TW571378B - Slot detector of cassette for substrate - Google Patents
Slot detector of cassette for substrate Download PDFInfo
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- TW571378B TW571378B TW091124610A TW91124610A TW571378B TW 571378 B TW571378 B TW 571378B TW 091124610 A TW091124610 A TW 091124610A TW 91124610 A TW91124610 A TW 91124610A TW 571378 B TW571378 B TW 571378B
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- substrate
- cassette
- sensor
- slot
- arm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0084—Programme-controlled manipulators comprising a plurality of manipulators
- B25J9/0087—Dual arms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G61/00—Use of pick-up or transfer devices or of manipulators for stacking or de-stacking articles not otherwise provided for
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
Description
571378 五、發明說明(1) β 【發明說明】 【發明所屬技術領域] - 本發明係關於一種基板用卡匣之槽口檢測裝置,其係 用以檢測收納半導體晶圓、液晶顯示器(LCD )、電漿顯 示面板(PDP) 、FED等平面顯示器(FPD)的玻璃基板之 基板用卡匣之槽口。 【發明所欲解決之問題】 橫置型基板用卡匣的構造係如第8圖所示,基板用卡 E 100的内部於上下方向排列有多數供收納基板2〇〇用的槽 口 1 0 1。 φ 然而’即使是用以收納相同尺寸的基板2 〇 〇之基板用 卡H100 ’各基板用卡匣製造商的規格式樣也不同,而且 槽口形狀及槽口間的間距也依各製造商而各有不同,而 且’即使是相同製造商所製造的基板用卡匣1〇〇,其槽口 彼此間的間距在誤差範圍内也具有差異。 因此’以往利用基板搬送機器人將基板200搬入或搬 出於基板用卡匣1 0 0時,每次要更換基板用卡匣丨〇 〇即必須 對基板搬送機器人進行教示。 ' 本發明係有鑒於上述之習知問題點而開發者,其目的_ 在於藉由檢測基板用卡匣的槽口,以便更換基板用卡匣時· 可不用再對基板搬送機器人進行繁瑣的教示。 【解決問題之手段】 本發明基板用卡匣之槽口檢測裝置,其特徵為:具備 可朝基板用卡ϋ的内外前進後退且可順沿基板用卡匡/内的571378 V. Description of the invention (1) β [Explanation of the invention] [Technical field to which the invention belongs]-The present invention relates to a slot detection device for a substrate cassette, which is used to detect a semiconductor wafer and a liquid crystal display (LCD). , Plasma display panel (PDP), FED and other flat panel display (FPD) glass substrate substrate slot for slot. [Problems to be Solved by the Invention] As shown in FIG. 8, the structure of the horizontal-type substrate cassette is such that a large number of slots 1 0 1 for accommodating the substrate 200 are arranged inside the substrate card E 100 in the vertical direction. . φ However, 'Even if it is a board card H100 for housing the same-size board 2000', the specifications of each cassette manufacturer are different, and the shape of the notch and the distance between the notches also depend on each manufacturer. Each of them is different, and even if the substrate cassette 100 manufactured by the same manufacturer has a gap between its notches within an error range. Therefore, in the past, when the substrate 200 was transferred into or out of the substrate cassette 100 by the substrate transfer robot, the substrate transfer robot had to be taught every time the substrate cassette was changed. '' The present invention was developed in view of the conventional problems mentioned above, and its purpose is to detect the slot of the substrate cassette so that the substrate cassette can be replaced without the need for complicated teaching of the substrate transfer robot. . [Means for solving the problem] The slot detection device of the substrate cassette according to the present invention is characterized in that it is provided with a device capable of advancing forward and backward toward the inside and outside of the substrate card holder, and can smoothly follow the substrate card inside / outside.
第6頁 571378Page 571 378
多數槽口之排列方向移動的感應器,而可依據上述感應 在上述基板用卡匣内順沿上述槽口排列方向移動時的^; 4吕?虎,來檢測上述基板用卡匣内的各槽口位置。 上述感應器的構造包括:槽口位置檢測用感^應器,用 以檢測由上述多數槽口所形成之重複凹凸形狀;卡匣起點 確認感應器,用以檢測在上述基板用卡匣的壁面上,亦^ 上述槽口排列方向上位於起點側之壁面的存在與否丨及^ 匣終點確認感應器,用以檢測在上述基板用卡^的壁面— 上,亦即上述槽口排列方向上位於終點側之壁面的^在與 否。 /、 口上述槽口位置檢測用感應器、上述卡匣起點確認感應 器及上述卡ϋ終點確認感應器係設置於雙臂式基板搬 ^ 器久之檢測用臂部的前蟑部。 上述檢測用臂部具有墓板感應器,而該基板感應器係 用以檢測上述基板用卡匣内是否具有基板。 抑上述槽口位置檢測用感應器、上述卡匣起點確認感應 器及上述卡Ε終點確認感應器係設置於單臂式基板搬送機 器人之搬送用臂部的前端部。 上述搬送用臂部具有基板感應器,而該基板感應器係 用以檢測上述基板用卡匣内是否具有基板。 【發明之實施型態】 以下’參佐圖面說明本發明之實施型態。 第1圖係本發明第1實施型態之雙臂式基板搬送機器人 的斜視圖’第2圖係槽口位置檢測用感應器的動作說明圖Most sensors that move in the alignment direction of the notches can be moved in the above-mentioned notch alignment direction within the cassette for the substrate according to the above-mentioned induction; 4Lu? To detect the position of each slot in the substrate cassette. The structure of the above-mentioned sensor includes: a slot position detecting sensor for detecting a repeated concave-convex shape formed by the above-mentioned plurality of slots; a cassette starting point confirmation sensor for detecting a wall surface of the above-mentioned substrate cassette In addition, the presence or absence of the wall surface at the starting point side in the above-mentioned slot arrangement direction and the box end confirmation sensor are used to detect the wall surface of the substrate card ^, that is, in the above-mentioned slot arrangement direction. The presence or absence of the wall surface on the end side. / 、 The sensor for detecting the slot position, the sensor for detecting the start point of the cassette, and the sensor for detecting the end point of the card are provided on the front cock part of the arm for detecting the two-arm type substrate carrier. The detection arm has a tombboard sensor, and the substrate sensor is used to detect whether a substrate is contained in the substrate cassette. The notch position detection sensor, the cassette start point confirmation sensor, and the card E end point confirmation sensor are provided at a front end portion of a transfer arm portion of a single-arm substrate transfer robot. The transfer arm has a substrate sensor, and the substrate sensor is used to detect whether a substrate is contained in the substrate cassette. [Implementation Mode of the Invention] The embodiment of the invention will be described below with reference to the drawings. Fig. 1 is a perspective view of a dual-arm substrate transfer robot according to a first embodiment of the present invention. Fig. 2 is an operation explanatory diagram of a notch position detection sensor.
第7頁 571378 五、發明說明(3) ' " " 第3圖係卡匣起點確認感應器及卡匣終點確認感應器的 作說明圖,第4圖係槽口檢測裝置的動作說明圖,第5圖 係本發明第2實施型態之單臂式基板搬送機器人的槽口檢 :裝置之動作說明圖,第6圖係槽口位置檢測用感應器、 w匣起點確認感應器及卡匣終點確認感應器安裝於手部之 况明圖’第7圖係各種搬送方式圖,第8圖係基板用卡匣的 斜視圖。 第1圖至第4圖中,第i實施型態之雙臂式基板搬送機器 人1的構成方式係就業已公知之水平多關節型雙臂式基板 搬送機器人中丄將兩具水平多關節型臂部(搬送用臂部)_ 2 3中之一搬送用臂部2換成檢測用臂部。檢測用臂部2具 備第2臂2 1及第1臂2 2 ’彼等係與搬送用臂部3的第2臂3 i及 第1J32具有相同構造且可進行相同動作,而在該第 的刖端上連結有與搬送用臂部3的手部33相對應且可進行 與該手部33相同動作之感應器保持部23。搬送用臂部3的 第2臂31及檢測用臂部2的第2臂21係安裝於可對機器人丨的 本體邛4作上下升降軸方向)的共用機台5。在該本體 44的内部’内设有用以檢測機台5的高度位置之編碼器 6 〇 在感應器保持部23的前端部上設置有:槽口位置檢測籲: 3應器51、卡ϋ起點確認感應器52及卡厘終點確認感應-器5 而且,在感應器保持部2 3的基部上,設置有用以避 免與保持於搬送用臂部3的手部33之基板2〇〇發生相互干擾-的U字形構件24。而在該υ字形構件24上設有基板感應器,_Page 7 571378 V. Description of the invention (3) '" " Figure 3 is an explanatory diagram of the cassette start point confirmation sensor and the cassette end point confirmation sensor, and Figure 4 is an operation illustration of the slot detection device Fig. 5 is a slot inspection of a single-arm substrate transfer robot according to the second embodiment of the present invention: an operation diagram of the device, and Fig. 6 is a notch position detection sensor, a w-box starting point confirmation sensor, and a card. A diagram showing the state of the end-of-box detection sensor installed on the hand. FIG. 7 is a perspective view of various conveying methods, and FIG. 8 is a perspective view of a substrate cassette. In FIGS. 1 to 4, the configuration of the dual-arm type substrate transfer robot 1 of the i-th embodiment is a horizontal multi-joint type dual-arm type substrate transfer robot that is known for employment. Part (transport arm part) _ 2 One of the transport arm part 2 is replaced with a detection arm part. The detection arm portion 2 includes a second arm 21 and a first arm 2 2 'which are the same as the second arm 3 i and the first J32 of the transport arm portion 3 and can perform the same operation. A sensor holder 23 corresponding to the hand 33 of the transfer arm 3 and capable of performing the same operation as the hand 33 is connected to the butt end. The second arm 31 of the transport arm portion 3 and the second arm 21 of the detection arm portion 2 are mounted on a common machine 5 that can be used to move the main body 邛 4 of the robot 丨 in the direction of the vertical axis). An encoder 6 for detecting the height position of the machine 5 is provided inside the main body 44. The front end of the sensor holding section 23 is provided with a notch position detection call: 3 responder 51, and a click start point. Confirmation sensor 52 and Cali end point confirmation sensor-5 The base of the sensor holding portion 23 is provided to prevent interference with the substrate 200 held by the hand 33 of the transfer arm portion 3 -U-shaped member 24. A substrate sensor is provided on the υ-shaped member 24,
第8頁 571378Page 8 571378
槽口位置檢測用感應器5 1係由例如發光元件及森 件所形成的光反射式感應器所構成,而且如第2圖所〜先: 使用於藉由檢測基板用卡E100 (參佐第8圖) :也 1。01的重複凹凸形狀,以檢測出各槽口1〇1的上下方向= 卡匠起點確認感應器52係由例如發光元件及 所形成的光反射式感應器所構成,而且如第3圖先/件 用於令檢測用臂部2在基板用卡匿1〇〇内下降時,藉由也^吏 基板用卡匣100之下端壁面1〇2的存在盥 曰檢測 臂部2在基板用卡㈣〇内的下限位^。、否以確遇檢測用 卡匿終點確認感應器53係由例如發光元件及為 所形成的光反射式感應器所構成’而且如第又:件 用於令檢測用臂部2在基板用卡匣1〇〇内上 ^也使 基板用卡匣100之上端壁面103的存在盥否,以檢測 臂部2在基板用卡匡⑽内的上限位置。'否i"確§忍檢測用 其次,參佐第4圖說明如上述地構成之 送機器人1的一動作例。而且,該動作彳 土 _由裝載側卡…卡匡)1〇。二乍;=:將基板 卡昆)1〇〇Β内之作業。 #至卸載侧卡E (空 基板搬送機器人1係於實卡E100A的前 測用臂部2呈疊置的狀態’一邊令機台5朝上彳置々檢 一邊藉由基板感應器54來檢測實卡Ε1〇〇Α = = ? ’ 200 (參佐第4圖)。 疋否具有基板The notch position detection sensor 51 is composed of, for example, a light-reflective sensor formed by a light-emitting element and a forest element, and is as shown in FIG. 2 to first: used for detecting a substrate card E100 (refer to Section 1) (Figure 8): 1.01 repeats the concave-convex shape to detect the vertical direction of each slot 101. The cardmaker's starting point confirmation sensor 52 is composed of, for example, a light-emitting element and a light-reflective sensor formed. In addition, as shown in FIG. 3, when the detection arm 2 is lowered within the substrate card 100, the detection arm is cleaned by the presence of the end wall surface 102 below the substrate cassette 100. The lower limit of the portion 2 within the substrate card ^. 、 No, the detection end detection sensor 53 for card detection is composed of, for example, a light-emitting element and a light-reflective sensor formed there. The upper position of the cassette 100 also allows the presence of the upper end wall surface 103 of the substrate cassette 100 to be detected to detect the upper limit position of the arm portion 2 in the substrate cassette. "No" " for tolerance detection. Next, an example of the operation of the robot 1 configured as described above will be described with reference to Fig. 4. Moreover, this operation is performed by the load side card (Ka Kuang) 10. Erzha; =: the substrate Ka Kun) 100b operation. # 至 Unloading side card E (The empty board transfer robot 1 is stacked on the front measurement arm 2 of the real card E100A, and the board 5 is inspected by the board sensor 54 while the machine 5 is placed upward. Real card Ε1〇〇Α = =? 200 (see Figure 4). Does it have a substrate?
第9頁 571378 五、發明說明(5) 右上述之實卡匣内基板有無檢測作業檢測出實卡匣 100A内具有基板200,則基板用搬送機器人 :2呈疊置的狀態下,移動至空卡E1_的前方在位檢/, 台5朝上下方向移動,一邊藉由基板感應器54來 ,工卡H100B内是否具有基板200。因為若在對… 十仃空卡匿内基板有無檢測作業前’即開始進行如後 ΐ 位置檢測作業,則在空卡㈣⑽内具有基板200 ί :二1生基板200及檢測用臂部2互相干擾的不良情形, 匣内基板有無檢測作業可避免此種的不良情形, 而可良好地進行口位置檢測作業。 :上述之空卡&内基板有無檢測作業檢測出空卡匣 100Β内沒有基板200時,則基板用搬送機器人丨會在旋轉半 δ 臂部2 (對應於第3圖示的實線狀態 丄、令機台5持續下降,直到卡匣起點確認感應器 52 $測到空卡g1〇〇B的下端壁面1〇2時才停止(對應於第3 =不之-點鍵線的狀態)。繼之,令機台5上升,並藉 由^ 口位置檢測用感應器51持續檢測多數槽口 1〇1的凹凸 2 ϋ佐第4圖(B ))。於卡匣終點確認感應器53檢測 mB的上端壁面1〇3時,才停止機台5的上升(對 應於第3圖所示之兩點鏈線的狀態)。 e ! ΛΑ上^述#之槽口位置檢測作業中,槽口位置檢測用感應器 5^的尚度位置係依據機台5的高度位置作單一定義的設 由於機台5的高度位置係可利用本體部4的内部之編碼 為6來檢測,戶斤以槽口位置檢測用感應器51的高度位置可Page 9 571378 V. Description of the invention (5) The presence or absence of the detection of the substrate in the real cassette on the right shows that there is a substrate 200 in the real cassette 100A, and the substrate transfer robot: 2 is stacked and moves to the empty state. The front of the card E1_ is checked, and the stage 5 is moved up and down, and the board sensor 54 is used to determine whether there is a board 200 in the work card H100B. Because if the position detection operation is performed before the detection of the presence or absence of the internal substrate of the ten-card empty card, the substrate 200 is included in the empty card. The two substrates 200 and the detection arm 2 are mutually connected. In the case of interference, the presence or absence of the detection operation of the substrate in the cassette can avoid such an undesirable situation, and can perform the mouth position detection operation well. : When the above-mentioned empty card & inner substrate presence detection operation detects that there is no substrate 200 in the empty cassette 100B, the substrate transfer robot 丨 will rotate half of the δ arm 2 (corresponding to the solid line state shown in Figure 3) 2. Make the machine 5 continue to descend until the start of the cassette confirmation sensor 52 $ detects the bottom wall surface 1002 of the empty card g100B (corresponding to the state of the 3rd = no-dot point line). Next, the machine 5 is raised, and the unevenness 2 of the plurality of notches 101 is continuously detected by the sensor 51 for detecting the position of the opening 2 (see FIG. 4 (B)). When the upper end wall surface of the mB is detected by the cassette end confirmation sensor 53, the ascent of the machine 5 is stopped (corresponding to the state of the two-point chain line shown in FIG. 3). e! ΛΑ 上 ^ 述 # In the slot position detection operation, the position of the slot position detection sensor 5 ^ is a single definition based on the height position of the machine 5. Since the height position of the machine 5 is It is detected by the internal code of the main body part 4 as 6, and the household weight can be determined by the height position of the notch position detection sensor 51.
第10頁 571378 五、發明說明(6) 藉由編碼器6來檢測。再者,揭 輸出對應於多數槽口10=重;二置f測用感應器51會 (例如··凹部為高位準,凸邻=广狀之脈衝串列信號 Λ m , 1人 凸口P則為低位準的脈衝串列信號 )。因此,可令編碼器6所測得 广甲力σ y姑 丨j传之槽口位置檢測用感應器 ^ 1的间度位置及槽口位置檢測用式 一斟一从如方灿處 像列用感應益5 1的脈衝串列信號 ί彳互對應’且可檢測出各槽口 1 01的高度位置 (換言之,槽口的段數)。而’咖卜 J J 而該空卡匣100B之各槽口 101 ,兩度位置係在機器人本體部4的記憶裝置中記憶成空卡 匣100B的槽口資料,之後,可在 .^ ^ ^ ^ μ 』在將基板200由實卡匣1〇〇Α 内移載至空卡H100B内時可加以利用。 丨 :之,基板搬送機器人!利用搬送用臂部3將基板2〇〇 仗貫卡匣10 0Α内取出後直接移載至空卡匡1〇〇Β内的預定槽 口 101,或者,暫將基板200搬送至處理裝置後,再將處理 過後的基板200移載至空卡匣1〇〇β内的預定槽口 1〇1。 ^如上所說明,第1實施型態之雙臂式基板搬送機器人j 係具有用以檢測基板用卡匣丨〇〇的槽口丨〇 j之裝置,而該栌 口檢測裝置係具備可朝基板用卡匣丨〇〇的内外前進後退Χ且曰 可順=基板用卡£100内的多數卡Ε1〇1之排列方向移動的 感應器51至53 ;而可依據感應器51至53在基板用卡匣1〇〇 内順沿槽口排列方向移動時的感應器輸出信號來檢測基板< 用卡H 100内的各槽口位置。因此,在使用新的基板用卡 匣1 00時,即使不像以往那樣對基板搬送用機器人丨進行繁 瑣的教示,亦可自動檢測基板用卡匣丨〇 〇的各槽口位置, 如此,卡匣使用之前的作業即可以自動化。 第11頁 571378 發明說明(7) 其久’因為感應為5 1至5 3的構造包括:槽口位置檢測 用感應器5 1,用以檢測由多數槽口 1 〇 1所形成的重複凹凸 形狀;卡匣起點確認感應器52,用以檢測在基板用卡匣 1 0 0的壁面上,亦即槽口排列方向上位於起點侧之壁面 (下端壁面1 0 2 )的存在與否;及卡匣終點確認感應器 53,用以檢測在基板用卡匣丨00的壁面上,亦即槽口於排 列方向上位於終點側之壁面(上端壁面丨〇3 )的存在與 否,故可藉由各基板用卡匣1〇〇 —邊確認不同的起點位置 (下知位置)及終點位置(上端位置),一邊檢測各槽口Page 10 571378 V. Description of the invention (6) It is detected by the encoder 6. In addition, the exposed output corresponds to most of the notches 10 = heavy; two sets of f-measurement sensors 51 will (for example, the concave part is at a high level, and the convex neighbor = the wide-shaped pulse train signal Λ m, and one convex P Is a low-level pulse train signal). Therefore, it is possible to make the position of the slot position detection sensor ^ 1 measured by the encoder 6 measured by the encoder 6 σ y y 丨 j and the position of the slot position detection method from Fang Can at the same time. The pulse train signals of the induction gain 5 1 correspond to each other and the height position of each slot 1 01 can be detected (in other words, the number of segments of the slot). The 'cabb JJ' and each slot 101 of the empty cassette 100B are stored in the memory device of the robot body 4 as the slot data of the empty cassette 100B, and can be stored in. ^ ^ ^ ^ μ "can be used when the substrate 200 is transferred from the real cassette 100A to the empty card H100B.丨: Yes, the substrate transfer robot! Use the transfer arm 3 to take out the substrate 200 from the magazine 100A and directly transfer it to the predetermined slot 101 in the empty card 100B, or after temporarily transferring the substrate 200 to the processing device, Then, the processed substrate 200 is transferred to a predetermined slot 101 in the empty cassette 100β. ^ As explained above, the dual-arm substrate transfer robot j of the first embodiment is a device having a slot 丨 〇j for detecting a substrate cassette 丨 〇〇, and the mouth detection device is provided with a substrate facing Use the inside and outside of the cassette 丨 〇〇 to move forward and backward X, that is, the sensors 51 to 53 that can be moved in the direction of the arrangement of the majority of the cards E1101 in the card for the substrate £ 100; The sensor outputs signals when the cassette 100 moves in the slot arrangement direction to detect the position of each slot in the substrate < card H 100. Therefore, when a new substrate cassette 100 is used, it is possible to automatically detect the position of each slot of the substrate cassette 丨 oo without tedious teaching of the substrate transfer robot 丨 as in the past. Operations before the cartridge is used can be automated. P.11 571378 Description of the invention (7) Its structure is 5 1 to 5 3 because the sensor includes a slot position detection sensor 5 1 to detect the repeated concave-convex shape formed by a large number of slots 1 〇 1 ; The start point confirmation sensor 52 of the cassette is used to detect the presence or absence of the wall surface (lower end wall surface 10 2) on the wall side of the substrate cassette 100, that is, the starting point side in the slot arrangement direction; and the card; The end-of-box confirmation sensor 53 is used to detect the presence or absence of the wall surface (top wall surface 丨 〇3) of the slot on the end side in the alignment direction of the substrate cassette 00, so that the Each substrate cassette 100—Check the notches while checking the different starting positions (lower known positions) and end positions (upper positions).
的位置。 又’由於槽口位置檢測用感應器51、卡匣起點確認感 應器52及卡匣終點確認感應器53係設置於雙臂式基板搬送 機器人之檢測用臂部2的前端部,故可將習知雙臂式基板 搬送機器人的兩具臂部(搬送用臂部)中的一臂部換成檢 測用臂部2 ’利用一台搬送機器人1即可同時發揮基板搬送 及槽口檢測的兩個功能。 此外,檢測用臂部2係具備基板感應器54,而由於該 基板感應器5 4係用以檢測基板用卡匣1 〇 〇内是否具有基板 2〇〇,所以若基板用卡匣1〇〇内具有基板2〇〇時,藉由檢測 槽口即可避免檢測用臂部2與基板2 00發生互相干擾的不良_ 情況。 繼之,說明第2實施型態。 第5圖至第6圖中,第2實施型態之單臂式基板搬送機 器人1係與習知的水平多關節型雙臂式基板搬送機器人同s position. Also, since the notch position detection sensor 51, the cassette start confirmation sensor 52, and the cassette end confirmation sensor 53 are provided at the front end of the detection arm 2 of the two-arm substrate transfer robot, it is possible to use Knowing that one of the two arms (transfer arm) of the two-arm substrate transfer robot is replaced with the detection arm 2 'With one transfer robot 1, both substrate transfer and slot detection can be performed simultaneously. Features. In addition, the detection arm 2 is provided with a substrate sensor 54, and since the substrate sensor 54 is used to detect whether the substrate cassette 100 is included in the substrate cassette 100, the substrate cassette 100 is used. When the substrate 200 is provided inside, the detection notch can avoid the problem that the detection arm 2 and the substrate 200 interfere with each other. Next, a second embodiment will be described. In FIGS. 5 to 6, the single-arm type substrate transfer robot of the second embodiment is the same as the conventional horizontal multi-joint dual-arm type substrate transfer robot.
第12頁 571378 五、發明說明(8) ---- Ϊ卷ί備由第2臂部31、第1臂部32及手部33所構成的搬送 =身部3,且該第2臂部31係安裝於可對機器人丨的本體部4 . 上下方向(Ζ軸方向)升降的共用機台5。而在本體部4 的内部,内設有用以檢測機台5的高度位置之編碼器6。 如第6圖所不,在手部33的前端部設置有槽口位置檢 測用。感應器51、卡匣起點確認感應器52及卡匣終點確認感 應器53。又,如第5圖所示,在手部33的基部設有基板 應器54。 槽、口位置檢測用感應器5 1與第1實施型態之槽口位置檢 測用感應器51具有相同的構造,其係使用於藉由檢測基板_ 用卡匣1 0 0内的多數槽口 1 〇 1的重複凹凸形狀以檢測各槽口 101的上下方向位置。 卡ϋ起點確認感應器5 2與第1實施型態之卡匣起點確認感 應器52具有相同的構造,並使用於令搬送用臂部3在基板 用卡匡100内下降時,藉由檢測基板用卡匣1〇〇之下端壁面 102的存在與否,以確認搬送用臂部3在基板用卡匣1〇()内 的下限位置。 卡匣終點確認感應器53具有與第1實施型態之卡匣終點確 g忍感應器5 3相同的構造’並使用於令搬送用臂部3在基板龜 用卡匣100内上升時,藉由檢測基板用卡匣丨00之上端壁面: 103的存在與否,以確認基板用卡匣1〇〇内之搬送用臂部3 的上限位置。 其次,參佐第5圖說明單臂式基板搬送機器人1的一動 -作例。而且,該動作例係對應於將基板2 〇 〇由裝載側卡匡Page 12 571378 V. Description of the invention (8) ---- The roll is provided by the second arm portion 31, the first arm portion 32, and the hand portion 33 = body portion 3, and the second arm portion 31 is mounted on a common machine 5 that can lift and lower the main body 4 of the robot 丨. An encoder 6 for detecting the height position of the machine 5 is provided inside the main body 4. As shown in Fig. 6, a notch position detection is provided at the front end portion of the hand 33. The sensor 51, the cassette start confirmation sensor 52, and the cassette end confirmation sensor 53. Further, as shown in Fig. 5, a substrate reactor 54 is provided at the base of the hand 33. The slot and mouth position detection sensor 51 has the same structure as the notch position detection sensor 51 of the first embodiment, and is used to detect most of the slots in the substrate_use cassette 100 The repeating concave-convex shape of 101 is used to detect the vertical position of each notch 101. The card start point confirmation sensor 5 2 has the same structure as the cassette start point confirmation sensor 52 of the first embodiment, and when the transport arm portion 3 is lowered in the substrate card 100, the substrate is detected. The presence or absence of the end wall surface 102 below the cassette 100 is used to confirm the lower limit position of the transfer arm 3 in the substrate cassette 10 (). The cassette end point confirmation sensor 53 has the same structure as the cassette end point tolerance sensor 5 3 of the first embodiment type, and is used to raise the transport arm portion 3 in the substrate tortoise cassette 100. By detecting the presence or absence of the end wall surface of the substrate cassette №00: 103, the upper limit position of the transport arm portion 3 in the substrate cassette 100 is confirmed. Next, referring to Fig. 5, an example of an operation of the single-arm substrate transfer robot 1 will be described. In addition, this operation example corresponds to removing the substrate 200 from the loading side card.
第13頁 571378 五、發明說明(9) (貫卡ϋ)100Α内移至卸載側卡匣(空卡匣)ι〇〇Β内之作 業。 基板搬送機器人1係於實卡匣i 00A的前方位置,令搬 送用臂部3呈疊置的狀態下,一邊令機台5朝上下方向移 動’ 一邊藉由基板感應器54來檢測實卡匣ιοοΑ内是否具有 基板200 (參佐第5圖)。 〃 若上述之實卡匣内基板有無檢測作業檢測出實卡匣 100A内具有基板2〇〇,則基板用搬送機器人1會在搬送用臂 部3呈疊置的狀態下,移動至空卡匣1〇〇8的前方位置,一 邊令機台5朝上下方向移動,一邊藉由基板感應器54來檢籲 測空卡ϋΙΟΟΒ内是否具有基板2〇〇。因為若在對空卡匡 1 0 0 Β進行空卡匣内基板有無檢測作業前,即開始進行後述 之槽口位置檢測作業,則當空卡匣100β内具有基板2〇〇 時,則會發生基板200及搬送用臂部3互相干擾的不良情 形,故此卡匣内基板有無檢測作業可避免此種的不良情 形’而可良好地進行槽口位置檢測作業。 若上述之空卡匣内基板有無檢測作業檢測出空卡匣 100Β内沒有基板200時,則基板用搬送機器會在旋轉半 圈之後,伸出搬送用臂部3以使手部33進入空卡匣1〇〇β 内。接著,令機台5持續下降,直到卡匣起點確認感應器 52檢測到空卡匣100B的下端壁面1〇2時才停止。繼之,令 機台5上升,並藉由槽口位置檢測用感應器5丨持續檢測多 數槽口 1 0 1的凹凸形狀。於卡匣終點確認感應器53檢測到. 空卡S100B的上端壁面103時,才停止機台5的上升。Page 13 571378 V. Description of the invention (9) The job of moving the inside of 100A to the unloading side cassette (empty cassette) ι〇〇Β. The substrate transfer robot 1 is positioned in front of the real cassette i 00A, and the transport arm 3 is stacked, and the real cassette is detected by the substrate sensor 54 while moving the table 5 in the vertical direction. ιοοΑ Whether there is a substrate 200 (see Fig. 5). 〃 If the above-mentioned detection operation of the substrate in the real cassette detects that there is a substrate 200 in the real cassette 100A, the substrate transfer robot 1 will move to the empty cassette with the transfer arm 3 being stacked. In the forward position of 008, the substrate sensor 54 is used to detect whether there is a substrate 200 in the empty card 一边 100B while moving the machine 5 in the vertical direction. This is because if the notch position detection operation described below is started before the empty card cassette 1 0 B is inspected for the presence of the substrate in the empty cassette, the substrate will occur when the substrate 200 is included in the empty cassette 100β. 200 and the transfer arm 3 interfere with each other. Therefore, the presence or absence of the inspection operation of the substrate in the cassette can avoid such an unfavorable situation, and the slot position detection operation can be performed well. If the substrate presence detection operation in the empty cassette detects that there is no substrate 200 in the empty cassette 100B, the substrate conveying machine will rotate the conveying arm 3 after half a rotation to allow the hand 33 to enter the empty card. Within the box 100β. Next, the machine 5 is continuously lowered until the cassette start confirmation sensor 52 detects the lower end wall surface 102 of the empty cassette 100B, and then stops. Next, the machine 5 is raised, and the groove shape detection sensor 5 丨 continuously detects the concave-convex shape of the plurality of slots 1 0 1. When the upper end wall surface 103 of the empty card S100B is detected by the cassette end confirmation sensor 53, the ascent of the machine 5 is stopped.
第14頁 571378 五、發明說明(10) 上述之槽口位置檢測 51的高度位置伤斤祕 M乍菜中,槽口位置檢測用感應器 器6來檢測,因屮二又位置係可利用本體部4的内部之編碼 藉由編碼器6來檢^ ^位置檢测用感應器5 1的高度位置可 輪出對應於多數梯^ 7 ^者,槽口位置檢測用感應器51會 (例如··凹部為:办淮的重複凹凸形狀之脈衝串列信號 )。因此,可I、= 凸部則為低位準的脈衝串列信號 51的高度位置^揭益所測得之槽口位置檢測用感應器 -對-地相ΐίΓ位置檢測用感應器51的脈衝, (::相:對應,且可檢測出各槽口 ι〇ι的高度位置· 的言^位晉::的?數)。而該空卡£1_之各槽口 101 匣1::的挿、次機器人本體部4的記憶裝置中記憶成空卡 内爲《牵::貝料,之後,可在將基板2〇〇由實卡匣100A 内移載至空卡匣1006内時加以利用。 / Λ —、盧之基板搬送機器人1利用搬送用臂部3將基板2 0 0 從貝卡匣100Α内取出,直接移載至空卡匣内的預定槽 口 1/1,或者,暫將基板2〇〇搬送至處理裝置後,再將處理 過後的基板200移載至空卡匣ι〇〇β内的預定槽口 。 如上所說明’第2實施型態之單臂式基板搬送機器人1與第 1貫施型態之雙臂式機器人1同樣,係為具有用以檢測基板 用卡匣100的槽口 101之裝置,而該槽口檢測裝置係具備可 朝基板用卡匣1 0 0的内外前進後退且可順沿基板用卡匣i 0 0 内之多數卡匣101的排列方向移動之感應器51至53 ;而可 依據感應器5 1至5 3在基板用卡匣1 0 0内順沿槽口排列方向Page 14 571378 V. Description of the invention (10) In the above-mentioned notch position detection 51, the height and position of the injured position M is not detected. The notch position is detected by the sensor 6 because the second position is available. The internal coding of the unit 4 is detected by the encoder 6 ^^ The position detection sensor 51 1 can be turned out to correspond to most ladders ^ 7 ^, the slot position detection sensor 51 will (for example · The recess is a pulse train signal with repeated concave and convex shapes. Therefore, if I, = the convex part is the height position of the pulse train signal 51 at a low level, the notch position detection sensor-opposite-ground phase measured by the sensor 51-the pulse of the position detection sensor 51, (:: Phase: Correspondence, and can detect the height position of each slot ιι. The number of words:: ??). The empty card £ 1_ is inserted into each slot 101 box 1 :: of the slot, and the memory device of the secondary robot body 4 is memorized into the empty card as "holding :: shell material." Used when transferring from real cassette 100A to empty cassette 1006. / Λ — Lu Zhi's substrate transfer robot 1 uses the transfer arm 3 to remove the substrate 2 0 0 from the Beka magazine 100A and directly transfer it to the predetermined slot 1/1 in the empty magazine, or temporarily remove the substrate After 200 is transferred to the processing device, the processed substrate 200 is transferred to a predetermined slot in the empty cassette ιββ. As described above, the single-arm type substrate transfer robot 1 in the second embodiment is the same as the two-arm type robot 1 in the first penetration type, and is a device having a slot 101 for detecting the substrate cassette 100. The notch detection device is provided with sensors 51 to 53 that can move forward and backward toward the inside and outside of the substrate cassette 100 and can move along the arrangement direction of most of the cassettes 101 in the substrate cassette i 0 0; and Can be arranged along the slot in the substrate cassette 1 0 0 according to the sensors 5 1 to 5 3
第15頁 571378 五、發明說明(11) 移動時的感應器輸出信號來檢測基板用卡匣1 0 0内的各槽 口位置。因此,在使用新的基板用卡匣丨〇 〇時,即使不像 以在那樣對基板搬送用機器人1進行繁j貞的教示,亦可自 動地檢測基板用卡匣1 〇 0的各槽口位置,如此,卡匣使用 之前的作業即可以自動化。 其次’因為感應器51至5 3的構造包括:槽口位置檢測 用感應器5 1,用以檢測由多數槽口丨〇 1所形成之重複凹凸 形狀;卡匣起點確認感應器5 2,用以檢測在基板用卡匣 1 00的壁面上,亦即槽口排列方向上位於起點側之壁面 (下端壁面1 0 2 )的存在與否;及卡匣終點確認感應器 53,用以檢測在基板用卡匣丨〇〇的壁面上,亦即槽口排列 方向上位於終點側之壁面(上端壁面1〇3 )的存在與否, 故可藉由各基板用卡匣1 〇 〇,一邊確認不同的起點位置 (下端位置)及終點位置(上端位置),一邊檢測各槽口 處-5 5於槽口位置檢測用感應器51、卡匣起點確認感 應益5 2及卡£終點確認感應器5 3係設置於單臂式基板搬送 機t人之搬送用臂部3的前端部,故藉由搬送用臂部3即可 同%發揮基板搬送及槽口檢測之兩種功用。 備基板感應器54,而由於該基* Π =檢測基板用卡S1〇°内是否具有基板2。〇 所以右基板用卡£100内具有基板2〇〇時,藉 測即可避免搬送用臂部3與基板2〇〇發生互相干擾的]$ 況0 & 571378 五、發明說明(12) 板搬ϊϋί的第1、第2實施型態皆以水平多關節型基 ί例加以說明,但是本發明並不限定在水平 多關即型,亦可交屆谪>丁 此外,如第4圖及第二:於直線動作型士板搬送機器人。 搬送用機器人可朝左右方=H、第2貫施型_係就基板 ...± 朝左右方向移動之類型,亦即具有機5|人 移動軸之類型加以說明,麸 ^兀Ρ /、有機益人 適用於第7圖(Α)、(βΓ r本 此’亦可 裔人移動軸的類型,或者, 有械 於具有機器人移動軸且可對3個第…亦可適用 基板2。◦的搬出及搬入之了類對』個以上的基板用卡㈣◦進行 ^者’本發明亦可適用於縱置型基板用卡四〇 =01的排列方向係設定為水平方向,並以垂直狀態收 納基板2 0 0的基板用卡匣1 〇 〇。 【發明之效果】 根據本發明,藉由檢測基板卡匣的槽口,即可置換美 板用卡匣而不須對基板搬送機器人進行繁項的教示。、土Page 15 571378 V. Description of the invention (11) The sensor outputs signals during movement to detect the position of each slot in the substrate cassette 100. Therefore, when a new substrate cassette 100 is used, it is possible to automatically detect each slot of the substrate cassette 100 without teaching the substrate transport robot 1 as it is. Position, so that the job before the cartridge is used can be automated. Secondly, because the structure of the sensors 51 to 53 includes: the sensor 51 for detecting the position of the slot, which is used to detect the repeated concave-convex shape formed by the majority of the slots; To detect the presence or absence of the wall surface (lower end wall surface 102) on the wall surface of the substrate cassette 100, that is, the starting point side in the slot arrangement direction; and the cassette end confirmation sensor 53 for detecting the The presence or absence of the wall surface of the substrate cassette 丨 〇〇, that is, the wall surface (upper end wall surface 103) located on the end side in the slot arrangement direction, can be confirmed by the substrate cassette 1 00 Different start position (lower end position) and end position (upper end position), while detecting each slot at -5 5 at the slot position detection sensor 51, the cassette start confirmation sensor 5 2 and the card end confirmation sensor 5 3 series is installed at the front end of the transfer arm 3 of the single-arm substrate transfer machine. Therefore, the transfer arm 3 can perform the two functions of substrate transfer and slot detection in the same%. The substrate sensor 54 is provided, and the base * Π = detects whether the substrate card S10 has a substrate 2 or not. 〇So if there is a substrate 200 in the right substrate card £ 100, borrowing can avoid the mutual interference between the transport arm 3 and the substrate 200] Case 0 & 571378 V. Description of the invention (12) Board The first and second implementations of the moving method are described using horizontal multi-joint type examples, but the present invention is not limited to the horizontal multi-joint type, and can also be applied.> In addition, as shown in FIG. 4 And the second: transfer robots on linear action type plates. The transport robot can move to the left and right = H, the second pass type _ is the type that moves the substrate ... ± to the left and right direction, that is, the type with the machine 5 | person moving axis will be described. Organic benefit is applicable to Figure 7 (Α), (βΓ r could not be a type of human movement axis, or it is equipped with a robot movement axis and can be applied to the 3rd ... substrate 2. For carrying out and carrying in, there are "more than one card for substrates." The present invention can also be applied to a vertical substrate card. The arrangement direction of the card is set to the horizontal direction and stored in a vertical state. Substrate cassette 100 for substrate 2000. [Effects of the invention] According to the present invention, by detecting the slot of the substrate cassette, the cassette for the US board can be replaced without having to perform complicated operations on the substrate transfer robot. Teachings.
第17頁 571378Page 17 571378
圖式簡單說明 【圖面之簡單說明】 第1圖係本發明第1實施型態之雙臂式基板搬送機器 的斜視圖。 土 第2圖係槽口位置檢測用感應器的動作說明圖。 第3圖係卡匣起點確認感應器及卡匣終點確認感應器 的動作說明圖。 第4圖(A )、( B )係槽口檢測裝置的動作說明圖。 第5圖(A)、(B)係本發明第2實施型態之單臂式基板搬 送機器人的槽口檢測裝置之動作說明圖: (Ϊ :6圖係槽口位置檢測用感應器、卡匣起點確認感應 器及卡E、終‘點確認感應、器安裝於手部的說明圖。 =(二:士 (「。,、⑻係各種搬叫^ 第8圖係基板用卡匣的斜視圖。 【符號說明】 單臂 1…基板搬送機器人 式基板搬送機器人) 2…檢測用臂部 3…搬送用臂部 4…本體部 (雙臂式基板搬送機器人 5…機台 6…編碼器 2 1…檢測用臂部的第2臂 22…檢測用臂部的第J臂 23…感應器保持部Brief Description of Drawings [Simplified Description of Drawings] Fig. 1 is a perspective view of a two-arm type substrate transfer machine according to a first embodiment of the present invention. Figure 2 is a diagram illustrating the operation of a notch position detection sensor. Fig. 3 is an operation explanatory diagram of the cassette start confirmation sensor and the cassette end confirmation sensor. Fig. 4 (A) and (B) are operation explanatory diagrams of the notch detection device. Figures 5 (A) and (B) are operation explanatory diagrams of the slot detection device of the single-arm substrate transfer robot of the second embodiment of the present invention: (Ϊ: Figure 6 is a slot position detection sensor and card Box starting point confirmation sensor and card E, end 'point confirmation sensor, and illustration for mounting the device on the hand. = (二: 士 (",,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, ^) Figure 8 is an oblique view of a substrate-use cassette. Fig. [Symbol description] Single arm 1 ... substrate transfer robot-type substrate transfer robot) 2 ... detection arm 3 ... transfer arm 4 ... main body (two-arm substrate transfer robot 5 ... machine 6 ... encoder 2 1 ... Second arm 22 of the detection arm portion ... J-arm 23 of the detection arm portion ... Sensor holding portion
第18頁 571378 圖式簡單說明 24… U字形構件 31 - 搬送用臂部3的第2臂 32… 搬送用臂部3的第1臂 51 ··· 槽口位置檢測用感應器 52… 卡匣起點確認感應器 53… 卡匣終點確認感應器 54… 基板感應器 100 · ••基板用卡匣 100A …實卡匣 100B …空卡匣 101 · .·槽口 102 · ••下端壁面 103 · ••上端壁面 200 · ••基板Page 18 571378 Brief description of drawings 24 ... U-shaped member 31-Second arm 32 of transfer arm 3 ... First arm 51 of transfer arm 3 ... Slot position detection sensor 52 ... Cassette Starting point confirmation sensor 53 ... Cassette end confirmation sensor 54 ... Substrate sensor 100 · •• Substrate cassette 100A… Solid cassette 100B… Empty cassette 101 ·. · Slot 102 · •• Bottom wall surface 103 · • • Top wall surface 200 • •• Substrate
第19頁Page 19
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JP2001355127A JP2003158170A (en) | 2001-11-20 | 2001-11-20 | Slot detector of cassette for substrate |
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KR100575159B1 (en) | 2004-08-16 | 2006-04-28 | 삼성전자주식회사 | Teaching apparatus of transfer robot |
JP4849804B2 (en) * | 2004-09-28 | 2012-01-11 | 日本電産サンキョー株式会社 | Robot operation method |
CN101844359B (en) * | 2006-07-11 | 2013-06-05 | 株式会社安川电机 | Multijoint robot |
KR101115531B1 (en) * | 2009-05-06 | 2012-02-27 | 에이피시스템 주식회사 | Position measuring apparatus for wafer supply |
JP6255724B2 (en) * | 2013-06-10 | 2018-01-10 | セイコーエプソン株式会社 | Robot and robot operation method |
JP6602691B2 (en) * | 2016-02-26 | 2019-11-06 | 株式会社日立ハイテクマニファクチャ&サービス | Wafer transfer device |
KR102403911B1 (en) * | 2019-12-04 | 2022-06-02 | 참엔지니어링(주) | Multiple repair apparatus for display |
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2001
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