KR100620282B1 - 센서 응답을 선형화하는 시스템 및 방법 - Google Patents

센서 응답을 선형화하는 시스템 및 방법 Download PDF

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Publication number
KR100620282B1
KR100620282B1 KR1020027000306A KR20027000306A KR100620282B1 KR 100620282 B1 KR100620282 B1 KR 100620282B1 KR 1020027000306 A KR1020027000306 A KR 1020027000306A KR 20027000306 A KR20027000306 A KR 20027000306A KR 100620282 B1 KR100620282 B1 KR 100620282B1
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South Korea
Prior art keywords
calculate
signal
sensor
flow rate
sensor signal
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Expired - Fee Related
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KR1020027000306A
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English (en)
Korean (ko)
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KR20020038682A (ko
Inventor
테리크페이셜
파탄티우스타마스아이.
Original Assignee
엔테그리스, 아이엔씨.
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Publication of KR20020038682A publication Critical patent/KR20020038682A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/0007—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm for discrete indicating and measuring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)
KR1020027000306A 1999-07-09 2000-06-20 센서 응답을 선형화하는 시스템 및 방법 Expired - Fee Related KR100620282B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/350,747 1999-07-09
US09/350,747 US6449571B1 (en) 1999-07-09 1999-07-09 System and method for sensor response linearization

Publications (2)

Publication Number Publication Date
KR20020038682A KR20020038682A (ko) 2002-05-23
KR100620282B1 true KR100620282B1 (ko) 2006-09-13

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Application Number Title Priority Date Filing Date
KR1020027000306A Expired - Fee Related KR100620282B1 (ko) 1999-07-09 2000-06-20 센서 응답을 선형화하는 시스템 및 방법

Country Status (8)

Country Link
US (1) US6449571B1 (enExample)
EP (1) EP1192424A1 (enExample)
JP (1) JP2003504613A (enExample)
KR (1) KR100620282B1 (enExample)
CN (1) CN1206518C (enExample)
AU (1) AU6405600A (enExample)
TW (1) TW436672B (enExample)
WO (1) WO2001004582A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190036959A (ko) 2017-09-28 2019-04-05 금오기전 주식회사 센서 데이터 처리 시스템에서의 센서 출력 선형화를 위한 장치 및 방법

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WO2001061284A1 (en) 2000-02-14 2001-08-23 Unit Instruments, Inc. Method and apparatus for balancing resistance
AU2002307547A1 (en) 2001-04-24 2002-11-05 Unit Instruments, Inc. System and method for configuring and asapting a mass flow controller
KR20050031109A (ko) * 2002-07-19 2005-04-01 셀레리티 그룹 아이엔씨 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치
AU2003256591A1 (en) 2002-07-19 2004-02-09 Celerity Group Inc. Variable resistance sensor with common reference leg
US6859765B2 (en) * 2002-12-13 2005-02-22 Lam Research Corporation Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
US20080221822A1 (en) * 2004-08-13 2008-09-11 Marc Laverdiere System and Method for Calibration of a Flow Device
WO2006135977A1 (en) * 2005-06-24 2006-12-28 Carl Peter Renneberg A circuit and method for fitting the output of a sensor to a predetermined linear relationship
DE102005062981A1 (de) * 2005-12-28 2007-07-05 Endress + Hauser Flowtec Ag Verfahren zur Bestimmung eines Ausgangswertes eines Sensors der Automatisierungstechnik
US7532992B2 (en) * 2006-01-20 2009-05-12 Teledyne Isco, Inc. Measuring apparatuses and methods of using them
JP5073949B2 (ja) * 2006-02-02 2012-11-14 日立オートモティブシステムズ株式会社 流量測定装置
EP2479681A1 (en) * 2011-01-24 2012-07-25 Sensirion AG Approximating a non-linear characteristic in a sensor system
CN103176499B (zh) * 2013-03-29 2014-11-19 哈尔滨工业大学（威海） 低功耗抗工艺偏差和电源噪声的动态电流模式收发系统
GB201323009D0 (en) * 2013-10-21 2014-02-12 Continental Automotive Systems Dual range high precision pressure sensor
CN107407590B (zh) * 2015-02-23 2019-11-19 新纳公司 具有用于流体成分补偿的mems热式流量传感器
ES2811305T3 (es) * 2015-05-20 2021-03-11 Thd Spa Aparato y método de medición asociado
TR201614439A1 (en) 2016-10-13 2018-04-24 Univ Yeditepe SMART OPTIMAL ANALOG CIRCUIT FOR SENSOR LINEARIZATION IN A WIDE RANGE
CN106813737B (zh) * 2016-12-29 2020-01-10 北京七星华创流量计有限公司 流量测量装置、其最佳响应时间获取方法和测试系统
US10969797B2 (en) * 2018-08-29 2021-04-06 Illinois Tool Works, Inc. Mass flow valve controller and control method with set point filter and linearization system based on valve model
CN115452080B (zh) * 2022-08-08 2024-06-11 重庆川仪自动化股份有限公司 热式气体质量流量计信号线性化电路及方法

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US4059982A (en) 1975-08-29 1977-11-29 Massachusetts Institute Of Technology Apparatus for the measurement of thermal properties of biomaterials
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
US5193406A (en) 1991-06-20 1993-03-16 Exxon Research And Engineering Company On-stream method for detecting erosion or plugging for manifolded feed nozzle systems
US5369603A (en) 1992-07-19 1994-11-29 Myers; Allen Calibration of a non-linear sensor
US5660207A (en) 1994-12-29 1997-08-26 Tylan General, Inc. Flow controller, parts of flow controller, and related method
US5710370A (en) * 1996-05-17 1998-01-20 Dieterich Technology Holding Corp. Method for calibrating a differential pressure fluid flow measuring system
US5911238A (en) 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
US5944048A (en) * 1996-10-04 1999-08-31 Emerson Electric Co. Method and apparatus for detecting and controlling mass flow

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190036959A (ko) 2017-09-28 2019-04-05 금오기전 주식회사 센서 데이터 처리 시스템에서의 센서 출력 선형화를 위한 장치 및 방법

Also Published As

Publication number Publication date
EP1192424A1 (en) 2002-04-03
CN1371467A (zh) 2002-09-25
JP2003504613A (ja) 2003-02-04
TW436672B (en) 2001-05-28
WO2001004582B1 (en) 2001-05-10
CN1206518C (zh) 2005-06-15
US6449571B1 (en) 2002-09-10
KR20020038682A (ko) 2002-05-23
AU6405600A (en) 2001-01-30
WO2001004582A1 (en) 2001-01-18

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