JP5812089B2 - 動作範囲を拡張させた質量流量制御器 - Google Patents
動作範囲を拡張させた質量流量制御器 Download PDFInfo
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- JP5812089B2 JP5812089B2 JP2013503229A JP2013503229A JP5812089B2 JP 5812089 B2 JP5812089 B2 JP 5812089B2 JP 2013503229 A JP2013503229 A JP 2013503229A JP 2013503229 A JP2013503229 A JP 2013503229A JP 5812089 B2 JP5812089 B2 JP 5812089B2
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F7/00—Volume-flow measuring devices with two or more measuring ranges; Compound meters
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
- Y10T137/0324—With control of flow by a condition or characteristic of a fluid
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
- Y10T137/776—Control by pressures across flow line valve
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7761—Electrically actuated valve
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Fluid Mechanics (AREA)
- Measuring Volume Flow (AREA)
- Flow Control (AREA)
Description
D1(f)=D2(SF*f)/SF 式(1)
T1(f)−T1(0)=(T2(SF*f)−T2(0))/SF 式(2)
式中、fは流量であり、D1およびD2は、ガス1およびガス2それぞれの差電圧関数であり(例えば、D1はガス1のノード213と223間の電圧差であり、D2はガス2のノード213と223間の電圧差である)、T1およびT2は、ガス1およびガス2それぞれのトップ電圧関数(第1のノード230における電位)であり、T(0)は、流量ゼロ時の第1のノード230におけるトップ電圧であり、SFは、ガス1およびガス2の熱伝導率の関数である飽和係数である。
Claims (9)
- ガスが質量流量制御器を通って流れるときに、前記ガスの一部分が中を流れるセンサ管と、
前記センサ管の第1および第2の位置で、前記センサ管にそれぞれ結合された第1および第2の感知素子と、
第1、第2、第3、および第4のノードと、前記第1のノードと前記第2のノード間に接続された第1の所定の抵抗要素と、前記第2のノードと前記第3のノード間に接続された第2の所定の抵抗要素と、前記第1のノードと前記第4のノード間に接続された前記第1の感知素子と、前記第4のノードと前記第3のノード間に接続された前記第2の感知素子とを含むブリッジ回路であって、前記第2および第4のノードから第1の信号を供給し、前記第1および第3のノードから第2の信号を供給するように構成されたブリッジ回路と、
前記ガスの流れが第1の流量範囲内にあるとき、前記第1の信号に応答して前記質量流量制御器の弁の位置を制御し、前記ガスの流れが第2の流量範囲内にあるとき、前記第2の信号に応答して前記質量流量制御器の前記弁の位置を制御するように構成された制御部分と
を備える、質量流量制御器。 - 前記ブリッジ回路と前記制御部分との間に処理要素を含み、前記処理要素が、増幅器およびデジタルアナログ変換器からなる群から選択される、請求項1に記載の質量流量制御器。
- 前記第1の範囲と、前記第2の範囲とが重なり合うとき、前記制御部分が、前記第1および第2の信号の両方に応答して前記ガスの流れを制御するように構成される、請求項1に記載の質量流量制御器。
- 前記第1および第2の感知素子が、抵抗温度計素子、および抵抗温度検出器からなる群から選択された感知素子である、請求項1に記載の質量流量制御器。
- 前記ブリッジ回路の前記第1のノードに電流を供給するように構成された電流源を含み、前記第1および第2の信号が電圧信号である、請求項1に記載の質量流量制御器。
- 前記第1のノードで電圧を印加するように構成された電圧源を含み、前記第1および第2の信号が電流信号である、請求項1に記載の質量流量制御器。
- 前記制御部分が、FPGA、およびメモリと接続されたプロセッサからなる群から選択された構成要素を含む、請求項1に記載の質量流量制御器。
- 質量流量制御器を動作させる方法であって、
ブリッジ回路の第2および第4のノードから第1の入力を受け取るステップと、
前記ブリッジ回路の第1および第3のノードから第2の入力を受け取るステップであって、前記ブリッジ回路が、前記第1のノードと前記第2のノード間に接続された第1の所定の抵抗要素と、前記第2のノードと前記第3のノード間に接続された第2の所定の抵抗要素と、前記ブリッジ回路の前記第1のノードと前記第4のノード間に接続された前記第1の感知素子と、前記ブリッジ回路の前記第4のノードと前記第3のノード間に接続された前記第2の感知素子とを含み、前記第1および第2の感知素子が、ガスが前記質量流量制御器を通って流れるときに、前記ガスの一部分が通って流れるセンサ管に、前記センサ管の第1および第2のそれぞれの位置で結合される、ステップと、
前記ガスの流れが第1の流量範囲内にあるとき、前記第1の入力に応答して前記質量流量制御器の弁の位置を制御するステップと、
前記ガスの流れが第2の流量範囲内にあるとき、前記第2の入力に応答して前記質量流量制御器の前記弁の位置を制御するステップと
を含む、方法。 - 前記第1および第2の入力を増幅して、増幅済入力を生成するステップと、
前記増幅済入力をデジタル表示に変換するステップと、
前記第1および第2の入力の前記デジタル表示に基づいて、前記弁の位置を制御するステップと
を含む、請求項8に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/757,574 | 2010-04-09 | ||
US12/757,574 US8499786B2 (en) | 2010-04-09 | 2010-04-09 | Mass flow controller with enhanced operating range |
PCT/JP2011/002096 WO2011125339A1 (en) | 2010-04-09 | 2011-04-08 | Mass flow controller with enhanced operating range |
Publications (2)
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JP2013527520A JP2013527520A (ja) | 2013-06-27 |
JP5812089B2 true JP5812089B2 (ja) | 2015-11-11 |
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JP2013503229A Active JP5812089B2 (ja) | 2010-04-09 | 2011-04-08 | 動作範囲を拡張させた質量流量制御器 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8499786B2 (ja) |
JP (1) | JP5812089B2 (ja) |
KR (1) | KR101717069B1 (ja) |
WO (1) | WO2011125339A1 (ja) |
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2010
- 2010-04-09 US US12/757,574 patent/US8499786B2/en active Active
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- 2011-04-08 WO PCT/JP2011/002096 patent/WO2011125339A1/en active Application Filing
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US20110247696A1 (en) | 2011-10-13 |
JP2013527520A (ja) | 2013-06-27 |
KR20130070567A (ko) | 2013-06-27 |
US8499786B2 (en) | 2013-08-06 |
KR101717069B1 (ko) | 2017-03-16 |
WO2011125339A1 (en) | 2011-10-13 |
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