JP2704533B2 - Pipe whetstone - Google Patents
Pipe whetstoneInfo
- Publication number
- JP2704533B2 JP2704533B2 JP63314156A JP31415688A JP2704533B2 JP 2704533 B2 JP2704533 B2 JP 2704533B2 JP 63314156 A JP63314156 A JP 63314156A JP 31415688 A JP31415688 A JP 31415688A JP 2704533 B2 JP2704533 B2 JP 2704533B2
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- grinding fluid
- grinding
- fluid supply
- wheel base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Description
本発明はシリコン、セラミックス、ガラス又はウエー
ハ等の硬脆材料の表面を平滑に研削するために使用され
るパイプ砥石に関するものである。The present invention relates to a pipe grindstone used to smoothly grind the surface of a hard and brittle material such as silicon, ceramics, glass or a wafer.
この種の砥石としては、例えば特公昭63−39385号公
報に開示されたダイヤモンド砥石が従来例として周知で
ある。 この従来例のダイヤモンド砥石において、ホイールベ
ースの下端外周縁から中心側に突出したフランジ部を設
け、該フランジ部の上面と下面間を貫通して多数の通孔
を設け、各通孔に筒状のダイヤモンド砥石セグメントを
嵌着し、各ダイヤモンド砥石セグメントの下端部をフラ
ンジ部の下面から突出させた構成を有している。そし
て、研削液の供給はホイールベースの内側に別途の研削
液供給パイプを配設し、該研削液供給パイプから前記フ
ランジ部の上面に研削液を供給し、そのフランジ部の上
面側から研削液通路を経てダイヤモンド砥石セグメント
の中心孔に流入して流通し、そのダイヤモンド砥石セグ
メントの下端面の中心孔から流出するようになってい
る。As such a grindstone, for example, a diamond grindstone disclosed in Japanese Patent Publication No. 63-39385 is well known as a conventional example. In this conventional diamond grindstone, a flange portion protruding toward the center from the outer peripheral edge at the lower end of the wheel base is provided, a large number of through holes are provided through the upper surface and the lower surface of the flange portion, and a cylindrical shape is provided in each through hole. And the lower end of each diamond whetstone segment protrudes from the lower surface of the flange portion. For the supply of the grinding fluid, a separate grinding fluid supply pipe is provided inside the wheel base, the grinding fluid is supplied from the grinding fluid supply pipe to the upper surface of the flange portion, and the grinding fluid is supplied from the upper surface side of the flange portion. The fluid flows into the central hole of the diamond grinding wheel segment through the passage, flows therethrough, and flows out of the central hole at the lower end surface of the diamond grinding wheel segment.
前記従来例のダイヤモンド砥石は、ホイールベース
の下端にフランジ部を設けたこと、そのフランジ部の
上面と下面間を貫通して通孔を設けたこと、その通孔
にダイヤモンド砥石セグメントを嵌着したことの構成上
の理由から、研削液の供給が別途の研削液供給パイプを
介してフランジ部の上面に供給される構成に成らざるを
得ないのである。 しかしながら、このような構成であると、研削液の供
給が各ダイヤモンド砥石セグメントに対して略均等な状
態で供給されないのである。つまり、主軸の回転によっ
てホイールベースが回転し、その回転による遠心力でフ
ランジ部の上面に供給された研削液がフランジ部の基部
側、即ちホイールベースとの境界側に集中し、境界側に
位置するダイヤモンド砥石セグメントと境界から離れて
位置するダイヤモンド砥石セグメントとでは、必然的に
研削液の量及び圧力が相違することになる。又、各ダイ
ヤモンド砥石セグメント毎に研削液が夫々個別にガイド
される訳ではないから、各ダイヤモンド砥石セグメント
毎の研削液の量及び圧力にバラツキが生ずることにな
る。 このように、各ダイヤモンド砥石セグメント毎の研削
液の量及び圧力に相違及びバラツキが生ずることによっ
て、研削しようとする材料との間で各ダイヤモンド砥石
セグメント毎に摩擦熱の発生度合が相違し、且つ研削能
力にもバラツキが生ずることになり、要求される均等な
平滑面に研削できないと云う課題を有している。The conventional diamond grindstone has a flange portion provided at the lower end of the wheel base, a through-hole is provided through the upper surface and the lower surface of the flange portion, and a diamond grindstone segment is fitted into the through-hole. For this reason, the supply of the grinding fluid must be supplied to the upper surface of the flange portion through a separate grinding fluid supply pipe. However, with such a configuration, the supply of the grinding fluid is not supplied to each diamond grinding wheel segment in a substantially uniform state. In other words, the rotation of the main shaft rotates the wheel base, and the grinding fluid supplied to the upper surface of the flange portion by the centrifugal force due to the rotation concentrates on the base side of the flange portion, that is, the boundary side with the wheel base, and is located on the boundary side. Inevitably, the amount and pressure of the grinding fluid are different between the diamond wheel segment to be formed and the diamond wheel segment located away from the boundary. In addition, since the grinding fluid is not individually guided for each diamond grinding wheel segment, the amount and pressure of the grinding fluid for each diamond grinding wheel segment vary. As described above, since the difference and the variation occur in the amount and pressure of the grinding fluid for each diamond grinding wheel segment, the degree of frictional heat generation differs for each diamond grinding wheel segment with the material to be ground, and There is also a problem in that the grinding ability varies, and the required uniform smooth surface cannot be ground.
前記従来例の課題を解決する具体的手段として本発明
は、ホイールベースの環状端部に外側に向けて所定の傾
斜をもって突出させて電着法によって形成したパイプ状
砥石チップを複数配設し、これ等各パイプ状砥石チップ
のパイプ内部に連通する研削液供給孔がそれぞれ前記ホ
イールベースの取り付け面に開口して設けられていると
共に、該パイプ状砥石チップの配設位置よりも内側で前
記環状端部の内側に形成されたテーパ面に開口する補助
研削液供給孔が設けられたパイプ砥石を要旨とするもの
である。As a specific means for solving the problems of the conventional example, the present invention provides a plurality of pipe-shaped grindstone tips formed by electrodeposition by projecting outward at a predetermined inclination to the annular end of the wheel base, A grinding fluid supply hole communicating with the inside of the pipe of each of the pipe-shaped grindstone tips is provided to be opened on the mounting surface of the wheel base, respectively, and the annular shape is provided inside the arrangement position of the pipe-shaped grindstone tips. The gist of the present invention is a pipe grindstone provided with an auxiliary grinding fluid supply hole that opens on a tapered surface formed inside the end.
次に本発明を図示の実施例により更に詳しく説明する
と、第１〜３図に示した第１実施例において、１はホイ
ールベースであり、該ホイールベースはアルミニウム等
の金属により略ドーナツ形状に形成される。このホイー
ルベース１はその下端部、即ち環状端部２に複数のパイ
プ状砥石チップ３を植設状態に且つ外側に向けて所定の
傾斜をもって取り付ける。そして、各パイプ状砥石チッ
プ３に連通させて夫々研削液供給孔４をホイールベース
１の上面、即ちホイールベース１の取付面５に貫通して
形成する。 前記パイプ状砥石チップ３の取り付けに当たっては、
予めパイプ状砥石チップ３の取り付け角度に沿って且つ
その内径に略等しい孔、即ち研削液供給孔４を環状端部
２から取付面５に貫通させて夫々穿設し、次に各研削液
供給孔４に沿って環状端部２側からパイプ状砥石チップ
３の外径に略等しい孔を夫々一定深さに亘って形成す
る。そして、各孔にパイプ状砥石チップ３を挿着して、
エポキシ樹脂系の接着剤により接着固定するのである。 この場合に使用されるパイプ状砥石チップ３は、ダイ
ヤモンド砥粒をニッケル電着法により、例えば長尺のア
ルミニウム細管の表面に所定厚さ積層形成し、その後ア
ルミニウム細管を溶解してパイプ状の砥石素材に形成
し、そのパイプ状の砥石素材を所定長さに切断したもの
である。 前記ホイールベース１は、前記環状端部２の内側をテ
ーパ面６に形成し、内側に付着した研削液又は水滴等を
ホイールベース１の回転による遠心力で外部に排出する
ように形成してある。又ホイールベース１の取付面５に
は、取付用のネジ孔７が所定の間隔をもって複数箇所に
亘って形成してある。この取付用のネジ孔７は、ホイー
ルベース１に直接形成しても良いし、又ホイールベース
に単に孔を穿け、その孔内に予め内側に雌ネジを有する
ネジピースを埋設し、溶着して取り付けても良い。更
に、必要ならば取付面側において、研削液供給孔４を一
連に連通させる環状溝を設けても良い。 この場合に、ホイールベース１の取付面５にネジ孔７
が設けられることにより、研削液供給孔４が形成出来な
い部分が存することになる。この部分においては、勿論
パイプ状砥石チップ３の取付も出来ないのであり、約１
本分のパイプ状砥石チップ３の取付が間引きされる。従
って、取付用のネジ孔７の存在によって、前記パイプ状
砥石チップ３群が複数に分割されることになるが、その
機能には全く影響を及ぼさないのである。 又、ホイールベース１の取付面５におけるネジ孔７の
形成は、研削液供給孔４を避けて形成することができ
る。つまり、ホイールベース１の取付面を稍々広めに形
成し、研削液供給孔４と重ならない位置に取付用のネジ
孔７を形成すれば良い。このようにネジ孔７を形成する
ことで、パイプ状砥石チップ３を略均等に取付配設する
ことが出来るのである。 第４図に第２実施例を示してある。この第２実施例
は、前記第１実施例に補助研削液供給孔８を付加した点
が相違するのみで、他の構成部分は同一であり、その同
一部分には同一符号を付してその詳細は省略する。即
ち、補助研削液供給孔８は前記取付面５において前記各
研削液供給孔４と分岐又は隣接して夫々穿設され、その
下端をパイプ状砥石チップ３の近傍で且つパイプ状砥石
チップの配設位置よりも内側に開口させ、限定されない
が良好な開口位置としては、例えば前記テーパ面６に開
口させた方が良い。この場合に、補助研削液供給孔８は
研削液供給孔４よりも内側、つまりホイールベース１に
おける中心側に穿設して位置させ、研削液が前記テーパ
面６を伝って流下し、ホイールベース１の遠心力により
前記パイプ状砥石チップ３の外周面に供給される。この
ように研削液をパイプ状砥石チップ３の内側からだけで
なく、外側にも供給することにより、被研削物の研削時
に摩擦による発熱を更に効果的に抑制することが出来る
のである。 第５図に前記ホイールベース１が取り付けられるベー
ス又はヘッド部材10が示されている。同ヘッド部材10は
略円盤状を呈し、その中心位置が適宜の駆動源により駆
動される回転軸11に一体的に取り付けられている。この
ヘッド部材10の内部には研削液が所定の圧力で流通する
複数の通水路12が設けられ、これらの通水路12は前記回
転軸11内に設けられた通水路13から夫々分岐して設けら
れる。前記複数の通水路12はその開口部において環状溝
12aによって連通状態になり、そしてその環状溝12aは、
前記ホイールベース１の研削液供給孔４に対応するので
ある。 つまり、ヘッド部材10に対してホイールベース１の取
付面５を当接させ、ネジ孔７にボルト14等螺着させて取
り付けることで、通水路12と研削液供給孔４とが環状溝
12aを介して対応し連通状態になり、通水路12からの研
削液が所定の圧力をもって必然的に研削液供給孔４に流
通し、その先端から吐出又は噴出するようになるのであ
る。尚、第２実施例の場合も、研削液供給孔４と補助研
削液供給孔８とが共に環状溝12aを介して通水路12に臨
み、前記同様に研削液が所定の圧力をもって吐出又は噴
出するのである。 前記構成を有する本発明のパイプ砥石と従来例の砥石
とを「シリコンウエーハ」の切削に関し、同一条件で実
際に試験した。 イ 使用砥石 本発明 従来例 砥石の直径 200mm 200mm 研削材の粒度 ＃4000 ＃4000 研削材の粒径 ２−４μｍ ２−４μｍ ロ 条件 送り速度 160mm/min 160mm/min 切削深さ ５μｍ ５μｍ 使用モード １−pass １−pass 冷却水 水道水 水道水 冷却水流量 4.0/min 4.0/min 周側度 50m/sec 50m/sec 回転数 4850（R.P.M） 4850（R.P.M） 上記により夫々連続して、「シリコンウエーハ」を70
0枚づつ研削し、各20枚毎に検査品として１枚づつピッ
クアップし、夫々35枚づつを検査した。その検査品にお
ける研削面状態、即ち研削面における山と谷の凹凸の平
均値Raが本発明のものにおいて、良好なもの＝Ra0.013
μｍであり、荒れたもの＝Ra0.023μｍであった。これ
に対して従来例のものは、良好なもの＝Ra0.018μｍで
あり、荒れたもの＝Ra0.108μｍであった。 この試験結果から明らかなように、本発明の砥石を使
用した場合に、従来例のものよりも研削面が著しく平滑
であり、しかも研削面のバラツキが少なく、平均してい
る点で優れた結果が得られた。これは、各パイプ状砥石
チップ３から強制的に所定の圧力で所定の量の研削液が
吐出又は噴射される結果、多数並設した各パイプ状砥石
チップ３が夫々均等な研削条件になるためと推察され
る。Next, the present invention will be described in more detail with reference to the illustrated embodiment. In the first embodiment shown in FIGS. 1 to 3, reference numeral 1 denotes a wheel base, which is formed in a substantially donut shape by a metal such as aluminum. Is done. The wheel base 1 has a plurality of pipe-shaped grindstone tips 3 attached to a lower end portion, that is, an annular end portion 2 of the wheel base 1 in an implanted state and with a predetermined inclination toward the outside. Then, the grinding fluid supply holes 4 are formed so as to penetrate the upper surface of the wheel base 1, that is, the mounting surface 5 of the wheel base 1 so as to communicate with the respective pipe-shaped grindstone tips 3. In mounting the pipe-shaped whetstone tip 3,
A hole substantially equal to the inner diameter of the pipe-shaped grindstone tip 3, that is, a grinding fluid supply hole 4, is previously drilled from the annular end portion 2 to the mounting surface 5, and then each grinding fluid supply is performed. Holes substantially equal to the outer diameter of the pipe-shaped grindstone tip 3 are formed from the annular end portion 2 side along the holes 4 over a certain depth. Then, insert the pipe-shaped whetstone tip 3 into each hole,
The adhesive is fixed with an epoxy resin adhesive. The pipe-shaped grinding wheel tip 3 used in this case is formed by laminating diamond abrasive grains to a predetermined thickness on a surface of, for example, a long aluminum thin tube by a nickel electrodeposition method, and then dissolving the aluminum thin tube to form a pipe-shaped grinding wheel. It is formed into a material, and the pipe-shaped whetstone material is cut into a predetermined length. The wheel base 1 is formed such that the inside of the annular end portion 2 is formed into a tapered surface 6 and the grinding fluid or water droplets adhered to the inside is discharged to the outside by centrifugal force caused by the rotation of the wheel base 1. . In the mounting surface 5 of the wheel base 1, mounting screw holes 7 are formed at a plurality of locations at predetermined intervals. The mounting screw hole 7 may be formed directly in the wheel base 1 or may be formed by simply drilling a hole in the wheel base, embedding a screw piece having a female screw inside in advance, and welding the hole. May be. Further, if necessary, an annular groove may be provided on the mounting surface side to allow the grinding fluid supply holes 4 to communicate in series. In this case, a screw hole 7 is formed in the mounting surface 5 of the wheel base 1.
Is provided, there is a portion where the grinding fluid supply hole 4 cannot be formed. In this part, of course, the pipe-shaped grindstone tip 3 cannot be attached,
The attachment of the pipe-shaped whetstone tip 3 is thinned out. Therefore, the pipe-shaped grindstone tip group 3 is divided into a plurality of groups by the presence of the mounting screw holes 7, but the function thereof is not affected at all. Further, the screw holes 7 in the mounting surface 5 of the wheel base 1 can be formed avoiding the grinding fluid supply holes 4. That is, the mounting surface of the wheel base 1 may be formed slightly wider, and the mounting screw holes 7 may be formed at positions not overlapping with the grinding fluid supply holes 4. By forming the screw holes 7 in this manner, the pipe-shaped grindstone chips 3 can be attached and arranged substantially uniformly. FIG. 4 shows a second embodiment. The second embodiment is different from the first embodiment only in that an auxiliary grinding fluid supply hole 8 is added, and the other components are the same. Details are omitted. That is, the auxiliary grinding fluid supply hole 8 is formed in the mounting surface 5 at a position branched or adjacent to each of the grinding fluid supply holes 4, and the lower end thereof is located near the pipe-shaped grinding wheel tip 3 and is provided with the pipe-shaped grinding wheel tip. It is preferable that the opening is provided on the inner side of the installation position, and the opening is not limited, but is provided on the tapered surface 6, for example. In this case, the auxiliary grinding fluid supply hole 8 is located inside the grinding fluid supply hole 4, that is, on the center side of the wheel base 1, and the grinding fluid flows down along the tapered surface 6, Due to the centrifugal force of 1, the fluid is supplied to the outer peripheral surface of the pipe-shaped grindstone tip 3. Thus, by supplying the grinding fluid not only from the inside of the pipe-shaped grindstone chip 3 but also to the outside thereof, heat generation due to friction during grinding of the workpiece can be more effectively suppressed. FIG. 5 shows a base or head member 10 to which the wheel base 1 is attached. The head member 10 has a substantially disk shape, and its center position is integrally attached to a rotating shaft 11 driven by an appropriate drive source. A plurality of water passages 12 through which the grinding fluid flows at a predetermined pressure are provided inside the head member 10, and these water passages 12 are provided by branching off from water passages 13 provided in the rotating shaft 11. Can be The plurality of water passages 12 have annular grooves at their openings.
A communication is established by 12a, and its annular groove 12a
This corresponds to the grinding fluid supply hole 4 of the wheel base 1. That is, by attaching the mounting surface 5 of the wheel base 1 to the head member 10 and screwing the bolt 14 into the screw hole 7, the water passage 12 and the grinding fluid supply hole 4 are formed in an annular groove.
Correspondingly, a communication state is established through 12a, and the grinding fluid from the water passage 12 necessarily flows to the grinding fluid supply hole 4 with a predetermined pressure, and is discharged or ejected from the tip. In the case of the second embodiment as well, the grinding fluid supply hole 4 and the auxiliary grinding fluid supply hole 8 both face the water passage 12 via the annular groove 12a, and the grinding fluid is discharged or jetted at a predetermined pressure in the same manner as described above. You do it. The pipe grindstone of the present invention having the above configuration and the grindstone of the conventional example were actually tested under the same conditions with respect to cutting of a "silicon wafer". B. Grinding stone used Conventional diameter of grinding wheel of the present invention 200 mm 200 mm Grain size of grinding material # 4000 # 4000 Grain size of grinding material 2-4 μm 2-4 μm b Condition Feeding speed 160 mm / min 160 mm / min Cutting depth 5 μm 5 μm Usage mode 1 pass 1-pass Cooling water Tap water Tap water Cooling water flow rate 4.0 / min 4.0 / min Circumferential degree 50m / sec 50m / sec Rotation speed 4850 (RPM) 4850 (RPM) 70
0 sheets were ground at a time, and every 20 sheets were picked up one by one as an inspection product, and 35 sheets each were inspected. The state of the ground surface in the inspected product, that is, the average value Ra of peaks and valleys on the ground surface is good in the present invention = Ra0.013.
μm, and the roughness was Ra 0.023 μm. On the other hand, in the case of the conventional example, good = Ra0.018 μm, and rough = Ra0.108 μm. As is clear from the test results, when the grindstone of the present invention was used, the ground surface was remarkably smoother than that of the conventional example, and the dispersion of the ground surface was small, and the result was excellent in that the average was obtained. was gotten. This is because a predetermined amount of grinding fluid is forcibly discharged or jetted at a predetermined pressure from each pipe-shaped grindstone chip 3, so that a large number of the pipe-shaped grindstone chips 3 arranged in parallel have uniform grinding conditions. It is inferred.
以上説明したように本発明に係るパイプ砥石は、研削
液供給孔と補助研削液供給孔とを組み合わせ、補助研削
液供給孔は各パイプ状砥石チップに対応させてホイール
ベースの内側テーパ面に開口させて配設したので、研削
液をパイプ状砥石チップの内側からだけでなく、外側に
も供給することができ、これにより各パイプ状砥石チッ
プへの研削液の供給量及び供給圧力にバラツキがなくな
ると共に、研削時に生じる摩擦熱を効果的に抑制するこ
とができ、均等に且つ平滑に研削することができる等の
優れた効果を奏する。又、ホイルベースの内側テーパ面
により、補助研削液供給孔からの研削液が各パイプ状砥
石チップの外周面に強制的にしかも効率良くガイドされ
る効果も奏する。As described above, the pipe grindstone according to the present invention combines the grinding fluid supply hole and the auxiliary grinding fluid supply hole, and the auxiliary grinding fluid supply hole is opened on the inner tapered surface of the wheel base corresponding to each pipe-shaped grindstone tip. The grinding fluid can be supplied not only from the inside of the pipe-shaped grindstone tip but also to the outside, thereby causing variation in the supply amount and supply pressure of the grinding fluid to each pipe-shaped grindstone tip. In addition, the frictional heat generated during grinding can be effectively suppressed, and excellent effects such as uniform and smooth grinding can be achieved. In addition, the inner tapered surface of the wheel base has an effect that the grinding fluid from the auxiliary grinding fluid supply hole is forcibly and efficiently guided to the outer peripheral surface of each pipe-shaped grindstone tip.
第１図は本発明に係る第１実施例のパイプ砥石の一部を
断面で示した側面図、第２図は同パイプ砥石の一部を示
す上面図、第３図は第２図のIII−III線に沿う断面図、
第４図は第２実施例のパイプ砥石の要部のみを示した断
面図、第５図は本発明のパイプ砥石を所定の取付用のヘ
ッド部材に取り付けた状態を示す一部破断側面図であ
る。 １……ホイールベース、２……環状端部 ３……パイプ状砥石チップ ４……研削液供給孔、５……取付面 ６……テーパ面、７……ネジ孔 ８……補助研削液供給孔 10……ヘッド部材、11……回転軸 12、13……通水路、12a……環状溝 14……ボルト1 is a side view showing a part of a pipe grindstone of a first embodiment according to the present invention in cross section, FIG. 2 is a top view showing a part of the pipe grindstone, and FIG. 3 is III in FIG. A cross-sectional view along the line III,
FIG. 4 is a sectional view showing only a main part of the pipe grindstone of the second embodiment, and FIG. 5 is a partially broken side view showing a state where the pipe grindstone of the present invention is mounted on a predetermined mounting head member. is there. DESCRIPTION OF SYMBOLS 1 ... Wheel base, 2 ... Annular end part 3 ... Pipe-shaped grindstone tip 4 ... Grinding fluid supply hole 5, ... Mounting surface 6 ... Tapered surface, 7 ... Screw hole 8 ... Supplementary grinding fluid supply Hole 10: Head member, 11: Rotating shaft 12, 13: Water passage, 12a: Annular groove 14: Bolt
Claims (1)
所定の傾斜をもって突出させて電着法によって形成した
パイプ状砥石チップを複数配設し、これ等各パイプ状砥
石チップのパイプ内部に連通する研削液供給孔が夫々前
記ホイールベースの取付面に開口して設けられていると
共に、該パイプ状砥石チップの配設位置よりも内側で前
記環状端部の内側に形成されたテーパ面に開口する補助
研削液供給孔が設けられたことを特徴とするパイプ砥
石。1. A plurality of pipe-shaped grindstone chips formed by electrodeposition by projecting outward at a predetermined inclination from an annular end of a wheel base, and each of these pipe-shaped grindstone chips is provided inside a pipe. Grinding fluid supply holes communicating with each other are provided in the mounting surface of the wheel base so as to be opened, and a tapered surface formed inside the annular end portion inside the arrangement position of the pipe-shaped grindstone tip. A pipe whetstone having an auxiliary grinding fluid supply hole that opens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63314156A JP2704533B2 (en) | 1988-12-13 | 1988-12-13 | Pipe whetstone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63314156A JP2704533B2 (en) | 1988-12-13 | 1988-12-13 | Pipe whetstone |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02160475A JPH02160475A (en) | 1990-06-20 |
| JP2704533B2 true JP2704533B2 (en) | 1998-01-26 |
Family
ID=18049912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63314156A Expired - Fee Related JP2704533B2 (en) | 1988-12-13 | 1988-12-13 | Pipe whetstone |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2704533B2 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0785620B2 (en) * | 1990-09-27 | 1995-09-13 | 誠新産業株式会社 | Wiring adapter and method of laying underground cable using wiring adapter |
| JP4874597B2 (en) * | 2005-08-04 | 2012-02-15 | 株式会社ディスコ | Manufacturing method of grinding wheel |
| CA2733305C (en) | 2008-08-08 | 2015-07-14 | Saint-Gobain Abrasives, Inc. | Abrasive tools having a continuous metal phase for bonding an abrasive component to a carrier |
| US9097067B2 (en) | 2009-02-12 | 2015-08-04 | Saint-Gobain Abrasives, Inc. | Abrasive tip for abrasive tool and method for forming and replacing thereof |
| PL2519381T3 (en) | 2009-12-31 | 2018-03-30 | Saint-Gobain Abrasives, Inc. | Abrasive article incorporating an infiltrated abrasive segment |
| PL2593274T3 (en) | 2010-07-12 | 2017-09-29 | Saint-Gobain Abrasives, Inc. | Abrasive article for shaping of industrial materials |
| JP6367614B2 (en) * | 2014-06-09 | 2018-08-01 | 株式会社ディスコ | Grinding wheel manufacturing method |
| JP6041249B1 (en) * | 2016-03-31 | 2016-12-07 | 伊藤 幸男 | Chopping processing method using bird's nest-like grindstone and bird's nest-like grindstone |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5541272U (en) * | 1978-09-11 | 1980-03-17 | ||
| JPS5917573Y2 (en) * | 1980-08-08 | 1984-05-22 | 本田技研工業株式会社 | Grinding wheel for surface grinding |
| JPS6339385A (en) * | 1986-08-05 | 1988-02-19 | Fuji Photo Film Co Ltd | Information recording medium |
-
1988
- 1988-12-13 JP JP63314156A patent/JP2704533B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02160475A (en) | 1990-06-20 |
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