508421 A7 ------- - B7_____ 五、發明說明（1 ) 【發明所屬的技術領域】 本發明係關於加熱器裝置，特別是用來加熱其具有像 管線、其他的導管、球體、球狀物、彎管接縫、或τ形管 接縫之類的曲表面構造的被加熱物的加熱器裝置。 【習知技術】 在半導體製造、化學處理、塑膠製造、食品處理、機 器製造等方面，需要加熱或隔熱的管線，特別是爲了防止 揮發性液體或氣體在管線內壁的固化和堆積，加熱器是經 常被使用的。而這種加熱器被要求要，利用和周圍的空氣 熱絕緣，減少必要的輸出，並且將露出的加熱器的外側面 的溫度減到最小，而不燙傷到可能觸摸到它的人。 例如’爲了形成半導體晶片而使用的在晶圓基板上堆 積氮化矽（S i 3 N 4 )的減壓c V D處理，氮化矽（ S i 3 N 4 )的堆積產生了反應室內的副生成物，產生大量 的氯化銨氣。而這個氯化銨氣一旦溢出反應室且使其冷卻 ’就會在製造系統內的管線和幫浦內側等等全部的被加熱 面形成白色結晶物的形成層。而這個氯化銨氣的形成層剝 落下來，會逆流到反應室，而污染到室內的晶圓基板。如 果產生這種污染的話，就一定要封鎖製造系統，將堵塞的 管線和幫浦淸洗乾淨，或者予以更換。甚至有時會將晶圓 基板或半導體晶片污染到不能修理或使用的情形。而要防 止氯化銨氣塞滿或污染製造系統，則需要將加熱器設置在 管線的四週予以加熱，而使其昇華掉。 ---：-----TIJ---裝—— (請先閱讀背面之注意事項再本頁) —‘訂· ;線- 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -4- 508421 A7 — 一 B7 五、發明說明（2 ) --^------^---*—--裝--- (請先閱讀背面之注意事項再本頁) 作爲用來加熱包含上述管線的對象物，或者隔熱的加 熱器，向來都是使用著披覆著矽膠和玻璃纖維的帶狀加熱 器捲繞在管線上。 【發明所欲解決的課題】 _ 然而上述習知的帶狀加熱器要密著地捲繞在具有管線 、導管、球體、球狀物、彎管接縫、或T形管接縫這樣的 曲表面構造的被加熱物上面是很難的，而不能使被加熱物 的溫度變的很平均的話，就不能防止副生成物部分的固化 〇 而將已捲繞上的加熱器拆卸下來係很困難，且也無法 再利用已拆卸下的加熱器。 線. 因爲披覆著上述加熱器的矽膠或玻璃纖維都很薄，所 以有燙傷人的危險，而且有散熱性太大而加熱器的加熱效 率差的缺點。 本發明就是要除去上述的缺點。 經濟部智慧財產局員工消費合作社印製 【用以解決課題的手段】 本發明的加熱器裝置其特徵爲，由使其內面形狀記憶 成和被加熱物的表面形狀相同的環圈狀的彈性材料所構成 的薄片狀的加熱器、和固定在上述薄片狀加熱器的外面， 之使其內面形狀記憶成和上述薄片狀的加熱器的外面形狀 相同的環圈狀的彈性材料所構成的隔熱材所構成。 上述的隔熱材其特徵爲，是以海綿狀矽膠和陶瓷纖維 -5- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 508421 A7 B7 五、發明說明（3 ) 積疊而成的。 上述隔熱材的熱傳導率爲0·03〜0·13 k c a 1 / m h 〇C 〇 上述隔熱材的厚度爲超過1〇mm以上。 上述薄片狀的加熱器其特徵晷，係由兩片隔熱和隔電 的絕緣材、和挾持在兩枚絕緣材中間的，所期的發熱形狀 的發熱金屬箔器材所構成的。 上述的隔熱和隔電的絕緣材，係以玻璃纖維補強的砂 膠薄片。 上述薄片狀的加熱器的厚度爲小於2 m m。 【發明的實施型態】 根據以下圖面來說明本發明的實施例。 經濟部智慧財產局員工消費合作社印製 ---^-----^---^---裝--- (請先閱讀背面之注意事項再本頁) _線- 本發明的加熱器裝置係如第1圖、第2圖所示，係由 由使其內面形狀記憶成和被加熱物如管線1的表面形狀相 同的環圏狀地使其兩端互相對向而作成筒狀係由很薄且非 伸縮性的習知的彈性材料所構成的薄片狀的加熱器2、和 接著在上述薄片狀的加熱器2的外表面全體的，由使其內 面形狀記憶成和上述薄片狀的加熱器2的外表面形狀相同 的環圈狀地使其兩端互相對向而作成筒狀係由很薄且非伸 縮性的習知的彈性材料所構成的隔熱套3、和接續在上述 薄片狀的加熱器2的一側和另一側的電線4、5、和設置 在上述一側和另一側的電線4、5的自由端的插頭6 a、 6 b所構成。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -6- 508421 • A7 B7 五、發明說明（4 ) --- ----J—--- I I I I I 請先閱讀背面之注意事項再本頁) 7爲接續在上述一側的電線4的插頭6 a的電源線。 上述薄片狀的加熱器2係以，兩枚具有以玻璃纖維補 強的矽膠等的耐熱性、難燃性、和電絕緣性的絕緣薄片， 夾著所期的發熱形狀中中以化學鈾刻處理的金屬箔器材所 形成；而上述薄片狀的加熱器2昀厚度爲小於2 mm較佳 〇 將使其內部形狀記憶成和上述管線1的外表面相同的 上述薄片狀的加熱器2係在上述絕緣薄片的矽膠在未加硫 狀態時，貼在和上述管線1相同形狀的模型的表面，在進 行適當的加熱和加硫處理之後，由上述的模型剝離下來而 成形。 線- 因爲本發明的加熱器裝置係如上述之構成，利用它的 復原性，而撐開環圈狀的上述薄片狀的加熱器2及上述隔 熱套3的接合端面8，而可將上述薄片狀的加熱器2及上 述隔熱套3套上管線1。 經濟部智慧財產局員工消費合作社印製 上述薄片狀的加熱器2及上述隔熱套3係利用彈性而 復原成原來的筒狀，則上述薄片狀的加熱器2緊密接合在 上述的管線1，而上述薄片狀的加熱器2及上述隔熱套3 的上述接合端面8爲大略地接觸。 在這個狀態加熱上述的加熱器裝置的話，因爲上述薄 片狀的加熱器2緊密接合在上述的管線1上，所以上述薄 片狀的加熱器2所發生的熱會向管線方向流去；另一方面 ，可藉由隔熱套3防止熱流流向外側方向。 而作爲上述的金屬箔器材，係使用鎳鉻合金、鐵鉻合 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -7- 508421 . A7 _ B7 五、發明說明（5 ) 金、不鏽鋼或者具有對電流有充分的電阻而可大量發熱的 性質，和可以承受電流流過所發生的熱的具有高熔點的物 質。 上述隔熱套3係具有比上述薄片狀的加熱器2和上述 管線1要低的熱傳導性，它的熱傳導率被期望在0 . 〇 3 〜0 · 13kca l/mh°C 之間。 爲了使上述隔熱套3的隔熱效果更好，而將海綿狀矽 膠和陶瓷纖維積疊起來也可以。 上述的隔熱套3的厚度在超過1Omm較佳。 上述的電線4、5、7係包覆著矽膠、聚四氟乙烯、 或玻璃纖維。 如第3圖的電路圖所示上述電線4、5係互相並列地 接續著，上述一側的電線4、5的插頭6 a係接續在上述 的電源線7 .，而如果將上述另一側的電線5的插頭6 b接 續到鄰接的加熱裝置的一側的電線4的插頭6 a的話，就 可將電源並列地供給到鄰接的加熱器裝置。 如此一來，在要加熱形狀不一樣的管線且連續的網狀 管線工件時，可以將複數的加熱器裝置安裝在上述的網狀 管線工件，可以連鎖地接續各相鄰的加熱器裝置。 而本發明的其他實施例，如第4圖、第5圖所示，在 上述隔熱套3的外表面上，係以由用玻璃纖維補強的矽膠 片等等形成的包覆薄片9跨越過上述的接合端面8而包捲 在外表面，而將上述的加熱器裝置固定在管線1上。 而且，爲了固定上述包覆薄片的兩端部，在上述包覆 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ---τ-----Γ-----· I I (請先閱讀背面之注意事項再本頁) ' - -線- 經濟部智慧財產局員工消費合作社印製 -8- 508421 • A7 _ B7 五、發明說明（6 ) -ϋ n ·ϋ I ϋ n J0 -ϋ ϋ ·1 I ϋ ·ϋ (請先閱讀背面之注意事項再ml本頁) 薄片的兩端部設置扣件、金屬掛勾零件、或彈簧勾等等的 固定元件1 0 ’而防止上述的接合端面8分離而上述加熱 器裝置突然由管線1上脫落。 且在上述薄片狀的加熱器2的外表面配置溫度保險絲 、溫度調節器等的電器零件也可以。 【發明的效果】 如上述的本發明的加熱器裝置，可以敏捷且快速地將 其安裝在具有曲表面構造的管線的預定位置、或從之拆卸 下來，而兩者都具有很大的好處。 因此，因爲一個月或一周一次要進行管路淸掃，所以 在經常有管路作業的中止和管路系統的移動的半導體工廠 就特別的方便。 線· 利用隔.熱套3可抑制由薄片狀的加熱器2朝外側方向 傳熱，而促進向管線1的傳熱而根據這個可以減少必要 的加熱器的熱量。 經濟部智慧財產局員工消費合作社印製 而且，因爲可以降低隔熱套3的外表面的溫度，所以 可以保護可能接觸到加熱器裝置外表面的人免於燙傷。 而使用包覆薄片9的話，可以將加熱器裝置確實地固 定在管線1上，並且使用掛勾等等的固定元件1 0的話’ 可以將加熱器裝置快速且容易地安裝在管線上或從管線上 卸下。 在將複數的加熱器裝置接續在網狀管線工件上的情況 下，可以顯著地減少電源線的長度，對於在附近工作的人 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -9- 508421 . A7 B7 五、發明說明（7 ) 來說可以減少障礙物。 (請先閱讀背面之注意事項再HR本頁) 而且，因爲各個加熱器裝置可以並列地接續起來，而 即使一個加熱器裝置不正常，而電流也可以流到其他的力0 熱器裝置。 【圖面之簡單說明】 第1圖爲本發明的加熱器裝置的正面圖。 第2圖爲第1圖所顯示的加熱器裝置的縱斷側面圖。 第3圖爲第1圖所顯示的加熱器裝置的電路圖。 第4圖爲本發明的加熱器裝置的其他實施例的正面圖 〇 第5圖爲第4圖所顯示的加熱器裝置的縱斷側面圖。 【圖號說明】 1 :管線 2 :薄片狀的加熱器 3 :隔熱套 經濟部智慧財產局員工消費合作社印製 4、5 :電線 6 a、6 b :插頭 7 :電源線 8 :接合端面 9 ‘·包覆薄片 1 0 :固定元件 1 1 :電氣零件 -10 - 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）508421 A7 --------B7_____ V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a heater device, in particular, for heating it with a pipeline, other conduits, spheres, balls, etc. A heater device for an object to be heated having a curved surface structure such as an object, an elbow joint, or a τ-shaped pipe joint. [Known technology] In semiconductor manufacturing, chemical processing, plastic manufacturing, food processing, machine manufacturing, etc., pipelines that require heating or insulation, especially to prevent the solidification and accumulation of volatile liquids or gases on the inner wall of the pipeline, heating Is often used. Such heaters are required to utilize thermal insulation from the surrounding air to reduce the necessary output and minimize the temperature of the exposed outside surface of the heater without scalding anyone who might touch it. For example, 'decompressed c VD processing for depositing silicon nitride (S i 3 N 4) on a wafer substrate for forming a semiconductor wafer, the deposition of silicon nitride (S i 3 N 4) generates a secondary The product produced a large amount of ammonium chloride gas. Once this ammonium chloride gas overflows and cools the reaction chamber, it will form a layer of white crystals on all heated surfaces such as the inside of the pipeline and pump in the manufacturing system. The formation layer of the ammonium chloride gas is peeled off and flows back to the reaction chamber, which contaminates the wafer substrate in the room. If such contamination occurs, the manufacturing system must be blocked, the blocked pipelines and pumps must be cleaned or replaced. It may even contaminate the wafer substrate or semiconductor wafer to the point where it cannot be repaired or used. To prevent the ammonium chloride gas from filling up or contaminating the manufacturing system, it is necessary to place the heater around the pipeline and heat it to sublimate it. ---: ----- TIJ --- install—— (Please read the precautions on the back before this page) —'Order ·; Line-Printed on paper standards for employees' cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, applicable to China National Standard (CNS) A4 Specification (210 X 297 mm) -4- 508421 A7 — One B7 V. Description of Invention (2)-^ ------ ^ --- * ---- install --- (Please read the precautions on the back of this page before this page.) As a heater to heat the object containing the above-mentioned pipelines, or a thermal insulation, a tape heater covered with silicone and fiberglass has been wound around On the pipeline. [Problems to be Solved by the Invention] _ However, the above-mentioned conventional belt heaters must be wound tightly around a curved line having pipes, ducts, spheres, balls, elbow joints, or T-tube joints. The surface structure of the object to be heated is difficult, and if the temperature of the object to be heated is not evened, the by-products cannot be prevented from solidifying. It is difficult to remove the wound heater. , And it is no longer possible to reuse the removed heater. Line. Because the silicone or glass fiber covering the heater is very thin, there is a danger of burns, and there is a disadvantage that the heat dissipation is too large and the heating efficiency of the heater is poor. The present invention seeks to eliminate the aforementioned disadvantages. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs [Means for solving problems] The heater device of the present invention is characterized in that its inner surface shape is memorized in a loop-like elasticity similar to the surface shape of the object to be heated A sheet-shaped heater made of a material and a ring-shaped elastic material fixed on the outer surface of the sheet-shaped heater so that the shape of the inner surface of the sheet-shaped heater is the same as the shape of the outer surface of the sheet-shaped heater Made of heat-insulating material. The above-mentioned thermal insulation material is characterized in that it is made of sponge-like silicone and ceramic fibers. -5- The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 508421 A7 B7. 5. Description of the invention (3) Stacked. The thermal conductivity of the heat insulating material is 0.03 to 0.13 k c a 1 / m h 〇C 〇 The thickness of the heat insulating material is more than 10 mm. The above-mentioned sheet-shaped heater is characterized in that it is composed of two pieces of heat-insulating and insulating materials and a desired heat-generating metal foil device held between the two insulation materials. The above-mentioned heat-insulating and electric-insulating insulating materials are glass fiber reinforced sand sheets. The thickness of the sheet-like heater is less than 2 mm. [Embodiment Mode of the Invention] An embodiment of the present invention will be described with reference to the following drawings. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs --- ^ ----- ^ --- ^ --- install --- (Please read the precautions on the back before this page) _Wire-The heating of the present invention As shown in Fig. 1 and Fig. 2, the device is a tube formed by memorizing the shape of the inner surface of the device to the same shape as the surface of the object to be heated, such as the pipeline 1. The sheet-like heater 2 made of a thin, non-stretchable, conventional elastic material and the entire outer surface of the sheet-like heater 2 are formed by memorizing the inner shape of the sheet-like heater 2 and The outer surface of the sheet-like heater 2 has the same shape of the outer ring, and its two ends are opposed to each other to form a cylindrical shape. The heat-insulating sleeve 3 is made of a thin and non-stretchable conventional elastic material. It consists of the electric wires 4 and 5 connected to one side and the other side of the said sheet-like heater 2, and the plugs 6a and 6b provided at the free ends of the electric wires 4, 5 on the said one side and the other side. This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) -6-508421 • A7 B7 V. Description of invention (4) --- ---- J ----- IIIII Please read the back first (Notes on this page) 7 is the power cord of the plug 6a connected to the electric wire 4 on the above side. The above-mentioned sheet-like heater 2 is composed of two insulating sheets having heat resistance, flame retardancy, and electrical insulation properties such as silicone rubber reinforced with glass fiber, and is treated with chemical uranium in a desired heat generating shape. And the thickness of the sheet-shaped heater 2 is less than 2 mm, and the internal shape of the sheet-shaped heater 2 is the same as that of the outer surface of the pipeline 1. The sheet-shaped heater 2 is described above. When the silicone rubber of the insulating sheet is in a non-vulcanized state, it is affixed to the surface of a mold having the same shape as the pipeline 1 described above, and after being subjected to appropriate heating and vulcanization treatment, the mold is peeled off and formed. Wire-Because the heater device of the present invention is constructed as described above, and using its resilience, the sheet-like heater 2 and the joint end face 8 of the heat insulation sleeve 3 are opened, and the above The sheet-like heater 2 and the heat-insulating sleeve 3 are put on the pipeline 1. The sheet heater 2 and the heat insulation cover 3 printed by the employee's consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs are restored to the original tube shape by elasticity, and the sheet heater 2 is tightly connected to the pipeline 1, On the other hand, the sheet-like heater 2 and the joint end surface 8 of the heat-insulating sleeve 3 are in approximate contact. If the above-mentioned heater device is heated in this state, since the sheet-like heater 2 is tightly connected to the above-mentioned pipeline 1, the heat generated by the sheet-like heater 2 will flow in the direction of the pipeline; The heat flow can be prevented from flowing to the outer direction by the heat insulation sleeve 3. As the above-mentioned metal foil equipment, the nickel-chromium alloy and iron-chrome composite paper are used in accordance with the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -7- 508421. A7 _ B7 V. Description of the invention (5 ) Gold, stainless steel, or a substance that has sufficient resistance to current and can generate a large amount of heat, and a substance with a high melting point that can withstand the heat generated by the current flow. The heat-insulating sleeve 3 has a lower thermal conductivity than the sheet-like heater 2 and the pipeline 1, and its thermal conductivity is expected to be between 0.03 and 0.1 kca l / mh ° C. In order to make the heat-insulating effect of the heat-insulating sleeve 3 better, a sponge-like silicone rubber and a ceramic fiber may be stacked. It is preferable that the thickness of the heat-insulating sleeve 3 is more than 10 mm. The wires 4, 5, and 7 are coated with silicone, polytetrafluoroethylene, or fiberglass. As shown in the circuit diagram in FIG. 3, the wires 4 and 5 are connected in parallel to each other, and the plugs 6a of the wires 4 and 5 on the one side are connected to the power cord 7. When the plug 6 b of the electric wire 5 is connected to the plug 6 a of the electric wire 4 on the side of the adjacent heating device, power can be supplied in parallel to the adjacent heater device. In this way, when heating different-shaped pipelines and continuous meshed pipeline workpieces, a plurality of heater devices can be installed on the above-mentioned meshed pipeline workpieces, and adjacent heater devices can be connected in a chain. In other embodiments of the present invention, as shown in FIG. 4 and FIG. 5, on the outer surface of the heat insulation cover 3, a covering sheet 9 formed of a silicon fiber sheet reinforced with glass fiber or the like is passed over. The above-mentioned joint end surface 8 is wrapped around the outer surface, and the above-mentioned heater device is fixed to the pipeline 1. In addition, in order to fix both ends of the coating sheet, the Chinese paper (CNS) A4 specification (210 X 297 mm) is applied to the paper size of the coating. --- τ ----- Γ ---- -· II (Please read the notes on the back before this page) '--line-Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs-8- 508421 • A7 _ B7 V. Description of Invention (6) -ϋ n · ϋ I ϋ n J0 -ϋ ϋ · 1 I ϋ · ϋ (Please read the precautions on the back first and then on this page) The two ends of the sheet are provided with fasteners, metal hook parts, or spring hooks, etc. 1 0 'And prevent the above-mentioned joint end surface 8 from being separated and the above-mentioned heater device from falling off from the pipeline 1 suddenly. Furthermore, electrical components such as a thermal fuse and a thermostat may be arranged on the outer surface of the sheet-like heater 2. [Effects of the Invention] As described above, the heater device of the present invention can be quickly and quickly installed at or removed from a predetermined position of a pipeline having a curved surface structure, both of which have great advantages. Therefore, since pipeline cleaning is performed once a month or once a week, it is particularly convenient in a semiconductor factory where pipeline operations are often suspended and pipeline systems are moved. The wire and heat shield 3 can suppress the heat transfer from the sheet-like heater 2 to the outside, and promote the heat transfer to the line 1. According to this, the necessary heat of the heater can be reduced. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Furthermore, since the temperature of the outer surface of the heat insulation cover 3 can be lowered, persons who may come into contact with the outer surface of the heater device can be protected from burns. If the cover sheet 9 is used, the heater device can be reliably fixed to the pipeline 1, and if a fixing element 10 such as a hook is used, the heater device can be quickly and easily installed on the pipeline or from the pipe. Remove on line. When a plurality of heater devices are connected to the mesh pipe work, the length of the power cord can be significantly reduced, and the Chinese national standard (CNS) A4 standard (210 X 297 male) is applicable to the paper size of people working nearby. (Centi) -9- 508421. A7 B7 5. Invention description (7) can reduce obstacles. (Please read the precautions on the back of this page before the HR page.) Also, because each heater unit can be connected in parallel, even if one heater unit is abnormal, the current can flow to other force 0 heater units. [Brief Description of the Drawings] FIG. 1 is a front view of a heater device of the present invention. Fig. 2 is a longitudinal sectional view of the heater device shown in Fig. 1. Fig. 3 is a circuit diagram of the heater device shown in Fig. 1. Fig. 4 is a front view of another embodiment of the heater device of the present invention. Fig. 5 is a longitudinal side view of the heater device shown in Fig. 4. [Illustration of drawing number] 1: Pipeline 2: Sheet heater 3: Insulation jacket Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 4, 5: Electric wires 6 a, 6 b: Plug 7: Power cord 8: Joint end face 9 '· Cover sheet 1 0: Fixing element 1 1: Electrical parts -10-This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm)