JPH01150096A - Conduit having heat-insulating function - Google Patents
Conduit having heat-insulating functionInfo
- Publication number
- JPH01150096A JPH01150096A JP62305828A JP30582887A JPH01150096A JP H01150096 A JPH01150096 A JP H01150096A JP 62305828 A JP62305828 A JP 62305828A JP 30582887 A JP30582887 A JP 30582887A JP H01150096 A JPH01150096 A JP H01150096A
- Authority
- JP
- Japan
- Prior art keywords
- conduit
- heating element
- heat
- layer
- element layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims abstract description 28
- 239000000919 ceramic Substances 0.000 claims abstract description 11
- 239000002184 metal Substances 0.000 claims abstract description 6
- 239000000203 mixture Substances 0.000 claims abstract description 6
- 238000007751 thermal spraying Methods 0.000 claims abstract description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 5
- 229920002379 silicone rubber Polymers 0.000 claims description 5
- 239000004945 silicone rubber Substances 0.000 claims description 5
- 239000004809 Teflon Substances 0.000 claims description 3
- 229920006362 Teflon® Polymers 0.000 claims description 3
- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 238000009413 insulation Methods 0.000 abstract description 11
- 238000004321 preservation Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 6
- 229910001120 nichrome Inorganic materials 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 239000010425 asbestos Substances 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052895 riebeckite Inorganic materials 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910002060 Fe-Cr-Al alloy Inorganic materials 0.000 description 1
- 229910026161 MgAl2O4 Inorganic materials 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L53/00—Heating of pipes or pipe systems; Cooling of pipes or pipe systems
- F16L53/30—Heating of pipes or pipe systems
- F16L53/35—Ohmic-resistance heating
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
本発明は、半導体等を製造するときに使用するガスを導
く導管において、導管の外周から加熱できるようにした
保温機能を有する導管に関する。DETAILED DESCRIPTION OF THE INVENTION "Industrial Application Field" The present invention relates to a conduit that guides gas used in manufacturing semiconductors and the like and has a heat-retaining function that allows heating from the outer periphery of the conduit.
「従来の技術」
半導体を製造する場合、各種のガスを使用するが、それ
らガスは使用時の反応温度が高いため、ガスを供給する
管路においても予熱しておくことが望ましい。そのため
従来では、ガスを供給するように配管した導管の外周に
、アスベストやセラミックファイバーを巻き回し、その
上にニクロム線を巻き、その外周を絶縁および断熱のた
めにアスベストやセラミックファイバーで覆っている。"Prior Art" When manufacturing semiconductors, various gases are used, but since these gases have high reaction temperatures during use, it is desirable to preheat the gas supply pipes as well. Conventionally, therefore, asbestos or ceramic fiber is wound around the outer circumference of the conduit used to supply gas, nichrome wire is wound on top of that, and the outer circumference is covered with asbestos or ceramic fiber for insulation and heat insulation. .
そして、ニクロム線に電圧を印加して導管を加熱してい
る。A voltage is then applied to the nichrome wire to heat the conduit.
「発明が解決しようとする問題点」
従来、導管を加熱する場合、配管された導管にアスベス
トやセラミックファイバーを巻きつけ、さらにニクロム
線を巻きつける作業があるために、その作業に時間を要
し、不経済であった。``Problem to be solved by the invention'' Conventionally, when heating a conduit, the work involved wrapping asbestos or ceramic fiber around the conduit and then wrapping it with nichrome wire, which took time. , it was uneconomical.
また導管の外周をアスベストやセラミックファイバーで
覆っているが、それらは、時の経過により微粉となっっ
て落下したり、あるいはほこりとなって飛散するなど、
半導体製造に必要な装置付近のクリーン度が低下すると
いう問題があった。In addition, the outer circumference of the conduit is covered with asbestos and ceramic fibers, but over time, these become fine particles and fall off, or become dust and scatter.
There was a problem in that the cleanliness around the equipment necessary for semiconductor manufacturing decreased.
さらにニクロム線を巻きつけて加熱する場合、各巻き線
は間隔があけられるので導管の各位置を均一温度に加熱
することが困難であるという問題があった。Furthermore, when heating the nichrome wire by winding it, there is a problem in that it is difficult to heat each position of the conduit to a uniform temperature because the windings are spaced apart.
そこで本発明は、導管の外周に設ける加熱のための外装
から微粉やほこりが発生しないようにするとともに、均
一に加熱できるようにし、しかも作業性良く配管作業が
できるようにすることを目的とする。Therefore, the object of the present invention is to prevent fine powder and dust from being generated from the heating sheath provided on the outer periphery of the conduit, to enable uniform heating, and to enable piping work with good workability. .
ｒ問題点を解決するための手段」
本発明は、導管の外周に、内側から順次、内側絶縁層、
発熱体層、外側絶縁層を設け、発熱体層に電圧印加でき
るようにした保温機能を有する導管である。"Means for Solving Problems" The present invention provides an inner insulating layer, an inner insulating layer,
This conduit has a heat-retaining function and is provided with a heating element layer and an outer insulating layer, and a voltage can be applied to the heating element layer.
内側および外側絶縁層は、アルミナ、ＭｇＡｌ２Ｏ４、
ガラス等のセラミック材を溶射して形成され、発熱体層
はセラミックと導電性金属との混合体で形成される。ま
た外側絶縁層の外周に、シリコンゴム、テフロン等の熱
絶縁層を設けて保温効果を向上させることもできる。The inner and outer insulating layers are made of alumina, MgAl2O4,
It is formed by spraying a ceramic material such as glass, and the heating element layer is formed from a mixture of ceramic and conductive metal. Furthermore, a heat insulating layer made of silicone rubber, Teflon, or the like can be provided around the outer periphery of the outer insulating layer to improve the heat retention effect.
「作用」
上記手段において、導管はその全外周が均一に発熱体層
で覆われているので、導管全体を均一に加熱できる。ま
た、外周層としての外側絶縁層あるいは熱絶縁層は、溶
射したセラミック層あるいはシリコンゴム等であるので
、時の経過により微粉を落下させたり、はこりを生じさ
せることがない。さらに、導管の外周に設ける絶縁層や
発熱体層は配管する前に溶射により形成するので、その
配管作業性がよい。"Operation" In the above means, since the entire outer periphery of the conduit is uniformly covered with the heating element layer, the entire conduit can be uniformly heated. Further, since the outer insulating layer or the thermal insulating layer as the outer circumferential layer is made of a thermally sprayed ceramic layer, silicone rubber, etc., it will not drop fine powder or cause lumps over time. Furthermore, since the insulating layer and heating layer provided on the outer periphery of the conduit are formed by thermal spraying before piping, the piping workability is good.
「実施例」
本発明である保温機能を有する導管の実施例を図面によ
り説明する。"Example" An example of a conduit having a heat retention function according to the present invention will be described with reference to the drawings.
ガス等を導くため金属、合成樹脂等により形成した導管
ｌは、適宜長さを有し、本実施例ではＳＵ Ｓ ３１１
３により外径６璽謬、内径５．３ ＋ｓｍに形成した。The conduit l formed of metal, synthetic resin, etc. for guiding gas etc. has an appropriate length, and in this example, it is SU S 311.
3, the outer diameter was 6 mm and the inner diameter was 5.3 + sm.
導管１の外周に、内側から順次、約３００ｇｍの厚さの
内側絶縁層２、約０．１５ｍｍの厚さの発熱体層３、約
０．１ ａｍ厚さの外側絶縁層４が形成される。On the outer periphery of the conduit 1, an inner insulating layer 2 with a thickness of about 300 gm, a heating element layer 3 with a thickness of about 0.15 mm, and an outer insulating layer 4 with a thickness of about 0.1 am are sequentially formed from the inside. .
また導管１の外周での断熱性を向上させるため、外側絶
縁層４の外周に０．５〜５ ｍｍの厚さの熱絶縁層５を
設けることができ、その材料としてシリコンゴム、テフ
ロン、バルーン等を使用できる。Furthermore, in order to improve the heat insulation properties on the outer periphery of the conduit 1, a thermal insulation layer 5 with a thickness of 0.5 to 5 mm can be provided on the outer periphery of the outer insulation layer 4, and the material thereof can be silicone rubber, Teflon, balloon, etc. etc. can be used.
発熱体層３は、導電性金属とセラミックとの混合体を溶
射して形成され、例えばニクロムあるいはＦｅ−Ｃｒ−
Ａｌ合金とアルミナの混合体、あるいはニクロムあるい
はＦｅ−Ｃｒ−Ａｌ合金と各種フェライトの混合体等を
使用できる。また発熱体層３の外周における軸方向両端
部に、図示を省略した例えばリング状の電極がそれぞれ
設けられ、その電極を介して発熱体層３に電圧を印加す
ることにより加熱できるようになっている。すなわち発
熱体層３は、セラミック基地中に分散された金属が平面
的なネットワークを形成して電気的に連続し、所定の抵
抗値を持つようになっている。The heating element layer 3 is formed by spraying a mixture of conductive metal and ceramic, for example, nichrome or Fe-Cr-
A mixture of Al alloy and alumina, or a mixture of nichrome or Fe-Cr-Al alloy and various ferrites can be used. In addition, ring-shaped electrodes (not shown), for example, are provided at both axial ends of the outer periphery of the heat generating layer 3, and heating can be performed by applying a voltage to the heat generating layer 3 via the electrodes. There is. That is, in the heating element layer 3, metal dispersed in a ceramic base forms a planar network, is electrically continuous, and has a predetermined resistance value.
内側絶縁層２と外側絶縁層４は、発熱体層３の内側と外
側を絶縁させるためのものであり、それぞれ例えばアル
ミナを溶射して形成される。なお、各絶縁層の材料は、
内周と外周の材料のものに付着しやすく、かつそれぞれ
の熱膨張率の差が小さいものが望ましく、アルミナ以外
にＭｇＡ！２０４、ガラス等のセラミック材を適用する
こともできる。また導管ｌが電気的絶縁体で形成される
場合は、内側絶縁層が不要になる。The inner insulating layer 2 and the outer insulating layer 4 are for insulating the inside and outside of the heating element layer 3, and are each formed by spraying alumina, for example. The material of each insulating layer is
It is preferable to use a material that easily adheres to the inner and outer circumferential materials and has a small difference in coefficient of thermal expansion.In addition to alumina, MgA! 204, ceramic materials such as glass can also be applied. Also, if the conduit l is formed of an electrical insulator, no inner insulating layer is required.
そして前記構成の保温機能を有する導管を複数本連続さ
せて、半導体製造装置等の配管をすれば、それで保温機
能を有する管路が形成される。なお、前記では直線状の
導管であったが、屈曲した導管にも本発明を適用できる
。If a plurality of conduits having a heat-retaining function having the above-mentioned configuration are connected in series for piping of semiconductor manufacturing equipment, etc., a conduit having a heat-retaining function is formed. In addition, although the above description was made of a straight conduit, the present invention can also be applied to a bent conduit.
「発明の効果」
本発明の保温機能を有する導管は、導管の外周に発熱体
層を設けているので、保温機能を有する管路の配管作業
が簡単になる。また導管の外周は、溶射したセラミック
層、あるいはシリコンゴム等の熱絶縁層であるので、微
粉が生じたりほこりを生じることがなく、半導体製造装
置を設けた室内をクリーンに保つことができる。また加
熱するのは面状の発熱体層であるので、各位置での加熱
状態を均一に保つことができ、熱効率がよい。"Effects of the Invention" Since the conduit having a heat retaining function of the present invention is provided with a heating layer on the outer periphery of the conduit, the piping work of the conduit having a heat retaining function is simplified. Further, since the outer periphery of the conduit is a thermally insulating layer such as a thermally sprayed ceramic layer or silicone rubber, no fine powder or dust is generated, and the interior of the room in which the semiconductor manufacturing equipment is installed can be kept clean. In addition, since it is the planar heating element layer that is heated, the heating state at each position can be maintained uniformly, resulting in good thermal efficiency.
図面は本発明の保温機能を有する導管の横断面図である
。
ｌ；導管 ２：内側絶縁層
３；発熱体層 ４；外側絶縁層
５；熱絶縁層The drawing is a cross-sectional view of a conduit having a heat retaining function according to the present invention. l; conduit 2: inner insulating layer 3; heating element layer 4; outer insulating layer 5; thermal insulation layer
Claims (4)
体層、外側絶縁層を設け、発熱体層に電圧印加用の電極
を設けたことを特徴とする保温機能を有する導管。(1) A conduit having a heat-retaining function, characterized in that an inner insulating layer, a heating element layer, and an outer insulating layer are sequentially provided on the outer periphery of the conduit from the inside, and an electrode for voltage application is provided on the heating element layer.
の熱絶縁層を設けたことを特徴とする特許請求の範囲第
１項に記載の保温機能を有する導管。(2) The conduit having a heat retaining function as set forth in claim 1, characterized in that a heat insulating layer made of silicone rubber, Teflon, etc. is provided on the outer periphery of the outer insulating layer.
からなることを特徴とする特許請求の範囲第１項と、第
２項に記載の保温機能を有する導管。(3) A conduit having a heat retaining function as set forth in Claims 1 and 2, wherein the heating element layer is made of a mixture of ceramic and conductive metal.
Ｏ＿４、ガラス等のセラミック材を溶射することにより
形成したことを特徴とする特許請求の範囲第１項に記載
の保温機能を有する導管。(4) Inner and outer insulating layers are alumina, MgAl_2
The conduit having a heat-retaining function according to claim 1, characterized in that it is formed by thermal spraying a ceramic material such as O_4 or glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62305828A JPH01150096A (en) | 1987-12-04 | 1987-12-04 | Conduit having heat-insulating function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62305828A JPH01150096A (en) | 1987-12-04 | 1987-12-04 | Conduit having heat-insulating function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01150096A true JPH01150096A (en) | 1989-06-13 |
Family
ID=17949862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62305828A Pending JPH01150096A (en) | 1987-12-04 | 1987-12-04 | Conduit having heat-insulating function |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01150096A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004353681A (en) * | 2003-05-26 | 2004-12-16 | Sumitomo Electric Ind Ltd | Baking method |
| US11001784B2 (en) | 2012-09-13 | 2021-05-11 | Ecolab Usa Inc. | Detergent composition comprising phosphinosuccinic acid adducts and methods of use |
| US11053458B2 (en) | 2012-09-13 | 2021-07-06 | Ecolab Usa Inc. | Hard surface cleaning compositions comprising phosphinosuccinic acid adducts and methods of use |
| JP2021101143A (en) * | 2016-02-18 | 2021-07-08 | ベバスト エスエーＷｅｂａｓｔｏ ＳＥ | Heat exchanger, especially, water-air heat exchanger or oil-water heat exchanger |
| US11865219B2 (en) | 2013-04-15 | 2024-01-09 | Ecolab Usa Inc. | Peroxycarboxylic acid based sanitizing rinse additives for use in ware washing |
-
1987
- 1987-12-04 JP JP62305828A patent/JPH01150096A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004353681A (en) * | 2003-05-26 | 2004-12-16 | Sumitomo Electric Ind Ltd | Baking method |
| JP4528495B2 (en) * | 2003-05-26 | 2010-08-18 | 住友電気工業株式会社 | Baking method of heat insulation pipe for superconducting cable |
| US11001784B2 (en) | 2012-09-13 | 2021-05-11 | Ecolab Usa Inc. | Detergent composition comprising phosphinosuccinic acid adducts and methods of use |
| US11053458B2 (en) | 2012-09-13 | 2021-07-06 | Ecolab Usa Inc. | Hard surface cleaning compositions comprising phosphinosuccinic acid adducts and methods of use |
| US11859155B2 (en) | 2012-09-13 | 2024-01-02 | Ecolab Usa Inc. | Hard surface cleaning compositions comprising phosphinosuccinic acid adducts and methods of use |
| US11952556B2 (en) | 2012-09-13 | 2024-04-09 | Ecolab Usa Inc. | Detergent composition comprising phosphinosuccinic acid adducts and methods of use |
| US11865219B2 (en) | 2013-04-15 | 2024-01-09 | Ecolab Usa Inc. | Peroxycarboxylic acid based sanitizing rinse additives for use in ware washing |
| JP2021101143A (en) * | 2016-02-18 | 2021-07-08 | ベバスト エスエーＷｅｂａｓｔｏ ＳＥ | Heat exchanger, especially, water-air heat exchanger or oil-water heat exchanger |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH01150096A (en) | Conduit having heat-insulating function | |
| US3406275A (en) | Furnace having fingers interdigitatedly engaged with its heating elements | |
| JPH01154487A (en) | Heat insulation tube for heating of conduit | |
| JP2953744B2 (en) | Heat treatment equipment | |
| JPS6327435Y2 (en) | ||
| JP2604944B2 (en) | Semiconductor wafer heating equipment | |
| JP2503077B2 (en) | Electric heater and heating method using the same | |
| US2966430A (en) | Electric resistance elements | |
| GB2258592A (en) | Inert gas protects carbon heating element | |
| US3249988A (en) | Method of covering resistor bead | |
| US4534997A (en) | High-temperature carbon fiber coil and method for producing same | |
| US4822677A (en) | High-temperature carbon fiber coil | |
| JPS6344963Y2 (en) | ||
| JPS62170481A (en) | Tubular electric furnace | |
| JPH0869856A (en) | Tube type heater and its manufacture | |
| JPH0718445A (en) | Heat treating device | |
| US1096414A (en) | Electric furnace. | |
| JPS60200895A (en) | Ejection cell structure of molecular beam crystal growth device | |
| JPH0712039B2 (en) | Heat treatment equipment | |
| JPH0235292A (en) | Composite tube for transporting fluid | |
| RU1830196C (en) | Electric heater | |
| JPH0468296A (en) | Semiconductor manufacturing device | |
| JPH01192113A (en) | Heating furnace | |
| SU1196668A1 (en) | Arrangement for investigating convective heat exchange process | |
| JPS61287223A (en) | Heat treating furnace |