KR101918492B1 - Heating jacket - Google Patents

Abstract

The present invention relates to a heating jacket installed in a pipe of a semiconductor process facility to heat the pipe at a high temperature. The heating jacket comprises: an insulation pad (110) composed of an inner sheet (111), an outer sheet (112), and a side sheet (113), wherein an insulation member (114) is filled to be sewed and combined, and the outer sheet (112) has a width longer than the width of the inner sheet (111) to have an outwardly convex three-dimensional structure; a free end part (120) composed of a sheet layer which is inserted between the inner sheet (111) and the outer sheet (112) at one side end in the longitudinal direction of the insulation pad (110) and is integrally sewed and fixed; a first Velcro tape (131) attached to the free end part (120); a second Velcro tape (132) attached to the outer circumferential surface of the insulation pad (110) to be adhered on the first Velcro tape (131); a pair of heat-resistant sheets (141, 142) sewed and fixed in a longitudinal direction to both ends of the insulation pad (110) in a width direction; a heating wire part (150) arranged in a predetermined pattern between the heat-resistant sheets (141, 142) to be sewed and fixed; and a double-sided tape (161) attached to the inner surface of the heat-resistant sheets (141, 142). The width (W1) of the heating wire part (150) wound around a pipe (10) is greater than the circular circumference of the pipe (10), and thus the heating wire part (150) has a section in which at least a part thereof overlaps.

Description

Heating jacket {Heating jacket}

The present invention relates to a heating jacket installed in a piping of a semiconductor process facility for heating piping to a high temperature.

Generally, a semiconductor process is composed of various unit processes such as oxidation, diffusion, ion implantation, deposition and etching, and each unit process has a closed structure and a reaction chamber capable of maintaining a constant temperature and vacuum As shown in FIG.

The reaction chamber supplies the process gas necessary for the reaction, and after the process is completed, there is a pipe for discharging residual materials and by-products generated during the process. On the other hand, residual gas generated after the process has a characteristic of being solidified at a specific temperature or lower, and powder or the like may be generated when it is cooled in the process of discharging to the outside through piping. This is fixed to the inside of the pipe, There may arise a problem that interferes with it. Therefore, it is very important to maintain the temperature of the residual gas inside the piping during the semiconductor manufacturing process at a high temperature. Therefore, conventionally, separate heating means are provided in the piping.

As such a heating means, there is a heating pipe in which a heating wire is built and connected directly to the chamber, or a heating jacket or a heat tape to which heat is applied by being attached to the outer peripheral surface of the pipe.

However, when the built-in heating wire is broken or broken, it is impossible to replace only the heating wire, so that the entire heating pipe needs to be replaced. Also, the conventional heating jacket is inconvenient for installation and separation, and when it is used for a long time, So that damage can easily occur, and periodic maintenance is required.

As a conventional technique, Japanese Patent Application Laid-Open No. 10-0980861 (Publication Date: Sep. 10, 2010) discloses a heating jacket having a heat insulating layer containing any one of hollow silica and hollow ceramic and liquid silicone rubber, And is hardened and vulcanized in the molding operation.

However, when the heat insulating layer is manufactured by the molding operation as described above, a short circuit may occur due to the movement of the hot wire in the mold, and the manufacturing process is complicated.

As another prior art, Japanese Patent Application No. 10-0955861 (Published on May 04, 2010) discloses a heat exchanger comprising an inner sheet on which heat lines are arranged on one surface, a heat pad laminated on the inner sheet, And a cover jacket for covering the pipe.

However, in this conventional technique, since the inner sheet and the thermal pad are temporarily fixed to the pipeline during the installation process, the inner sheet and the thermal pad are fixed to the pipeline by wrapping the cover jacket. Particularly, in order to obtain a sufficient warming effect, the thickness of the warming pad must be sufficiently thick. Therefore, when the pipe line to be installed is large, the inner sheet and the thick warming pad are temporarily fixed to the pipeline Since jackets need to be covered and secured, more than two workers are generally required.

Also, the conventional heating jacket can be detachably attached to the piping. In this case, a portion where the heating jacket is wound and the both ends are fixed can not be heated, .

Patent Registration No. 10-0980861 (Publication Date: September 10, 2010) Patent Registration No. 10-0955861 (Publication Date: May 4, 2010)

SUMMARY OF THE INVENTION It is an object of the present invention to provide a heating jacket in which the whole outer circumferential surface of a pipe is uniformly heated effectively and installation work is convenient.

To achieve these and other advantages and in accordance with the purpose of the present invention, as embodied and broadly described herein, a heating jacket includes an inner sheet, an outer sheet and a side sheet, and a heat insulating member is filled in the inner jacket. The outer sheet is longer than the inner sheet. A heat insulating pad having a convex three-dimensional structure; A free end which is fixed to one end portion in the width direction of the heat insulating pad along the longitudinal direction and is inserted between the inner sheet and the outer sheet and is integrally sewn and fixed; A first Velcro tape attached to the free end; A second Velcro tape attached to an outer circumferential surface of the heat insulating pad and capable of adhering to the first Velcro tape; A pair of heat resistant sheets sewn and fixed at both ends in the width direction of the heat insulating pad along the longitudinal direction; A heat ray portion arranged and fixed in a predetermined pattern between the heat resistant sheets; And a double-sided tape adhered to the inner surface of the heat-resistant sheet. The width of the heat ray wound on the pipe is larger than the circumference of the pipe, so that the heat ray has at least a part where the heat ray overlaps.

Preferably, the inner sheet, the outer sheet, and the side sheet constituting the heat insulating pad are fabric sheets coated with Teflon, and the heat ray portions are arranged in a quadrangular pattern, the width of which is larger than the circumference of the outer diameter of the pipe, The heat insulating member includes a multilayered layer of an airgel sheet.

A heating jacket according to the present invention comprises a heat insulating pad having a three-dimensional structure in a direction of assembling a pipe, a free end which is integrally sewn and fixed at one end in the longitudinal direction of the heat insulating pad, And a double-sided tape adhered to the inner surface of the heat-resistant sheet. The heat-ray portion is superimposed on a certain section of the heat- It is possible to uniformly heat the whole piping, minimize the heat loss, and reduce the power consumption. Also, even when the diameter of the pipeline to be installed is large, the installation is easy.

1 is a perspective view of a heating jacket according to the present invention,
2 is a cross-sectional view of a heating jacket according to the present invention,
FIG. 3 is a plan view of a heat resistant sheet provided with a heating wire of a heating jacket according to the present invention,
FIG. 4 is a sectional view showing a state in which a heating jacket according to the present invention is wound around a pipe,
5 is a perspective view of a heating jacket according to another embodiment of the present invention.

The specific structure or functional description presented in the embodiment of the present invention is merely illustrative for the purpose of illustrating an embodiment according to the concept of the present invention, and embodiments according to the concept of the present invention can be implemented in various forms. And should not be construed as limited to the embodiments described herein, but should be understood to include all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.

Meanwhile, in the present invention, the terms first and / or second etc. may be used to describe various components, but the components are not limited to the terms. The terms may be referred to as a second element only for the purpose of distinguishing one element from another, for example, to the extent that it does not depart from the scope of the invention in accordance with the concept of the present invention, Similarly, the second component may also be referred to as the first component.

Whenever an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, but it should be understood that other elements may be present in between something to do. On the other hand, when it is mentioned that an element is "directly connected" or "directly contacted" to another element, it should be understood that there are no other elements in between. Other expressions for describing the relationship between components, such as "between" and "between" or "adjacent to" and "directly adjacent to" should also be interpreted.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. It will be further understood that the terms " comprises ", or "having ", and the like in the specification are intended to specify the presence of stated features, integers, But do not preclude the presence or addition of steps, operations, elements, parts, or combinations thereof.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view of a heating jacket according to the present invention, and FIG. 2 is a sectional view of a heating jacket according to the present invention.

1 and 2, a heating jacket according to the present invention includes a heat insulating pad 110 provided to surround a pipe 10, and a free member 110 fixed to one end of the heat insulating pad 110 in the width direction, A loop surface tape 131 provided at the free end 120 and a large back surface tape 132 attached to the outer circumferential surface of the heat insulating pad 110 to be adhered to the loop surface tape 131, A pair of heat resistant sheets 141 and 142 fixed to both ends of the heat resistant sheet 141 and 142 and a heat ray portion 150 arranged and fixed in a predetermined pattern between the heat resistant sheets 141 and 142, And a double-sided tape 161 adhered to the inner surface of the base plate 142.

The double-sided tape 161 may be provided with a release paper 162 for protecting the exposed surface. At the time of construction, the release paper 162 is removed and the double-sided tape 161 is attached to the surface of the pipe 10.

The heat insulating pad 110 has a rectangular shape in which the heat insulating member 114 is filled with the inner sheet 111, the outer sheet 112 and the side sheet 113 composed of the same type of sheet layer, Is characterized in that the outer sheet 112 has a three-dimensional structure that is wider than the inner sheet 111 and convexed outward.

The insulating member 114 may be provided by glass fiber, silica fiber, or aramid felt, and it is preferable that the insulating member 114 has an appropriate thickness for sufficient warming.

The material of the sheets 111, 112, and 113 constituting the heat insulating pad is not particularly limited, but a heat insulating member filled with a nonwoven fabric, glass fiber or silica fiber, PTEF (Polytetrafluoroethylene) , It is possible to prevent the fine dust from leaking out to the outside because of harming the health of workers and polluting the surrounding environment. Therefore, the nonwoven fabric coated with Teflon, the carbon fiber, the aramid fiber and the sheet made of silica fiber Is preferably provided. Such a fabric sheet coated with Teflon is excellent in heat insulation and workability and can minimize deformation due to heat.

The free end 120 has the same length as the heat-insulating pad 110 and is integrally sewn and fixed between the inner sheet 111 and the outer sheet 112 at one end in the longitudinal direction. Preferably, at this time, (S1) together with the sheets (141) and (142). The free end portion 120, which is sewn and fixed between the inner sheet 111 and the outer sheet 112 together with the heat resistant sheets 141 and 142 to be adhered and supported by the heat insulating pad 110 and the Velcro tape, 110 in the longitudinal direction so that the binding force is large and the hicking jacket can be firmly fixed even in a pipe of a large diameter.

The loop surface tape 131 is provided on the free end portion 120 as a patch pattern provided with a plurality of loops and the tape 132 is provided with a plurality of hooks, As shown in Fig.

The loop surface tape 131 and the back surface tape 132 constitute a Velcro tape which can be adhered to each other. Unlike the present embodiment, the positions of the loop surface tape and the back surface tape provided on the free end portion and the heat insulating pad are mutually The first Velcro tape 131 and the second Velcro tape 132 are referred to as "first Velcro tape 131" and "second Velcro tape 132".

The heat ray portion 150 is sewn and fixed in a predetermined pattern between the pair of heat resistant sheets 141 and 142 which are overlapped with each other.

3 is a plan view of a heat resistant sheet provided with a heating wire of a heating jacket according to the present invention.

The heat ray portions 150 are arranged with a rectangular pattern as a whole and the heat ray portions 150 are arranged and fixed in a certain pattern between the heat resistant sheets 141 and 142. That is, (Not shown). Such a heat-resistant sheet may be made of a material such as silicon, Teflon, PI, etc., but not limited thereto, and a well-known sheet having electrical insulation and heat resistance can be used.

The width W1 of the heat wire portion 150 is greater than the circumference 2πR by at least the outer diameter R1 of the pipe and the width of the heat resistant sheet 141 142 where the heat wire portion 150 is disposed (W2) is larger than the width W1 of the heat ray portion 150 (W2 > W1). The length L of the heat resistant sheets 141 and 142 is equal to the length of the heat insulating pad.

As described above, the heat-resistant sheets 141 and 142 are sewed together with the heat-insulating pad 110 at both ends thereof (S1) and fixed.

Referring again to FIGS. 1 and 2, the heat resistant sheets 141 and 142 constructed as described above are in direct contact with the piping 10, and the heat insulating pads 110 are provided outside the heat resistant sheets 141 and 142, 10). At this time, the heat wire part 150 has a section in which at least a part is overlapped.

FIG. 4 is a cross-sectional view showing a heating jacket according to the present invention wound around a pipe. In order to facilitate understanding, only the positional relationship is ignored, Only the heat ray portion is shown.

The heating jacket of the heating jacket is attached to the surface of the pipe 10 and the heating jacket is attached to the pipe 10 in a state where one end is fixed. The first Velcro tape 131 provided on the free end 120 is fixed to the second Velcro tape 132 on the upper surface of the fixed heat insulating pad 110 and fixed.

When the heating jacket is installed on the pipe 10 by the above process, the free end 120 and the heat-insulating pad 110 located on the outer surface overlap with the heat-insulating pad 110 located inside, And the inner surface heat ray portion 150 is also superimposed on the outer surface of the heat ray portion 150 by a certain interval? 2.

5 is a perspective view of a heating jacket according to another embodiment of the present invention. The same reference numerals are used for the same components as those of the previous embodiment, and redundant explanations are omitted.

Referring to FIG. 5, in this embodiment, the heat insulating pad 210 includes an airgel sheet layer 214a which is multilayered with heat insulating members 214a and 214b.

The airgel has a porous structure, has a high specific surface area and a low thermal conductivity, and is thus very effective as an insulating member. For example, 10 to 20 mW / m.K, which is significantly lower than the thermal conductivity of conventional styrofoam of 30 to 40 mW / m.k.

On the other hand, although the airgel has an excellent thermal conductivity, it is limited to increase the thickness due to the limitations of the production method when manufacturing the single sheet. Therefore, the present invention is preferably used as a heat insulating member by laminating a plurality of airgel sheets.

On the other hand, the upper portion of the airgel sheet layer 214a may further include a silicon layer 214b which is thicker than the single airgel sheet layer 214a. The silicon layer 214b is provided to enclose the heat ray portion together with the airgel sheet layer 214a so that effective heat retention is performed to minimize heat loss. Unlike the glass fiber or the like, the airgel sheet as the heat insulating member does not cause fine dust, which is advantageous in that the working environment is not contaminated.

The silicone layer 214b and the airgel sheet layer 214a are protected by a sheath made of an inner sheet 211, an outer sheet 212 and a side sheet 213 as described in the foregoing embodiment, Thereby constituting the heat insulating pad 210.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the inventions. It will be apparent to those of ordinary skill in the art.

110, 210: heat insulation pad 111, 211: inner sheet
112, 212: outer sheet 113, 213: side sheet
114: heat insulating member 120: free end
131: first Velcro tape 132: second Velcro tape
141, 142: heat-resistant sheet 150:
161: double-sided tape 214a: airgel sheet layer
214b: silicon layer

Claims (4)

An outer sheet, an outer sheet, and a side sheet, wherein the outer sheet is filled with a heat insulating member, and the outer sheet is longer than the inner sheet and has a convex three-dimensional structure outwardly;
A free end which is fixed to one end portion in the width direction of the heat insulating pad along the longitudinal direction and is inserted between the inner sheet and the outer sheet and is integrally sewn and fixed;
A first Velcro tape attached to the free end;
A second Velcro tape attached to an outer circumferential surface of the heat insulating pad and capable of adhering to the first Velcro tape;
A pair of heat resistant sheets sewn and fixed at both ends in the width direction of the heat insulating pad along the longitudinal direction;
A heat ray portion arranged and fixed in a predetermined pattern between the heat resistant sheets;
And a double-sided tape adhered to an inner surface of the heat resistant sheet, wherein a width of the hot wire wound on the pipe is larger than a circumference of the pipe, so that the hot wire has at least a part where the hot wire overlaps. The heating jacket according to claim 1, wherein the inner sheet, the outer sheet, and the side sheets constituting the heat insulating pad are fabric sheets coated with Teflon. The heating jacket according to claim 1, wherein the hot wire portion is arranged in a rectangular pattern and its width is larger than the circumference of the outer diameter of the pipe. The heating jacket according to claim 1, wherein the heat insulating member is an airgel sheet layer laminated in multiple layers.

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