KR970052087A - Semiconductor manufacturing device with handler - Google Patents

Semiconductor manufacturing device with handler Download PDF

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Publication number
KR970052087A
KR970052087A KR1019950067543A KR19950067543A KR970052087A KR 970052087 A KR970052087 A KR 970052087A KR 1019950067543 A KR1019950067543 A KR 1019950067543A KR 19950067543 A KR19950067543 A KR 19950067543A KR 970052087 A KR970052087 A KR 970052087A
Authority
KR
South Korea
Prior art keywords
handler
semiconductor manufacturing
switches
manufacturing apparatus
handlers
Prior art date
Application number
KR1019950067543A
Other languages
Korean (ko)
Other versions
KR0168808B1 (en
Inventor
송병수
유찬일
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950067543A priority Critical patent/KR0168808B1/en
Priority to TW086217278U priority patent/TW346248U/en
Priority to JP8316690A priority patent/JPH09191042A/en
Publication of KR970052087A publication Critical patent/KR970052087A/en
Application granted granted Critical
Publication of KR0168808B1 publication Critical patent/KR0168808B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

본 발명은 챔버 내에서 웨이퍼를 이송하기 위한 핸들러들을 가지는 반도체 제조 장치에 관한 것으로, 핸들러의 시퀀스 제어 오류의 원인을 쉽게 파악할 수 있도록 하기 위해, 릴레이들(10, 20, 30, 40)과 발광 다이오드들(50, 60, 70, 80)로 각 핸들러의 위치를 검출하기 위한 스위치의 동작 상태를 표시한다. 이로써, 발광 다이오드들(50~80)의 도통/부도통 상태를 확인하면 마이크로 리미트 스위치들에 의한 핸들러들의 위치 검출이 정상적으로 이루어지고 있는 지의 여부를 쉽게 알 수 있게 되므로 장치의 유지를 위한 시간의 손실을 줄일 수 있게 된다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing apparatus having handlers for transferring wafers in a chamber, in order to easily identify the cause of the sequence control error of the handler, the relays 10, 20, 30, 40 and the light emitting diode. Fields 50, 60, 70, and 80 indicate the operating state of the switch for detecting the position of each handler. As a result, when the conduction / non-conduction state of the light emitting diodes 50 to 80 is confirmed, it is easy to know whether the position detection of the handlers by the micro limit switches is normally performed, and thus the loss of time for the maintenance of the device. Can be reduced.

Description

핸들러를 가지는 반도체 제조 장치Semiconductor manufacturing device with handler

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2도는 본 발명에 따른 마이크로 리미트 스위치 상태 표시 회로.2 is a micro limit switch state display circuit according to the present invention.

Claims (2)

챔버내에서 웨이퍼를 이송하기 위한 핸들러들과 각 핸들러의 위치를 검출하기 위한 스위치들을 구비하는 반도체 제조 장치에 있어서, 상기 스위치들 각각의 동작 상태를 표시하는 표시 수단을 구비하는 것을 특징으로 하는 핸들러를 가지는 반도체 제조 장치.A semiconductor manufacturing apparatus comprising handlers for transferring wafers in a chamber and switches for detecting a position of each handler, the semiconductor manufacturing apparatus comprising: display means for displaying an operating state of each of the switches; Semiconductor manufacturing apparatus which has. 제1항에 있어서, 상기 표시 수단은, 상기 스위치들에 대응되게 연결되고, 상기 스위치들 각각이 해당 핸들러의 위치를 나타내는 소정의 전기적인 신호를 발생하는 것에 각각 응답하여 동작되는 다수의 릴레이들과, 상기 릴레이들에 각각 연결되는 다수의 발광 다이오드들을 구비하는 것을 특징으로 하는 핸들러를 가지는 반도체 제조 장치.The apparatus of claim 1, wherein the display means comprises: a plurality of relays connected correspondingly to the switches, each of the switches being operated in response to generating a predetermined electrical signal indicative of the position of the handler; And a plurality of light emitting diodes connected to the relays, respectively. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950067543A 1995-12-29 1995-12-29 Semiconductor device fabrication apparatus with handlers KR0168808B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1019950067543A KR0168808B1 (en) 1995-12-29 1995-12-29 Semiconductor device fabrication apparatus with handlers
TW086217278U TW346248U (en) 1995-12-29 1996-10-28 Semiconducter device fabrication with handlers
JP8316690A JPH09191042A (en) 1995-12-29 1996-11-27 Semiconductor fabricating apparatus having handler

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950067543A KR0168808B1 (en) 1995-12-29 1995-12-29 Semiconductor device fabrication apparatus with handlers

Publications (2)

Publication Number Publication Date
KR970052087A true KR970052087A (en) 1997-07-29
KR0168808B1 KR0168808B1 (en) 1999-02-01

Family

ID=19447783

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950067543A KR0168808B1 (en) 1995-12-29 1995-12-29 Semiconductor device fabrication apparatus with handlers

Country Status (3)

Country Link
JP (1) JPH09191042A (en)
KR (1) KR0168808B1 (en)
TW (1) TW346248U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100390850B1 (en) * 2000-12-28 2003-07-10 한국 고덴시 주식회사 Sensing control equipment
KR100394507B1 (en) * 1999-04-23 2003-08-14 주식회사 디이엔티 device for pre-align for LCD handler

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100394507B1 (en) * 1999-04-23 2003-08-14 주식회사 디이엔티 device for pre-align for LCD handler
KR100390850B1 (en) * 2000-12-28 2003-07-10 한국 고덴시 주식회사 Sensing control equipment

Also Published As

Publication number Publication date
TW346248U (en) 1998-11-21
JPH09191042A (en) 1997-07-22
KR0168808B1 (en) 1999-02-01

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