CN1206518C - 用于传感器响应线性化的系统和方法 - Google Patents

用于传感器响应线性化的系统和方法 Download PDF

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Publication number
CN1206518C
CN1206518C CNB008101132A CN00810113A CN1206518C CN 1206518 C CN1206518 C CN 1206518C CN B008101132 A CNB008101132 A CN B008101132A CN 00810113 A CN00810113 A CN 00810113A CN 1206518 C CN1206518 C CN 1206518C
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CN
China
Prior art keywords
calculate
signal
sensor
sensor signal
linearized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB008101132A
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English (en)
Chinese (zh)
Other versions
CN1371467A (zh
Inventor
飞索·塔里克
塔马斯·I·帕坦突斯
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Entegris Inc
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Mykrolis Corp
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Publication date
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Publication of CN1371467A publication Critical patent/CN1371467A/zh
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Publication of CN1206518C publication Critical patent/CN1206518C/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/0007—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm for discrete indicating and measuring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)
CNB008101132A 1999-07-09 2000-06-20 用于传感器响应线性化的系统和方法 Expired - Fee Related CN1206518C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/350,747 US6449571B1 (en) 1999-07-09 1999-07-09 System and method for sensor response linearization
US09/350,747 1999-07-09

Publications (2)

Publication Number Publication Date
CN1371467A CN1371467A (zh) 2002-09-25
CN1206518C true CN1206518C (zh) 2005-06-15

Family

ID=23378007

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB008101132A Expired - Fee Related CN1206518C (zh) 1999-07-09 2000-06-20 用于传感器响应线性化的系统和方法

Country Status (8)

Country Link
US (1) US6449571B1 (enExample)
EP (1) EP1192424A1 (enExample)
JP (1) JP2003504613A (enExample)
KR (1) KR100620282B1 (enExample)
CN (1) CN1206518C (enExample)
AU (1) AU6405600A (enExample)
TW (1) TW436672B (enExample)
WO (1) WO2001004582A1 (enExample)

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WO2001061284A1 (en) 2000-02-14 2001-08-23 Unit Instruments, Inc. Method and apparatus for balancing resistance
ATE310986T1 (de) 2001-04-24 2005-12-15 Celerity Group Inc Verfahren zur bestimmung einer ventilöffnung für einen massenflussregler
EP1523701A2 (en) * 2002-07-19 2005-04-20 Celerity Group, Inc. Methods and apparatus for pressure compensation in a mass flow controller
EP1523660A1 (en) 2002-07-19 2005-04-20 Celerity Group, Inc. Variable resistance sensor with common reference leg
US6859765B2 (en) * 2002-12-13 2005-02-22 Lam Research Corporation Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
KR20070056092A (ko) * 2004-08-13 2007-05-31 엔테그리스, 아이엔씨. 유량계의 교정 시스템 및 방법
US20090063070A1 (en) * 2005-06-24 2009-03-05 Carl Peter Renneberg Circuit and Method for Fitting the Output of a Sensor to a Predetermined Linear Relationship
DE102005062981A1 (de) * 2005-12-28 2007-07-05 Endress + Hauser Flowtec Ag Verfahren zur Bestimmung eines Ausgangswertes eines Sensors der Automatisierungstechnik
US7532992B2 (en) * 2006-01-20 2009-05-12 Teledyne Isco, Inc. Measuring apparatuses and methods of using them
JP5073949B2 (ja) * 2006-02-02 2012-11-14 日立オートモティブシステムズ株式会社 流量測定装置
EP2479681A1 (en) * 2011-01-24 2012-07-25 Sensirion AG Approximating a non-linear characteristic in a sensor system
CN103176499B (zh) * 2013-03-29 2014-11-19 哈尔滨工业大学（威海） 低功耗抗工艺偏差和电源噪声的动态电流模式收发系统
GB201323009D0 (en) * 2013-10-21 2014-02-12 Continental Automotive Systems Dual range high precision pressure sensor
WO2016137826A1 (en) * 2015-02-23 2016-09-01 Memsic, Inc. Mems thermal flow sensor with compensation for fluid composition
US11793417B2 (en) * 2015-05-20 2023-10-24 Thd S.P.A. Apparatus and a method of measurement thereof
TR201614439A1 (en) 2016-10-13 2018-04-24 Univ Yeditepe SMART OPTIMAL ANALOG CIRCUIT FOR SENSOR LINEARIZATION IN A WIDE RANGE
CN106813737B (zh) * 2016-12-29 2020-01-10 北京七星华创流量计有限公司 流量测量装置、其最佳响应时间获取方法和测试系统
KR20190036959A (ko) 2017-09-28 2019-04-05 금오기전 주식회사 센서 데이터 처리 시스템에서의 센서 출력 선형화를 위한 장치 및 방법
US10969797B2 (en) * 2018-08-29 2021-04-06 Illinois Tool Works, Inc. Mass flow valve controller and control method with set point filter and linearization system based on valve model
CN115452080B (zh) * 2022-08-08 2024-06-11 重庆川仪自动化股份有限公司 热式气体质量流量计信号线性化电路及方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4059982A (en) 1975-08-29 1977-11-29 Massachusetts Institute Of Technology Apparatus for the measurement of thermal properties of biomaterials
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
US5193406A (en) 1991-06-20 1993-03-16 Exxon Research And Engineering Company On-stream method for detecting erosion or plugging for manifolded feed nozzle systems
US5369603A (en) 1992-07-19 1994-11-29 Myers; Allen Calibration of a non-linear sensor
US5660207A (en) 1994-12-29 1997-08-26 Tylan General, Inc. Flow controller, parts of flow controller, and related method
US5710370A (en) * 1996-05-17 1998-01-20 Dieterich Technology Holding Corp. Method for calibrating a differential pressure fluid flow measuring system
US5911238A (en) 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
US5944048A (en) 1996-10-04 1999-08-31 Emerson Electric Co. Method and apparatus for detecting and controlling mass flow

Also Published As

Publication number Publication date
AU6405600A (en) 2001-01-30
WO2001004582A1 (en) 2001-01-18
WO2001004582B1 (en) 2001-05-10
US6449571B1 (en) 2002-09-10
JP2003504613A (ja) 2003-02-04
EP1192424A1 (en) 2002-04-03
KR100620282B1 (ko) 2006-09-13
KR20020038682A (ko) 2002-05-23
CN1371467A (zh) 2002-09-25
TW436672B (en) 2001-05-28

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Owner name: ENTEGRIS INC

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Granted publication date: 20050615