CN101633441B - Substrate processing system and substrate carrying device thereof - Google Patents
Substrate processing system and substrate carrying device thereof Download PDFInfo
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- CN101633441B CN101633441B CN2009101672058A CN200910167205A CN101633441B CN 101633441 B CN101633441 B CN 101633441B CN 2009101672058 A CN2009101672058 A CN 2009101672058A CN 200910167205 A CN200910167205 A CN 200910167205A CN 101633441 B CN101633441 B CN 101633441B
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Abstract
The embodiment of the invention provides a substrate processing system and a substrate carrying device thereof, wherein the substrate processing system comprises a storage case and the substrate carrying device. The storage case is provided with a plurality of accommodating spaces for storing substrates, and the accommodating spaces are mutually laminated along an array direction. The substrate carrying device comprises a main body, a bearing unit and at least one substrate protruded sensor. The bearing unit is suitable to be moved between a standby position and at least one working position, and is provided with a bearing surface and a first end and a second end which are opposite to each other, and the first end is connected to the main body. The substrate protruded sensor is configured on the bearing unit and positioned at the second end. In addition, the substrate protruded sensor is provided with a first sensing surface which is towards the array direction of the accommodating spaces like the bearing surface of the bearing unit. The substrate processing system can sense whether the substrate has excessively protruding condition during mapping sense so as to avoid crushing the substrate.
Description
Technical field
The invention relates to a kind of base plate processing system and substrate transfer apparatus thereof, but and particularly relevant for the unusual substrate in a kind of detection position and the base plate processing system and the substrate transfer apparatus thereof of substrate unfilled corner.
Background technology
In the technology of read out instrument,, therefore must use Handling device carrying substrate between each road process because substrate need pass through the multiple tracks process.Present way be through mechanical arm with substrate by taking out in the storing box (Cassette), and be transported to and carry out technological reaction on the technology board, again after technology finishes, from board, substrate is returned in the storing box, afterwards to carry out a series of processing step.
And; For obtaining stored number of substrates or other information in the storing box; Mechanical arm picks up substrate in stretching into storing box before; Can be earlier in the action of doing rise and fall apart from storing box one specific range part, so that come sensing to leave the information of the substrate in the storing box in through the mapping sensor (mapping sensor) that is arranged on the mechanical arm front end.
Yet, in the time of outside the outstanding unusually and too storing box of the substrate position in leaving storing box in, mechanical arm takes place easily when shining upon sensing, strikes outstanding substrate, thereby cause substrate damaged.At this moment, must suspend whole carrying flow process, and get rid of fragmentation with the mode of manual work.The problem that will cause thus, maintenance cost raising and waste of manpower.
In addition; The size of display panel enlarges day by day in recent years; And unfilled corner or damaged situation take place in large-sized glass substrate easily in the process of transporting; But, therefore when the substrate with unfilled corner must be waited to be transferred on the technology board, could be realized by the board operator because of factor such as the out-of-size of substrate because known substrate transfer apparatus does not detect the function of unfilled corner.So not only cause board operator's puzzlement, in the time of also can expending more worker simultaneously.
Summary of the invention
In view of this, the object of the invention is to provide a kind of substrate transfer apparatus exactly, and it can be when doing the mapping sensing, and whether have the outstanding situation of putting position, to avoid the substrate of wounding if detecting the substrate of desiring to pick up simultaneously.
A purpose more of the present invention provides a kind of substrate transfer apparatus, and it can be gone forward substrate being transported to the technology board, detects the situation whether substrate has unfilled corner earlier.
Another purpose of the present invention provides a kind of base plate processing system, and it can be when doing the mapping sensing, and whether the substrate in the dipulse governor storing box has outstanding situation, to avoid the substrate of wounding.
Another object of the present invention provides a kind of base plate processing system, and it can detect the situation whether substrate has unfilled corner earlier after substrate is taken out in the storing box.
The present invention proposes a kind of substrate transfer apparatus, comprises that main body, load-carrying unit and at least one substrate give prominence to sensor.Wherein, load-carrying unit is suitable between a position of readiness and at least one control position, moving, and has carrying surface and first end respect to one another and second end, and first end is to be connected to main body.The outstanding sensor of substrate then is to be disposed on the load-carrying unit, and is positioned at its second end.And the outstanding sensing utensil of substrate has first sensing face, its be carrying surface with load-carrying unit towards same direction, said same direction is the orientation of the accommodation space that is laminated to each other of storing box, said accommodation space is in order to store a plurality of substrates; Said substrate transfer apparatus also comprises at least one location correction sensor, be disposed on the said carrying surface of said load-carrying unit, and contiguous said first end, and the sensing face of said location correction sensor be with said carrying surface towards same direction.
The present invention proposes a kind of base plate processing system, comprises storing box and aforesaid substrate Handling device.Wherein, storing box has a plurality of accommodation spaces, in order to store a plurality of substrates.And these accommodation spaces are to be laminated to each other along an orientation, and substrate promptly is to lay respectively in the cooresponding accommodation space.In addition, first sensing face of the outstanding sensor of the carrying surface of load-carrying unit and substrate is all towards this orientation.
In preferred embodiment of the present invention, above-mentioned main body comprises a dressing plate, has first side respect to one another and second side, and load-carrying unit is to move towards the first side via the second side when control position moves to position of readiness.
In preferred embodiment of the present invention, above-mentioned substrate transfer apparatus also comprises a plurality of fragmentation sensors, is disposed on the above-mentioned dressing plate, and is adjacent to its second side.And these fragmentation sensors can the almost parallel second sides and are spaced, and corresponding to corner, substrate both sides and middle side.
In preferred embodiment of the present invention, above-mentioned substrate transfer apparatus also comprises at least one position correction unit, be disposed at by the dressing plate, and between this second side, first side.
In preferred embodiment of the present invention, above-mentioned substrate transfer apparatus also comprises a mapping sensor (mapping sensor), is disposed at second end of load-carrying unit.And the mapping sensor has second sensing face, and it is first sensing face that is approximately perpendicular to the outstanding sensor of substrate.
In preferred embodiment of the present invention, above-mentioned mapping sensor is second end that is embedded at load-carrying unit.
Base plate processing system of the present invention is in substrate transfer apparatus, to be provided with the outstanding sensor of substrate; With when load-carrying unit shines upon sensing to the substrate in the storing box; Whether inspection simultaneously has substrate excessively to protrude in outside the storing box, thereby avoids load-carrying unit at the mapping outstanding substrate of wounding in the detection process.In addition, substrate transfer apparatus of the present invention can also be provided with a plurality of fragmentation sensors, so that after substrate was taken out in the storing box, whether the inspection substrate was damaged earlier, and then guarantees all do not have fragmentation through the substrate that substrate transfer apparatus is carried on the technology board.
From the above, the present invention not only can improve the production yields of substrate effectively, more can promote the running fluency of subsequent technique.
Description of drawings
Fig. 1 is the side rough schematic of base plate processing system in one embodiment of the invention;
Fig. 2 is the schematic perspective view of the substrate transfer apparatus of Fig. 1;
Fig. 3 is the enlarged diagram of the load-carrying unit of Fig. 2;
Fig. 4 is the side rough schematic of base plate processing system in the another embodiment of the present invention;
Fig. 5 A is the mapping signal waveform sequential chart that sensor returned in one embodiment of the invention;
Fig. 5 B is the signal waveform sequential chart that the outstanding sensor of substrate is returned in one embodiment of the invention;
Fig. 6 A is the mapping signal waveform sequential chart that sensor returned in the another embodiment of the present invention;
Fig. 6 B is the signal waveform sequential chart that the outstanding sensor of substrate is returned in the another embodiment of the present invention;
Fig. 7 A to Fig. 7 C is respectively the damaged scheme drawing of substrate;
Fig. 8 A to Fig. 8 C illustrates the signal waveform sequential chart that the fragmentation sensor is returned in different embodiments of the invention respectively.
Drawing reference numeral
100: base plate processing system
101: substrate
110: storing box
112: accommodation space
120: substrate transfer apparatus
121: the first ends
122: main body
123: the second ends
124: load-carrying unit
125: carrying surface
126: substrate is given prominence to sensor
127: the first sensing face
128: the mapping sensor
129: the second sensing face
210: dressing plate
211: the first side
213: the second side
220,220a, 220b, 220c: fragmentation sensor
310a, 310b: position correction unit
320: the location correction sensor
D: distance
L: orientation
The specific embodiment
For let above-mentioned and other purposes of the present invention, feature and advantage can be more obviously understandable, hereinafter is special lifts preferred embodiment, and cooperates appended accompanying drawing, elaborates as follows.
Fig. 1 is the side rough schematic of base plate processing system in one embodiment of the invention, and Fig. 2 then is the schematic perspective view of the substrate transfer apparatus of Fig. 1.Please be simultaneously with reference to Fig. 1 and Fig. 2, base plate processing system 100 comprises storing box 110 and substrate transfer apparatus 120.Wherein, storing box 110 has a plurality of accommodation spaces 112 that are laminated to each other along orientation L, in order to store a plurality of substrates 101.And substrate 101 promptly is to lay respectively in the cooresponding accommodation space 112.
Hold the above, outstanding 126 of the sensors of substrate are to be disposed on the load-carrying unit 124, and are positioned at its second end 123, and are as shown in Figure 3.The outstanding sensor 126 of substrate has first sensing face 127, and it is that carrying surface 125 with load-carrying unit 124 is towards same direction.Specifically, first sensing face 127 of the carrying surface 125 of load-carrying unit 124 and the outstanding sensor 126 of substrate is all towards the orientation L of the accommodation space 112 of storing box 110.
In addition, substrate transfer apparatus 120 also comprises a mapping sensor (mapping sensor) 128, gives prominence to second end 123 that sensor 126 is positioned at load-carrying unit 124 equally with substrate.What deserves to be mentioned is that the mapping sensor 128 of present embodiment is second end 123 that is embedded at load-carrying unit 124, but the present invention is not limited to this.In other embodiments, mapping sensor 128 also can be second end 123 that is convexly set in load-carrying unit 124, and is as shown in Figure 4.Specifically, mapping sensor 128 has second sensing face 129, and its institute towards direction be that to give prominence to first sensing face 127 of sensor 126 vertical with substrate, just towards storing box 110.
Please refer again to Fig. 1; Load-carrying unit 124 is before the accommodation space that stretches into storing box 110 112 picks up substrate 101; Can shine upon sensing to the substrate 101 in the storing box 110 earlier; All be placed with substrate 101 whether to learn in each accommodation space 112, or obtain the relevant information of each substrate 101 according to this.Specifically; When shining upon sensing; Second end 123 of load-carrying unit 124 and the distance between the storing box 110 are D, and load-carrying unit 124 is in move along the orientation L of accommodation space 112 here, to shine upon sensing through the substrates 101 in 128 pairs of magazines of mapping sensor 110.For instance, second end 123 of load-carrying unit 124 and the distance between the storing box 110 are about 20 centimetres to 30 centimetres.
When load-carrying unit 124 when the orientation L of accommodation space 112 moves, can come the substrates 101 in the sensing storing box 110 whether unusual outstanding situation is arranged through the outstanding sensor 126 of substrate.As shown in Figure 1; When being positioned at the top of second end 123 of load-carrying unit 124 when having the outstanding accommodation spaces 112 of a plate base 101 in the storing box 110 at least; Can sense this situation through the outstanding sensor 126 of substrate; And signal is back to the control system that moves of control load-carrying unit 124, and make load-carrying unit 124 stop to move, to avoid striking outstanding substrate 101.
For making those skilled in the art understand the present invention more, casehistory is shone upon sensor to hereinafter and substrate is given prominence to the signal waveform that sensor is back to control circuit, but it is not in order to limit the present invention.
Fig. 5 A is the mapping signal waveform sequential chart that sensor returned in one embodiment of the invention, the signal waveform sequential chart that Fig. 5 B is then returned for the outstanding sensor of substrate in one embodiment of the invention.Please be simultaneously with reference to Fig. 1 and Fig. 5 A; If the substrate 101 that stores in magazine 110 all is positioned at normal position; Then at load-carrying unit 124 when the orientation L of accommodation space 112 moves; Mapping sensor 128 whenever senses a plate base 101, and the signal that it returned can correspondingly generate a pulse pattern, and the time difference between the production burst waveform is load-carrying unit 124 mobile required time between adjacent substrate 101 in succession.That is to say, as shown in Figure 1, if store in the magazine 110 6 plate bases 101 are arranged, the signal that mapping sensor 128 is returned will correspondingly generate 6 pulse patterns.Wherein, the peak value of the pulse wave of present embodiment for example is 5V.
In addition, because the substrates 101 in the magazine 110 all are positioned at normal position, the outstanding sensor 126 of substrate does not sense any different shape, so the signal waveform that it returned is that signal waveform when starting is identical.
Fig. 6 A is the mapping signal waveform sequential chart that sensor returned in the another embodiment of the present invention, the signal waveform sequential chart that Fig. 6 B is then returned for the outstanding sensor of substrate in the another embodiment of the present invention.Please be simultaneously with reference to Fig. 1, Fig. 6 A and Fig. 6 B, before the outstanding sensor 126 of substrate did not sense the substrate 101 that protrudes in magazine 110 unusually, mapping sensor 128 whenever sensed a plate base 101, and the signal that it returned can correspondingly generate a pulse pattern.When the outstanding sensor 126 of substrate sensed outstanding unusually substrate 101, the signal waveform that it returned can rise to peak value (for example being 5V), and the control system of load-carrying unit 124 promptly is to stop to move load-carrying unit 124 according to this signal.At this moment, because load-carrying unit 124 no longer continues to move along the orientation L of accommodation space 112, therefore shine upon the generation that signal that sensor 128 passed back also can the stopping pulse waveform.
With Fig. 1 is example; Storing in the magazine 110 has 6 plate bases 101, and shines upon sensor 128 behind the mapping sensing of accomplishing 3 plate bases 101, and the outstanding sensor 126 of substrate senses the 4th plate base 101 immediately has unusual outstanding situation; And stop to move load-carrying unit 124 through control system; In the signal waveforms that mapping sensor 128 is returned, 3 pulse patterns only can appear, shown in Fig. 6 A then.
From the above, substrate transfer apparatus 120 can be avoided the substrate 101 of when shining upon sensing, wounding, and then can improve the production yields of substrate.
Please once more with reference to Fig. 2, main body 122 can comprise dressing plate 210, and dressing plate 210 has first side 211 respect to one another and second side 213.Wherein, the position of readiness of load-carrying unit 124 promptly is to be positioned on the dressing plate 210.And, when load-carrying unit 124 when control position moves back to position of readiness, be that 211 move towards the first side second side 213 through dressing plate 210.
Specifically, substrate transfer apparatus 120 can also comprise a plurality of fragmentation sensors 220, and it is to be disposed on the dressing plate 210, and second end 213 of near-correction platform 210.The arrangement mode and the position on dressing plate 210 thereof that it should be noted that these fragmentation sensors 220 can adjust according to practice upper substrate 101 easy damaged parts.Because it is corner, both sides and middle side (shown in Fig. 7 A to Fig. 7 C) that present substrate 101 is easier to rent; Therefore the substrate transfer apparatus 120 of present embodiment for example is to comprise fragmentation sensor 220a, fragmentation sensor 220b and fragmentation sensor 220c; And it is almost parallel second side 213 and being spaced, but the present invention is not limited thereto.
Please be simultaneously with reference to Fig. 1 and Fig. 2, after load-carrying unit 124 picked up substrate 101 in by storing box 110, load-carrying unit 124 can 211 move towards the first side via the second side 213 of dressing plate 210, to get back to its position of readiness.In the process that moves, can check whether substrate 101 has breakage through these fragmentation sensors 220.
In detail, these fragmentation sensors 220 for example are OPTICAL SENSORSs.That is to say fragmentation sensor 220 is whether to be reflected judgement substrate 101 by substrate 101 through its light beam that is sent of sensing to have or not breakage.When fragmentation sensor 220 inspection substrates 101 had breakage, its signal of passing control system back will make substrate transfer apparatus 100 decommission, and notifies the related personnel to get rid of fragmentation with the mode of manual work.
Fig. 8 A to Fig. 8 C illustrates the signal waveform sequential chart that the fragmentation sensor is returned in different embodiments of the invention respectively.Please be simultaneously with reference to Fig. 2, Fig. 7 A and Fig. 8 A, when the substrate 101 that is picked up when load-carrying unit 124 had the damaged situation shown in Fig. 7 A, the signal that fragmentation sensor 220c is returned can correspondingly generate a pulse pattern, shown in waveform (c).Control system promptly is to stop start substrate transfer apparatus 120 according to this signal.At this; Because substrate 101 all do not have breakage at fragmentation sensor 220a and fragmentation sensor 220b institute corresponding position, so the signal waveform (a) passed back of fragmentation sensor 220a and signal waveform (b) that fragmentation sensor 220b is passed back are that signal waveform during with its startup is identical.
Can know that in like manner when the substrate 101 that is picked up when load-carrying unit 124 had the damaged situation shown in Fig. 7 B, the signal that only has fragmentation sensor 220a to be returned can generate a pulse pattern, shown in Fig. 8 B.On the other hand, when the substrate 101 that is picked up when load-carrying unit 124 had the damaged situation shown in Fig. 7 C, the signal that only has fragmentation sensor 220b to be returned can generate a pulse pattern, shown in Fig. 8 C.In other words, control system or related personnel can learn whether substrate 101 has breakage and breakage thereof according to the signal that these fragmentation sensors 220 are returned.
From the above, the present invention can avoid substrate transfer apparatus 120 that damaged substrate is transported on the technology board, and subsequent technique is impacted.What deserves to be mentioned is that the damaged degree of substrate 101 (like crack size) can receive time difference between the light beam continuously according to the moving velocity of load-carrying unit 124 and fragmentation sensor 220 and push away.
In addition, substrate transfer apparatus 100 also disposes at least one group of position correction unit on dressing plate 210 sides, like 310a and the 310b that Fig. 2 indicated. Position correction unit 310a and 310b are between the first side 211 and second side 213 of dressing plate 210; In order to proofread and correct the putting position of 124 substrates that pick up back 101 of load-carrying unit on load-carrying unit 124, impaired in handling process because of the putting position mistake to avoid substrate 101.Specifically, position correction unit 310a for example is a left and right sides position correction unit, and position correction unit 310b for example is the front and back position correcting unit.That is to say that position correction unit 310a is in order to the position of translation substrate 101 in the left and right sides on load-carrying unit 124, position correction unit 310b then is in order to the position of translation substrate 101 in front and back on load-carrying unit 124.
On the other hand, substrate transfer apparatus 100 can also comprise at least one location correction sensor 320, and it is that to be disposed at load-carrying unit 124 be on the carrying surface 125, and first end 121 of contiguous load-carrying unit 124.And, the sensing face of location correction sensor 320 be with carrying surface 125 towards same direction.In the present embodiment, substrate transfer apparatus 100 for example is to comprise two location correction sensors 320, and it is respectively adjacent to the position is the dual-sides between first end 121 and second end 123 at load-carrying unit 124.Please be simultaneously with reference to Fig. 1 and Fig. 2; When in load-carrying unit 124 stretches into storing box 110, picking up substrate 101; Can check whether substrate 101 has the phenomenon of rotation displacement through location correction sensor 320, revise it and get the sheet position to judge whether load-carrying unit 124 need be rotated.
In sum; Base plate processing system of the present invention is in substrate transfer apparatus, to be provided with the outstanding sensor of substrate; With when load-carrying unit shines upon sensing to the substrate in the storing box; Whether inspection simultaneously has substrate excessively to protrude in outside the storing box, thereby avoids load-carrying unit at the mapping outstanding substrate of wounding in the detection process.Hence one can see that, and the present invention can improve the production yields of substrate effectively.
In addition, substrate transfer apparatus of the present invention can also be provided with a plurality of fragmentation sensors, so that after substrate was taken out in the storing box, whether the inspection substrate was damaged earlier, and then guarantees all do not have fragmentation through the substrate that substrate transfer apparatus is carried on the technology board.Thus, can promote the running fluency of subsequent technique, and avoid taking place the technology board and incur loss through delay the technology problem in man-hour because of need shutdown eliminating fragmentation.
Though the present invention discloses as above with preferred embodiment; Right its is not in order to limit the present invention; Any those skilled in the art; Do not breaking away from the spirit and scope of the present invention, when can doing a little change and retouching, so protection scope of the present invention claims scope of before looking, attaching defines and is as the criterion.
Claims (8)
1. a substrate transfer apparatus is characterized in that, said substrate transfer apparatus comprises:
One main body;
One load-carrying unit has a carrying surface, one first end and one second end, and wherein said first end is connected to said main body, and said second end is with respect to said first end, and said load-carrying unit is suitable between a position of readiness and at least one control position, moving; And
At least one substrate is given prominence to sensor; Be disposed on the said load-carrying unit and be positioned at said second end; And the outstanding sensing utensil of said substrate has one first sensing face; With said carrying surface towards same direction, said same direction is the orientation of the accommodation space that is laminated to each other of storing box, said accommodation space is in order to store a plurality of substrates;
Said substrate transfer apparatus also comprises at least one location correction sensor, be disposed on the said carrying surface of said load-carrying unit, and contiguous said first end, and the sensing face of said location correction sensor be with said carrying surface towards same direction;
Said main body comprises a dressing plate; Have a first side and a second side; Said first side is with respect to said second side, and said load-carrying unit is to move towards said first side via said second side when said control position moves to said position of readiness;
Said substrate transfer apparatus also comprises a plurality of fragmentation sensors, is disposed on the said dressing plate, and contiguous said second side; Said these fragmentation sensors are said second sides of almost parallel and being spaced, and corresponding to corner, substrate both sides and middle side.
2. substrate transfer apparatus as claimed in claim 1 is characterized in that said substrate transfer apparatus also comprises at least one position correction unit, is disposed at by the said dressing plate, and between said first side and said second side.
3. substrate transfer apparatus as claimed in claim 1; It is characterized in that; Said substrate transfer apparatus also comprises a mapping sensor; Be disposed at said second end of said load-carrying unit, and said mapping sensor has one second sensing face, be approximately perpendicular to said first sensing face of the outstanding sensor of said substrate.
4. substrate transfer apparatus as claimed in claim 3 is characterized in that, said mapping sensor is said second end that is embedded at said load-carrying unit.
5. a base plate processing system is characterized in that, said base plate processing system comprises:
One storing box has a plurality of accommodation spaces, and in order to storing a plurality of substrates, wherein said these accommodation spaces are laminated in each other along orientations, and said these substrates lay respectively at cooresponding said these accommodation spaces in one of them; And
One substrate transfer apparatus comprises:
One load-carrying unit is suitable between a control position and a position of readiness, moving, and has a carrying surface and one first end respect to one another and one second end, and wherein said carrying surface is towards said orientation;
One main body is connected to said first end of said load-carrying unit, is suitable for driving said load-carrying unit, so that said second end of said load-carrying unit is suitable for moving along said orientation apart from said storing box one mapping distance part; And
At least one substrate is given prominence to sensor, be disposed on the said load-carrying unit and be positioned at said second end, and the outstanding sensing utensil of said substrate has one first sensing face, towards said orientation;
Said substrate transfer apparatus also comprises at least one location correction sensor, be disposed on the said load-carrying unit, and contiguous said first end, and the sensing face of said location correction sensor be with said carrying surface towards same direction;
Said main body comprises a dressing plate; Have a first side and a second side; Said first side is with respect to said second side, and said load-carrying unit is to move towards said second side via said first side when said position of readiness moves to said control position;
Said substrate transfer apparatus also comprises a plurality of fragmentation sensors, is disposed on the said dressing plate, and contiguous said second side; Said these fragmentation sensors are said second sides of almost parallel and being spaced, and corresponding to corner, substrate both sides and middle side.
6. base plate processing system as claimed in claim 5 is characterized in that said substrate transfer apparatus also comprises at least one position correction unit, is disposed at by the said dressing plate, and between said first side and said second side.
7. base plate processing system as claimed in claim 5; It is characterized in that; Said substrate transfer apparatus also comprises a mapping sensor; Be disposed at said second end of said load-carrying unit, and said mapping sensor has one second sensing face, be approximately perpendicular to said first sensing face of the outstanding sensor of said substrate.
8. base plate processing system as claimed in claim 7 is characterized in that, said mapping sensor is said second end that is embedded at said load-carrying unit.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2009101672058A CN101633441B (en) | 2009-08-19 | 2009-08-19 | Substrate processing system and substrate carrying device thereof |
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| CN2009101672058A CN101633441B (en) | 2009-08-19 | 2009-08-19 | Substrate processing system and substrate carrying device thereof |
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| CN101633441A CN101633441A (en) | 2010-01-27 |
| CN101633441B true CN101633441B (en) | 2012-05-23 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5704871B2 (en) * | 2010-09-16 | 2015-04-22 | 東京エレクトロン株式会社 | Conveying device, processing system, control method for conveying device, and computer-readable storage medium |
| TWI433257B (en) * | 2012-01-17 | 2014-04-01 | Chipmos Technologies Inc | Wafer cassette |
| CN102674007B (en) * | 2012-04-27 | 2015-05-20 | 深圳市华星光电技术有限公司 | Method for carrying liquid crystal display panel and carrying device |
| CN113232020B (en) * | 2021-05-14 | 2023-03-21 | 山西光兴光电科技有限公司 | System and method for correcting film taking position of film taking robot |
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| EP0975009A1 (en) * | 1998-07-22 | 2000-01-26 | Asm Japan K.K. | Wafer transfer mechanism |
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| CN101633441A (en) | 2010-01-27 |
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