TW358951B - Platinum resistor temperature sensor structure and the manufacturing method - Google Patents
Platinum resistor temperature sensor structure and the manufacturing methodInfo
- Publication number
- TW358951B TW358951B TW086120030A TW86120030A TW358951B TW 358951 B TW358951 B TW 358951B TW 086120030 A TW086120030 A TW 086120030A TW 86120030 A TW86120030 A TW 86120030A TW 358951 B TW358951 B TW 358951B
- Authority
- TW
- Taiwan
- Prior art keywords
- platinum
- cavity
- temperature sensor
- substrate
- resistor temperature
- Prior art date
Links
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- Thermistors And Varistors (AREA)
Abstract
Manufacturing method of a platinum resistor temperature sensor structure, including the following steps: forming a mask on the substrate surface, of a pattern identical to the negative pattern of the platinum circuit in the platinum resistor temperature sensor; etching of the substrate for forming cavity on the substrate by means of the mask aperture, being the pattern of the cavity identical the pattern of the positive of the platinum circuit of the platinum resistor temperature sensor; removal of the mask; forming a dielectric layer on the substrate with etch and the surface of the cavity, being divided the dielectric layer into cavity sector of rough surface in the cavity and the smooth sector on the substrate surface; coating of a platinum member on the dielectric surface, being divided into the first platinum layer in the cavity sector of the cavity, and the second platinum layer in the smooth sector on the substrate surface; and surface polishing to the dielectric layer and the platinum substrate, with removal of the second platinum layer in the smooth area in the dielectric layer and the first platinum layer attached in the cavity in the cavity, for forming of the platinum circuit of platinum resistor temperature sensor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086120030A TW358951B (en) | 1997-12-29 | 1997-12-29 | Platinum resistor temperature sensor structure and the manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086120030A TW358951B (en) | 1997-12-29 | 1997-12-29 | Platinum resistor temperature sensor structure and the manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
TW358951B true TW358951B (en) | 1999-05-21 |
Family
ID=57940554
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086120030A TW358951B (en) | 1997-12-29 | 1997-12-29 | Platinum resistor temperature sensor structure and the manufacturing method |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW358951B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI472012B (en) * | 2005-01-19 | 2015-02-01 | Samsung Display Co Ltd | Sensor, thin film transistor array panel, and display panel including the sensor |
-
1997
- 1997-12-29 TW TW086120030A patent/TW358951B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI472012B (en) * | 2005-01-19 | 2015-02-01 | Samsung Display Co Ltd | Sensor, thin film transistor array panel, and display panel including the sensor |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |