TW339412B - Non-linear hinge for micro-mechanical device - Google Patents

Non-linear hinge for micro-mechanical device

Info

Publication number
TW339412B
TW339412B TW086110186A TW86110186A TW339412B TW 339412 B TW339412 B TW 339412B TW 086110186 A TW086110186 A TW 086110186A TW 86110186 A TW86110186 A TW 86110186A TW 339412 B TW339412 B TW 339412B
Authority
TW
Taiwan
Prior art keywords
mechanical device
micro
movable element
articulation
linear hinge
Prior art date
Application number
TW086110186A
Other languages
English (en)
Inventor
L Knipe Richard
A Webb Douglas
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of TW339412B publication Critical patent/TW339412B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Pivots And Pivotal Connections (AREA)
  • Transmission Devices (AREA)
TW086110186A 1995-07-20 1997-07-15 Non-linear hinge for micro-mechanical device TW339412B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/504,861 US5739941A (en) 1995-07-20 1995-07-20 Non-linear hinge for micro-mechanical device

Publications (1)

Publication Number Publication Date
TW339412B true TW339412B (en) 1998-09-01

Family

ID=24008039

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086110186A TW339412B (en) 1995-07-20 1997-07-15 Non-linear hinge for micro-mechanical device

Country Status (5)

Country Link
US (1) US5739941A (zh)
EP (1) EP0754958A3 (zh)
KR (1) KR980010479A (zh)
CA (1) CA2181612A1 (zh)
TW (1) TW339412B (zh)

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KR100259151B1 (ko) * 1997-08-26 2000-06-15 윤종용 비대칭강성구조를 갖는 광 경로 변환 액츄에이터 및 그의 구동방법
KR100263891B1 (ko) * 1997-12-31 2000-08-16 윤종용 가동미러장치
KR100313851B1 (ko) 1998-04-10 2001-12-12 윤종용 화상표시장치용마이크로미러디바이스
JPH11308174A (ja) * 1998-04-20 1999-11-05 Sony Corp ミラー保持体とこれを用いた光軸補正装置
DE19851967B4 (de) * 1998-11-11 2005-12-22 Robert Bosch Gmbh Mikrospiegel und Verfahren zu seiner Herstellung
JP2000330067A (ja) 1999-05-20 2000-11-30 Olympus Optical Co Ltd ねじり揺動体
DE19941045A1 (de) 1999-08-28 2001-04-12 Bosch Gmbh Robert Mikroschwingvorrichtung
US6198180B1 (en) * 1999-06-30 2001-03-06 Sandia Corporation Micromechanisms with floating pivot
US6950223B2 (en) * 2003-01-15 2005-09-27 Reflectivity, Inc Multiple hinge MEMS device
DE19963382A1 (de) * 1999-12-28 2001-07-12 Bosch Gmbh Robert Mikrospiegel
US6753638B2 (en) * 2000-02-03 2004-06-22 Calient Networks, Inc. Electrostatic actuator for micromechanical systems
KR100708077B1 (ko) * 2000-05-01 2007-04-16 삼성전자주식회사 화상표시장치용 마이크로미러 디바이스
KR100708086B1 (ko) * 2000-06-03 2007-04-16 삼성전자주식회사 마이크로미러 디바이스
KR20010109867A (ko) * 2000-06-03 2001-12-12 윤종용 마이크로미러 디바이스 및 그 제조방법
US6867897B2 (en) * 2003-01-29 2005-03-15 Reflectivity, Inc Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays
US6765710B2 (en) * 2000-12-11 2004-07-20 Axsun Technologies, Inc. Interference tabs for avoiding snapdown of optical membrane and fabrication process
US6831765B2 (en) * 2001-02-22 2004-12-14 Canon Kabushiki Kaisha Tiltable-body apparatus, and method of fabricating the same
KR100389865B1 (ko) * 2001-03-02 2003-07-04 삼성전자주식회사 마이크로미러 디바이스 및 이를 채용한 프로젝터
US6690850B1 (en) * 2001-06-05 2004-02-10 Agere Systems Inc. Article comprising a reflection-type spectral equalizer/optical switch
KR100413799B1 (ko) * 2001-10-09 2004-01-03 삼성전자주식회사 가동 미러 장치 및 이를 채용한 프로젝터
DE60214111T2 (de) * 2001-11-21 2007-02-22 Texas Instruments Inc., Dallas Jochlose digitale Mikrospiegel-Vorrichtung mit verdecktem Gelenk
US6876124B1 (en) * 2001-12-06 2005-04-05 Tera Fiberoptics Method and system for securing and controlling an electro-statically driven micro-mirror
EP1569023B1 (en) * 2002-10-10 2011-10-05 Fujitsu Limited Micro moving element comprising torsion bar
US7411717B2 (en) * 2003-02-12 2008-08-12 Texas Instruments Incorporated Micromirror device
US6914711B2 (en) * 2003-03-22 2005-07-05 Active Optical Networks, Inc. Spatial light modulator with hidden comb actuator
US7015885B2 (en) * 2003-03-22 2006-03-21 Active Optical Networks, Inc. MEMS devices monolithically integrated with drive and control circuitry
US7375874B1 (en) 2003-03-22 2008-05-20 Active Optical Mems Inc. Light modulator with integrated drive and control circuitry
JP2005088188A (ja) * 2003-08-12 2005-04-07 Fujitsu Ltd マイクロ揺動素子およびマイクロ揺動素子駆動方法
JP2005092174A (ja) * 2003-08-12 2005-04-07 Fujitsu Ltd マイクロ揺動素子
US7014115B2 (en) 2003-08-25 2006-03-21 Advanced Nano Systems, Inc. MEMS scanning mirror with distributed hinges and multiple support attachments
US20060022424A1 (en) * 2004-07-30 2006-02-02 Norm Reynolds Torsion spring cartridge
DE102005033800B4 (de) * 2005-07-13 2016-09-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches optisches Element mit einer reflektierenden Fläche sowie dessen Verwendung
US7359107B2 (en) * 2006-03-31 2008-04-15 Texas Instruments Incorporated Analog MEMS with non-linear support
US7932788B2 (en) * 2006-04-24 2011-04-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Oscillating, deflectable micromechanical element and method for use thereof
WO2007121693A1 (de) * 2006-04-24 2007-11-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Torsionsfederelement für die aufhängung auslenkbarer mikromechanischer elemente
US7477219B2 (en) * 2006-05-08 2009-01-13 Texas Instruments Incorporated Micro-mirror and method
US8432597B2 (en) * 2006-05-08 2013-04-30 Texas Instruments Incorporated Micro-mirror hinge
DE102006051207B4 (de) 2006-10-30 2019-09-12 Robert Bosch Gmbh Mikromechanisches Bauelement mit einer Mikroschwingvorrichtung und Verfahren zum Abgleich eines Bauelements
US8171804B2 (en) 2006-12-22 2012-05-08 Texas Instruments Incorporated Motion conversion system
US7535620B2 (en) * 2007-04-04 2009-05-19 Precisely Microtechnology Corp. Micro-electro-mechanical system micro mirror
US8472100B2 (en) * 2008-03-12 2013-06-25 Texas Instruments Incorporated Multilayered deformable element with reduced memory properties in a MEMS device
US7997744B2 (en) * 2008-03-12 2011-08-16 Texas Instruments Incorporated Electrically conductive protection layer and a microelectromechanical device using the same
US8541850B2 (en) * 2008-12-12 2013-09-24 Texas Instruments Incorporated Method and system for forming resonators over CMOS
US8238018B2 (en) 2009-06-01 2012-08-07 Zhou Tiansheng MEMS micromirror and micromirror array
US9036231B2 (en) 2010-10-20 2015-05-19 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
US10551613B2 (en) 2010-10-20 2020-02-04 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
US9385634B2 (en) 2012-01-26 2016-07-05 Tiansheng ZHOU Rotational type of MEMS electrostatic actuator
DE102017206252A1 (de) 2017-04-11 2018-10-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanische Spiegelvorrichtung

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US434212A (en) * 1890-08-12 Spring-hinge
US2733476A (en) * 1956-02-07 Torsion fflngse
US5061049A (en) * 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
DE3542154A1 (de) * 1984-12-01 1986-07-10 Ngk Spark Plug Co Lichtumlenkvorrichtung
US4921231A (en) * 1985-08-14 1990-05-01 Reynolds Torsion System, Inc. Torsion spring cartridge assembly
US4949426A (en) * 1987-11-30 1990-08-21 Mita Industrial Co., Ltd. Hinge mechanism with torsion bar
US4956619A (en) * 1988-02-19 1990-09-11 Texas Instruments Incorporated Spatial light modulator
GB2239101B (en) * 1989-11-17 1993-09-22 Marconi Gec Ltd Optical device
US5083857A (en) * 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
GB2275787A (en) * 1993-03-05 1994-09-07 British Aerospace Silicon micro-mirror unit
US5345521A (en) * 1993-07-12 1994-09-06 Texas Instrument Incorporated Architecture for optical switch
US5535047A (en) * 1995-04-18 1996-07-09 Texas Instruments Incorporated Active yoke hidden hinge digital micromirror device

Also Published As

Publication number Publication date
KR980010479A (ko) 1998-04-30
EP0754958A2 (en) 1997-01-22
CA2181612A1 (en) 1997-01-21
EP0754958A3 (en) 1998-03-11
US5739941A (en) 1998-04-14

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees