KR101575181B1

KR101575181B1 - jacket heater

Info

Publication number: KR101575181B1
Application number: KR1020150106172A
Authority: KR
Inventors: 김환남
Original assignee: 김환남
Priority date: 2015-07-27
Filing date: 2015-07-27
Publication date: 2015-12-21
Also published as: WO2017018778A1

Abstract

According to an embodiment of the present invention, a jacket heater, which covers a gas pipe of a pipe or a tube in order to constantly maintain temperatures in the pipe or tube of semiconductor facilities, comprises: an outer cover which is an outer side surface of a jacket heater, and covers the gas pipe; an inner cover which is an inner side surface of the jacket heater, and is in contact with the gas pipe; an insulation material positioned between the outer and inner covers to be in contact with the outer cover; a conductive plate positioned between the insulation material and the inner cover to be in contact with the insulation material, and connected to an external ground terminal; an outer glass fiber positioned between the conductive plate and the inner cover to be in contact with the conductive plate; an explosion-proof heating wire cable which is made of an explosion-proof metal material, is disposed on a surface of the outer glass fiber between the outer glass fiber and the inner cover and is a heating wire for generating heat; and a power input terminal provided at one end of the explosion-proof heating wire cable to receive power from external power supply.

Description

Jacket heater

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a jacket heater, a gas cylinder used in a semiconductor facility or the like, and a jacket heater that maintains a constant temperature of a gas pipe.

In a semiconductor liquid crystal manufacturing process or a chemical product manufacturing process, a liquid or gas including a gas in a gas cylinder, which is transported through a pipe or a tube, may solidify when a temperature or a temperature is not maintained above a certain temperature, Can be caused. Therefore, a jacket heater is used to wrap the pipe or tube so that the temperature inside the pipe or tube can be kept constant.

The conventional jacket heater includes a heating mat including a heating element such as a heating wire and a heat insulating material stacked thereon. A jacket heater is installed on the pipe or tube by surrounding the jacket heater 10 in the form of a flat, flexible mat and covering the outer periphery of the pipe or tube and securing it in a pipe or tube inseparably.

FIG. 1 is a view showing a conventional hot wire. In the conventional jacket heater, the heat loss of the jacket heater is increased due to the heat of the uncoated surface, thereby lowering the heating efficiency. As a result, power consumption And the durability of the jacket heater is deteriorated.

Korean Patent No. 10-1201951

An object of the present invention is to provide a jacket heater having an explosion-proof function for maintaining a constant temperature of a gas cylinder and a gas pipe used in a semiconductor facility or the like. The present invention also provides a waterproof means and an overheat preventing means for the jacket heater. It is another object of the present invention to provide a means for blocking leakage current of a jacket heater.

The present invention provides a jacket heater for enclosing a gas pipe of a pipe or a tube so as to maintain a constant temperature inside a pipe or a tube of a semiconductor facility, the jacket heater comprising: an outer cover which is an outer surface of a jacket heater surrounding the gas cylinder and the gas pipe; An inner cover which is an inner surface of the gas cylinder and a jacket heater contacting the gas pipe; A heat insulating material disposed between the outer cover and the inner cover in contact with the outer cover; A conductive plate disposed between the heat insulating material and the inner cover in contact with the heat insulating material and connected to an external ground terminal; An outer glass fiber positioned between the conductive plate and the inner cover in contact with the conductive plate; A heating wire arranged in the outer glass fiber between the outer glass fiber and the inner cover to generate heat, the thermal wire being made of a metal material for explosion proof; And a power input terminal provided at one end of the explosion-proof hot-wire cable and receiving power from an external power source.

Wherein the inner cover comprises: a first waterproof coating layer serving as a waterproof layer in contact with the gas pipe; A second waterproof coating layer which is in contact with a surface of the outer glass fiber where the explosion-proof hot-wire cable is disposed and serves as a waterproof layer; And inner glass fibers positioned between the first waterproof coating layer and the second waterproof coating layer.

The thickness of the first waterproof coating layer may be greater than the thickness of the second waterproof coating layer.

The waterproof coating layer may be a silicon coating.

The explosion-proof hot-wire cable may be a mineral insulated cable.

The conductive plate may be an aluminum plate.

The jacket heater may include a bimetal disposed between the power input terminal and the external power supply to cut off power from the external power supply when the temperature becomes higher than the set critical temperature.

The jacket heater may include a cooling zone heating cable having a resistance component lower than that of the explosion-proof hot-wire cable, the hot-wire cable connecting the power input end and the external power source.

The jacket heater includes a thermally conductive coating agent coated on the surface of the outer glass fiber on which the explosion-proof hot-wire cable is disposed and positioned between the outer glass fiber and the inner cover, and having a thermal conductivity higher than that of the outer glass fiber .

According to the embodiment of the present invention, by using the jacket heater to which the explosion-proof hot-wire cable is applied, the temperature of the gas pipe is kept constant, so that explosion can be prevented and accident can be prevented in advance. Further, according to the embodiment of the present invention, the jacket heater is coated with a waterproof layer so that moisture generated on the surface of the gas pipe can be prevented from permeating into the inside of the jacket heater. In addition, a bimetal is provided to prevent an accident caused by overheating. Further, according to the embodiment of the present invention, since the conductive plate plate is provided inside the jacket heater and connected to the external ground, even if the coating of the explosion-proof hot-wire cable is peeled off, the leakage current can be flowed to the ground, It can prevent accidents.

FIG. 1 is a view showing a conventional heat line. FIG.
2 is a plan view of a jacket heater according to an embodiment of the present invention;
3 is a cross-sectional view of a jacket heater according to an embodiment of the present invention.
4 is a perspective view showing a state in which a jacket heater is wrapped in a gas pipe according to an embodiment of the present invention;
5 is a conceptual view of a mineral insulated cable according to an embodiment of the present invention;
6 is a diameter cross-sectional view of a type of mineral insulated cable according to an embodiment of the present invention.
7 is a sectional view of a jacket heater according to another embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, in order to explain the present invention in detail so that those skilled in the art can easily carry out the present invention. . Other objects, features, and operational advantages of the present invention, including its effects and advantages, will become more apparent from the description of the preferred embodiments. It should be noted that the same reference numerals are used to denote the same or similar components in the drawings.

FIG. 2 is a plan view of a jacket heater according to an embodiment of the present invention, FIG. 3 is a cross-sectional view of a jacket heater according to an embodiment of the present invention, FIG. 4 is a cross- 5 is a conceptual diagram of a mineral insulated cable according to an embodiment of the present invention, FIG. 6 is a cross-sectional view of a mineral insulated cable according to an embodiment of the present invention, FIG. 7 is a cross- Sectional view of a jacket heater according to another embodiment.

The jacket heater 10 of the present invention surrounds the gas cylinder A and the gas pipe A so that the temperature of the gas cylinder of the semiconductor equipment and the inside of the pipe or tube can be kept constant. The outer cover 124, A heat insulating material 123, a conductive plate 122, an outer glass fiber 121, an explosion-proof hot-wire cable 200, and an electric power input terminal 201. [

The jacket heater 10 is tightly fixed to the gas pipe A by the fastener 20. The fastener 20 is a means for fastening the jacket heater 10 so as to enclose the outer wall of the gas pipe A as shown in Fig. The fastening body 20 can be realized by various fastening means such as a connecting cord and a buckle. One end of the connecting cord is connected to one side of the jacket heater 10 and the other end of the connecting cord is connected to the jacket heater 10, So that the jacket heater 10 can be brought into close contact with the outer wall of the gas pipe A so that the jacket heater 10 can be brought into contact with the outer wall of the gas pipe A by wrapping it around the gas pipe A and then tightening it with the buckle.

The outer cover 124 may be an outer surface of the jacket heater 10 surrounding the gas pipe A, and a synthetic resin such as polyethylene may be used. The outer cover 124 may be made of a variety of non-conductive materials such as genuine materials even if it is not made of synthetic resin.

A heater insulating material 123 is placed between the outer cover and the inner cover 110 in abutment with the outer cover 124. The heat insulating material 123 performs a heat insulating function such as carbon fiber so that heat generated from the jacket heater 10 does not flow to the outside.

The electroconductive plate 122 is disposed between the heat insulating material 123 and the inner cover 110 in contact with the heat insulating material 123 and is connected to an external ground terminal GND. Therefore, when leakage occurs due to peeling of the cover of the explosion-proof hot-wire cable 200, the leaked current can flow to the external ground terminal to prevent an accident caused by leakage. The conductive plate 122 may be embodied as a metal sheet having conductivity, for example, an aluminum plate.

Outer glass fiber 121 is placed between conductive plate 122 and inner cover 110 in contact with conductive plate 122. Glass fiber is a mineral fiber made of melted glass in fiber shape and has characteristics of heat resistance, durability, sound absorption, and electric insulation.

The explosion-proof heat-ray cable 200 is a heat-generating heat wire that is disposed on the surface of the outer glass fiber 121 between the outer glass fiber 121 and the inner glass cover 110 to generate heat. to be. The explosion-proof hot-wire cable 200 may be arranged in various arrangements such as a zigzag method, a line method, and a polygonal method.

The explosion-proof hot-wire cable 200 has a high resistance component and generates heat due to resistance heat. Further, the explosion-proof hot-wire cable 200 is realized by a cable for preventing explosion, and is realized by a metal material for explosion-proof. The explosion-proof hot-wire cable 200 may be implemented as a mineral insulated cable. As is known, a mineral insulated cable can be continuously used at 200 ° C and is a heat-resistant wire that can be used at 400 ° C and 600 ° C.

As shown in FIG. 5, a known mineral insulated cable uses minerals such as magnesium oxide (MgO) as the insulator 2 between the conductor 1 and the sheath 3. U.S. Patent No. 4,998,341 (Inco Alloys Limited) discloses a technique in which a tube having a relatively large diameter is filled with at least one conductor bar and one insulator, sealed and then rolled and milled at a high temperature to produce a relatively thin, To provide a heating cable. US Pat. No. 4,739,155 (Pyrotenax of Canada Ltd.) has a structure similar to that of U.S. Patent No. 4,998,341. However, it is not a normal drawing method of manufacturing process, but a heating element having a conductor and a high conductivity And the insulating part surrounding the heating element is bonded.

6, a mineral insulated cable having a single core cable type as shown in FIG. 6 (a), and a mineral insulated cable having a single core cable type as shown in FIG. 6 (a) a mineral insulated cable having a twin core cable type as shown in FIG. 6B, and a mineral insulated cable having a flexible termination type as shown in FIG. 6 (c) , And a mineral insulated cable having a solid termination type at the end of the cable as shown in Fig. 6 (d). Although not shown, various other mineral insulated cables may be used for the explosion-proof hot-wire cable 200.

The power input terminal 201 is provided at one end of the explosion-proof hot-wire cable 200 and is supplied with power from the external power source 300. The power input terminal 201 may be implemented as a power input connector or the like.

The inner cover 110 is an inner surface (joint surface) of the jacket heater 10 in contact with the gas pipe (A). Since the inner cover 110 is in contact with the gas pipe A unlike the outer cover 124, moisture that may be generated on the surface of the gas pipe A is prevented from penetrating into the outer glass fiber 121 having the heat- And a waterproof layer.

The inner cover 110 has a first waterproof coating layer 111 serving as a waterproof layer in contact with the gas pipe A and a waterproof layer in contact with the surface of the outer glass fiber 121 on which the explosion- And an inner glass fiber 112 positioned between the first waterproof coating layer 111 and the second waterproof coating layer 113. The thickness t1 of the first waterproof coating layer 111 in contact with the gas pipe A is made larger than the thickness t2 of the second waterproof coating layer 113. By further increasing the thickness of the first waterproof coating layer 111 contacting the surface of the gas pipe A, the waterproof effect can be further maximized.

The first waterproof coating layer 111 and the second waterproof coating layer 113 may be formed of a silicone coating agent, and various waterproof coating agents may be used.

7, a thermally conductive coating agent 210 having a thermal conductivity higher than that of the outer glass fiber 121 is coated on the surface of the outer glass fiber 121 on which the explosion-proof thermal wire cable 200 is disposed, The coating layer may be positioned between the outer glass fiber 121 and the inner cover 110. The explosion-proof heat-ray cable 200 is arranged in a staggered manner on the surface of the outer glass fiber 121. Heat generated in the explosion-proof heat-ray cable 200 heats the corresponding cable region to a high temperature, Will have a low temperature. Therefore, the surface of the gas pipe (A) is not heated evenly due to uneven temperature. 7, on the surface of the outer glass fiber 121 on which the heat ray cable 200 for explosion-proof use is disposed, a thermally conductive coating agent 210 having a thermal conductivity higher than that of the outer glass fiber 121 ). Accordingly, the heat radiated from the explosion-proof hot-wire cable 200 rapidly propagates to the periphery by the thermal conductive force of the thermally conductive coating agent 210, thereby achieving uniform heat distribution.

As the material of the thermally conductive coating material 210, various thermally conductive materials such as boron nitrate can be used. As the material of the thermally conductive coating material 210, a thermally conductive plastic coating material having no conductivity and having a thermal conductivity 5 to 100 times higher than that of conventional plastics may be used.

Meanwhile, in the embodiment of the present invention, the jacket heater 10 interrupts the driving power when the overheat of the explosion-proof hot-wire cable 200 occurs, thereby blocking the possibility of explosion. To this end, the jacket heater 10 is provided between the power input terminal 201 and the external power source 300 and includes a bimetal 500 for blocking power from the external power source 300 when the temperature becomes higher than the set critical temperature ). The bimetal (500) is a rod-shaped part formed by superimposing two kinds of thin metal plates having very different thermal expansion coefficients and forming a single piece. The bimetal (500) can control the temperature of the device by using the bending property when heat is applied. That is, the bimetal 500 is made of a single plate by closely contacting two kinds of thin metal plates having different expansion coefficients. The bimetal 500 has a property of bending greatly even when the temperature is slightly changed. Therefore, when the temperature is heated, The current can be cut off.

Heat generated in the explosion-proof hot-wire cable 200 of the jacket heater 10 may be transmitted to the external power source 300 through the power input terminal 201 to cause malfunction of the external power source 300. The present invention has a cooling zone heating cable (400) in order to prevent the generated heat of the explosion-proof hot-wire cable (200) from being transmitted to the external power source (300). The cooling zone hot-wire cable 400 is a hot-wire cable connecting the power input terminal 201 and the external power source 300 so as to have a lower resistance component than the explosion-proof hot-wire cable 200. It is preferable to have a resistance of less than 1/500 of the resistance of the explosion-proof hot-wire cable 200. The cooling zone heating cable 400 conveys the electric power of the external power source 300 as a conductive cable to the explosion-proof heat-conducting cable 200, but the resistance component is very low and hardly generates heat. Therefore, since no heat is transmitted to the external power source 300, malfunction of the external power source 300 can be prevented.

The embodiments of the present invention described above are selected and presented in order to facilitate the understanding of those skilled in the art from a variety of possible examples. The technical idea of the present invention is not necessarily limited to or limited to these embodiments Various changes, modifications, and other equivalent embodiments are possible without departing from the spirit of the present invention.

10: Jacket heater
20: fastener
110: Inner cover
111: first waterproof coating layer
112: inner glass fiber
113: second waterproof coating layer
121: outer glass fiber
122: conductive plate
123: Insulation
124: outer cover
200: Hot wire cable for explosion proof
210: Thermosetting coating agent

Claims

A jacket heater for enclosing a gas pipe of a pipe or a tube so as to maintain a constant temperature inside a pipe or a tube of a semiconductor facility,
An outer cover which is an outer surface of a jacket heater surrounding the gas pipe;
An inner cover which is an inner surface of the jacket heater contacting the gas pipe;
A heat insulating material disposed between the outer cover and the inner cover in contact with the outer cover;
A conductive plate disposed between the heat insulating material and the inner cover in contact with the heat insulating material and connected to an external ground terminal;
An outer glass fiber positioned between the conductive plate and the inner cover in contact with the conductive plate;
A heating wire arranged in the outer glass fiber between the outer glass fiber and the inner cover to generate heat, the thermal wire being made of a metal material for explosion proof; And
A power input terminal provided at one end of the explosion-proof hot-wire cable and receiving power from an external power source;
A jacket heater containing.

[2] The apparatus according to claim 1,
A first waterproof coating layer serving as a waterproof layer in contact with the gas pipe;
A second waterproof coating layer which is in contact with a surface of the outer glass fiber where the explosion-proof hot-wire cable is disposed and serves as a waterproof layer; And
An inner glass fiber positioned between the first waterproof coating layer and the second waterproof coating layer;
A jacket heater comprising:

The method of claim 2,
Wherein the thickness of the first waterproof coating layer is thicker than the thickness of the second waterproof coating layer.

The method of claim 2,
Wherein the waterproof coating layer is a silicone coating.

The explosion-proof heat-conducting cable according to claim 1 or 2,
A jacket heater characterized by a mineral insulated cable.

The conductive plate according to claim 1 or 2,
A jacket heater characterized by an aluminum plate.

The jacket heater according to claim 1 or 2,
A bimetal provided between the power input terminal and the external power supply to cut off power from the external power supply when the temperature becomes higher than the set critical temperature;
A jacket heater containing.

The jacket heater according to claim 1 or 2,
A heating wire cable for connecting the power input terminal and an external power source, the cooling zone heating wire cable having a lower resistance component than the explosion-proof hot-wire cable;
A jacket heater containing.

The jacket heater according to claim 1 or 2,
And a thermally conductive coating agent coated on a surface of the outer glass fiber on which the explosion-proof hot-wire cable is disposed and positioned between the outer glass fiber and the inner cover, and having a thermal conductivity higher than that of the outer glass fiber.