TW346248U - Semiconducter device fabrication with handlers - Google Patents

Semiconducter device fabrication with handlers

Info

Publication number
TW346248U
TW346248U TW086217278U TW86217278U TW346248U TW 346248 U TW346248 U TW 346248U TW 086217278 U TW086217278 U TW 086217278U TW 86217278 U TW86217278 U TW 86217278U TW 346248 U TW346248 U TW 346248U
Authority
TW
Taiwan
Prior art keywords
handlers
device fabrication
semiconducter device
semiconducter
fabrication
Prior art date
Application number
TW086217278U
Other languages
Chinese (zh)
Inventor
Byoung-Soo Song
Chan-Ii Yu
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of TW346248U publication Critical patent/TW346248U/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
TW086217278U 1995-12-29 1996-10-28 Semiconducter device fabrication with handlers TW346248U (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950067543A KR0168808B1 (en) 1995-12-29 1995-12-29 Semiconductor device fabrication apparatus with handlers

Publications (1)

Publication Number Publication Date
TW346248U true TW346248U (en) 1998-11-21

Family

ID=19447783

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086217278U TW346248U (en) 1995-12-29 1996-10-28 Semiconducter device fabrication with handlers

Country Status (3)

Country Link
JP (1) JPH09191042A (en)
KR (1) KR0168808B1 (en)
TW (1) TW346248U (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100394507B1 (en) * 1999-04-23 2003-08-14 주식회사 디이엔티 device for pre-align for LCD handler
KR100390850B1 (en) * 2000-12-28 2003-07-10 한국 고덴시 주식회사 Sensing control equipment

Also Published As

Publication number Publication date
JPH09191042A (en) 1997-07-22
KR0168808B1 (en) 1999-02-01
KR970052087A (en) 1997-07-29

Similar Documents

Publication Publication Date Title
GB2292010B (en) Semiconductor device
GB2295488B (en) Semiconductor device
EP0690486A3 (en) Semiconductor device fabrication
TW520816U (en) Semiconductor device
EP0704897A3 (en) Semiconductor device
TW505356U (en) Semiconductor device
EP0702404A3 (en) Semiconductor device
EP0714129A3 (en) Semiconductor device
EP0723292A3 (en) Semiconductor device
EP0720295A3 (en) Semiconductor device
TW490082U (en) Semiconductor device
GB9523207D0 (en) Semiconductor device
GB2292637B (en) Semiconductor device
GB2295272B (en) Semiconductor device
SG63659A1 (en) Semiconductor device
GB2308740B (en) Semiconductor device
GB2303963B (en) Semiconductor device
GB2296373B (en) Semiconductor device
EP0716445A3 (en) Semiconductor device
GB2295051B (en) Semiconductor device
AU3378995A (en) Semiconductor device with at least one semiconductor component
GB9402639D0 (en) Semiconductor device
TW346248U (en) Semiconducter device fabrication with handlers
GB9513898D0 (en) Semiconductor device
GB9604764D0 (en) Semiconductor device fabrication