薄、短、 品發展。 ，市場上 板件係形 不具有孔 及底部上 藉由形成 〇 及底部上 對位標記 業已形成 係。 ，整個表 之對位標 層之銅箔 該膠片的 記的部份 一標記而 入核心板 脂絕緣層 517178 五、發明說明（1) 發明領域 本發明係有關於一種對位裝置。 先前技藝 化、及：f叙：刷電路板係朝向輕、 化及以仃動電話為代矣 > 了增加安裝於板件上的電 地形成樹脂絕緣層；部 在此，當欲4㈡的導電性 層式層用光罩上之；：：；心板上之 然而，在增層=开』；：置關 覆蓋，因此通常血法：2成圖案之前 有鑑於斯，觀ΐ到核心板上 已採用放置遮光膠^形成增層式 電鍍不致附著於相對電鍍後除去 的方法。在該m 為核心板之 入之樹脂，使得當^佈丨需防止樹脂侵 田塗佈増層式層之樹 小等精緻 特別地，為 已有猎稱作 成於貫穿至 洞。這種板 依順序交錯 稱作成孔之 之一增層式 與設於一增 於核心板上 面係由銅箔 言己。 的方法中， 方法，使得 。另一方法 不使用圖案 中或移除侵 時’需在次Thin, short, product development. On the market, the plate system has no holes and the bottom has been formed by forming 0 and the alignment mark on the bottom. The copper foil of the alignment mark layer of the entire table, the marked part of the film, a mark is inserted into the core board, the lipid insulation layer 517178 V. Description of the invention (1) Field of the invention The present invention relates to a registration device. The previous technology and f: the brush circuit board system is lighter, and the mobile phone is used as a substitute.> Added the electrical ground installed on the board to form a resin insulation layer; here, when you want to The conductive layer type layer is used on a photomask ::; However, on the heart plate, the layer is added = on ;;: the cover is closed, so the blood method is usually: before the pattern is 2 into the pattern, look at the core plate A method has been adopted in which a light-shielding adhesive is placed to form a build-up plating so as not to be attached to and removed after relative plating. The m is the core of the resin, so that when the cloth needs to prevent the resin from invading the field and coating the layered layer of the tree is small and exquisite. In particular, it is known that it is formed in the through hole. This kind of plate is staggered in order, which is called a layered type of hole formation and is placed on a core plate. The surface is made of copper foil. In the method, the method makes. Another method is not to use the pattern or remove the invasion.
2099-4714-PF(N).ptd 178 1782099-4714-PF (N) .ptd 178 178
發明說明（2) 一電鍍步驟時覆苔兮 中，由於需餘刻鋼:放置銅猪而形成的方法 而成為製程效率的：頸，且移除之，目此造成製程困難， 為了解決上流P弓^Description of the invention (2) In the coating process during a plating step, due to the need to engraving steel: a method formed by placing copper pigs, it becomes a process efficiency: neck, and it is removed, which makes the process difficult, in order to solve the high-level P Bow ^
射線來讀取形成於:、ί:明之申請人發展出藉使用X 然而，當使用X射線時VV產生之弁―罝板Λ上的一對位標記^ 以及受X射線照射二：f t 組成將因χ射線而改變 螭光.罩時尤然。73透月度將退化的問題，特別在玻 t發明之—目的係致力關於上 對位裝置的新穎改良。 4甲便用λ射線來疋位 為了達成上述目的，本發明 夠配置於形忐古 夕g + “ 1了做匕枯· 九罩， 1孓^成有一多層電路之一 形成於該板件上的導電 ：：某㈣上且繪製 板件之至少一芦上Y6板件對位標記，形成於The X-rays were used to read: The applicants of Ming and Ming developed the use of X. However, when X-rays were used, a pair of bit marks on the 弁-罝 plate Λ generated by VV and irradiated by X-rays 2: ft constituted Changes in phobia due to x-rays. This is especially true for hoods. 73 The problem of degrading through the moon, especially in the invention of the glass-the purpose is to work on new improvements to the upper alignment device. For the purpose of achieving the above-mentioned object, the present invention is capable of being arranged in the shape of the ancient g + "1. It is made of daggers and nine covers, and one of the multilayer circuits is formed on the board. Electrical conductivity: Y6 plate alignment mark on at least one reed drawn on a sampan, formed on
記，㈣於該…二 =;'=相；一光罩對則 括有該板件對位標記的一區域；一移除將χ射：照射至 射線產生器之X射線照射範圍移、、，用於自該 能夠《射線轉換成可見光、影構件 線照射之該板件對位標記的一影像將 U ，單元，用於㈣投影至該投影構；記 6己的位置；一偵測單元，用於在該光 \牛對位 之狀態下’偵測該光罩之光罩對 Μ置於該板件- 早耵伹铩，己的位置；一移Remember, I ’m afraid that ... two =; '= phase; a mask pair includes an area where the plate alignment mark is included; one removes the X-ray: the X-ray irradiation range of the ray generator is shifted ,, An image for the registration mark of the plate which can be converted into visible light and irradiated by the shadow member line will be U, unit for projecting to the projection structure; remembering 6 positions; a detection unit For 'detecting the photomask pair M of the photomask in the state of the light \ bull alignment to the plate-as soon as possible, its own position; a move
517178 五、發明說明（3) 兀、，用於移動該板件與該光罩兩者或其 、 摘測到之板件對位標記及該光罩對位：以根據該 標記與該光罩對位標記之定位；及一己广亥板件對位 造具有複數個絕緣層及繪製 光源，在用於製 -多層印刷電路板的對位ίΚ電數個導電層之 圖案在該定位後曝光至該板件上。π 1於該光罩上之一 在上述結構中，可能藉叉射線將形 板件對位標記影像投影至該投影構件成；核心板上之該 標記及該光罩對位標記來定位該板^與=據該板件對位 此外’由於自該X射線產 光罩’因此可防止因χ =射線照射範圍移除該 該對位裝置尚包括一二^亥署先罩組成改變。 記及光罩對位標記的谓測位置獲致位=自該板件對位標 之位置關係來偵測一間隙， 愚係且由先前決定 板與該光罩。譬如，可移^可能根據該間隙來定位該 以使其交t。該運動 動^立=記及該光罩對位標記 之一"可自動或藉人工= 該光軍兩者或其中 在較佳實施例中，該移動早凡。 於記憶該偵測到之板件對位 '置尚包括-記憶裝置，用 該記憶之板件對位標 ϋ，置’該移動單元係根 該板件及該光軍兩者或到之光罩對位標記來移動 可能偵測到根據該記憶之 。即使在這種情況下，仍 對位標記之間位置關係的—門：位標記舆該偵捌到之光罩 可能提供一記憶穿署 隙。 ——用於記憶除了該板件對位標記 2099-4714-PF(N).ptd 517178 五、發明說明（4) 以外之該板件位 件的該板件對位 位標記位置。在 上之該板件對位 板件及該光罩兩 板上之該板件對 到一間隙。該對 對位標 該光罩 位標記 當 罩。即 該光罩 記與該 偵測該 單元通 相機所 位標記 上 膜基礎 記及光罩 兩者或其 根據該顯 設定該虛 使在這種 兩者或其 光罩對位 板件對位 常包括一 照相之影 的位置。 述構造在 光罩之一 置，設 標記位 這種情 標記與 者或其 位標記 位裝置 對位標 中之一 示之影 影板時 情況下 中之一 標記的 標記的 電荷耦 像信號 疋' 虛 置、及 況下， 該偵測 中之一 與該偵 尚包括 記的一 ，使得 像來達 ，將以 ，該移 ，使得 位置關 單元及 合裝置 來偵測 該光罩係一玻 玻璃時具有優 影板、記憶關於該記憶之板 設定該虛影板上之該板件對 β亥移動I元係根據該f彡;1¾ 到之光罩對位標記來移動該 、。甚至可能根據設於該虛影 測到之光罩對位標記而偵測 以影像顯示該偵測到之板件 ί::元，可移動該板件及 〃 對位標記與該光罩對 成先前決定之位置關係。 y顯示該虛影板及該光 可能移動該板件及 上之該板件對位標 :達成才曰定位置關係。用於 用貞測該光單對 H 相機’且根據該照 、位標記及該光罩對 ;光罩或為其上置放有一薄 鱼-隹實施例之詳細說明 以下將參考圖式來說明本發明之一垂 ,.. , 〜貝施例。 在第1圖中’將繪製有電路圖案 — ^先罩4運送至一印517178 V. Description of the invention (3) Wu, used to move both the plate and the photomask, or the plate alignment mark and the photomask alignment measured according to the mark: The positioning of the alignment marks; and the alignment of the Guanghai board with a plurality of insulating layers and a drawing light source. The pattern of several conductive layers used for the alignment of the multilayer printed circuit board is exposed after the positioning. On the board. π 1 on the photomask In the above structure, it may be possible to project the image of the registration mark of the shaped plate onto the projection member by a fork ray; the mark on the core board and the registration mark of the mask may be used to position the plate. ^ And = according to the plate alignment In addition, 'because the photomask is produced from the X-rays', the removal of the registration device due to the x-ray irradiation range can also prevent the composition of the mask from being changed. Taking into account the measured position of the registration mark of the photomask = detection of a gap from the positional relationship of the registration mark of the plate, which is determined by the board and the photomask previously. For example, it may be possible to position ^ according to the gap so that it intersects t. The movement is erected = one of the mask alignment marks is noted " can be automatically or by manual = both or both of the light army. In a preferred embodiment, the movement is early. In the memory of the detected plate alignment, the positioning device includes a memory device, and the memory plate alignment mark is used to set the mobile unit to both the plate and the light army. Mask registration marks to move may be detected based on that memory. Even in this case, the positional relationship between the registration marks is still the door: the registration mark may provide a memory through the mask. ——It is used to memorize the position of the registration mark of the plate other than the registration mark of the plate 2099-4714-PF (N) .ptd 517178 V. Description of the invention (4). The plate alignment on the plate and the plate on the two plates of the photomask are aligned to a gap. The pair of registration marks, the mask, and the mark mark when the cover. That is, both the mask mark and the mask base mark and the mask that detect the position of the unit through the camera, or according to the display settings, the false position is always in the two or the mask alignment plate. Includes the location of a photographic shadow. The charge-coupled image signal of one of the markers in the case where the marker is placed on one of the photomasks, and the marker is set, or its bit marker device is used to match the shadow plate shown in the marker. 'Virtually, and in addition, one of the detection and the reconnaissance include a recorded one, so that the image will be reached, the movement, the position off unit and the device to detect the mask is a glass The glass has an excellent shadow plate, and the memory plate is set on the virtual shadow plate. The plate pair moves to the β-axis. The I element is moved according to the f 该; 1¾ to the mask registration mark. It is even possible to detect the detected plate based on the mask registration mark set on the virtual image to display the detected plate ί :: Yuan, the plate can be moved and the registration mark can be aligned with the mask Location relationship previously determined. y shows that the ghost plate and the light may move the plate and the alignment mark of the plate on it: the position relationship is reached. It is used to test the light single-pair H camera 'and according to the photo, bit mark and the photomask pair; the photomask may be placed with a thin fish- 隹One of the present inventions, ...., ~ Bei Shi examples. In the first figure, the circuit pattern is drawn — ^ 上盖 4shipped to a stamp
2099-4714-PF(N).ptd 第8頁 五、發明說明（5) 刷電路板6上附近 一 光源（未顯示）通附至該印刷電路板6，且藉利用曝光 路板6上。 k光罩4的曝光將電路圖案印刷至印刷電 在多層板之愔、、兄丁 的次數。 下’將重複該曝光動作相同於層數量 曝光時將杳：本 板6係設置於一平4與印刷電路板6之定位。印刷電路 0方向運動。缸从二8上，且藉一運動機構80而可朝XYZ及 罩對位標記5係检制H標記7係形成於印刷電路板6上，光 由電荷耦合裝置光罩4上，板件對位標記7及光罩4係 施定^以使該兩者達二相合機2照相，且藉平台8運動來實 使板件對位標記;；V/取底層之核心板)上的-層，而 器1係設置於平A 8、之’下I取可見光。有鑑於斯，x射線產生 板6盘光罩4之門ΥΛ方側，螢光體3係設置於印刷電路 ，、九罩4之間，X射線係自χ射線昭 線擷取板件對位標記7之影像此』且稭Χ射 上。 心〜像以將该影像投影至螢光體3 产轉：：ί ::塗佈於螢光體3之光罩4側，X射線係在此 ί3之Λ上V/對位標記7之影像㈣^ 體3之表面上。投影至營弁體3卜 麵照相機2照相以實:定位，象係由電荷麵合裝置 至光ΐ:，/Λχ射生器1之χ射線係同時均句地照射 至先罩4 1式中’光罩對位標記5附近之一部份斜紋線係 2〇99-4714-PF(N).ptd 第9頁 517178 發明說明 照射範圍。由發明人之研究可明白，這種X射線照射將使 °亥X 射處發生組成改變。亦即，當光罩4係玻璃或當薄 膜基礎之光罩放置於玻璃上時，將逐漸發生使光罩4變色 之改變。因此，將發生對位標記之影像識別耗時或準確度 降低的問題。亦，將發生嚴重變色而需要更換該玻璃光^ 及相似者的問題。 為了解決該等問題，當X射線係自X射線產生器1照射 時’光罩4並非如第2圖中所示者一般地配置於印刷電路板 6上’亦即，由一微電腦構成之一演算及控制單元9主要將 在電荷耦合裝置（CCD)照相機2照相及一影像處理單 =後，記憶板件對位標記7之位置一次。在實中20,處 刷者’設置―虛影印刷電路板6’ ’則記錄印 刷電路板之板件對位標記7，位置為該處。 上且二中：示者’設置光罩4於印刷電路板6 且猎私動早兀30移除螢光體3之後，將 取得，-；機置間隙係由演算及控制單元9 逆動機構8 0係經由一驅動及批法丨留 該間隙變為零以及調整平台8之位動置及控制早-1°驅動而使 -顯：動動作時將設置 光罩對位標記5係顯示於 之板件1位標記Γ及 藉觀看影像來實施定位。 处且一刼作人員將 印刷電路板6及光罩4之後將由來自2099-4714-PF (N) .ptd Page 8 V. Description of the invention (5) Brush the circuit board 6 nearby A light source (not shown) is attached to the printed circuit board 6 and the exposed circuit board 6 is used. The exposure of the k mask 4 printed the circuit pattern to the number of times that the printed circuit board was printed on the multilayer board. Next 'will repeat this exposure action the same as the number of layers. The exposure will be: when the plate 6 is set in a flat 4 and the positioning of the printed circuit board 6. Printed circuit moves in 0 direction. The cylinder is mounted on the printed circuit board 6 from the second 8 and can be oriented toward XYZ and the hood by a movement mechanism 80. The H mark 7 is formed on the printed circuit board 6. The light is provided on the hood 4 of the charge coupled device. The bit mark 7 and the mask 4 are set to make the two reach the two-phase combiner 2 to take a picture, and the platform 8 is moved to implement the plate alignment mark; V / take the bottom core plate)-layer, The device 1 is set on the flat A 8, and the lower part I takes visible light. In view of this, the X-ray generation board 6 discs of the mask 4 door ΥΛ side, the phosphor 3 is set between the printed circuit, and the nine mask 4, the X-ray is taken from the X-ray Zhao line to capture the plate alignment The image labeled "7" is shot on it. The heart ~ image to project this image to the phosphor 3 production and transfer :: ί :: coated on the 4 side of the mask of the phosphor 3, the X-ray is an image of V / alignment mark 7 on the Λ of ί 3 ㈣ ^ On the surface of the body 3. Projected to the camping body 3, the camera 2 is used to take pictures: positioning, the image system is from the charge surface bonding device to the light beam, and the x-ray system of / Λχ 生 器 1 is irradiated to the front cover 41 at the same time. 'A part of the diagonal line near the mask registration mark 5 is 2099-4714-PF (N) .ptd Page 9 517178 The invention explains the irradiation range. It can be understood from the research of the inventors that such X-ray irradiation will cause a change in the composition of the X-ray radiation. That is, when the mask 4 is a glass or when a film-based mask is placed on the glass, a change in discoloration of the mask 4 will gradually occur. Therefore, problems such as time-consuming or reduced accuracy of the image recognition of the registration marks will occur. Also, the problem of serious discoloration and the need to replace the glass light and the like will occur. In order to solve these problems, when the X-ray system is irradiated from the X-ray generator 1, 'the photomask 4 is not generally arranged on the printed circuit board 6 as shown in FIG. 2', that is, one of a microcomputer The calculation and control unit 9 mainly stores the position of the registration mark 7 of the memory board once after the charge-coupled device (CCD) camera 2 takes a picture and an image processing sheet =. In reality 20, the person who brushes ‘sets — the ghost printed circuit board 6’ ”records the board registration mark 7 of the printed circuit board at that location. Upper and second middle: The shower 'will set the photomask 4 on the printed circuit board 6 and remove the phosphor 3 from the private hunter 30, and will obtain,-; the machine clearance is calculated by the calculation and control unit 9 the reaction mechanism 8 0 is made by a drive and batch method 丨 leave the gap to zero and adjust the position of the platform 8 and control the drive by -1 ° as early as possible to display-when the movement is performed, the photomask registration mark 5 is displayed on the The plate is marked with a bit Γ, and positioning is performed by viewing the image. In the meantime, one person will print the printed circuit board 6 and the photomask 4 from
517178 五、發明說明（7) 源（未顯不）之照射光線實施曝光，且此後將在曝光每一層 時重複上述動作。 儘官平台8、印刷電路板6、光罩4、電荷耦合裝置 (CCD)照相機2、及相似者之位置關係描述為上與下方向之 關係，但並非以這種關係為限，且甚至可能為水平方向之 配置。 昭相中，當藉來自x射線產生器1之x射線照射來 :— 子位標記7時，由於係在第2圖中所示之光罩4並 非路板f上的狀態下實施照相，因此X射線並 ^ . ，使得光罩4之組成成份不致發生因X射線 = =罩即使光罩4為-玻璃光罩或為其上 題。由於^基礎先罩之一玻璃光罩，仍無任何變色的問 7, 糸根據虛影印刷電路板6’之板件對位標記 體3、上之板 者，保持相同的準^ 罩對位標記5來直接實施定位 時，ίΐΐχ者射：Λ本發明之對位裝置係在製造多層板 位，更進—牛祕來有效地實施印刷電路板6與光罩4的定 成之光罩變置具有可消除因X射線照射造 Μ 2099-4714-PF(N).ptd 第11頁 517178 圖式簡單說明 第1圖係顯示依據本發明之一實施例的一概略立體 圖； 第2圖係顯示依據本發明之該實施例動作的一概略立 體圖； 第3圖係顯示依據本發明之該實施例動作的一概略立 體圖；及 第4圖係顯示依據本發明之該實施例動作的一概略立 體圖。 符號說明 卜X射線產生器； 2〜電荷耦合裝置（CCD)照相機； 3〜螢光體； 4〜光罩； 5〜光罩對位標記； 6〜印刷電路板； 6 ’〜虛影印刷電路板；7〜板件對位標記； 7’〜板件對位標記； 8〜平台； 9〜演算及控制單元；1 〇〜驅動及控制單元； 11〜顯示單元； 2 0〜影像處理單元； 3 0〜移動單元； 8 0〜運動機構。517178 V. Description of the Invention (7) The exposure light from the source (not shown) is exposed, and the above actions will be repeated after each layer is exposed. The positional relationship between the official platform 8, the printed circuit board 6, the photomask 4, the charge-coupled device (CCD) camera 2, and the like is described as the relationship between the up and down directions, but it is not limited to this relationship, and it is even possible Configuration for horizontal direction. In Zhao Xiang, when x-ray irradiation from the x-ray generator 1 was used to:-sub-position mark 7, because the photo is taken in a state where the photomask 4 shown in Fig. 2 is not on the road board f, so X-rays ^., So that the composition of the photomask 4 does not occur because X-ray = = mask even if the photomask 4 is-a glass mask or a title for it. Since there is no change in color due to ^ one of the basic masks, 糸 According to the plate alignment mark 3 and the upper plate of the ghost printed circuit board 6 ', the same ^ mask alignment is maintained. When marking 5 is used for direct positioning, the person who shoots is: Λ The alignment device of the present invention is in the manufacture of multi-layer boards, and more advanced-Niu Mi to effectively implement the photomask change of the printed circuit board 6 and the photomask 4 The device can be eliminated by X-ray irradiation. 2099-4714-PF (N) .ptd Page 11 517178 Brief Description of the Drawings Figure 1 shows a schematic perspective view according to an embodiment of the present invention; Figure 2 shows A schematic perspective view of the operation according to the embodiment of the present invention; FIG. 3 is a schematic perspective view of the operation according to the embodiment of the present invention; and FIG. 4 is a schematic perspective view of the operation according to the embodiment of the present invention. Explanation of symbols: X-ray generator; 2 ~ charge-coupled device (CCD) camera; 3 ~ phosphor; 4 ~ photomask; 5 ~ photomask registration mark; 6 ~ printed circuit board; 6 '~ virtual printed circuit Plate; 7 ~ plate alignment mark; 7 '~ plate alignment mark; 8 ~ platform; 9 ~ calculation and control unit; 10 ~ drive and control unit; 11 ~ display unit; 20 ~ image processing unit; 3 0 ~ mobile unit; 8 0 ~ movement mechanism.
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