TW541589B - Loadlock chamber - Google Patents

Loadlock chamber Download PDF

Info

Publication number
TW541589B
TW541589B TW90116674A TW90116674A TW541589B TW 541589 B TW541589 B TW 541589B TW 90116674 A TW90116674 A TW 90116674A TW 90116674 A TW90116674 A TW 90116674A TW 541589 B TW541589 B TW 541589B
Authority
TW
Taiwan
Prior art keywords
substrate
compartment
chamber
opening
vacuum
Prior art date
Application number
TW90116674A
Other languages
English (en)
Chinese (zh)
Inventor
Ilya Perlov
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of TW541589B publication Critical patent/TW541589B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW90116674A 2000-07-07 2001-07-06 Loadlock chamber TW541589B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US21714400P 2000-07-07 2000-07-07

Publications (1)

Publication Number Publication Date
TW541589B true TW541589B (en) 2003-07-11

Family

ID=22809832

Family Applications (1)

Application Number Title Priority Date Filing Date
TW90116674A TW541589B (en) 2000-07-07 2001-07-06 Loadlock chamber

Country Status (4)

Country Link
CN (1) CN1440564A (fr)
AU (1) AU2001273667A1 (fr)
TW (1) TW541589B (fr)
WO (1) WO2002005332A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EA012052B1 (ru) 2005-06-17 2009-08-28 Мерц Фарма Гмбх Унд Ко. Кгаа Устройство и способ для ферментативного получения биологически активных соединений
TW201639063A (zh) 2015-01-22 2016-11-01 應用材料股份有限公司 批量加熱和冷卻腔室或負載鎖定裝置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9122676D0 (en) * 1991-10-25 1991-12-11 Electrotech Ltd Processing system
KR100310249B1 (ko) * 1995-08-05 2001-12-17 엔도 마코토 기판처리장치
US6034000A (en) * 1997-07-28 2000-03-07 Applied Materials, Inc. Multiple loadlock system
JP4048387B2 (ja) * 1997-09-10 2008-02-20 東京エレクトロン株式会社 ロードロック機構及び処理装置

Also Published As

Publication number Publication date
AU2001273667A1 (en) 2002-01-21
CN1440564A (zh) 2003-09-03
WO2002005332A3 (fr) 2002-05-10
WO2002005332A2 (fr) 2002-01-17

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Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent