TW346678B - Method for producing memory cell array - Google Patents

Method for producing memory cell array

Info

Publication number
TW346678B
TW346678B TW086103797A TW86103797A TW346678B TW 346678 B TW346678 B TW 346678B TW 086103797 A TW086103797 A TW 086103797A TW 86103797 A TW86103797 A TW 86103797A TW 346678 B TW346678 B TW 346678B
Authority
TW
Taiwan
Prior art keywords
forming
layer
insulator
semiconductor substrate
drain region
Prior art date
Application number
TW086103797A
Other languages
English (en)
Inventor
Jan-Mye Sung
Original Assignee
Vanguard Int Semiconduct Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vanguard Int Semiconduct Corp filed Critical Vanguard Int Semiconduct Corp
Priority to TW086103797A priority Critical patent/TW346678B/zh
Priority to JP10058292A priority patent/JPH10321820A/ja
Application granted granted Critical
Publication of TW346678B publication Critical patent/TW346678B/zh

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  • Semiconductor Memories (AREA)
TW086103797A 1997-03-25 1997-03-25 Method for producing memory cell array TW346678B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW086103797A TW346678B (en) 1997-03-25 1997-03-25 Method for producing memory cell array
JP10058292A JPH10321820A (ja) 1997-03-25 1998-03-10 メモリーセルアレイ製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086103797A TW346678B (en) 1997-03-25 1997-03-25 Method for producing memory cell array

Publications (1)

Publication Number Publication Date
TW346678B true TW346678B (en) 1998-12-01

Family

ID=21626477

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086103797A TW346678B (en) 1997-03-25 1997-03-25 Method for producing memory cell array

Country Status (2)

Country Link
JP (1) JPH10321820A (zh)
TW (1) TW346678B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6274409B1 (en) * 2000-01-18 2001-08-14 Agere Systems Guardian Corp. Method for making a semiconductor device

Also Published As

Publication number Publication date
JPH10321820A (ja) 1998-12-04

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees