虹华环保科技股份有限公司 一种硝酸退锡水处理系统
US10683223B1 (en) * 2016-04-01 2020-06-16 Paul C. Wegner Process to remove transition metals from waste water
WO2021207298A1 (fr) * 2020-04-07 2021-10-14 Evoqua Water Technologies Llc Traitement des eaux usées d'une boue du cuivre par ultrafiltration et échange d'ions
CN115490366B (zh) * 2022-10-08 2024-04-26 惠州市成泰环保智能科技有限公司 Pcb生产用水的低排放回用工艺

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Also Published As

Publication number Publication date
EP1078887A1 (fr) 2001-02-28
US6398964B1 (en) 2002-06-04

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