TW411307B - Cup wheel-type grinding wheel and surface grinding device having it - Google Patents

Abstract

The purpose of this invention is to quickly discharge chips from the inside of a grinding wheel as well as to improve the circulation of grinding fluid when a base plate is ground by a surface grinding device. A cup wheel-type gringing wheel for surface grinding device comprises fixing the annular grinding wheel on the annual peripheral wall and on the peripheral wall on the opposite surface to the bottom wall of the cup-shaped base metal provided on the bottom wall of one of its end. The characteristics are the said base metal is provided by being inserted from an annular groove (a) provided on the outer surface of the bottom wall concentrically with the peripheral wall and from the bottom surface of an annular groove through the bottom wall in order to introduce grinding fluid to the groove to the inner side of the peripheral wall it is inclined to the outer peripheral side toward the other end side of the peripheral wall, and it is provided with grinding fluid introducing holes (b) concentrically provided on the peripheral wall at equal distances. Many grinding fluid discharging slits (c) inclined from the axis side to the outside of the grinding wheel at 30 DEG to 60 DEG in relation to the axis shared with the peripheral wall and the annular groove and to the erected surface of the annular grinding wheel perpendicular to the axis are provided at equal distances on a part projecting from the top surface of the peripheral wall of the annular grinding wheel fixed on the upper surface of the peripheral wall on the opposite surface to the bottom wall.

Description

411307 V. Description of the invention (1) Technical field of the invention The present invention relates to the planar grinding (including polishing) of semiconductor substrates and metal plates such as silicon wafers, germanium wafers, aluminum wafers, and glass substrates. Cup-wheel type grinding stone 'and a surface grinding device provided with the cup-wheel type grinding stone β The prior-art surface grinding device is used for grinding semiconductor substrates, metal plates, and ceramic plates (Japanese Patent Application Laid-Open No. 2-274462, the same is Japanese Patent Application Laid-Open No. 3-1 54773 cites, for example, a surface grinding device shown in FIG. 5 (Japanese Patent No. 丨 〇_ 7 丨 2 5 2) as an example of the surface grinding device β in the drawing. 1 Series Surface Grinding Device 'A Series Abutment, 2 Series Rotary Shaft, 3 Series Wafer, 4 Series Grinding Table, 5 Series Cup Wheel Grinding Stone, 6 Series Body Shell, 7 Series Lifting Device, 8 Series Mandrel, 9 series drawing, 10 series of mandrel housing, 丨 丨 the head of the cup wheel type grindstone, 1 2 series of mounting members for mounting the mandrel housing to the lifting device, 1 3 series of tilt adjustment bolt drive described later Motor, 1 4 series of self-contained motors for rotary drive mandrels, I 5 series of tilt adjustment bolts in X axis direction 1 5. It is a tilt adjustment screw inspection in the γ-axis direction. 1 6 is a concave groove that allows the lifting device to be raised and lowered in the vertical direction. 丨 8 is provided with a hemispherical convex part of the 2 mandrel housing. The hemispherical recesses fitted with the aforementioned hemispherical protrusions with a few gaps therebetween are "2 1 tie rods" and 2 2 air bearings. "The mandrel 8 is lowered to the grinding table by the lifting device". The surface of the wafer 3 on 4 'makes the cup wheel type grindstone crimp to the wafer surface, and rotates the two axes 2, 8' in the same direction or opposite directions to make the grindstone slide and rub against the wafer. Grinding (polishing ) Wafer surface β

0: \ 60 \ 60304.PTD

Page 6 411307 The upper surface of the peripheral wall opposed to the bottom wall with a cup-shaped metal seat provided with a ring-shaped peripheral wall 50 and a bottom wall at one end shown in FIG. 6 is used to grind the fan shape with a spotting agent. The small pieces of stone 5d form an opening between the adjacent grinding stone pieces 5f and the fixed grinding stone pieces have a height of 3-5. The cup-shaped grinding stone (Shikai Sho 61-144959, the same as 6 144961, the same 61-144962, Japanese Patent Application Laid-Open No. 62-181875). '

In addition, there has been proposed a cup-wheel type grinding stone for surface grinding devices (Patent No. 2503158, No. 2500285). The cup-shaped metal seat includes a ring-shaped peripheral wall and a cup-shaped metal seat provided at one end thereof. The cup-wheel-type grinding stone with a ring-shaped grinding stone (without a slit) fixed on the same wall above the wall is characterized in that the metal seat has a ring-shaped groove (丨) arranged concentrically with the peripheral wall outside the bottom wall. It is used to introduce the grinding fluid supplied into the annular groove to the inside of the peripheral wall. The bottom surface of the annular groove penetrates the bottom wall and is set to be "inclined to the outer peripheral side to the extent towards the other side of the peripheral ^" and arranged concentrically at equal intervals. A plurality of grinding fluid introduction holes (2) on the peripheral wall are provided on the top surface of the grinding stone with an inclination (3) of 0_5.0 ° from the axial center to the outside of the grinding stone. θ The problem to be solved by the invention The cup-wheel type grindstone with slits on the former ring grindstone is expected to increase the flow of grinding fluid by increasing the diameter of the grinding base. & Of course, in order to avoid the grinding liquid 'introduction or discharge through holes or slits' provided in the ring-shaped grinding stone to avoid grinding liquid in the ring-shaped grinding stone, it is necessary to grind the soil and groove of the wheel-shaped grinding stone. The cutting fluid easily escapes from the outside of the ring-shaped grindstone, but the escape of the grinding fluid is not sufficient. Also, the escape of grinding chips (chips) in the grinding stone is not sufficient. Furthermore, in Japanese Patent Publication Nos. 2503158 and 2500285

O: \ 60V60304.PTD Page 7 411307 V. Description of the invention (3) The method for supplying the grinding fluid to the ring-shaped groove of the cup-wheel type grinding stone provided in the surface grinding device is not disclosed. The purpose of the present invention is to provide a cup wheel type grinding stone which uses the advantages of a two cup wheel type grinding stone to improve the grinding fluid and grinding chips from the grinding stone, and a surface grinding device β provided with the grinding stone. Means for solving the problem The first item of the scope of patent application of the present invention provides a cup-wheel type grindstone for a surface grinding device, which is a cup-shaped grindstone having a ring-shaped peripheral wall and a bottom wall provided at one end thereof. The one above the peripheral wall opposing the bottom wall of the metal seat is characterized in that 'the aforementioned metal seat has an annular groove (a) provided concentrically with the peripheral wall outside the bottom wall, and is used to grind the supply into the annular groove. The liquid is introduced into the inner side of the peripheral wall. The ground wall penetrates the bottom wall from the bottom surface of the annular groove and is set to be inclined toward the outer peripheral side to a degree τ toward the other end side of the peripheral wall. A plurality of grinding liquid introduction holes (b) are provided at equal intervals with the peripheral wall. , With respect to the portion of the annular grindstone fixed above the peripheral wall opposed to the bottom wall protruding from the top surface of the peripheral wall, the axial center shared by the peripheral wall and the annular groove 'and the annular grindstone orthogonal to the axial center Standing surface Slot for grinding fluid discharge inclined to the outside of the grinding stone by 30 to 60 degrees (c) * Item 2 of the scope of patent application of the present invention provides a cup-wheel type grindstone, which is in the aforementioned cup-wheel type grindstone The slitting horsepower is 3 ~ 10mm, the width of the ring-shaped grindstone is 2-7 mm. The length of the grindstone blade separated by the slit is 10 ~ 50 mm. 'The third item of the scope of the present application for a patent provides a cup-wheel type grindstone, which is in the aforementioned cup-wheel type grindstone. 5 to 5 degrees of incline.

411307

V. Description of the invention ¢ 4) The fourth item of the scope of patent application of the present invention provides a surface grinding device characterized by the installation of the cup wheel year as described in the first scope of the patent application 丨 hemp ^ on a rotating mandrel The plate is set to be independent; and it also describes the influence of the rotation drive of the heart station, which contains the space in the head of the heart Han φ _g J Ding Danbei supplies the grinding fluid to the annular groove of the cup-wheel type grindstone Inside the supply nozzle. (Function) A slit for grinding liquid discharge is provided at the annular grinding stone at an angle of 30 to 60 degrees from the axial center side to the outside of the grinding stone, and the annular groove for grinding liquid introduction is provided on the inner surface of the peripheral wall. The structure of the cup-wheel type grinding stone is used to supply the grinding liquid of the above-mentioned annular groove: the grinding debris is easily discharged out of the peripheral wall of the cup-wheel type grinding stone through the aforementioned slit. Embodiments of the Invention (Examples) The present invention will be described in more detail below with reference to the drawings. Fig. 1 is a diagram of a cup-wheel type grindstone according to the present invention, a is a plan view thereof, ^ is a bottom view, and Fig. 2 is a cross-sectional view of the cup-wheel type grindstone, and Fig. 3 is a view showing the cup-wheel type grindstone Partial plan view of the slit state of the ring-shaped grindstone on the top surface of the peripheral wall. FIG. 4 is a cross-sectional view of the ring-shaped grindstone with the slit, and FIG. Floor plan. In the cup-wheel type grinding stone 50 shown in Figs. 1 to 3, 51 is an annular peripheral wall, 52 is a bottom wall provided at one end of the peripheral wall, 53 is a cup-shaped metal seat '53a' is a screw hole, and 54 is an aforesaid peripheral wall. On the top, 55 is an annular grindstone, 56 is an annular groove, and 57, 57 '57 ... are used to introduce the grinding fluid supplied into the annular groove to the inside of the peripheral wall, and pass through the bottom wall from the bottom surface of the annular groove. , The outer peripheral side is inclined to the extent of the other end side of the peripheral wall, and a plurality of grindings are provided concentrically at equal intervals on the peripheral wall 411307 5. Description of the invention (5) Liquid introduction holes, 5 8, 5, 8, 5, 8 ... are relative In the part protruding from the top surface of the peripheral wall of the annular grindstone fixed above the peripheral wall, the axial center shared by the peripheral wall and the annular groove, and the rising surface of the annular grindstone orthogonal to the axial center, from the axial center The slits for grinding fluid discharge are inclined at an outside angle of 30 to 60 degrees (45 degrees in the third drawing).

CD Surface grinding device 1 t shown in Figure 4, 6 series body shell, 8 series core #, 9 series bearings, 1 1 series cup wheel type grinding stone mounting plate, 12 series mandrel. Housing mounting member, 1 3 series motors for tilt adjustment screw drive, 1 4 series self-attached motors for rotary drive spindles, 2 2 series air bearings, 2 3 series air supply tubes, 2 4 series mounting plates 11 and fixed plates for shaft support spindles The connecting shaft of 2 5 and the coolant supply pipe for the 2 6 series mandrel housing, 27 are provided on the head composed of the air bearing 22 and the cylindrical surrounding plate (grindstone cover) 28 provided under the peripheral wall of the air bearing. The meat space department, 50 series of cup-wheel grinding stones, 51 series of peripheral walls, § 2 series of bottom walls, 53 series of cup-shaped metal seats, 55 series of grinding stones, 56 series of annular grooves, and 5 series of grinding fluids Introduction hole, 5 9 series grinding liquid supply nozzle, 60 series grinding liquid supply pipe, 6 1 series grinding liquid introduction port. Although this grinding liquid supply pipe is not shown, it is fixed to the mounting member of the lifting device. It is connected to the grinding fluid tank by a flexible tube.

The cup-wheel-type grindstone 50 is transmitted through the spindle 8, the fixing plate 25, the connecting shaft 24, and the mounting plate Π to drive the two rotations of the attached motor 14. Since the head is fixed to the mounting member 12 ', the head itself is not rotationally driven even if the grindstone 50 is rotated. Therefore, the flexible tube connecting the grinding liquid supply nozzle 59 to the grinding liquid supply groove is prevented from being bent or broken. ^ The grinding fluid supply nozzle 59 supplies the grinding fluid supplied to the annular groove 56 of the grinding stone 50 through the entrance holes 57, 57 ... to the grinding stone 56 ′56… the inner surface of the peripheral wall ”.

Page 10 411307 Five 'Explanation of the invention (6) The slit 50f is discharged outside the peripheral wall of the millstone. As shown in Figure 2, in order to facilitate the discharge of the grinding fluid, a tilt of 0.5 to 5 degrees from the center of the grinding stone to the outside of the grinding stone can be further provided on the top surface of the grinding stone (1 degree in Figure 2). ). The inclination of the introduction hole 57 is 45 to 85 degrees, preferably 60 to 75 degrees (the second figure is 75 degrees). 0 Ring-shaped grindstone is made of diamond, diamond, and CBN abrasive particles into a ring with adhesives such as phenol, resin, and epoxy resin. As shown in Figure 3, The axial center shared with the annular groove and the rising surface 1 of the annular grindstone orthogonal to the axis are provided with slits inclined at an angle of 30 to 60 degrees from the axial center side to the outside of the grindstone 5 8, 5 8, 5 8 ... The angle of the slit depends on the rotation speed of the mandrel, but it is used to effectively remove the grinding fluid and grinding debris from the peripheral wall of the grindstone through the slit through the centrifugal force generated by the rotation of the cup-wheel type grindstone. The aforementioned angle. For general purpose grindstone, it is 45 degrees. The direction of the inclination of the slit is preferably the direction of the centrifugal force of the rotating grindstone. Although the formation of the slits is preferably formed by cutting grindstones, it is also possible to form small grindstone pieces 55 on the top surface of the peripheral wall by bonding with adhesives at intervals of the slits. Preferably, the cup-wheel type grindstone is configured such that the height of the slit is 3 to 5 mm, the width of the grindstone is 2 to 7 mm, and the length of the ring-shaped grindstone separated by the slit is 10 ~ 50 mm. The diameter of the grinding stone introduction hole 57 is preferably 2 to 6 mm. Preferably, the height of the peripheral wall is 25 to 45 mm, and the diameter is selected from the size of 6.0 to 450 mm depending on the size of the object to be ground. Effects of the Invention The cup-wheel type grinding stone used in the surface grinding device of the present invention is excellent in that the grinding fluid and grinding chips escape from the inner surface of the grinding stone, and little heat is generated during grinding.

Page 11 411307 V. Description of the invention (7) Tan grinding the substrate. A brief description of the drawings is a plan view thereof, and b is a first view showing a cup-wheel type grindstone of the present invention, a bottom view. Fig. 2 is a partial sectional view of a cup-wheel type grindstone. Fig. 3 is a partial plan view showing the state of slitting of the ring-shaped grindstone provided on the top surface of the peripheral wall of the cup-wheel type grindstone. Θ Figure 4 is a partially cutaway plan view of a surface grinding apparatus of the present invention. Figure 5 is a partially cutaway plan view of a surface grinding device. Figure 6 is an oblique view of the previous cup-wheel type grindstone.

DESCRIPTION OF SYMBOLS 1 Grinding device 5 Cup-wheel type grinding stone 11 Mounting plate 14 Self-attached motor 22 Air bearing 50 Cup-wheel type grinding stone 51. Ring-shaped peripheral wall 52 Bottom wall 53 Cup-shaped metal seat 5 3a Screw hole 55 Grinding stone piece 56 Circular groove 57 Grinding fluid introduction hole Page 12 411307 V. Description of the invention (8) 58 Slot 59 Grinding fluid supply nozzle Page 13

Claims (1)

411307 6. Scope of patent application 1. A cup-wheel type grinding stone for a surface grinding device, which is a ring-shaped grinding stone fixed to a cup-shaped metal seat and a bottom wall provided with a ring-shaped peripheral wall and a bottom wall provided at one end thereof. The object above the peripheral wall is characterized in that the metal seat has an annular groove (a) provided outside the bottom wall concentrically with the peripheral wall, and for introducing the grinding fluid supplied into the annular groove to the inside of the peripheral wall, The annular groove is provided to penetrate the bottom wall from the bottom surface, and is inclined toward the outer peripheral side toward the other end side of the peripheral wall. A plurality of cutting fluid introduction holes (b) are provided concentrically with the peripheral wall at equal intervals. The part of the annular grindstone above the peripheral wall opposed to the bottom wall protrudes from the top surface of the peripheral wall and competes with the axial center shared by the peripheral wall and the annular groove, and the rising surface of the annular grindstone orthogonal to the axial center, A plurality of slits (c) for discharging the grinding fluid inclined at an angle of 30 to 60 degrees from the axial center side to the outside of the grindstone are provided at equal intervals. 2. For example, the cup-wheel type grindstone in the scope of the patent application, the height of the slit is 3 ~ 10 mm, the width of the ring grindstone is 2 ~ 7 mm, and the length of the grindstone blade separated by the slit is I0 ~ 50 mm. 3. For example, the cup-wheel type grinding stone in the scope of patent application, the top surface of the grinding stone is provided with a slope of 0.5 to 5 degrees, which gradually increases from the axial center to the outside of the grinding stone. 4. A surface grinding device, characterized in that a cup-wheel type grindstone, such as item I in the scope of patent application, is mounted on a mounting plate of a bearing on a rotating mandrel, and is set independently from the rotation driving of the aforementioned mandrel In the method, the space in the head of the built-in mandrel is provided with a supply nozzle for supplying the grinding fluid into the annular groove of the cup-wheel type grindstone.