KR101016434B1 - Structure for fixing heating line of heat jacket and method thereof - Google Patents

Abstract

PURPOSE: A heat wire securing structure for single heat jacket and a securing method thereof are provided to shorten the securing time by sewing and securing the heat source to the insulating material. CONSTITUTION: An insulation heat jacket structure(50) comprises a secured seat, a hotwire, and a fixing seal. The heat wire is of shape having a diameter of 0.1 mm to 1.4 mm. The heat wire is not covered. A securing thread is sewn with the heat wire to secure the heat wire on the secured seat. The heat wire is secured on the secured seat.

Description

Structure for fixing heating line of heat jacket and method

The present invention relates to a hot wire fixing structure for a heat insulating heat jacket and the hot wire fixing method, and more particularly, a heat insulating used when a liquid or gas needs to be transported to a specific temperature in a semiconductor manufacturing process, a chemical process, a plastic production process, or the like. A structure for fixing a heating wire of the heat jacket and a method for fixing the heating wire of the heat insulating heat jacket.

Pipes, tubes, valve bodies, and other conduits (hereinafter referred to as "fluid conduits" for convenience) at particular temperatures limited to liquids or gases, especially in semiconductor device manufacturing, chemical processing, plastic production, commercial food processing, equipment manufacturing, and other manufacturing industries. It needs to be transported through. It is also necessary to prevent the evaporable material from depositing as a result of solidification on the fluid transport tube inner surface. In this case, an adiabatic heater jacket is used to heat or insulate the fluid transport tube.

For example, a semiconductor manufacturing process is generally classified into a pre-process and a post-process, and a pre-process means a physical / chemical process of depositing and etching a thin film on a wafer to manufacture a semiconductor chip. The process refers to a package fabrication process in which the wafer fabricated in the previous process is cut to a specific standard, placed on a separately produced lead frame, and molded after wire bonding.

The entire process includes silane and arsine, which inject a wafer into a process chamber that provides space for the process and form a working atmosphere for performing deposition and etching of a thin film on the wafer. And injecting a gas such as boron chloride and hydrogen into the chamber to perform a chip manufacturing process.

At this time, a large amount of harmful gas containing various ignitable gases, corrosive foreign substances and toxic components is generated inside the process chamber during the entire process, and in order to purify and release the harmful gases, a scrubber (scubber: Gas cleaner) is installed.

Since such a scrubber purifies only the reaction by-products in the form of gas, when the reaction by-products proceed to the outside of the process chamber and become solid in the form of powder, the exhaust pressure rises as they adhere to the exhaust line and flows into the vacuum pump. Problems such as malfunctions and harmful gases flow back into the process chamber contaminate the wafer. Therefore, in order to prevent the solidification of the powder is used a heat insulating heating jacket for heating the temperature of the fluid transport pipe (P) above a certain temperature.

The conventional thermal insulation heating jacket disclosed in Korean Patent Publication No. 10-1999-0028880 is a member formed of a heat insulating material having an internal shape identical to the external shape of a fluid transport tube, and has a round cylindrical shape with an empty internal space. One end and the other end are formed in the slit. In this case, the heat insulating heating jacket is composed of a heat mat surrounding the fluid transport pipe and the heat insulating material attached to the outer surface of the heat mat.

The heat mat is made of glass fiber reinforced silicone rubber and includes a hot wire embedded between the inner sheet and the outer sheet. The insulation is made of silicone sponge or foam rubber and has a thickness thicker than the heat mat.

As shown in FIG. 1, the conventional heat insulating heating jacket configured as described above is embedded by fixing the heating wire 40 between the inner sheet 39 and the outer sheet 38 of the heat mat 34. However, since the material of the heat mat 34 is made of glass fiber reinforced silicone rubber, the effect of being insulated by the outer sheet 38 is degraded. In addition, the thickness of the heat mat 34 is so thick that the heat transfer to the inner surface is not excellent.

In addition, in order to embed and fix the heating wire 40 inside the heat mat, the material of the heat mat 34 is limited to fiberglass reinforced rubber or the like. In addition, the heating wire 40 is embedded between the heat mats and then fixed using the mandrel 50. Unexplained 35 is a slot. It is then vulcanized using a vulcanization process to complete the heat mat. At this time, the platen 60 is applied to the temperature while wrapping the heat mat surrounding the mandrel. Thereafter, the heat mat must be separated from the mandrel 50. This heat mat manufacturing operation is not easy and the manufacturing process is difficult, there is a problem that takes a lot of manufacturing cost and manufacturing time. There is also a problem that the heat mat thickness becomes thick.

Accordingly, an object of the present invention is to provide a heat source fixing structure and a fixing method for a heat insulating heat jacket which can simplify the heat source while shortening the fixing time.

It is another object of the present invention to provide a heat source fixing structure and a fixing method for a heat insulating heat jacket with a small overall thickness and excellent heat insulating properties and heat transfer rate.

Therefore, the fixing structure of the heat insulation heat jacket which is this invention contains a fixing sheet, a heating wire, and a fixing chamber. The hot wire is a heat source of a yarn shape having a diameter of 0.1 mm to 1.4 mm, and is disposed with a predetermined pattern on one side of the fixing sheet. The fixing chamber is formed in the same pattern as the heating wire, and fixes the heating wire to the fixing sheet and is made of an insulating material.

The fixing chamber is alternately arranged alternately on one surface and the other surface of the fixing sheet, it is preferable to press and fix while crossing the upper surface of the heating wire on one surface of the fixing sheet.

The material of the hot wire may be at least one selected from the group consisting of stainless steel, copper, carbon, aramid and fiber bay.

In this case, the heating wire and the fixing chamber is a lower thread and upper thread or upper thread and lower thread used in the sewing machine, and is preferably formed by sewing the fixing sheet.

The fixing sheet may be a heat insulating material or an insulating material. In this case, the fixing sheet may be made of at least one selected from a fibrous mat, a cabla mat, a nomax mat, an airgel, and a carbon mat material. On the other hand, the fixing sheet may be at least one selected from silicon coated fiber glass, Teflon coated fiber glass, and oratex.

On the other hand, the method for fixing the heat wire of the heat insulating heat jacket in another aspect of the present invention, the step of preparing the hot wire as the lower thread or upper thread of the sewing machine, the step of preparing the fixed chamber as the remaining lower thread or upper thread of the sewing machine, and the sewing machine Fixing the heating wire by sewing on the insulating material or heat insulating material.

The insulating material is at least one material selected from silicon coated fiber glass, teflon coated fiber glass, and oratex, and may have a sheet shape. In addition, the heat insulating material may be at least one selected from a fiber mat, a capla mat, a nomax mat, an airgel, and a carbon mat material.

Meanwhile, in the fixing of the heating wire, the heating wire may be patterned on one side of the insulating material or the heat insulating material, and the fixing chamber may be sewing to fix the heating wire.

The hot wire may be sewn without being coated.

According to the present invention, by fixing the heat source to the heat insulator or the insulator, the fixing structure is simple and the fixing time can be shortened.

In addition, by using a heat insulating material having an excellent heat insulating effect, excellent heat insulating properties, by being in close contact with the insulating material is excellent in heat transfer.

2A and 2B are a plan view and a rear view, respectively, illustrating a fixing structure of the heating wire 120 for a heat insulating heat jacket according to a preferred embodiment of the present invention. As shown in FIGS. 2A and 2B, the fixing structure 100 of the heating wire for the heat insulating heat jacket according to the preferred embodiment of the present invention includes a fixing sheet 110, a heating wire 120, and a fixing chamber 130. It includes. In this case, the said heat insulation heat jacket is a member which transmits heat to the fluid transport pipe direction which requires heat, and insulates heat to the outside. In this case, the heat insulating heat jacket 1000 (refer to FIG. 4) is formed to surround the heating target pipe to transfer heat toward the pipe and to insulate the heat to the outside, and includes a hot wire 120. Insulating material is disposed in the inner direction of the 120, and the insulating material is disposed in the outer direction of the heating wire 120.

The heating wire 120 is fixed to the fixing sheet 110. The hot wire 120 is a heat source having a thread shape and is disposed with a predetermined pattern.

The material of the heating wire 120 is a conductive material, such as stainless steel, copper, carbon, aramid, fiber bay, etc., can be heated by receiving a current. In this case, the heating wire 120 may be fixed to the fixing sheet 110 by a sewing machine. To this end, the diameter of the heating wire 120 may be 0.1mm to 1.4mm, it may be one of the upper thread and the lower thread in the sewing machine.

The fixing chamber 130 is formed in the same pattern as the heating wire 120, and fixes the heating wire 120 to the fixing sheet 110 and is made of an insulating material. The fixing chamber 130 may be patterned by being machined together with the heating wire 120. That is, when the heating wire 120 is the lower thread in the sewing machine, the fixing chamber 130 is the upper thread. In addition, when the heating wire 120 is the upper thread in the sewing machine, the fixing chamber 130 is the lower thread.

The fixing chamber 130 may be disposed intermittently and alternately on one surface and the other surface of the fixing sheet 110. In this case, one side of the fixing sheet 110 may be fixed by pressing while crossing the upper surface of the heating wire 120. That is, the fixing chamber 130 is alternately formed on one side and the other side through the fixing sheet 110, and the heating wire 120 when the fixing chamber 130 is at one side of the fixing sheet 110. ) To be secured across the top.

In one method, the fixing chamber 130 is grooved so that the fixing chamber 130 is intermittently disposed on one surface of the fixing sheet 110, and the heating wire 120 is disposed on one surface of the fixing sheet 110. It may have a shape passing through the groove below the fixed chamber 130. For this purpose, a running stitch method can be used.

Accordingly, the heating wire 120 is not only firmly fixed by being compressed to the fixing sheet 110, but also the heating wire 120 is not positioned on the other surface of the fixing sheet 110, thereby providing excellent insulation.

It is preferable that the heating wire 120 is not covered. The coating is formed to prevent sorting of the heating wire 120, which is a concept of resistance in heat generation. According to the present invention, since the heating wire 120 is machined, it is firmly fixed by the upper thread or the lower thread so that the sorting phenomenon between the heating wires 120 does not occur. Therefore, it is not necessary to cover the hot wire 120, and accordingly, the heat transfer rate becomes better.

The fixing sheet 110 may be an insulating material. The insulating material is made of a material having excellent insulating properties, such as silicone coated fiber glass, Teflon coated fiber glass and Goattex. The materials are thin enough to function as a cloth during sewing. In addition, the insulation is also excellent. Therefore, after fixing the hot wire 120, the thickness is excellent while the insulation is excellent.

The fixing sheet 110 may be a heat insulating material. The heat insulating material may be made of a material having excellent heat insulating properties, such as a fiber mat, a kabla mat, a nomax mat, an airgel, and a carbon mat. The materials can be formed thin enough to function as a cloth during sewing. In addition, the heat insulating material is more excellent than the heat insulating material of the conventional silicon material.

In order to further improve the heat insulating property, another heat insulating material may be laminated on a surface on which the heating wire 120 of the heat insulating material is not pattern fixed. In this case, a binder is interposed between the plurality of heat insulating materials, and the plurality of heat insulating sheets may be bonded by the binder. The binder may be an adhesive such as a silicone binder, a urethane binder, and an inorganic binder.

In addition, the plurality of heat insulating materials may be made of a material that is easy to penetrate, and may be combined with each other by sewing the insulating material.

According to the present invention, the heating wire 120 can be fixed by sewing, thereby simplifying the fixing structure of the heating wire 120. In addition, by fixing the hot wire 120 to the thin cloth-shaped fixing sheet 110, the thickness of the entire heat insulating heat jacket is reduced. In addition, the material that can be applied to the fixing sheet 110 is diversified, and accordingly, it is possible to select and apply a material having excellent insulation or a material having excellent heat insulation according to the purpose.

3 is a flowchart illustrating a method for fixing a heat ray for a heat insulating heat jacket according to a preferred embodiment of the present invention.

Referring to Figure 3, when the method of fixing the hot wire of the heat insulating heat jacket, the step of preparing the hot wire to the lower thread or upper thread (S1), and the step of preparing the fixing chamber of the insulating material as the remaining lower or upper thread (S2) and And, the step of sewing on the insulating material or heat insulating material (S3).

In this case, referring to Figure 2a, the heating wire 120 is made of at least one material selected from the group consisting of stainless steel, copper, carbon, aramid and fiber bay, the diameter of the heating wire 120 is 0.1mm to It may be 1.4 mm. In the case of the hot wire 120 of the diameter, it is possible to apply to the lower thread or the upper thread of the sewing machine.

The fixing chamber 130 becomes the remaining lower thread or upper thread of the sewing machine. That is, when the heating wire 120 is the lower thread of the sewing machine, the fixing chamber 130 is the upper thread of the sewing machine. In addition, when the heating wire 120 is the upper thread, the fixed chamber becomes the lower thread of the sewing machine.

In this case, the heating wire 120 may be missing on the insulating material. In this case, the insulating material is at least one material selected from silicon-coated fiber glass, Teflon-coated fiber glass, and goatex, and may have a sheet shape.

In addition, the heating wire 120 may be missed on the heat insulating material. In this case, the heat insulator is at least one selected from a fiber mat, a cabbage mat, a nomax mat, an airgel, and a carbon mat material, and may be formed in a sheet shape.

Meanwhile, in the fixing of the heating wire 120, the heating wire 120 may be patterned on one side of the insulating material or the heat insulating material, and the fixing chamber 130 may be machined to fix the heating wire 120.

For this purpose, a running stitch method may be applied. For example, the fixing of the heating wire 120 may include grooving the fixing chamber and passing the heating wire 120 through a groove below the fixing chamber disposed at one side of the insulating material or the heat insulating material. can do.

The hot wire 120 is preferably machined in an uncovered state.

Figure 4 is a cross-sectional view showing a heat insulating heat jacket manufactured using the heat ray fixing method for heat insulating heat jacket as described above.

Referring to FIG. 4, a method of manufacturing a heat insulating heat jacket will be described. First, in the case of the heat insulating material 1400, the heating wires 120 are pattern-fixed and fixed to the inner surface of the sheet-shaped heat insulating material 1400. At least one heat insulating material 1400 may be bonded to an outer surface of the heat insulating material 1400 to be laminated. In this case, an adhesive member 1500 may be interposed between the insulation members.

The insulating material 1100 is bonded to an inner surface of the heat insulating material 1400 to which the heating wire 120 is exposed. In this case, the insulating material 1100 may be fixed by sewing the insulating material 1400 and the fixing chamber. Accordingly, the heating wire 120 is bonded to the insulating material 1100 and the heat insulating material 1400.

The outer surface of the insulation 1400 exposed outside is coated with a protective film 1600. The protective layer 1600 may be made of a silicon foam material. The protective film 1600 may have a better scratch resistance than the heat insulating material 1400, and thus may prevent the heat insulating material 1400 from being deteriorated from being damaged by external scratches. In addition, the protective layer 1600 serves to give elasticity to the heat insulating heating jacket.

After forming the passivation layer 1600, the method may include forming an outer shell 1700 on an outer surface of the passivation layer 1600. The outer shell 1700 may function to minimize the width of the slot while fixing the insulating material 1100, the heating wire 120, the heat insulating material 1400, and the protective film 1600 to be in close contact with the heating target pipe. In this case, the outer shell 1700 may be made of a material such as Teflon-coated fiberglass and Goattex.

On the other hand, in the case of the soft material 1100, the heating wire 120 is arranged in a pattern on the outer surface of the sheet-shaped insulating material 1100 and fixed. The heat insulator 1400 is bonded to the outer surface of the heat wire 120 of the insulating material 1100. The heat insulating material 1400 may be formed by laminating at least two or more heat insulating sheets.

In this case, the insulating material 1100 may be fixed by threading the insulating material 1400 and the fixing chamber. Accordingly, the heating wire 120 is bonded to the insulating material 1100 and the heat insulating material 1400.

A protective film 1600 is coated on the outer surface of the insulation 1400 that is exposed to the outside. The protective layer 1600 may be made of a silicon foam material.

After forming the passivation layer 1600, the method may include forming an outer shell 1700 on an outer surface of the passivation layer 1600.

Although the present invention has been described with reference to one embodiment shown in the accompanying drawings, this is only an example, and those skilled in the art may realize various modifications and equivalent other embodiments therefrom. I can understand. Therefore, the true technical protection scope of the present invention should be defined only by the appended claims.

1 is a perspective view showing a conventional method for producing a heat insulating heat sheet.

2A and 2B are a plan view and a rear view respectively showing a heat ray fixing structure for a heat insulating heat jacket according to a preferred embodiment of the present invention.

3 is a flowchart illustrating a method for fixing a heat ray for a heat insulating heat jacket according to a preferred embodiment of the present invention.

4 is a perspective view illustrating a heat insulating heat jacket having a heat ray fixing structure for the heat insulating heat jacket of FIGS. 2A and 2B.

<Brief Description of Drawings>

100: fixing structure of the heating wire for the heat insulating heat jacket 110: fixing sheet

120: heating wire 130: fixed chamber

1000: heat insulation heat jacket 1100: insulation material

1400: heat insulating material 1500: adhesive member

1600: shield

Claims (12)

As a structure for transmitting heat in the direction of the pipe requiring heat, and fixing the heating wire included in the heat insulating heat jacket to insulate the heat to the outside, Fixing sheet; A heat source of a thread shape having a diameter of 0.1 mm to 1.4 mm, selected from any one of the upper thread and the lower thread used in the sewing machine, and the unheated heating wire; And A fixing chamber formed in the same pattern as the heating wire and used as another one not selected from the upper thread and the lower thread used in the sewing machine to fix the heating wire to the fixing sheet while being sewn together with the heating wire; Fixing structure of the heating wire for a heat insulating heat jacket comprising a. The method according to claim 1, The fixing chamber is arranged alternately on one side and the other surface of the fixing sheet, the fixing structure of the heat wire for a heat insulating heat jacket, characterized in that the fixing sheet is pressed by pressing while crossing the upper surface of the heating wire. The method according to claim 1, The material of the heating wire is at least one selected from the group consisting of stainless steel, copper, carbon, aramid and fiber bayan fixing structure of the heat wire for a heat jacket. delete The method according to any one of claims 1 to 3, The fixing sheet is a heat insulating material, or a fixing structure of a heat wire for a heat insulating heat jacket, characterized in that the insulating material. The method according to any one of claims 1 to 3, The fixing sheet is a fixed structure of a heat wire for a heat insulating heat jacket, characterized in that made of at least one selected from a fiber mat, a kabla mat, a no-max mat, aerogel, carbon material. The method according to any one of claims 1 to 3, The fixing sheet is a fixing structure of a heat wire for a heat insulating heat jacket, characterized in that at least one selected from silicon coated fiber glass, Teflon coated fiber glass, and Goattex. It is formed to surround a heating target pipe, and transmits heat toward the pipe and insulates heat to the outside, and includes a heating wire, an insulation material is disposed in the inner direction of the heating wire, the heat insulating material in the outer direction of the heating wire Wire fixing method of the heat insulating heat jacket is disposed, Selecting and mounting the heating wire to any one of upper and lower threads in a sewing machine; Mounting a fixing chamber made of an insulating material to another one not selected from the upper thread and the lower thread in the sewing machine; And Fixing the heating wire by sewing the heating wire and the fixing chamber by the sewing machine to the insulating material or the heat insulating material; Heat wire fixing method of the heat insulating heat jacket comprising a. The method according to claim 8, The insulating material is at least one material selected from silicon coated fiberglass glass, Teflon coated fiberglass glass, and Goattex, the heat ray fixing method of the heat insulating heat jacket, characterized in that made of a sheet shape. The method according to claim 8, The heat insulating material is a heat wire fixing method of the heat insulating heat jacket, characterized in that at least one selected from the fiber mat, kabla mat, nomax mat, aerogel, carbon mat material. The method according to claim 8, The fixing of the hot wire may include a running stitch process in which the groove is fixed and the hot wire passes through the groove of the fixing chamber. The method according to any one of claims 8 to 11, The hot wire fixing method of the heat insulating heat jacket, characterized in that the sewing is not covered.

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