TW436672B - System and method for sensor response linearization - Google Patents

System and method for sensor response linearization Download PDF

Info

Publication number
TW436672B
TW436672B TW089113537A TW89113537A TW436672B TW 436672 B TW436672 B TW 436672B TW 089113537 A TW089113537 A TW 089113537A TW 89113537 A TW89113537 A TW 89113537A TW 436672 B TW436672 B TW 436672B
Authority
TW
Taiwan
Prior art keywords
signal
calculate
flow rate
sensor
patent application
Prior art date
Application number
TW089113537A
Other languages
English (en)
Chinese (zh)
Inventor
Faisal Tariq
Tamas I Pattantyus
Original Assignee
Millipore Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Millipore Corp filed Critical Millipore Corp
Application granted granted Critical
Publication of TW436672B publication Critical patent/TW436672B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/0007—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm for discrete indicating and measuring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)
TW089113537A 1999-07-09 2000-07-07 System and method for sensor response linearization TW436672B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/350,747 US6449571B1 (en) 1999-07-09 1999-07-09 System and method for sensor response linearization

Publications (1)

Publication Number Publication Date
TW436672B true TW436672B (en) 2001-05-28

Family

ID=23378007

Family Applications (1)

Application Number Title Priority Date Filing Date
TW089113537A TW436672B (en) 1999-07-09 2000-07-07 System and method for sensor response linearization

Country Status (8)

Country Link
US (1) US6449571B1 (enExample)
EP (1) EP1192424A1 (enExample)
JP (1) JP2003504613A (enExample)
KR (1) KR100620282B1 (enExample)
CN (1) CN1206518C (enExample)
AU (1) AU6405600A (enExample)
TW (1) TW436672B (enExample)
WO (1) WO2001004582A1 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001061284A1 (en) 2000-02-14 2001-08-23 Unit Instruments, Inc. Method and apparatus for balancing resistance
AU2002307547A1 (en) 2001-04-24 2002-11-05 Unit Instruments, Inc. System and method for configuring and asapting a mass flow controller
KR20050031109A (ko) * 2002-07-19 2005-04-01 셀레리티 그룹 아이엔씨 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치
AU2003256591A1 (en) 2002-07-19 2004-02-09 Celerity Group Inc. Variable resistance sensor with common reference leg
US6859765B2 (en) * 2002-12-13 2005-02-22 Lam Research Corporation Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
US20080221822A1 (en) * 2004-08-13 2008-09-11 Marc Laverdiere System and Method for Calibration of a Flow Device
WO2006135977A1 (en) * 2005-06-24 2006-12-28 Carl Peter Renneberg A circuit and method for fitting the output of a sensor to a predetermined linear relationship
DE102005062981A1 (de) * 2005-12-28 2007-07-05 Endress + Hauser Flowtec Ag Verfahren zur Bestimmung eines Ausgangswertes eines Sensors der Automatisierungstechnik
US7532992B2 (en) * 2006-01-20 2009-05-12 Teledyne Isco, Inc. Measuring apparatuses and methods of using them
JP5073949B2 (ja) * 2006-02-02 2012-11-14 日立オートモティブシステムズ株式会社 流量測定装置
EP2479681A1 (en) * 2011-01-24 2012-07-25 Sensirion AG Approximating a non-linear characteristic in a sensor system
CN103176499B (zh) * 2013-03-29 2014-11-19 哈尔滨工业大学（威海） 低功耗抗工艺偏差和电源噪声的动态电流模式收发系统
GB201323009D0 (en) * 2013-10-21 2014-02-12 Continental Automotive Systems Dual range high precision pressure sensor
CN107407590B (zh) * 2015-02-23 2019-11-19 新纳公司 具有用于流体成分补偿的mems热式流量传感器
ES2811305T3 (es) * 2015-05-20 2021-03-11 Thd Spa Aparato y método de medición asociado
TR201614439A1 (en) 2016-10-13 2018-04-24 Univ Yeditepe SMART OPTIMAL ANALOG CIRCUIT FOR SENSOR LINEARIZATION IN A WIDE RANGE
CN106813737B (zh) * 2016-12-29 2020-01-10 北京七星华创流量计有限公司 流量测量装置、其最佳响应时间获取方法和测试系统
KR20190036959A (ko) 2017-09-28 2019-04-05 금오기전 주식회사 센서 데이터 처리 시스템에서의 센서 출력 선형화를 위한 장치 및 방법
US10969797B2 (en) * 2018-08-29 2021-04-06 Illinois Tool Works, Inc. Mass flow valve controller and control method with set point filter and linearization system based on valve model
CN115452080B (zh) * 2022-08-08 2024-06-11 重庆川仪自动化股份有限公司 热式气体质量流量计信号线性化电路及方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4059982A (en) 1975-08-29 1977-11-29 Massachusetts Institute Of Technology Apparatus for the measurement of thermal properties of biomaterials
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
US5193406A (en) 1991-06-20 1993-03-16 Exxon Research And Engineering Company On-stream method for detecting erosion or plugging for manifolded feed nozzle systems
US5369603A (en) 1992-07-19 1994-11-29 Myers; Allen Calibration of a non-linear sensor
US5660207A (en) 1994-12-29 1997-08-26 Tylan General, Inc. Flow controller, parts of flow controller, and related method
US5710370A (en) * 1996-05-17 1998-01-20 Dieterich Technology Holding Corp. Method for calibrating a differential pressure fluid flow measuring system
US5911238A (en) 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
US5944048A (en) * 1996-10-04 1999-08-31 Emerson Electric Co. Method and apparatus for detecting and controlling mass flow

Also Published As

Publication number Publication date
EP1192424A1 (en) 2002-04-03
CN1371467A (zh) 2002-09-25
JP2003504613A (ja) 2003-02-04
WO2001004582B1 (en) 2001-05-10
CN1206518C (zh) 2005-06-15
US6449571B1 (en) 2002-09-10
KR100620282B1 (ko) 2006-09-13
KR20020038682A (ko) 2002-05-23
AU6405600A (en) 2001-01-30
WO2001004582A1 (en) 2001-01-18

Similar Documents

Publication Publication Date Title
TW436672B (en) System and method for sensor response linearization
TWI503525B (zh) 質量流量計、質量流量控制器以及具有其的質量流量計系統及質量流量控制器系統
TWI274143B (en) Method and system for correcting measured fluid flow
JP5812089B2 (ja) 動作範囲を拡張させた質量流量制御器
CN103155386B (zh) 功率半导体器件的电流校正电路和电流校正方法
CN103946672B (zh) 物理量传感器或其装置的输出值修正方法及装置
JP4944037B2 (ja) 質量流量センサ用レイノルズ数補正関数
TWI863911B (zh) 質流控制器以及用於控制質流控制器的方法
CN1795369A (zh) 流量传感器信号转换
CN105264341B (zh) 热式流量计、温度测量装置和热式流量计算方法
CN101600948A (zh) 温度传感器弓形补偿
CN101529214A (zh) 用于从质量气体流量和/或液体流量传感器提供线性信号的方法和系统
Radetić et al. The analog linearization of Pt100 working characteristic
CN114577378B (zh) 一种用于桥式传感器的非理想因素矫正系统
CN109323732B (zh) 热式流量计以及流量校正方法
JP7579490B2 (ja) マルチガスマスフローコントローラ及びその制御方法
JP3889404B2 (ja) 濃度測定方法および濃度測定システムならびに濃度測定プログラム
Ghosh et al. Linearization of transducers through a generalized software technique
JP3741029B2 (ja) 気体流量計
JP3887366B2 (ja) 流量測定装置及び流量測定方法
JP2012168822A (ja) 流体制御装置
JP2004170291A (ja) 熱式流量計

Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees