AU2001273667A1 - Loadlock chamber - Google Patents

Loadlock chamber

Info

Publication number
AU2001273667A1
AU2001273667A1 AU2001273667A AU7366701A AU2001273667A1 AU 2001273667 A1 AU2001273667 A1 AU 2001273667A1 AU 2001273667 A AU2001273667 A AU 2001273667A AU 7366701 A AU7366701 A AU 7366701A AU 2001273667 A1 AU2001273667 A1 AU 2001273667A1
Authority
AU
Australia
Prior art keywords
loadlock chamber
loadlock
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001273667A
Inventor
David Housman
Ilya Perlov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of AU2001273667A1 publication Critical patent/AU2001273667A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AU2001273667A 2000-07-07 2001-06-30 Loadlock chamber Abandoned AU2001273667A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US21714400P 2000-07-07 2000-07-07
US60217144 2000-07-07
PCT/US2001/041238 WO2002005332A2 (en) 2000-07-07 2001-06-30 Loadlock chamber

Publications (1)

Publication Number Publication Date
AU2001273667A1 true AU2001273667A1 (en) 2002-01-21

Family

ID=22809832

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001273667A Abandoned AU2001273667A1 (en) 2000-07-07 2001-06-30 Loadlock chamber

Country Status (4)

Country Link
CN (1) CN1440564A (en)
AU (1) AU2001273667A1 (en)
TW (1) TW541589B (en)
WO (1) WO2002005332A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2612205C (en) * 2005-06-17 2012-07-10 Merz Pharma Gmbh & Co. Kgaa Apparatus and process for the fermentative production of biological active compounds
TW201639063A (en) 2015-01-22 2016-11-01 應用材料股份有限公司 Batch heating and cooling chamber or loadlock

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9122676D0 (en) * 1991-10-25 1991-12-11 Electrotech Ltd Processing system
KR100310249B1 (en) * 1995-08-05 2001-12-17 엔도 마코토 Substrate Processing Equipment
US6034000A (en) * 1997-07-28 2000-03-07 Applied Materials, Inc. Multiple loadlock system
JP4048387B2 (en) * 1997-09-10 2008-02-20 東京エレクトロン株式会社 Load lock mechanism and processing device

Also Published As

Publication number Publication date
WO2002005332A3 (en) 2002-05-10
CN1440564A (en) 2003-09-03
TW541589B (en) 2003-07-11
WO2002005332A2 (en) 2002-01-17

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