JP2002093553A - Heater device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a heater device wherein the heater can be wound in close contact with a heated substance having a curved surface structure of a pipe or the like, and further wherein the heater once wound is easily removed. SOLUTION: To an outer face of a sheet-formed heater composed of an elastic material of endless state wherein a shape of inner face coincided with a shape of surface of the heated substance is memorized, an insulating material composed of the elastic material of endless state wherein a shape of inner face coincided with a shape of outer face of the sheet-formed heater is memorized is fixed, and the heated substance is inserted where the sheet-formed heater and the heat insulating material junction are expanded, and by utilizing the elasticity of the sheet-formed heater, the sheet-formed heater is fixed to the heated substance.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heater device, and more particularly to a heater device for heating an object to be heated having a curved surface structure such as a pipe, other conduits, spheres, valves, elbow joints or T-shaped joints. It is about.

[0002]

2. Description of the Related Art In semiconductor manufacturing, chemical processing, plastics manufacturing, food processing, and equipment manufacturing, heaters are used to prevent solidification and deposition of pipes requiring heating or heat insulation, particularly volatile liquids or gases, on the pipe inner walls. Often used. The heater is required to reduce the required power by thermally insulating it from the surrounding air, and to minimize the temperature of the exposed outer surface of the heater so that persons who may touch it will not be burned.

That is, for example, in a low pressure CVD process for depositing silicon nitride on a substrate wafer used for forming a semiconductor chip, a large amount of ammonium chloride gas is generated as a by-product in a reaction chamber where silicon nitride is deposited. Occurs. Once the ammonium chloride gas exits the reaction chamber and is cooled, white crystals form on all surfaces to be heated, such as inside pipes and pumps in the manufacturing system, forming layers. This layer of ammonium chloride peels off and flows back into the reaction chamber, contaminating the substrate wafers in the chamber. When such contamination occurs, the manufacturing system must be closed and the blocked pipes and pumps cleaned or replaced.
Furthermore, substrate wafers or semiconductor chips may become contaminated so that they cannot be repaired or used. To prevent the ammonium chloride gas from clogging or contaminating the production system, it is necessary to place a heater around the pipe to heat it and sublimate it.

[0004] As a heater for heating or insulating the object including the pipe, a belt-shaped heater covered with silicon rubber or glass fiber is conventionally wound around the pipe.

[0005]

However, it is difficult to wind the above-mentioned conventional belt-shaped heater in close contact with an object to be heated having a curved surface structure such as a pipe, a conduit, a sphere, a valve, an elbow joint or a T-type joint. It was difficult to make the temperature of the object to be heated uniform, so that partial solidification of by-products could not be prevented.

Further, it is difficult to remove the heater once wound, and the heater once removed cannot be reused.

In addition, since the silicon rubber or glass fiber covering the heater is thin, there is a risk that a human may be burned, heat is dissipated, and the heating efficiency of the heater is low.

The present invention has been made to eliminate the above disadvantages.

[0009]

According to the present invention, there is provided a heater device comprising: an endless sheet-shaped heater made of an elastic material in which an inner surface shape corresponding to a surface shape of an object to be heated is stored; and an outer surface of the sheet-shaped heater. It is characterized by comprising a fixed heat insulating material made of an endless elastic material having an inner surface shape that matches the outer surface shape of the sheet-shaped heater.

The heat insulating material is characterized in that a silicon rubber sponge and a ceramic fiber are laminated.

The thermal conductivity of the heat insulating material is 0.03 to 0.3.
It is characterized by 13kcal / mh ° C.

Further, the thickness of the heat insulating material is at least 10 mm.

[0013] The sheet-like heater is provided with two thermal and electrical insulating materials and sandwiched between the two insulating materials.
It is characterized by being made of a heat generating metal foil material of an arbitrary pattern.

Further, the heat and electric insulating material is a silicon rubber sheet reinforced with glass fiber.

The thickness of the sheet heater is 2 m
m.

[0016]

Embodiments of the present invention will be described below with reference to the drawings.

As shown in FIG. 1 and FIG. 2, the heater device of the present invention memorizes an inner surface shape corresponding to the surface shape of the object to be heated, for example, the pipe 1, and makes the both ends face each other endlessly to form a cylindrical shape. A sheet heater 2 made of a thin, non-stretchable and conventionally known elastic material, and an inner surface shape that matches the outer surface shape of the sheet heater 2 adhered to the entire outer surface of the sheet heater 2 and is stored in an endless shape. A heat insulation jacket 3 made of a conventionally known elastic material having a cylindrical shape with both ends facing each other, and one and the other cords 4, 5 connected to the sheet heater 2.
And plugs 6a and 6b provided at the free ends of the one and other cords 4 and 5, respectively.

Reference numeral 7 denotes a plug 6 of the one cord 4.
This is the power cord connected to a.

The sheet-like heater 2 is made of a metal foil chemically etched into an arbitrary heat generation pattern on two insulating sheets having heat resistance, flame retardancy and electrical insulation such as silicon rubber reinforced with glass fiber. The sheet-shaped heater 2 is preferably formed with a thickness of 2 mm or less.

The sheet-like heater 2 which stores an inner surface shape corresponding to the outer surface shape of the pipe 1 is used when the silicone rubber of the insulating sheet is in an unvulcanized state.
And vulcanizing by heating it appropriately, and then peeling off from the mold.

Since the heater device of the present invention has the above-described structure, the endless sheet-like heater 2 and the heat-insulating jacket 3 are expanded at the joining end face 8 by utilizing the restoring property thereof. The sheet heater 2 and the heat insulating jacket 3 are put on the pipe 1.

The sheet-like heater 2 and the heat-insulating jacket 3 are restored to the original cylindrical shape by elasticity, and the sheet-like heater 2 comes into close contact with the pipe 1, and the joining end face of the sheet-like heater 2 and the heat-insulating jacket 3 is formed. 8 comes into almost contact.

If the heater device is heated in this state, since the sheet heater 2 is in close contact with the pipe 1, the heat generated by the sheet heater 2 flows in the pipe direction, while the heat insulation jacket 3 This prevents heat flow in the outward direction.

The metal foil material may be nichrome,
Use iron chromium, stainless steel, or a material that has sufficient resistance to electric current, has a property of generating a large amount of heat, and has a high melting point to withstand the heat generated when electric current flows.

The heat insulation jacket 3 has a lower thermal conductivity than the sheet heater 2 and the pipe 1, and its thermal conductivity is desirably 0.03 to 0.13 kcal / mh.degree.

The heat insulating jacket 3 may be formed by laminating a silicon rubber sponge and a ceramic fiber in order to improve the heat insulating effect.

The thickness of the heat insulating jacket 3 is 10 mm.
It is preferable that it is above.

The cords 4, 5, and 7 are made of silicone rubber,
Coat with Teflon or glass fiber.

The cords 4 and 5 are connected in parallel as shown in the circuit diagram of FIG. 3, and the plug 6a of the one cord 4 is connected to the power cord 7 and the plug of the other cord 5 is connected. If 6b is connected to the plug 6a of one cord 4 of the adjacent heater device, power can be supplied to the adjacent heater device in parallel.

In this way, when heating a pipe network in which pipes having different shapes are continuous, a plurality of heater devices can be attached to the pipe network, and adjacent heater devices can be connected in a chain.

In another embodiment of the present invention, as shown in FIG. 4 and FIG.
A cover sheet 9 made of a silicon rubber sheet or the like reinforced with glass fiber is wound so as to straddle the joining end face 8, and the heater device is fixed to the pipe 1.

In order to fix both ends of the cover sheet 9, fixing members 10 such as hooks, hooks or spring hooks are provided at both ends of the cover sheet 9, and the joining end face 8 is separated. This prevents the heater device from accidentally dropping off the pipe 1.

An electric component 11 such as a thermal fuse or a thermostat may be arranged on the outer surface of the sheet heater 2.

[0034]

As described above, according to the heater device of the present invention, there is a great advantage that the heater device can be quickly and easily attached to and detached from a predetermined position of a pipe having a curved surface structure.

Therefore, since the pipeline cleaning is performed once a month or once a week, it is particularly convenient in a semiconductor factory where the operation of the pipeline is stopped or the pipeline system is frequently moved.

Further, since the heat transfer from the sheet-shaped heater 2 to the outside is suppressed by the heat insulating jacket 3, the heat transfer to the pipe 1 is promoted, and the necessary heat of the heater can be reduced.

Further, since the temperature of the outer peripheral surface of the heat insulating jacket 3 can be reduced, a person who may touch the outer surface of the heater device can be protected from burns.

Further, if the cover sheet 9 is used, the heater device can be fixed to the pipe 1 without fail.
The use of the fixing device 10 such as a hook allows the heater device to be quickly and easily attached to and detached from the pipe.

When a plurality of heater devices are connected to the pipe network, the length of the power cord can be significantly reduced, and obstacles for a person working nearby can be reduced.

Further, since each heater device can be connected in parallel, current can flow to another heater device even if one heater device is malfunctioning.

[Brief description of the drawings]

FIG. 1 is a front view of a heater device according to the present invention.

FIG. 2 is a vertical sectional side view of the heater device shown in FIG.

FIG. 3 is a circuit diagram of the heater device shown in FIG.

FIG. 4 is a front view of another embodiment of the heater device of the present invention.

FIG. 5 is a vertical sectional side view of the heater device shown in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Pipe 2 Sheet heater 3 Heat insulation jacket 4 Cord 5 Cord 6a Plug 6b Plug 7 Power cord 8 Joining end face 9 Cover sheet 10 Fixture 11 Electric parts

Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat II (reference) H05B 3/20 317 H05B 3/20 317 F term (reference) 3K034 AA02 AA33 BB08 BB13 BC06 BC16 BC29 CA15 FA02 FA04 FA05 GA03 GA04 GA13 HA01 HA07 HA09 HA10 JA02 3K092 PP11 QA02 QA06 QB02 QB31 QC38 QC43 RA06 RD09 RD12 RD16 RF02 RF11 RF13 RF26 SS02 SS04 SS05 TT37 VV03 VV22

Claims (7)

[Claims] 1. An endless sheet-like heater made of an elastic material having an inner shape that matches the surface shape of an object to be heated, and an outer shape of the sheet-like heater fixed to an outer surface of the sheet-like heater. A heater device comprising: a heat insulating material made of an endless elastic material in which a matched inner surface shape is stored. 2. The heater device according to claim 1, wherein the heat insulating material is formed by laminating a silicon rubber sponge and a ceramic fiber. 3. The heat insulating material has a thermal conductivity of 0.03 to 0.13 kcal.
The heater device according to claim 1 or 2, wherein the temperature is / mh ° C. 4. The heater device according to claim 1, wherein the heat insulating material has a thickness of 10 mm or more. 5. The sheet-shaped heater comprises two thermal and electrical insulating materials, and a heating metal foil material of an arbitrary pattern sandwiched between the two insulating materials. The heater device according to 1, 2, 3 or 4. 6. The heater device according to claim 5, wherein the heat and electricity insulating material is a silicon rubber sheet reinforced with glass fiber. 7. The heater device according to claim 1, wherein the thickness of the sheet-shaped heater is less than 2 mm.