JP2004167617A - Grinding head structure equipped with cup wheel type whetstone - Google Patents

Grinding head structure equipped with cup wheel type whetstone Download PDF

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Publication number
JP2004167617A
JP2004167617A JP2002334769A JP2002334769A JP2004167617A JP 2004167617 A JP2004167617 A JP 2004167617A JP 2002334769 A JP2002334769 A JP 2002334769A JP 2002334769 A JP2002334769 A JP 2002334769A JP 2004167617 A JP2004167617 A JP 2004167617A
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Prior art keywords
grinding
hollow shaft
water supply
supply guide
grindstone
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JP2002334769A
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JP3978118B2 (en
Inventor
Toshihiro Ito
利洋 伊東
Saburo Sekida
三郎 関田
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Okamoto Machine Tool Works Ltd
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Okamoto Machine Tool Works Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a grinding head structure of simple configuration capable of hindering dust from stagnating between the print wiring surface of a semiconductor board and a sticky film for protecting the print wiring surface. <P>SOLUTION: The grinding head 50 is equipped at its oversurface with a central recess 60 and with grooves 61 to serve as a flow passage arranged radially toward the outside from the central recess, and a water supply guide 59 having a plurality of slopes 62 and 63 with the gradient becoming lesser gradually toward the outside is fixed to the lower part of a hollow shaft 57 through a ring-shaped flange 56 fixed to the lower periphery of the hollow shaft 57, and a metal base 53 of a cup wheel type whetstone is fixed to the ring-shaped flange through a ring projection 55, and a cup-shaped lid is formed from the bottom wall, the ring projection, and the flange so as to prevent the grinding liquid from leaking out from the over-part when the hollow shaft rotates. The grinding liquid supplied to the inside of the hollow shaft is introduced to inside the peripheral wall via the surface of the water supply guide and is fed by pressure to the surface to be processed where any work and a whetstone piece 54 are in slide contact by the centrifugal force generated by rotation of the water supply guide 59. <P>COPYRIGHT: (C)2004,JPO

Description

【0001】
【発明の属する技術分野】
本発明は、シリコンウエハ、ゲルマニウムウエハ、アルミニウムウエハ、ガラス基板等の半導体基板や、金属板を平面研削(研磨も含む)するに用いられるカップホイ−ル型砥石を具備する研削ヘッド構造に関する。
【従来の技術】
【0002】
カップホイ−ル型砥石5としては、図5に示す環状の周壁5aと、その下面に扇状の砥石片5dを環状に接着剤で隣接する砥石片間に研削液の流通するスリット5fを形成させるようにして固定した砥石片高さが3〜5mmのカップホイ−ル型砥石(実開昭61−144959号、同61−144961号、同61−144962号、特開昭62−181875号公報)が使用されていた。
このカップホイ−ル型砥石は、研削液が砥石の外側から研削加工面に供給されるため研削液の利用効率が悪い。
【0003】
研削液の利用効率を高めるには、カップホイ−ル型砥石の内側から研削液を研削加工面に供給するセンタ−方式が好ましい。
センタ−方式のカップホイ−ル型砥石としては、次のものが知られている。
▲1▼砥石本体の基盤部中心部に研削液供給中空軸の装着孔を開口し、かつ、この中心部より外側に向かって放射状に延びる流体路を設け、周壁に垂下する流体路を前記流体路に繋げ、ワ−クとの接触面の前記周壁の各受液路開口端部間にダイヤモンド砥石片を固着したカップホイ−ル型砥石(特開昭60−232877号公報)。
【0004】
▲2▼図4に示すように、環状の周壁部18を有するカップ型台金2と、その下端面4に設けられた砥石片6と、台金12の上端面に形成された受液凹部14と、この受液凹部の内底面に一端が開口し他端が台金下面の周壁部2bよりも内面側の位置に開口する給液孔16とを具備し、周壁部の内周面8は上方から下方へ向けて外側へ広がる傾斜面とされた平面研削装置用カップホイ−ル型砥石1(特開平5−69339号、特開平6−278036号、特開平9−38866号、特開2000−94342号、特許第2503158号、特許第2500285号)。これら公報群に示されるカップホイ−ル型砥石においては、台金上面の受液凹部14に供給ノズルを用いて研削液が供給され、前記傾斜した研削液給液孔16を経由して砥石片6とワ−ク接触面に研削液は導かれる。
【0005】
▲3▼図3に示すように、環状の周壁18とその一端に設けられた底壁20とを備えてカップ状と成すと共に、該底壁を貫通する研削液導入穴28を有し、該研削液導入穴を通して該周壁の内側へ研削液が供給されつつ軸心回りに回転されて該周壁下面に設けられた砥石片30がワ−ク平面14と摺接させられることによりワ−ク面を研削するカップ型砥石であって、前記研削液導入穴28の底壁20の内面開口部を底壁内面から所定距離離隔して覆う本体部34を備えて該底壁に固着されるとともに、該本体部の底壁側の一面に外周側へ向かうに従って前記回転方向とは反対方向に向かう複数の羽根部42が周方向に所定間隔で立設されている回転翼車16を備えるカップ型砥石(特開平9−38666号)。
回転翼車16がポンプのような作用をして研削液を砥石片とワ−クの摺接面へ圧送する。
【0006】
上記▲1▼のカップ型砥石は受液路開口端部が砥石片間に設けられているので、遠心力により研削液は砥石外側へ逃げる量が多く、研削液の利用率が低い。
【0007】
上記▲2▼のカップ型砥石は受液凹部14に研削液を供給するノズルの取り付け位置が制限されるとともに、ワ−クである基板の径が200mm、300mm、400mmと拡径し、基板の厚みが20〜100μmと薄くなるにつれ研削屑がワ−クのプリント回路面とこれを保護する粘着フィルム間に侵入する機会が増加し、好ましくない。
【0008】
上記▲3▼の回転翼車を備えるカップ型砥石は砥石片への研削液の供給量が多く、研削屑や砥粒がワ−クのプリント回路面とこれを保護する粘着フィルム間に侵入する機会が減少する利点を有するが、研削液導入穴28に研削液を供給する複数のノズル46の取り付け位置が制限され、また、ノズル取り付け構造が複雑である。
【0009】
【発明が解決しようとする課題】
本発明は、研削液導入部を備えた回転軸に砥石を固定して研削ヘッド構造への研削液供給を簡略化するとともに、この回転軸下方に給水ガイドを設けて研削屑や砥粒がワ−クのプリント回路面とこれを保護する粘着フィルム間に侵入する機会が稀となるカップホイ−ル型砥石を備えた研削ヘッド構造を提供するものである。
【0010】
【課題を解決するための手段】
本発明の請求項1は、下部に砥石片を所定間隔で環状に植設した環状の周壁とその一端に設けられた底壁とでカップ状台金となし、該周壁の内側へ研削液が供給されつつ軸心回りに回転されて前記周壁の下部に植設された砥石片がワ−ク表面と摺接させられることによりワ−ク表面を研削するのに用いるカップホイ−ル型砥石を中空軸に軸承した研削ヘッド構造であって、
上面に中央凹部を有し、この中央凹部より外側へ向かって放射状に流路用溝を設け、外側へ向かって傾斜が次第にゆるくなる複数の傾斜部を有する給水ガイドを前記中空軸の下方周囲に固定した環状フランジを介して中空軸の下部に固定し、かつ、前記カップホイ−ル型砥石の台金を環状突起を介して前記環状フランジに固定し、前記底壁、環状突起および環状フランジでお椀状蓋体を形成して研削液が中空軸回転時に上方より外部に漏れるのを防ぐ構造とし、中空軸内部に供給された研削液は前記給水ガイドの中央凹部、流路用溝、複数の傾斜部を経由して周壁の内側へと導入され、更に前記中空軸心回りの給水ガイドの回転による遠心力によりワ−クと砥石片とが摺接する加工面に供給される構造であることを特徴とする、研削ヘッド構造を提供するものである。
【0011】
中空軸に研削液を供給するので、研削ヘッド部分の構造が従来のノズルを備える▲2▼や▲3▼の研削ヘッド構造と較べてスッキリとした構造となり、研削作業がし易い。また、給水ガイドの中央凹部に供給された研削液は、流路用溝に入る際、流れの勢いが増すとともに遠心力も加わって圧送力が高く、研削屑や砥粒をすばやく砥石片間のスリットから砥石外へと逃すのでこれらがワ−クのプリント回路面とこれを保護する粘着フィルム間に侵入する機会が稀となる。また、給水ガイドの外周部の傾斜部を多段とすることにより砥石片とワ−ク表面の摺接面への研削液の供給を容易とした。
【0012】
本発明の請求項2は、上記研削ヘッド構造において、前記給水ガイドの複数の傾斜部は2段であり、中心側の傾斜部aは水平面に対し角度が30〜60度の傾斜を、外側の傾斜部bは水平面に対し角度が5〜20度の傾斜を有し、該外側の傾斜部bに対向する環状フランジの下部面はこれら傾斜部bと環状フランジの下部面が形成する空間部が漸次狭くなるように外側に向かって傾斜していることを特徴とする。
【0013】
給水ガイドの2段の傾斜面と環状フランジの下部傾斜面とが形成する空間部が漸次狭くなるので圧送される研削液の圧力が増大し、研削屑や砥粒を砥石片間のスリットからすばやく砥石外へと逃す。
【0014】
【発明の実施の形態】
以下、図面を用いて本発明を詳細に説明する。
図1は、本発明の研削ヘッド構造を示す断面図で、300mm径の基板を表面研削する実例で寸法を記載している。図2は本発明の研削ヘッド構造に用いられる給水ガイドの平面図である。図1に示される給水ガイド59の断面は図2においてI−I切断線から見た図である。
【0015】
図1および図2に示すように、本発明の研削ヘッド構造50は下部に砥石片54を所定間隔で環状に植設した環状の周壁51とその一端に設けられた底壁52とでカップ状台金53となし、これらでカップホイ−ル型砥石を形成している。
研削液は、図示されていないポンプ、給水管を用いて中空軸57の中空部58に導かれ給水ガイド59上面と環状フランジ56下面とで形成される流路空間64を経由して前記周壁51の内側空間部66へ導かれ、研削液が砥石片54とワ−ク表面の摺接する面へと供給される。
【0016】
カップホイ−ル型砥石の台金53は、環状突起55にボルト67で固定され、この環状突起55はボルト68で環状フランジ56に固定され、環状フランジ56は中空軸58の下部に固定されている。70はオイルシ−リングである。前記底壁、環状突起および環状フランジでお椀状蓋体を形成して研削液が中空軸回転時に上方より外部に漏れるのを防ぐ構造としている。
【0017】
給水ガイド59は、その軸心59aが中空軸の軸心57aに一致するようにボルト69により前記環状フランジ56の下面に固定されている。この給水ガイドは、上面に中央凹部60を有し、この中央凹部より外側へ向かって放射状に流路用溝61を設け、外側へ向かって傾斜が次第にゆるくなる二段の傾斜部62,63を有する。中空軸内部58に供給された研削液は中央凹部60に導かれ、流路用溝61、ニ組みの傾斜部62,63を経由して周壁51の内側空間部66へと導入され、更に前記中空軸心59a回りの給水ガイドの回転による遠心力によりワ−クと砥石片とが摺接する加工面に研削液が供給される構造を採っている。
【0018】
前記給水ガイドの複数の傾斜部は二段であり、中心側の傾斜部a62は水平面に対し角度αが30〜60度の傾斜を、外側の傾斜部b63は水平面に対し角度βが5〜20度の傾斜を有し、該外側の傾斜部bに対向する環状フランジの下部面はこれら傾斜部bと環状フランジの下部面が形成する空間部が漸次狭くなるように外側に向かって傾斜している。環状フランジの下部面の傾斜角は、内側の角度γが35〜60度、外側の角度θが10〜20度である。図1に示す300mm基盤用研削ヘッド構造の給水ガイド59においては、角度αが45度、角度βが10度、角度γが45度、角度θが15度である。
中心側の傾斜部aの傾斜面長さは、外側の傾斜部bの傾斜面より短いのが設計上の面から好ましい。
【0019】
給水ガイドの傾斜部は、複数段であって漸次傾斜角が小さくなる構造であればよく、前述した二段であっても三〜五段であっても良い。
【0020】
台金53の素材としてはアルミニウムが、給水ガイド59素材としてはガラス繊維補強樹脂が用いられる。砥石片54は、ダイヤモンド砥粒、CBN砥粒等の砥粒をフェノ−ル樹脂、エポキシ樹脂等の接着剤で成型したもので、周壁の下面に環状に等間隔に設けられる。カップホイ−ル型砥石は、砥石片間のスリットの高さは3〜10mm、砥石片横幅2〜7mm、スリットで区分けされた砥石片の長さが10〜50mmであるのが好ましい。研削液導入中空部58の内径は25mm前後が好ましい。
【0021】
【実施例】
実施例1
研削装置として、株式会社 岡本工作機械製作所の精密平面研削装置SVG502MK−II(商品名)を用い、該装置の中空スピンドルに図1で示すカップホイ−ル型ダイヤモンド砥石を備えた研削ヘッド構造を固定した。
基板ホルダ−上には200mm径の半導体基板のプリント配線表面部に粘着保護フィルムを貼付したものをシリコン基板面が上向く(粘着フィルムは下向き)ように保持し、基板ホルダ−を100min−1で、中空スピンドルを300min−1で回転させ、中空スピンドルの中空部に研削液を供給しながら研削ヘッド構造を下降させて半導体基板のシリコン基板面に砥石片を摺接させ、2分間研削を行った。
基板の研削終了後、基板の研削加工面をブラシスクラブ洗浄し、スピン乾燥したのち、粘着フィルムと半導体基板のプリント配線間にダスト(砥粒や研削屑)が存在するか否か観察したところ、ダストは見受けられなかった。
【0022】
【発明の効果】
本発明の研削ヘッド構造は、中空軸より研削液を導入し、給水ガイドを経由してカップ型砥石の砥石片とワ−ク表面の摺接面に研削液を供給する構造となっているので、カップ型砥石周りの構造が簡単であり、カップ型砥石の砥石片とワ−ク表面の摺接面に研削液が豊富な量圧送されるので、粘着フィルムと半導体基板のプリント配線間にダストが溜まることはない。
【図面の簡単な説明】
【図1】本発明の研削ヘッド構造を示す断面図である。
【図2】本発明の研削ヘッド構造に用いた給水ガイドの平面図である。
【図3】カップホイ−ル型砥石を備えた研削ヘッドの部分断面図である。(公知)
【図4】カップホイ−ル型砥石の断面図である。(公知)
【図5】カップホイ−ル型砥石の斜視図である。(公知)
【符号の説明】
50 研削ヘッド構造
51 周壁
52 底壁
53 台金
54 砥石片
55 環状突起
56 環状フランジ
57 中空軸
59 給水ガイド
60 中央凹部
61 流路用溝
62 傾斜部a
63 傾斜部b
64 流路
65 出口
66 空間部
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a grinding head structure including a semiconductor substrate such as a silicon wafer, a germanium wafer, an aluminum wafer, and a glass substrate, and a cup wheel type grindstone used for surface grinding (including polishing) a metal plate.
[Prior art]
[0002]
As the cup wheel type grindstone 5, an annular peripheral wall 5a shown in FIG. 5 and a fan-shaped grindstone piece 5d are formed on the lower surface thereof in such a manner that a slit 5f through which a grinding fluid flows is formed between adjacent grindstone pieces with an adhesive. A cup wheel type grindstone with a grinding stone piece height of 3 to 5 mm (see Japanese Utility Model Unexamined Publication Nos. 61-144959, 61-144961, 61-144962, and JP-A-62-181875) is used. It had been.
In this cup wheel type grindstone, the use efficiency of the grinding fluid is poor because the grinding fluid is supplied to the grinding surface from outside the grindstone.
[0003]
In order to increase the utilization efficiency of the grinding fluid, a center system in which the grinding fluid is supplied to the grinding surface from the inside of the cup wheel type grindstone is preferable.
The following are known as center-type cup wheel-type grindstones.
{Circle around (1)} A mounting hole for the grinding fluid supply hollow shaft is opened at the center of the base of the grinding wheel main body, and a fluid path extending radially outward from the center is provided. A cup wheel-type grindstone in which a diamond grindstone piece is fixed between the opening of each of the liquid receiving passages of the peripheral wall at the contact surface with the work (see JP-A-60-232877).
[0004]
(2) As shown in FIG. 4, a cup-shaped base metal 2 having an annular peripheral wall portion 18, a grindstone piece 6 provided on the lower end surface 4, and a liquid receiving recess formed on an upper end surface of the base metal 12. And a liquid supply hole 16 having one end opened on the inner bottom surface of the liquid receiving recess and the other end opened at a position on the inner surface side of the peripheral wall portion 2b on the lower surface of the base metal, and the inner peripheral surface 8 of the peripheral wall portion is provided. Is a cup wheel-type grindstone 1 for a surface grinding device having an inclined surface extending outward from the upper side to the lower side (Japanese Patent Laid-Open Nos. 5-69339, 6-278036, 9-38866, and 2000) -94342, Japanese Patent No. 2503158, Japanese Patent No. 2500285). In the cup wheel type grindstones disclosed in these publications, the grinding fluid is supplied to the recess 14 on the upper surface of the base metal using a supply nozzle, and the grinding wheel piece 6 passes through the inclined grinding fluid supply hole 16. And the grinding fluid is guided to the work contact surface.
[0005]
(3) As shown in FIG. 3, the annular peripheral wall 18 and a bottom wall 20 provided at one end thereof have a cup-like shape, and a grinding fluid introduction hole 28 penetrating the bottom wall. While the grinding fluid is supplied to the inside of the peripheral wall through the grinding fluid introduction hole, it is rotated around the axis and the grinding wheel piece 30 provided on the lower surface of the peripheral wall is brought into sliding contact with the work plane 14 so that the work surface is formed. A cup-shaped grindstone that grinds the grinding fluid, comprising a main body part 34 that covers an inner surface opening of the bottom wall 20 of the grinding fluid introduction hole 28 at a predetermined distance from the inner surface of the bottom wall, and is fixed to the bottom wall, A cup-type grindstone provided with a rotating impeller 16 having a plurality of blades 42 erected at predetermined intervals in a circumferential direction on one surface of a bottom wall side of the main body portion in a direction opposite to the rotation direction toward an outer peripheral side. (JP-A-9-38666).
The impeller 16 acts like a pump to pump the grinding fluid to the sliding surface between the grinding wheel and the work.
[0006]
In the cup type grinding wheel of (1), since the opening end of the liquid receiving passage is provided between the grinding wheel pieces, a large amount of the grinding fluid escapes to the outside of the grinding wheel due to centrifugal force, and the utilization rate of the grinding fluid is low.
[0007]
In the cup type grinding wheel of the above item (2), the mounting position of the nozzle for supplying the grinding liquid to the liquid receiving concave portion 14 is restricted, and the diameter of the substrate as the work is increased to 200 mm, 300 mm, and 400 mm. As the thickness becomes as thin as 20 to 100 μm, the chance of grinding dust entering between the printed circuit surface of the work and the adhesive film protecting the same increases, which is not preferable.
[0008]
In the cup-type grindstone provided with the rotary impeller of the above (3), a large amount of grinding fluid is supplied to the grindstone pieces, and grinding chips and abrasive grains enter between the printed circuit surface of the work and the adhesive film for protecting the same. This has the advantage of reducing opportunities, but the mounting position of the plurality of nozzles 46 for supplying the grinding fluid to the grinding fluid introduction hole 28 is limited, and the nozzle mounting structure is complicated.
[0009]
[Problems to be solved by the invention]
The present invention simplifies the supply of the grinding fluid to the grinding head structure by fixing the grindstone to a rotating shaft having a grinding fluid introducing section, and providing a water supply guide below the rotating shaft to remove grinding dust and abrasive grains. To provide a grinding head structure provided with a cup wheel-type grindstone that rarely penetrates between a printed circuit surface of a workpiece and an adhesive film protecting the same.
[0010]
[Means for Solving the Problems]
In the first aspect of the present invention, a cup-shaped base is formed by an annular peripheral wall in which grinding stone pieces are annularly implanted at predetermined intervals in a lower part and a bottom wall provided at one end thereof, and a grinding fluid is provided inside the peripheral wall. The cup wheel-type grindstone used to grind the work surface by being rotated about the axis while being supplied and being brought into sliding contact with the work surface by the grindstone piece implanted under the peripheral wall being hollow. Grinding head structure bearing on the shaft,
A water supply guide having a central concave portion on the upper surface, providing a channel groove radially outward from the central concave portion, and having a plurality of inclined portions whose inclination gradually decreases outward is provided around the lower part of the hollow shaft. It is fixed to the lower part of the hollow shaft through a fixed annular flange, and the base of the cup wheel-type grindstone is fixed to the annular flange through an annular projection, and a bowl is formed by the bottom wall, the annular projection and the annular flange. A grinding lid is formed to prevent the grinding fluid from leaking out from above during rotation of the hollow shaft. The grinding fluid supplied to the inside of the hollow shaft is provided with a central concave portion of the water supply guide, a groove for a flow path, and a plurality of inclined portions. The work is introduced to the inside of the peripheral wall via the portion and further supplied to the processing surface where the work and the grindstone piece are in sliding contact with each other by centrifugal force generated by rotation of the water supply guide around the hollow shaft center. The grinding head structure It is intended to provide.
[0011]
Since the grinding fluid is supplied to the hollow shaft, the structure of the grinding head portion is cleaner than that of the conventional grinding head structures (2) and (3) provided with nozzles, and the grinding operation is easy. In addition, when the grinding fluid supplied to the central recess of the water supply guide enters the flow channel groove, the flow force increases and centrifugal force is also applied, so the pumping force is high, and the grinding chips and abrasive grains are quickly removed between the grinding wheel pieces. And escape from the grindstone, so that they rarely enter the space between the printed circuit surface of the work and the adhesive film protecting it. In addition, by making the inclined portion of the outer peripheral portion of the water supply guide multistage, it is easy to supply the grinding fluid to the sliding contact surface between the grindstone piece and the work surface.
[0012]
According to a second aspect of the present invention, in the grinding head structure, the plurality of inclined portions of the water supply guide have two steps, and the inclined portion a on the center side has an angle of 30 to 60 degrees with respect to the horizontal plane, The inclined portion b has an angle of 5 to 20 degrees with respect to the horizontal plane, and the lower surface of the annular flange opposed to the outer inclined portion b has a space formed by the inclined portion b and the lower surface of the annular flange. It is characterized by being inclined outwardly so as to become gradually narrower.
[0013]
Since the space formed by the two-step inclined surface of the water supply guide and the lower inclined surface of the annular flange gradually narrows, the pressure of the grinding fluid to be pumped increases, and grinding chips and abrasive grains can be quickly removed from the slit between the grinding wheel pieces. Escape outside the whetstone.
[0014]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 is a cross-sectional view showing a grinding head structure according to the present invention, in which dimensions are described in an actual example of grinding a substrate having a diameter of 300 mm. FIG. 2 is a plan view of a water supply guide used in the grinding head structure of the present invention. The cross section of the water supply guide 59 shown in FIG. 1 is a view seen from the II cutting line in FIG.
[0015]
As shown in FIGS. 1 and 2, the grinding head structure 50 of the present invention has a cup-like shape including an annular peripheral wall 51 in which grinding stone pieces 54 are annularly implanted at predetermined intervals in an annular shape and a bottom wall 52 provided at one end thereof. The base metal 53 is used, and these form a cup wheel type grindstone.
The grinding fluid is guided to the hollow portion 58 of the hollow shaft 57 using a pump and a water supply pipe (not shown), and is passed through a flow path space 64 formed by the upper surface of the water supply guide 59 and the lower surface of the annular flange 56. And the grinding fluid is supplied to the surface of the work surface in sliding contact with the grinding wheel piece 54.
[0016]
The base 53 of the cup wheel-type grindstone is fixed to the annular projection 55 by a bolt 67, and the annular projection 55 is fixed to the annular flange 56 by a bolt 68, and the annular flange 56 is fixed to a lower portion of the hollow shaft 58. . 70 is an oil sealing. A bowl-shaped lid is formed by the bottom wall, the annular projection, and the annular flange to prevent the grinding fluid from leaking from above to the outside during rotation of the hollow shaft.
[0017]
The water supply guide 59 is fixed to the lower surface of the annular flange 56 by a bolt 69 such that the axis 59a coincides with the axis 57a of the hollow shaft. This water supply guide has a central concave portion 60 on the upper surface, a flow channel groove 61 is provided radially outward from the central concave portion, and a two-step inclined portion 62, 63 whose inclination gradually decreases outward. Have. The grinding fluid supplied to the inside of the hollow shaft 58 is guided to the central concave portion 60, and is introduced into the inner space 66 of the peripheral wall 51 via the flow channel groove 61 and the two sets of inclined portions 62 and 63. A structure is employed in which the grinding fluid is supplied to the processing surface where the work and the grindstone piece are in sliding contact by centrifugal force due to rotation of the water supply guide about the hollow shaft center 59a.
[0018]
The plurality of inclined portions of the water supply guide are in two stages, the central inclined portion a62 has an angle α of 30 to 60 degrees with respect to the horizontal plane, and the outer inclined portion b63 has an angle β of 5 to 20 with respect to the horizontal plane. The lower surface of the annular flange opposed to the outer inclined portion b is inclined outward so that the space formed by the inclined portion b and the lower surface of the annular flange gradually narrows. I have. As for the inclination angle of the lower surface of the annular flange, the inner angle γ is 35 to 60 degrees, and the outer angle θ is 10 to 20 degrees. In the water supply guide 59 of the 300 mm base grinding head structure shown in FIG. 1, the angle α is 45 degrees, the angle β is 10 degrees, the angle γ is 45 degrees, and the angle θ is 15 degrees.
It is preferable in terms of design that the length of the inclined surface a of the center side is shorter than that of the outer inclined portion b.
[0019]
The inclined portion of the water supply guide may have a plurality of stages and a structure in which the inclination angle is gradually reduced, and may be two stages or three to five stages as described above.
[0020]
Aluminum is used as a material of the base metal 53, and glass fiber reinforced resin is used as a material of the water supply guide 59. The grindstone pieces 54 are formed by molding abrasive grains such as diamond abrasive grains and CBN abrasive grains with an adhesive such as phenol resin or epoxy resin, and are provided on the lower surface of the peripheral wall at equal intervals in a ring shape. In the cup wheel type grindstone, it is preferable that the height of the slit between the grindstone pieces is 3 to 10 mm, the width of the grindstone piece is 2 to 7 mm, and the length of the grindstone piece divided by the slit is 10 to 50 mm. The inner diameter of the grinding fluid introduction hollow portion 58 is preferably about 25 mm.
[0021]
【Example】
Example 1
A precision surface grinding device SVG502MK-II (trade name) manufactured by Okamoto Machine Tool Works, Ltd. was used as a grinding device, and a grinding head structure equipped with a cup wheel type diamond grinding wheel shown in FIG. 1 was fixed to a hollow spindle of the device. .
On a substrate holder, a semiconductor substrate having a diameter of 200 mm with an adhesive protection film adhered to a printed wiring surface portion is held such that the silicon substrate surface faces upward (the adhesive film faces downward), and the substrate holder is held at 100 min -1 . The hollow spindle was rotated at 300 min -1 and the grinding head structure was lowered while supplying a grinding liquid to the hollow portion of the hollow spindle, and a grinding wheel piece was slid on the silicon substrate surface of the semiconductor substrate to perform grinding for 2 minutes.
After the grinding of the substrate, the ground surface of the substrate was brush-scrub-cleaned and spin-dried. After observing whether or not dust (abrasive particles or grinding dust) existed between the adhesive film and the printed wiring of the semiconductor substrate, No dust was found.
[0022]
【The invention's effect】
The grinding head structure of the present invention has a structure in which a grinding fluid is introduced from a hollow shaft and supplied to the grinding piece of the cup-shaped grindstone and the sliding surface of the work surface via a water supply guide. The structure around the cup-shaped grindstone is simple, and a large amount of grinding fluid is pumped to the grinding surface of the cup-shaped grindstone and the sliding surface of the work surface. Will not accumulate.
[Brief description of the drawings]
FIG. 1 is a sectional view showing a grinding head structure of the present invention.
FIG. 2 is a plan view of a water supply guide used in the grinding head structure of the present invention.
FIG. 3 is a partial sectional view of a grinding head provided with a cup wheel type grindstone. (Known)
FIG. 4 is a cross-sectional view of a cup wheel-type grindstone. (Known)
FIG. 5 is a perspective view of a cup wheel-type grindstone. (Known)
[Explanation of symbols]
Reference Signs List 50 grinding head structure 51 peripheral wall 52 bottom wall 53 base metal 54 grindstone piece 55 annular protrusion 56 annular flange 57 hollow shaft 59 water supply guide 60 central concave portion 61 flow channel groove 62 inclined portion a
63 Inclined part b
64 channel 65 outlet 66 space

Claims (2)

下部に砥石片を所定間隔で環状に植設した環状の周壁とその一端に設けられた底壁とでカップ状台金となし、該周壁の内側へ研削液が供給されつつ軸心回りに回転されて前記周壁の下部に植設された砥石片がワ−ク表面と摺接させられることによりワ−ク表面を研削するのに用いるカップホイ−ル型砥石を中空軸に軸承した研削ヘッド構造であって、
上面に中央凹部を有し、この中央凹部より外側へ向かって放射状に流路用溝を設け、外側へ向かって傾斜が次第にゆるくなる複数の傾斜部を有する給水ガイドを前記中空軸の下方周囲に固定した環状フランジを介して中空軸の下部に固定し、かつ、前記カップホイ−ル型砥石の台金を環状突起を介して前記環状フランジに固定し、前記底壁、環状突起および環状フランジでお椀状蓋体を形成して研削液が中空軸回転時に上方より外部に漏れるのを防ぐ構造とし、中空軸内部に供給された研削液は前記給水ガイドの中央凹部、流路用溝、複数の傾斜部を経由して周壁の内側へと導入され、更に前記中空軸心回りの給水ガイドの回転による遠心力によりワ−クと砥石片とが摺接する加工面に供給される構造であることを特徴とする、研削ヘッド構造。
An annular peripheral wall in which grinding stone pieces are annularly implanted at predetermined intervals in the lower part and a bottom wall provided at one end form a cup-shaped base metal, and the inner peripheral wall is rotated around the axis while the grinding fluid is supplied. A grinding wheel structure in which a cup wheel type grindstone used to grind the work surface is slidably brought into contact with the surface of the work by grinding a piece of grindstone implanted at a lower portion of the peripheral wall, and is supported on a hollow shaft. So,
A water supply guide having a central concave portion on the upper surface, providing a channel groove radially outward from the central concave portion, and having a plurality of inclined portions whose inclination gradually decreases outward is provided around the lower part of the hollow shaft. It is fixed to the lower part of the hollow shaft through a fixed annular flange, and the base of the cup wheel-type grindstone is fixed to the annular flange through an annular projection, and a bowl is formed by the bottom wall, the annular projection and the annular flange. A grinding lid is formed to prevent the grinding fluid from leaking out from above during rotation of the hollow shaft. The grinding fluid supplied to the inside of the hollow shaft is provided with a central concave portion of the water supply guide, a groove for a flow path, and a plurality of inclined portions. The work is introduced to the inside of the peripheral wall via the portion and further supplied to the processing surface where the work and the grindstone piece are in sliding contact with each other by centrifugal force generated by rotation of the water supply guide around the hollow shaft center. The grinding head structure .
前記給水ガイドの複数の傾斜部は2段であり、中心側の傾斜部aは水平面に対し角度が30〜60度の傾斜を、外側の傾斜部bは水平面に対し角度が5〜20度の傾斜を有し、該外側の傾斜部bに対向する環状フランジの下部面はこれら傾斜部bと環状フランジの下部面が形成する空間部が漸次狭くなるように外側に向かって傾斜していることを特徴とする、請求項1に記載の研削ヘッド構造。The plurality of inclined portions of the water supply guide have two steps, the central inclined portion a has an angle of 30 to 60 degrees with respect to the horizontal plane, and the outer inclined portion b has an angle of 5 to 20 degrees with respect to the horizontal surface. The lower surface of the annular flange opposed to the outer inclined portion b is inclined so that the space formed by the inclined portion b and the lower surface of the annular flange is gradually narrowed outward. The grinding head structure according to claim 1, wherein:
JP2002334769A 2002-11-19 2002-11-19 Grinding head structure with cup wheel type grindstone Expired - Lifetime JP3978118B2 (en)

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WO2016170066A1 (en) * 2015-04-24 2016-10-27 Gühring KG Lathe tool comprising a tapered coolant channel and offset coolant outlet lines and corresponding production method
CN109843508A (en) * 2017-03-17 2019-06-04 桂林创源金刚石有限公司 The water-saving cooling system of glass processing center
CN112756980A (en) * 2020-12-28 2021-05-07 安徽远大轴承科技有限公司 Bearing ring processing device
KR20230028889A (en) * 2021-08-23 2023-03-03 한국생산기술연구원 Internal injection type cutting tool and including processing device thereof
KR20230028888A (en) * 2021-08-23 2023-03-03 한국생산기술연구원 Indirect injection type cutting tool and including processing device thereof

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JP2007313639A (en) * 2006-05-23 2007-12-06 Saint-Gobain Abrasives Inc Grinding tool, grinding method and grinding system
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CN109843508A (en) * 2017-03-17 2019-06-04 桂林创源金刚石有限公司 The water-saving cooling system of glass processing center
CN112756980A (en) * 2020-12-28 2021-05-07 安徽远大轴承科技有限公司 Bearing ring processing device
CN112756980B (en) * 2020-12-28 2023-01-24 安徽远大轴承科技有限公司 Bearing ring processing device
KR20230028889A (en) * 2021-08-23 2023-03-03 한국생산기술연구원 Internal injection type cutting tool and including processing device thereof
KR20230028888A (en) * 2021-08-23 2023-03-03 한국생산기술연구원 Indirect injection type cutting tool and including processing device thereof
KR102538240B1 (en) * 2021-08-23 2023-06-01 한국생산기술연구원 Internal injection type cutting tool and including processing device thereof
KR102538937B1 (en) * 2021-08-23 2023-06-12 한국생산기술연구원 Indirect injection type cutting tool and including processing device thereof

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