TW495607B - Inspecting system for flat glasses in the display manufacturing - Google Patents

Inspecting system for flat glasses in the display manufacturing Download PDF

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Publication number
TW495607B
TW495607B TW90128418A TW90128418A TW495607B TW 495607 B TW495607 B TW 495607B TW 90128418 A TW90128418 A TW 90128418A TW 90128418 A TW90128418 A TW 90128418A TW 495607 B TW495607 B TW 495607B
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Taiwan
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inspection system
scope
patent application
item
camera
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TW90128418A
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Chinese (zh)
Inventor
Oliver Bornholdt
Gunther Galfe
Detlef Hagenbruck
Wolfram Laux
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Basler Ag
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

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  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The present invention relates to a flat and thin object, and particularly to an inspecting system including at least a touch free detector which includes at least a camera, a lighting unit, and a conveyer to make an object move relatively, especially by an optical method for flat glass during display processing. The object can be held at a correct distance to the inspecting system by a clear thickness above an air cushion in the working area of the inspecting system. Therefore, the perfect transfer can be approached for the fragile flat glass of the display during inspecting.

Description

495607 五、發明說明(1) 本發明係 個免接觸,尤 和至少一照明 對於探測裝置 檢驗裝置,因 制。 在顯示器 檢查平板破璃 需諸層。通常 攝影機,在明 光過程中加以 機,此往往構 取的圖像資料 瑕疵辨識。 在攝影機 板玻璃儘管從 薄,則需要大 壓彎和翹曲。 只不夠到通常 平板玻璃在滾 平板玻璃 脆弱。因此, ’例如沾到附 此外,必 和平板玻 300x400 平面支持 另方面, 現有的應 輪或皮帶 表面及疊 不免經過 於滾輪或 須保證待 璃相對 mm大幅 ,以便 光學檢 用邊緣 上輸送 積,受 滾輪或 皮帶或 檢查的 運動中 平面延 使平板 驗系統 ’以防 時,會 到外界 皮帶時 其表面 表面要 關於平坦之薄物體的檢驗系統,-具有至少一 指光學方式的探測裝置,包括至少一攝影機 單位,以及至少一傳送裝置,物體可藉此相 運動。本發明尤指顯示器製造中平板玻璃之 此在以下主要談到平板玻璃,就不需再作限 用平板玻璃(例如平板螢幕等)製造中,必須 的瑕窥,不但就透明的載體材,而且涉及所 是以光學探測裝置進行檢驗,於此至少有一 區’在暗區,或者在從至少一照明單位的透 ,光。於此,平板玻璃以直線導引經過攝影 排,影機,對平板玻璃成排探測。所攝 ¥引至資料預備構造,在此進行資料運用和 ’出現更多問題。平 伸至80〇x 1〇〇〇_較 玻璃保持均勻,不致 不再能夠使用。支持 止壓彎。由此可知, 延伸於全寬。 機械性影響時,非常 ’表面會受損或污穢 的顆粒。 在離攝影機界定的距 495607 五、發明說明(2) :離在識。關於表面對物像的預先 ,^ ν蚁對微小公差的所需局部解決。 在矣®二;^ =的,在於提供前述技藝的檢驗系統,可以 =度準確性中’達成完美傳送 内’至少在氣塾測裝置範圍 置氣=可免作巧==二: 破小心受損。顯示藉在= 壤的i用傳送裝置可以把持平板玻 原則上,探測裝置是把物體保持排成一列。σ ίγίίϊ::實質上排列的總長度上方即;:: 適支巧探測範圍内’設有平均對齊的最 ί;;;::點狀或條狀氣…’只要避免與平板ί璃 項厚ΐ:氣j厚度可由〇.5至—,以―為佳。此 送厚度充刀足夠,而且可以確保較大平板玻璃的確實傳 需要κϊ二塾的產生基本上是可以隨意。但氣蟄 ,,刀穩疋和均勻,以便能維持所需的一定厚 乳墊產生的流動不要太強,即可避免平板玻璃495607 V. Description of the invention (1) The present invention is a contact-free, especially at least one lighting. Checking the panel for broken glass on the display requires layers. Generally, the camera is used in the bright process, which often constitutes the image data to identify defects. Although the glass of the camera plate is thin, it requires large bending and warping. It's not enough to roll the flat glass. The flat glass is fragile. Therefore, 'For example, if it is attached to it, it must support the flat glass 300x400 plane. On the other hand, the existing wheel or belt surface and the stack must inevitably pass through the roller or the glass must be relatively large in mm, so that the product can be transported on the edge of the optical inspection. Plane inspection system in motion caused by rollers or belts or inspections makes the panel inspection system 'in case, when it comes to the outside belt, the surface surface of the inspection system should be a flat and thin object,-with at least one finger optical detection device, including At least one camera unit and at least one conveying device can be used to move the object. The present invention particularly refers to flat glass in the manufacture of displays. In the following, flat glass is mainly discussed. It is no longer necessary to limit the production of flat glass (such as flat screens). The necessary flaws are not only transparent carrier materials, but also This involves the use of an optical detection device for inspection, where at least one zone is 'in the dark zone' or in the transmission of light from at least one lighting unit. Here, the flat glass is guided in a straight line through the photographic row, and the camera detects the flat glass in a row. The pictured ¥ leads to the data preparation structure, and there are more problems in using the data and ’. It stretches to 80 × 100 °. It is more uniform than glass and can no longer be used. Support pressure relief. It can be seen that it extends to full width. When mechanically affected, very small particles can be damaged or dirty on the surface. In the distance defined by the camera 495607 V. Description of the invention (2): Lie in knowledge. Regarding the surface-to-object image in advance, the required local solution to the small tolerances is required. In 矣 ®II; ^ =, it is to provide the inspection system of the aforementioned technology, which can be achieved within the degree of accuracy, 'at the perfect transmission', at least in the range of the gas detection device = can avoid making tricks == 2: broken careful damage . It can be shown that the conveying device can hold the flat glass by borrowing the soil. In principle, the detection device keeps the objects in a line. σ ίγίίϊ :: above the total length of the actual arrangement, that is: :: suitable for the detection range 'with the most evenly aligned ;;; :: point-like or strip-shaped gas ...' as long as the thickness of the plate is avoided ΐ: The thickness of gas j can be from 0.5 to-, preferably-. This thickness is sufficient to feed the knife, and it can ensure the true transmission of the larger flat glass. But discouraged, the knife is stable and uniform, so as to maintain a certain thickness required. The flow generated by the breast pad should not be too strong to avoid flat glass.

第5頁Page 5

控的運動。 按照本發明第一具體例,提供一種氣墊,是以氣態媒 '、過多孔板弓I進壓力,尤其是壓縮空氣所構成,該板在 勿?,開側至少設有濾材,覆於多孔上。#優點是,板可 t間單方式利用平均鑽孔板構成。濾材的作用在於淨化氣 用的氣態媒質。另外,產生與通過多孔流動的空氣比較 。由此在保持相同的厚度,可以達成氣墊之所需穩定性。 ;慮材可為絨毛、塑膠不織物、海錦等,以可以更換為 宜’在非常污染時可以更換。Controlled movement. According to the first specific example of the present invention, an air cushion is provided, which is composed of a gaseous medium and an inlet pressure through a perforated plate, especially compressed air. , At least an open side is provided with a filter material, covering the porous. # Advantage is that the plate can be constructed in a single way using average drilled plates. The role of filter media is to purify gaseous media. In addition, compared to air flowing through a porous body. Therefore, while maintaining the same thickness, the required stability of the air cushion can be achieved. ; Concerned materials can be fluff, plastic non-woven fabrics, brocade, etc., should be replaced as possible ’can be replaced when very contaminated.

按照本發明第二具體例,氣墊是以氣態媒質,尤其是 空氣,通過細孔的孔隙板引進壓力所構成。板可由燒結材 料,尤其是金屬性材料製成。細孔淨尺寸宜為8.0至2〇·〇 V m ’以1 0 · 〇至1 5 // jq為佳。意外發現經由氣態媒質透過該 孔隙性材料引進壓力於相反側,可以為穩定氣墊產生一定 的流動。孔隙性材料即同時把氣體過濾,故可避免受檢表 面的污染。進一步優點是,孔隙性材料的表面可以加工張 緊。即可達成表面之所需準痛性。 按照本發明較佳具體例,氣墊可以少量空氣產生。其 優點是,平板玻璃的污染藉空氣防止引進或附著顆粒。因 此,多孔、濾材或細孔不會很快阻塞。According to a second specific example of the present invention, the air cushion is constituted by a gaseous medium, especially air, and a pressure is introduced through a fine-pored orifice plate. The plate may be made of a sintered material, especially a metallic material. The pore net size is preferably 8.0 to 20.0 V m ′, and more preferably 10 · 0 to 1 5 // jq. It was unexpectedly discovered that the introduction of pressure through the porous material through the gaseous medium to the opposite side can generate a certain flow for the stable air cushion. The porous material filters the gas at the same time, so it can avoid contamination of the tested surface. A further advantage is that the surface of the porous material can be processed for tension. Can achieve the desired quasi-pain. According to a preferred embodiment of the present invention, the air cushion can be generated with a small amount of air. This has the advantage that contamination of the flat glass prevents the introduction or attachment of particles by air. Therefore, porosity, filter media or pores do not block quickly.

可設置框架,ge置板或多板和/或具有透氣性和不透 氣性段之板,以產生氣墊,物體離開的表面在一平面延伸 ,對水平傾斜角度為〇。至近乎90。,以至80°為佳。在 幾乎直立的齊平中,傳送裝置可設有受動和共同轉動的輥A frame, a ge plate or multiple plates and / or plates with air-permeable and air-impermeable sections can be provided to create an air cushion. The surface on which the object leaves extends in a plane, and the angle to the horizontal is 0. Almost 90. , Preferably 80 °. In almost upright flush, the conveyor can be equipped with driven and co-rotating rollers

第6頁 495607Page 6 495607

子’可以緊緊保持平板玻璃 共同轉動的輪子,平板玻璃 板或個別氣墊藉可以引 。於此可特別為此或氣墊, 調節,以便為穩定氣墊盡量 攝影機可設在平板玻璃 探測裝置的攝影機配置在氣 體例,至少有二板彼此相隔 /或照明單位可配置在板後 間隙以及氣墊,可以產生空 氣墊的穩定性。 的運用邊緣,亦可設有受動和 的運用邊緣平放其上。 進或產生的氣態媒質分離為宜 在探測裝置範圍内,設有壓力 產生一定的空氣流動。 背對氣墊之侧面,亦宜至少把 墊的側面。按照本發明較佳具 ’以間隙為界,於是攝影機和 或中間之間隙内。邊過板間的 氣流的界定比例,進一步提高 攝影機可由配置在物體相反側的至少一照明單位加以 照明。攝影機亦可由配置在和攝影機同側的明區和/或暗 區内之至少一照明單位加以照明。於此,若明區和/或暗 區的照明係經同樣間隙為之,則攝影機宜配置在其後或其 内。又,若板和/或框架壁和/或間隙之隔壁至^設在& 測裝置範圍内時,至少部份具有吸光色或層,你丨如養愛备 。因此,避免不良的反光。 / ^ 當然,亦可在傳送裝置中,設有複數探测裝置,在平 板破璃各不同區域或特性,亦可例如包括不同照明。即可 提供一種檢驗系統,使要檢驗的平板玻璃可以完 無接 地在探測裝置上方傳送◊因此,亦可把探測襄置、^ $ 墊側面上的有源層,否則即有受到機械性損傷己 氣 本發明可參照附圖詳述如下。附圖中: 之虞。The sub ’s can tightly hold the flat glass co-rotating wheels, and the flat glass plate or individual air cushions can be led. This can be done specifically for this or air cushion, so as to stabilize the air cushion as far as possible. The camera can be set on a flat glass detection device. The camera is configured in the gas example. At least two plates are separated from each other. Or the lighting unit can be placed in the gap behind the plate and the air cushion. Can produce the stability of the air cushion. The operating edge can also be provided with a moving edge. Incoming or generated gaseous media should be separated within the range of the detection device, provided with pressure to generate a certain air flow. With the side facing away from the air cushion, it should also be at least the side of the cushion. According to the present invention, it is preferable to have a gap as a boundary, so that the camera and the middle gap are within. The defined ratio of the airflow passing between the plates further improves the camera's illumination by at least one lighting unit arranged on the opposite side of the object. The camera may also be illuminated by at least one lighting unit arranged in a bright area and / or a dark area on the same side as the camera. Here, if the lighting in the bright area and / or the dark area is through the same gap, the camera should be arranged behind or in it. In addition, if the panel and / or the frame wall and / or the partition wall is located within the range of the & measuring device, at least part of it has a light-absorbing color or layer. Therefore, avoid bad reflections. / ^ Of course, a plurality of detection devices can also be provided in the conveying device, and different areas or characteristics of the glass can be broken in the flat plate, and for example, different lighting can be included. That is, an inspection system can be provided, so that the flat glass to be inspected can be transmitted above the detection device without grounding. Therefore, the detection layer can also be placed on the active layer on the side of the pad, otherwise mechanical damage will occur. The present invention can be described in detail below with reference to the drawings. In the drawings: Yu.

495607 發明說明(5) 第1圖為本發明檢驗系統之側視圖; 第2圖為檢驗系統前視圖; 第3圖為檢驗系統俯視圖。 ,圖示檢驗系統中,具有複數板u, =。把壓縮空氣分配到板後面 以:丨進壓 ΐ成μ空氣可通過細孔流動,以產生氣ii2 iii材料 表面20或其上。 支持物體在 、笨故^生之氣墊用來支持平板玻璃13,利用圖上表干夕搞 : ίΐίίί置上方。傳送運動是在箭頭14;向ί 直傳;= 二角運度用 機牟内生乳墊12用之板11必然不是完全平坦置放在圖示的 方^。,預設成斷線狀縱向或橫越該板11和氣墊12之傳送 變二夕,此達成界定之流動比例。第3圖表示框架内多項 強制地Ϊ明圖。基本上以對稱或平衡構造為宜。又,並非 板,j 5两要設置分離板丨丨。甚至亦宜設有一或以上之大型 管]ί透氣性和不透氣性段。於是可設有中央壓縮空氣導 i理设個別板的優點是,目視即可簡單運用其大小,加以 圍繞^ ^示具體例中’探測裝置包括多排攝影機1 6 ’成排 門隙17板坡璃1 3。於是’二相鄰板1 1有一距離’並形成一 二隙η: ΪΪ傳送裝置14。其配置是使攝影機16可透視過 叛及氣墊宜延伸跨越平板玻璃全寬,可.以良好和495607 Description of the invention (5) Figure 1 is a side view of the inspection system of the present invention; Figure 2 is a front view of the inspection system; and Figure 3 is a top view of the inspection system. In the diagram inspection system, there is a complex plate u, =. Distribute the compressed air to the back of the board to: 丨 Into the pressure μ air can flow through the pores to generate air ii2 iii material surface 20 or above. The supporting object is a stupid air cushion used to support the flat glass 13, using the table on the picture to make a dry evening: ίΐίίί set above. The transmission movement is at arrow 14; direct transmission to ί; = the board 11 used for the machine-made endogenous breast pad 12 of the two-angle transport must not be completely flat and placed on the square as shown in the figure. By default, the transmission in the form of a broken line longitudinally or across the plate 11 and the air cushion 12 will change overnight, and a defined flow ratio will be achieved. Figure 3 shows a number of mandatory obscure maps within the framework. It is preferably a symmetrical or balanced structure. Also, it is not a board, but a separate board is required for j 5. It is even better to have one or more large pipes] breathable and impermeable sections. Therefore, the central compressed air guide can be provided to arrange individual plates. The advantage is that the size can be simply used visually and surrounded. ^ In the specific example, the 'detection device includes multiple rows of cameras 1 6', the rows of door gaps 17 plates slope Glass 1 3. Then 'two adjacent plates 1 1 have a distance' and form a two gap η: ΪΪ transport device 14. Its configuration is such that the camera 16 can be seen through and the air cushion should extend across the full width of the flat glass.

第8頁 495607 五、發明說明(6) 確實支持平板玻璃行過探測裝置。 設有第一照明單位1 8,在攝影機1 6的相反侧,於透光 過程中對間隙1 7照明。又設有第二照明單位1 9,透過間隙 1 7對攝影機1 6的暗區發揮照明。如此可達成精巧構造,並 可使攝影機直接或以控制的光線曝光。如此一來,即可檢 查平板玻璃13的各種特性。Page 8 495607 V. Description of the invention (6) It does support flat glass passing detection device. A first lighting unit 18 is provided, and the gap 17 is illuminated during light transmission on the opposite side of the camera 16. A second lighting unit 19 is also provided, and the dark area of the camera 16 is illuminated through the gap 17. This allows for compact construction and allows the camera to be exposed directly or with controlled light. In this way, various characteristics of the flat glass 13 can be checked.

第9頁 495607Page 9 495607

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Claims (1)

甲❺專利範圍 1 · 種檢驗系統,可供檢給承如 器製造中的平板μ璃aw 千坦之薄物 ’ +板玻掏(13),该檢驗 卜光學方式之檢測裝£ :有 至少—照明單位(18,19),以及至w'_至/ — 此相對於探測裝置運•,其特少傳运舉 範圍内’在具有界定厚度之至 體至 測裝置有實質上確實距離者。…墊(12). 氣能2婵;申:巧利範圍第1項之檢驗系統,1 孔心媒貝,尤其是空氣,經至 夕 '、 該板3在離去側面設有至少-攄:,i:: .3.如申請專利範圍第1項之檢驗系统,、直 係以氣態媒質,尤其是空氣,孔、 (11)引進壓力構成者。 乂細孔并 、4.如申請專利範圍第3項之檢驗系盆 隙性板(1 1 )係由燒結材料構成者。μ 八 申f專利範圍第3項之檢驗系、統,直 為8.〇至20.0,,以10·0至15㈣為佳者。 ^6:如申請專??圍第1項之檢驗系統,其 產生平化,尤其是貫質上無顆粒空氣者。 匕申請專利範圍第!項之檢驗系統,直 為〇· 5至2mm,以lmm為佳者。 八 8.如申請專利範圍第丨項之檢驗 排成一列圍.繞物體⑴),而氣塾(、至4在、 實質上延伸於行列之全長者。 ^ ^ ^ 肢,尤指顯示 至少一免接觸 攝影機(1 6 )和 .置,物體藉 在知i測裝置 h 保持對探 中氣墊係以 壓力構成, ;孔上者。 中氣墊(12) (孔隙性板 中細孔狀孔 中細孔尺寸 中氣墊(12) 中氣墊厚度 中探測裝置 列的前後, 495607Former patent scope 1. An inspection system that can be used to inspect flat plates of glass, glass, glass, and thin objects in the manufacture of the container, + plate glass (13), which is an optical inspection device: there is at least- Illumination units (18, 19), and to w'_to / — This is relatively rare compared to the detection device's movement range 'in the range of the body to the measurement device with a defined thickness has a substantial distance. … Mat (12). Gas energy 2 婵; Shen: The inspection system of the first item in the scope of Qiaoli, 1 hole medium, especially air, through the evening ', the board 3 is provided with at least-摅 on the side of the departure. :, I :: .3. If the inspection system in the scope of patent application is No. 1, directly use gaseous media, especially air, holes, (11) Introduced pressure components.乂 Fine holes and 4. If the inspection system according to item 3 of the patent application, the gap plate (1 1) is made of sintered material. The inspection system and system of item 3 of the patent application scope of patent f is from 8.0 to 20.0, preferably from 10 · 0 to 15㈣. ^ 6: How to apply for a special course? ? The inspection system around item 1 produces flattening, especially for particles without air. No. of patent application scope! The inspection system of this item is 0.5 to 2mm, and 1mm is preferred. 8 8. If the inspection of the scope of application for the patent item number 丨 is arranged in a row around the object 塾), and discouraged (, to 4 in, substantially extending the full length of the line. ^ ^ ^ Limbs, especially showing at least one exemption Contact the camera (1 6) and the device. The object is kept under pressure by the detection device h, which is formed by pressure; the hole is above. The medium cushion (12) (the pores in the porous plate are pores.) Medium air cushion (12) Medium air cushion thickness, front and back of detection device row, 495607 9·如申請專利範圍第丨項之 内配置板或多板(11)和/或且右驗統,其中設有框架 之 一板或多板,以產生氣墊(1^有=二性和不透氣性區域 延伸,相對於水平傾斜角度^ / $物/的背側表面在平面 為佳者。 针角度為0至幾乎90。,以至80。 10·如申請專利範圍第8項之檢驗系統,苴或 板之各透氣性區域,藉可以引進的氣態媒質分離板者(。)成 11.如申請專利範圍第丨項之檢驗系統,、1中有至少二 板(11)隔開,並以一間隙(1 7)為界者。 1 2 ·如申请專利範圍第1項之檢驗系統,其中探測裝置 之至少一攝影機(1 6 )配置在氣塾側面者。 1 3 ·如申請專利範圍第1項之檢驗系統,其中攝影機 (1 6 )和/或照明單位(1 9 )係配置於板後或板間之間隙(丨7 ) 内者。 1 4.如申請專利範圍第1項之檢驗系統,其中攝影機 (1 6 )係由配置在物體(1 3 )相反面之至少一照明單位(1 8 )曝 光者。 1 5 ·如申請專利範圍第1項之檢驗系統,其中攝影機 (1 6)係由配置在攝影機同側的明區和/或暗區内之至少照 明單位(1 9 )曝光者。 ^ 1 6 ·如申請專利範圍第1 2項之檢驗系統,其中對明區和 /或暗區之照明係透過配置在攝影機(1 6 )之後或之内之同 一間隙(1 7 )作用者。 α 1 7 ·如申請專利範圍第1項之檢驗系統,其中板(丨丨)和9 · If the board or multiple boards (11) and / or the right test system are arranged within the scope of the patent application, there is one or more boards in the frame to generate air cushions (1 ^ 有 = 二 性 和 不The breathable area extends, and the back side surface of the horizontal tilt angle ^ / $ 物 / is preferably in a plane. The needle angle is 0 to almost 90 ° to 80. 10 · If the inspection system of item 8 of the patent application, Each air-permeable area of the plate or plate is separated by a gaseous medium that can be introduced (.). 11. If the inspection system in the scope of patent application No. 丨, at least two plates (11) are separated by 1, and separated by A gap (1 7) is the limiter. 1 2 · If the inspection system of the scope of patent application No. 1, wherein at least one camera (16) of the detection device is arranged on the side of the discontinuity. 1 3 · If the scope of patent application is No. 1 Item inspection system, in which the camera (1 6) and / or lighting unit (19) are arranged behind the board or in the gap (丨 7) between the boards. 1 4. The inspection system according to item 1 of the scope of patent application Where the camera (1 6) is composed of at least one lighting unit (1 8) Exposure person 1 5 · If the inspection system of the scope of patent application No. 1 wherein the camera (16) is exposed by at least the lighting unit (19) arranged in the bright area and / or dark area on the same side of the camera ^ 1 6 · The inspection system according to item 12 of the scope of patent application, in which the illumination of the bright area and / or the dark area is effected through the same gap (1 7) arranged behind or within the camera (16) Α 1 7 · As for the inspection system in the scope of patent application No. 1, wherein the plate (丨 丨) and 495607495607 第13頁Page 13
TW90128418A 2000-11-17 2001-11-16 Inspecting system for flat glasses in the display manufacturing TW495607B (en)

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JP2002277401A (en) 2002-09-25
CN1354362A (en) 2002-06-19

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