TW489971U - Front-guiding type dual port vacuum valve - Google Patents

Front-guiding type dual port vacuum valve

Info

Publication number
TW489971U
TW489971U TW090202589U TW90202589U TW489971U TW 489971 U TW489971 U TW 489971U TW 090202589 U TW090202589 U TW 090202589U TW 90202589 U TW90202589 U TW 90202589U TW 489971 U TW489971 U TW 489971U
Authority
TW
Taiwan
Prior art keywords
vacuum valve
dual port
type dual
guiding type
port vacuum
Prior art date
Application number
TW090202589U
Other languages
English (en)
Inventor
Masaichi Koyakata
Masao Kajitani
Original Assignee
Smc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Smc Corp filed Critical Smc Corp
Publication of TW489971U publication Critical patent/TW489971U/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K39/00—Devices for relieving the pressure on the sealing faces
    • F16K39/02—Devices for relieving the pressure on the sealing faces for lift valves
    • F16K39/024—Devices for relieving the pressure on the sealing faces for lift valves using an auxiliary valve on the main valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y10T137/8225—Position or extent of motion indicator
    • Y10T137/8275—Indicator element rigidly carried by the movable element whose position is indicated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86928—Sequentially progressive opening or closing of plural valves
    • Y10T137/86936—Pressure equalizing or auxiliary shunt flow
    • Y10T137/86944—One valve seats against other valve [e.g., concentric valves]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87096—Valves with separate, correlated, actuators
    • Y10T137/87121—Coaxial stems

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Details Of Valves (AREA)
  • Fluid-Driven Valves (AREA)
  • Lift Valve (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
TW090202589U 2000-03-21 2001-02-21 Front-guiding type dual port vacuum valve TW489971U (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000078286A JP3442714B2 (ja) 2000-03-21 2000-03-21 パイロット式２ポート真空バルブ

Publications (1)

Publication Number Publication Date
TW489971U true TW489971U (en) 2002-06-01

Family

ID=18595723

Family Applications (1)

Application Number Title Priority Date Filing Date
TW090202589U TW489971U (en) 2000-03-21 2001-02-21 Front-guiding type dual port vacuum valve

Country Status (7)

Country Link
US (1) US6581635B2 (zh)
EP (1) EP1136735B1 (zh)
JP (1) JP3442714B2 (zh)
KR (1) KR100421061B1 (zh)
CN (1) CN1234983C (zh)
DE (1) DE60102735T2 (zh)
TW (1) TW489971U (zh)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050072481A1 (en) * 2001-12-06 2005-04-07 Toshihiro Hanada Manifold valve
JP4110512B2 (ja) 2002-04-18 2008-07-02 Ｓｍｃ株式会社 真空調圧弁
JP4258806B2 (ja) 2003-09-02 2009-04-30 Ｓｍｃ株式会社 真空調圧用バルブ
JP4196293B2 (ja) * 2004-08-02 2008-12-17 Ｓｍｃ株式会社 真空調圧用バルブ
JP4284687B2 (ja) * 2005-04-26 2009-06-24 Ｓｍｃ株式会社 真空及び真空破壊用複合弁
JP2006312981A (ja) * 2005-05-09 2006-11-16 Smc Corp ２ポート弁のロッドシール部保護構造
US20070007475A1 (en) * 2005-07-07 2007-01-11 Peter Zvokelj Vacuum valve
US8596301B2 (en) 2008-10-01 2013-12-03 Marshall Excelsior Company Valve assembly
JP5490435B2 (ja) * 2009-03-31 2014-05-14 東京エレクトロン株式会社 ゲートバルブ装置
EP2270369A1 (en) * 2009-06-30 2011-01-05 Siemens Aktiengesellschaft Valve device and a steam turbine system incorporating said valve device
EP2270370A1 (en) * 2009-06-30 2011-01-05 Siemens Aktiengesellschaft Actuator assembly for a valve device and a steam turbine system incorporating said valve device
CN102725570A (zh) * 2009-09-15 2012-10-10 艾瑞克·艾瑞斯楚普·索伦森 用于油舱的通流阀
JP5397525B1 (ja) * 2012-11-13 2014-01-22 Ｓｍｃ株式会社 真空調圧システム
CN103591350B (zh) * 2013-11-04 2015-11-18 中国民航大学 一种用于飞机除冰液的先导型溢流阀
CN106763830A (zh) * 2016-12-14 2017-05-31 安徽海拓志永智能装备股份有限公司 一种低噪音快速放气阀
CN106641278A (zh) * 2016-12-14 2017-05-10 安徽海拓志永智能装备股份有限公司 一种高效快速放气阀
CN106763807A (zh) * 2016-12-15 2017-05-31 安徽海拓志永智能装备股份有限公司 一种大型二位二通气控阀
CN106763808A (zh) * 2016-12-15 2017-05-31 安徽海拓志永智能装备股份有限公司 高效二位二通气控阀
CN107505649A (zh) * 2017-07-19 2017-12-22 防城港市港口区晶通科技有限公司 一种基于声速检测的判断化工现场排放阀堵塞系统
JP7021979B2 (ja) * 2018-03-06 2022-02-17 浜名湖電装株式会社 流量制御弁
JP7106062B2 (ja) * 2018-06-22 2022-07-26 Smc株式会社 真空バルブ
CN111895165A (zh) * 2019-05-05 2020-11-06 得立鼎工业株式会社 阀装置
JP7088982B2 (ja) * 2019-09-04 2022-06-21 Ckd株式会社 パイロット形電磁弁
CN112728137B (zh) * 2021-03-30 2021-07-09 北京星际荣耀空间科技股份有限公司 一种截止阀和发动机及火箭飞行器
CN114046204A (zh) * 2021-12-13 2022-02-15 哈尔滨广瀚燃气轮机有限公司 一种燃气轮机可转导叶转动机构控制作动筒

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2829670A (en) * 1954-06-01 1958-04-08 Halliburton Oil Well Cementing Remote control valve assembly
CH594157A5 (zh) * 1975-07-25 1977-12-30 Sulzer Ag
US4561464A (en) * 1984-11-07 1985-12-31 Roanoke College Relay valve
US4721284A (en) * 1986-11-06 1988-01-26 Norriseal Controls Valve plug design
JPS63202658A (ja) 1987-02-18 1988-08-22 Toray Silicone Co Ltd シリコ−ンゴム粒状物の製造方法
DE4243111B4 (de) * 1992-12-18 2004-02-26 Südmo Holding GmbH Aseptische Doppelsitz-Ventilvorrichtung
JP3745427B2 (ja) * 1995-11-14 2006-02-15 Ｓｍｃ株式会社 真空圧制御用スロー排気バルブ
JP3576748B2 (ja) 1997-04-30 2004-10-13 東レ・ダウコーニング・シリコーン株式会社 硬化シリコーン粉末の製造方法

Also Published As

Publication number Publication date
EP1136735B1 (en) 2004-04-14
JP2001263532A (ja) 2001-09-26
KR20010092412A (ko) 2001-10-24
EP1136735A3 (en) 2002-05-08
CN1314557A (zh) 2001-09-26
CN1234983C (zh) 2006-01-04
US6581635B2 (en) 2003-06-24
DE60102735D1 (de) 2004-05-19
JP3442714B2 (ja) 2003-09-02
EP1136735A2 (en) 2001-09-26
KR100421061B1 (ko) 2004-03-03
DE60102735T2 (de) 2005-03-31
US20010023709A1 (en) 2001-09-27

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MM4K Annulment or lapse of a utility model due to non-payment of fees