TW423135B - Chip bonding pad structure and its package structure - Google Patents

Chip bonding pad structure and its package structure Download PDF

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Publication number
TW423135B
TW423135B TW088112376A TW88112376A TW423135B TW 423135 B TW423135 B TW 423135B TW 088112376 A TW088112376 A TW 088112376A TW 88112376 A TW88112376 A TW 88112376A TW 423135 B TW423135 B TW 423135B
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Taiwan
Prior art keywords
wafer
pads
identification
pad
patent application
Prior art date
Application number
TW088112376A
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English (en)
Inventor
Wei-Jen Tzeng
Original Assignee
Siliconware Precision Industries Co Ltd
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Priority to TW088112376A priority Critical patent/TW423135B/zh
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Publication of TW423135B publication Critical patent/TW423135B/zh

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  • Engineering & Computer Science (AREA)
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  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Wire Bonding (AREA)

Description

A7 ,^ J 1 3 5 5005twf.d〇c/〇°8 B7 __--- 五、發明説明（f ) 本發明是有關於一種晶片之焊墊結構，且特別是有關 於一種具有辨識焊墊之晶片焊墊結構。 縮小積體電路元件產品之體積，一直是電子製造業上 長久以來的目標之一。產品體積的縮小意味著生產成本的 降低，也表示訊號之傳輸路徑的縮短’同時帶來產品性能 提高的優點。然而’欲達到上述目標’必須致力於材料改 良，或相關設備精密度需提高等課題。 影響稹體電路元件體積的關鍵因素之一，則在於構裝 技術的改善。現今以導線架（leadframe)爲晶片承載器 (carrier)之構裝方式，仍是相當普及和廣泛應用的技術； 而打導線(wire bonding)亦是常用及低成本的構裝技術。由 於半導體晶片的積集度逐漸提高，已堂堂邁入0.1 8微米量 產的時代，同時伴隨著每一晶片所需輸入/輸出接點數逐 漸增加，具有數百支接腳的構裝已是常見之產品，四排腳 扁平構裝件(Quad Flat Package, QFP)即是常見之例。然而， 以一般晶片結構來說，焊墊(bonding pad)皆配置於晶片之 四周，當半導體晶片遺集度提高，造成焊墊之間距(pitch ) 縮短，將引發構裝技術上許多困擾。例如：在打導線的製 程中，由於焊墊排列緊密，造成焊墊圖案辨識（pattern recognition)困難，打導線前之晶片對位(chip alignment)錯 襲，而造成製程錯誤，產品報廢。另外’年封厣(encapsulating) 製程中，因模流速度與模壓的影響，會產生導線傾倒(wire sweep)之現象，尤其是在構裝的四個角落，因爲通常不配 置焊墊，模流阻力較小，所以模流速度會增快，此增快之 3 本紙張尺度適用中國ΐ家操率（CNS ) A4规格（210X297公~~ j--------W 裝— (請先聞讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局貝工消費合作社印製 經濟部智慧財產局員工消费合作社印製 423135 五、發明説明（>) 模流衝擊附近焊墊之導線，將造成導線傾倒而產生短路， 使產品報廢。此種現象在焊墊間距縮小時，因導線間之距 離更小，而更容易發生短路，因而影響產品良率。 在美國專利第5684332號(Chen et al.)中所揭露者，爲 .消除角落導線傾倒現象的方法之一。主要是將對應於灌模 澆注口（molding gate)二側之角落中，鄰近之焊墊重複打 線，也就是同一焊墊與同一導腳，打上二條導線，以避免 角落的導線傾倒現象。此方法中對於晶片角落仍採空置方 式，雖然利用重複打線可以強化導線，但對於角落之模流 速度之減緩效果仍十分有限，仍會發生導線傾倒的現象， 況且在焊墊間距縮小時，仍會面對辨識不易及對位困難等 問題。 因此本發明的目的之一就是在提供一種晶片辨識焊 墊，配置於晶片之四個角落，有助於焊墊圖案辨識，以利 打導線製程之進行。 本發明的目的之二在於提供一種晶片辨識焊墊，作爲 一種防呆裝置，便於防呆檢測。 本發明的目的之三在於提供一種晶片辨識焊墊，配置 於晶片之四個角落，並與鄰近之導腳或連接桿以導線連 接’防止模流造成角落導線傾倒現象，提高產品良率。 爲達成本發明之上述和其他目的，提出一種晶片之焊 墊結構’在晶片的主動表面上已形成多個元件，多個電極 焊墊配置於晶片主動表面的四個邊上，且分別與元件電性 連接。而多個辨識焊墊則配置於晶片之主動表面的四個角 4 本紙張尺度適用中國國家揉牟（> A4規格（210X2?7公釐） (請先閱讀背面之注意事項再填寫本頁) -裝. 訂 423135 A7 B7 5005twf.d〇c/〇〇g 五、發明説明（）） 落’且辨識焊墊不與元件連接，其中辨識焊墊與電極焊墊 之外型不同。 (請先閲讀背面之注意事項再填寫本頁) 而應用本發明之晶片焊墊結構的構裝，在辨識焊墊的 部分會以至少一條之導線連接辨識焊墊及其鄰近之導腳或 .連接桿。至於辨識焊墊的形狀可以大於電極焊墊，或是採 用不同形狀，比如L型或三角形等。由於辨識焊墊之外型 不同於電極焊墊，可提高打導線前之焊墊圖案辨識的能 力’提高製程良率。並且辨識焊墊可以助於晶片打導線前 之對準，並利於防呆檢測。由於構裝中辨識焊墊會與角落 之導腳或連接桿連接，而能獲致穩定的模流，因此可以減 少對附近焊墊之導線因模流衝擊造成之導線傾倒現象’提 商產品良率。 爲讓本發明之上述和其他目的、特徵、和優點能更明 顯易懂，下文特舉一較佳實施例，並配合所附圖式，作詳 細說明如下： 圖式之簡單說明： 第1圖繪示依照本發明一較佳實施例的一種晶片的焊 墊結構。 經濟部智慧財產局WK工消費合作社印製 第2圖繪示相對於第1圖之剖面示意圖。 第3圖繪示應用本發明之晶片於構裝中之結構。 圖式之標示說明： 10:晶片 12 :主動表面 5 ( CNS ) ( 210X2974^*1 ~ A7 B7 5005twf.doc/008 五、發明説明（γ) 14 ;電極焊墊 16、16a、16b、16c、16d :辨識焊墊 18 :半導體基底 20 :元件 22a、22b、22c :介電層 24a、24b ' 24c :介層窗 26a、26b :線路層 28 :保護層 30 :導線架 32 =晶片座 34 :連接桿 36 :導腳 36a :內導腳部分 36b :外導腳部分 38 :導線 40 :封裝材料 42 :澆注口 實施例
請同時參照第1圖及第2圖，其中第1圖繪示依照本 發明一較佳實施例的一種晶片的焊墊結構：第2圖則繪示 相對於第1圖之剖面示意圖。晶片W係建構於—半導體 基底18上，比如爲矽基底》在其主動表面12(activesurface) 形成有多個元件20，比如是金氧半電晶體（MOS 6 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） (請先閲讀背面之注意事項苒填寫本頁)
T 經濟部智慧財產局8工消費合作社印製 423135
5005twf.doc/00S A7 B7 五、發明説明（s) transistor)、電阻、電容、電感等。兀件20上覆蓋有多層 介電層、22b、22c，及線路層26a、26b，透過介電層 22a、22b、22c 中的介層窗 24a、24b、24c(via)，與線路層 26a、26b中的線路，連接元件20之電極(electrode)，以形 成複雜之內連線網路（interconnection network)。元件20之 電極透過內連線網路，連接至焊墊14(bonding pad)，以作 爲對外之訊號接點。在此定義有連接元件電極之焊墊14 爲電極焊墊。然而本發明中之辨識焊墊16亦配置於主動 表面12上’然而辨識焊墊16不與任何元件之電極連接， 呈浮置狀態（floating)。電極焊墊μ與辨識焊墊16上覆蓋 有一保護層28(passivation layer)，僅暴露出電極焊墊14 與辨識焊墊16欲打導線的部分，以保護下方之元件^保 護層28之材質通常爲氧化矽 '氮化矽、聚亞醯胺 (polyimide)，或其組合。 如第1圖所示’本發明係將電極焊墊14配置於晶片10 的四邊；而辨識焊墊16a、16b、16c、16d則配置於晶片10 之四個角落。在設計上’辨識焊墊l6a、16b、i6c、i6d 採用不同於電極焊墊I4之外型，選用易於辨識之幾何圖 形。比如辨識焊墊16a、16c採用L型；辨識焊墊16b則 採用三角形；而辨識焊墊l6d則採用類似電極焊墊14之 形狀，但尺寸較大之型態，以利焊墊圖案辨識。習知採用 之反光型焊墊圖案辨識系統，由於辨識焊墊16a'16b、16c、 16d外型不同於一般電極焊墊14，因此辨識容易，可提高 辨識力。至於習知定位系統(aUgnment system)係利用電極 7 本紙張尺度適用中國囷家椟率（CNS ) A4規格（210χ297公;^ ) f請先聞讀背面之注#^項再填寫本頁j ,裴· -11 經濟部智慈財產局員工消費合作社印製 ^^3135 S005twf.d〇 c/008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（匕） 焊S作爲定位基準，本發明中可由具有不同圖案之辨識焊 塾取代，可增加定位之精確度及速度。此外，本發明係將 不同圖案之辨識焊墊配置於晶片角落，可以作爲防呆設 計’可輕易地辨別晶片應擺置之方向，不會誤置晶片。因 &避免因反向作業造成之製程中斷，或產品報廢。 請參照第3圖，其繪示應用本發明之晶片於構裝中之 結構。以一般QFP構裝爲例，用於QFP構裝之承載器爲 導線架30，其至少包括一晶片座32，用以擺置晶片；晶 片座32係以多個連接桿34(SUpp〇rtbar)固定於導線架30。 圍繞於晶片座32周緣爲導腳36(lead)，其包括內導腳部分 36a(inner lead portion)及外導腳部分 36b(outer lead P<mi〇n)。導線架30之基材通常爲銅，而其上可能有多層 之鍍層。構裝時，本發明中具有辨識焊墊16a、16b、16c ' 之晶片ι〇係以其背面(未繪示)貼附於晶片座32，可以 利用導電或絕緣接合材料(adhesive)。此時由於晶片10具 有辨識焊墊，可以精確地擺置與定位。 接著，進行打導線製程，以導線38連接電極焊墊14 與對應之導腳36的內導腳部分36a，導線38之材質比如 爲金或鋁。至於辨識焊墊l6a、16b、16c、16d的部分， 可以直接以一條導線38連接辨識焊墊16d與其鄰近之連 接桿34 ;或是以多條導線38連接辨識焊墊16a、16c與其 鄰近之連接桿34。或是如辨識焊墊10b，亦可以用導線38 連接至鄰近之空腳(no connecting pin)。在電性上，辨識焊 墊可以選擇性地接地或採浮置狀態。需強調的是，上述辨 本紙張尺度逋用中國國家標準（CNS ) A4規格（210X297公釐） I. ί i 裝 ！| 訂 I f.^ (請先閱讀t·面之>i-意事項再填寫本1) A7 B7 423135 5005twf,doc/008 五、發明説明（7) 識焊墊的形狀或其打導線的方式，可以做其他變化或任意 組合，比如改變其他形狀等。 然後進行灌膠製程（molding or encapsulating)，將完成 打導線之晶片10及導線架3〇，置入—模具(未繪示）中， 將一封裝材料40灌入模具。此時，封裝材料40將包覆晶 片1〇、晶片座32、連接桿34、導線38及導腳36之內導 腳部分30a，以保護晶片10及晶片10與導腳36連接的部 分。封裝材料40之材質比如是環氧樹脂(ep0Xy)，或樹脂 (resin)等。當封裝材料4〇自模具之澆注口灌入時(如箭號 42所示），由於四個角落配置有辨識焊墊i6a、i6b、i6c、 l6d，並以導線38與鄰近之連接桿34或導腳36連接，因 此可以減緩模流在角落之流速，而能有穩定的膠料流動， 避免導線傾倒(wire sweep)的現象。本發明中辨識焊墊係 與習知電極焊墊於同一製程中形成，不會增加製程。而後 續構裝製程亦沿用習知打導線或灌膠製程與設備，無須投 資其他製造成本，卻能提高產品良率，而維持原有之可靠 度。 綜上所述，本發明至少具有下列優點： 1. 本發明之辨識焊墊，配置於晶片之四個角落，有助 於焊墊圖案辨識，以利打導線製程之進行以及提高該製程 的精度與速度。 2. 本發明的辨識焊墊’可作爲一種防呆裝置，便於防 呆檢測以及晶片定位。 3. 具有本發明辨識焊墊之晶片應用於構裝時，配置於 9 --------^丨裝------訂------ (請先閱讀背面之注項再填寫本頁) 經濟部智慧財產局8工消费合作社印製 本紙張尺度適用中國國家標牟（CNS ) A4規格（210X297公釐） 4 2 313 5 Μ 5005twf.doc/008 五、發明説明（2 ) 晶片四個角落的辨識焊墊，與鄰近之導腳或連接桿以導線 連接，可以防止模流速度過高造成角落導線傾倒現象，提 高產品良率。 雖然本發明已以一較佳實施例揭露如上，然其並非用 .以限定本發明，任何熟習此技藝者，在不脫離本發明之精 神和範圍內，當可作些許之更動與潤飾，因此本發明之保 護範圍當視後附之申請專利範圍所界定者爲準。 (請先聞讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度遑用中國國家標準（CNS ) A4規格（210X297公釐）

Claims (1)

  1. 經濟部智慧財產局貝工消費合作社印製 1. 一種晶片之焊墊結構，應用於一晶片中，該晶片至 少具有一主動表面，且該主動表面至少具有複數個元件形 成於其中，而該晶片約略呈一矩形，該晶片之焊墊結構包 括： 複數個電極焊墊，配置於該晶片之該主動表面的四個 邊上，且該些電極焊墊分別與該些元件電性連接；以及 複數個辨識焊墊，配置於該晶片之該主動表面的四個 角落，且該些辨識焊墊不與該些元件連接， 其中該些辨識焊墊與該些電極焊墊之外型不同。 2. 如申請專利範圍第1項所述晶片之焊墊結構，其中 該些辨識焊墊較大於於該些電極焊墊。 3. 如申請專利範圍第1項所述晶片之焊墊結構，其中 該些辨識焊墊與該些電極焊墊具有不同之形狀。 4. 如申請專利範圍第3項所述晶片之焊墊結構，其中 些電極焊墊約略呈一矩形，且該些辨識焊墊約略呈一 L 型< 5. 如申請專利範圍第3項所述晶片之焊墊結構，其中 些電極焊墊約略呈一矩形，且該些辨識焊墊約略呈一三角 形。 6. —種晶片構裝結構，包括： 一晶片，略呈一矩形，該晶片具有一主動表面及一背 面，且該主動表面至少具有複數個元件形成於其中；該晶 片包括： 複數個電極焊墊，配置於該晶片之該主動表面的四邊 _..... __Μ_______ 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) ^-----— II 訂·！ 線·.ί I!——：------------ L 23 1 3 5 5005twfl.doc/002 A8 B8 C8 D8 六 經濟部智慧財產局員工消費合作社印製 申請專利範圍 上’且該些電極焊墊分別與該些元件電性連接；以及 複數個辨識焊墊，配置於該晶片之該主動表面的四個 角落，且該些辨識焊墊不與該些元件連接， 其中該些辨識焊墊與該些電極焊墊之外型不同； 一晶片座’約略呈一矩形，該晶片座具有複數個連接 桿與之連接’其中該晶片以該背面與該晶片座貼合； 複數個導腳，配置於該晶片之周緣，每一該些導跏具 有一內導腳部分及一外導腳部分； 複數條導線，用以連接該些電極焊墊及該些辨識焊墊、 與該些導腳之該些內導腳部分及該些連接桿；以及 一封裝材料，包覆該晶片、該晶片座、該些連接桿、 該些導線及該些導腳之內導腳部分。 7. 如申請專利範圍第6項所述之晶片構裝結構，其中 該些辨識焊墊之一鄰近該些連接桿之一，且以該些導線之 一連接該辨識焊墊與該連接桿。 8. 如申請專利範圍第6項所述之晶片構裝結構，其中 該些辨識焊墊之一鄰近該些導腳之一，且以該些導線之一 連接該辨識焊墊與該導腳之該內導腳部分。. 9. 如申請專利範圍第6項所述之晶片構裝結構，其中 每一該些辨識焊墊至少有二條以上之該些導線與之連接。 10. 如申請專利範圍第9項所述之晶片構裝結構，其中 該些辨識焊墊之一鄰近該些連接桿之一，且至少二條以上 之該些導線連接該辨識焊墊與該連接桿。 11. 如申請專利範圍第9項所述之晶片構裝結構，其中 12 (請先閱讀背面之注意事項再填寫本頁) ，-------訂. 線 — --------：---.------------ k紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐：) A8B8C8D8 423135 5005twfl.doc/002 六、申請專利範圍 該些辨識焊墊之一鄰近該些導腳之一，且至少二條以上之 該些導線連接該辨識焊墊與該導腳之該內導腳部分。 12. 如申請專利範圍第6項所述之晶片構裝結構，其中 該些辨識焊墊較大於於該些電極焊墊。 13. 如申請專利範圍第6項所述之晶片構裝結構’其中 該些電極焊墊約略呈一矩形，且該些辨識焊墊約略呈一 L 型。 14. 如申請專利範圍第6項所述之晶片構裝結構，其中 該些電極焊墊約略呈一矩形，且該些辨識焊墊約略呈一三 角形。 (請先閱讀背面之注意事項再填寫本頁) --------訂i •線丨( 經濟部智慧財產局負工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8994156B2 (en) 2011-07-06 2015-03-31 Advanced Semiconductor Engineering, Inc. Semiconductor device packages with solder joint enhancement elements
EP2849224A3 (en) * 2013-09-03 2015-07-22 Renesas Electronics Corporation Semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8994156B2 (en) 2011-07-06 2015-03-31 Advanced Semiconductor Engineering, Inc. Semiconductor device packages with solder joint enhancement elements
TWI483318B (zh) * 2011-07-06 2015-05-01 Advanced Semiconductor Eng 電子裝置及其製造方法
EP2849224A3 (en) * 2013-09-03 2015-07-22 Renesas Electronics Corporation Semiconductor device

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