TW365024B - ROM with trench structure and manufacturing method thereof - Google Patents
ROM with trench structure and manufacturing method thereofInfo
- Publication number
- TW365024B TW365024B TW084111774A TW84111774A TW365024B TW 365024 B TW365024 B TW 365024B TW 084111774 A TW084111774 A TW 084111774A TW 84111774 A TW84111774 A TW 84111774A TW 365024 B TW365024 B TW 365024B
- Authority
- TW
- Taiwan
- Prior art keywords
- trench
- wordline
- silicon film
- rom
- manufacturing
- Prior art date
Links
Landscapes
- Semiconductor Memories (AREA)
Abstract
A kind of ROM with trench structure and the manufacturing method thereof which is after the etching forming the trench on the substrate to dispose a polycrystalline silicon film on the substrate surface and fill in the trench as the bitline. By the shielding layer, the first dielectric layer formed by oxidation of polycrystalline silicon film will be set as the first data storage area. Then, by removing the shielding layer and employing the first dielectric layer as the mask to etch the silicon film and form the trench which the second dielectric layer is formed there and cover the second data storage area. Last, form the wordline on the first and second dielectric layers. So, the method can reduce the parasitic capacitors between the wordline and bitline, and from the wordline to substrate and there is no need for coding implantation to get the coding plan.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW084111774A TW365024B (en) | 1995-11-07 | 1995-11-07 | ROM with trench structure and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW084111774A TW365024B (en) | 1995-11-07 | 1995-11-07 | ROM with trench structure and manufacturing method thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
TW365024B true TW365024B (en) | 1999-07-21 |
Family
ID=57941020
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW084111774A TW365024B (en) | 1995-11-07 | 1995-11-07 | ROM with trench structure and manufacturing method thereof |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW365024B (en) |
-
1995
- 1995-11-07 TW TW084111774A patent/TW365024B/en active
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