TW318966B - - Google Patents

Description

Printed 318366 A7 _ " B7 by the Employee Consumer Cooperative of the Central Standard Falcon Bureau of the Ministry of Economic Affairs V. Description of the Invention (1) The reference of the previous application (0S ----------- This case was in! i filed an application in the United States on the 7th with patent application No. 08 / 56〇, 457.-Field of the Invention The present invention relates to an organic light emitting diode image display device and a full-color organic light emitting device for an image display device A new type of manufacturing method for Hght emitting diode (LED) arrays. Background of the Invention '-An organic LED array for image display applications is composed of many organic light-emitting pixels in rows and columns. The electroluminescence array produces a full-color display. In the prior art, there are two main technologies. Three sub-pixels are formed into a pixel, and each pixel emits red, green or blue, which can be used to obtain a full-color array. This technology Commonly used in cathode ray tube color displays. An alternative full-color array, combined with a color filter array containing pixels patterned in red, green and blue sub-pixels, uses a white emitter as the backlight. The second technology of full color has been widely used in full color liquid crystal displays. In full color organic electroluminescent displays, due to the limitation of the luminous efficiency of most organic LED devices, the technology based on color filters is generally considered to be less. In the full-color array, each individual organic light-emitting pixel is divided into red, green, and blue sub-pixels. Each pixel usually transmits a first electrode with a light, and an organic electroluminescent medium is coated on the first electrode, And a metal electrode on the organic electroluminescent medium. The color of the sub-pixel is determined by the adopted _____ ^ _-4-Winter paper size suitable for Guanjia County (CNS—> A4 threat (21QX297 male thin) ------ IIII-Install III to order m line (please read the precautions on the back and then fill in this page)-_ ___ '·-318366. A7 __- B7 5. Description of the invention (2) Determined by the light-emitting medium. The electrodes are connected to the pixels to form a planar XY addressing pattern. In fact, the X_γ addressing pattern is to pattern the light-transmitting electrode in the X direction, and the metal electrode in the γ direction, and the X and Y directions For each other Completed vertically. The patterning of the electrodes is usually accomplished by screen or etching technology. Due to the technical limitations of screen, the image display only uses the etching method. It usually has a sub-pixel pitch of less than 0_ 2 mm. According to the etching method Depending on the medium used, etching techniques can be divided into two types: wet and dry. Wet etching is performed in an acidic liquid medium, and dry etching is usually carried out in the plasma atmosphere. ~

Scozzafava in EP 349,265 discloses an organic electroluminescence image display device and its manufacturing method based on wet etching technology. The metal electrode for the cathode contact in organic LEDs usually contains a stable metal and a highly reactive metal (work function less than 4 eV) that cannot continue to exist during acid etching. There are also problems with dry etching methods for metal electrodes in organic LED arrays. The high temperature (> 2〇 (rc) and reactive ion atmosphere required by the dry etching method may affect the integrity of the organic materials and active metals contained in the metal electrodes in the organic LED array "Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs

Tang in US Patent No. 5,276,380 discloses a barrier method for manufacturing a planar array without the need to etch metal electrodes. The barrier method includes: forming a dielectric / wall, which is orthogonal to the transparent electrode, can cover adjacent pixel areas, and has a height exceeding the thickness of the organic medium; applying an organic electroluminescent medium; and relative to the application surface from 15 . To 4, 5. The angle is covered with cathode metal. Since the height of the dielectric wall exceeds the thickness of the organic medium, the isolated parallels are formed. This paper ruler is 318966-Α7 ------- ~~ ____ '67_ 5. Description of the invention (3) Metal strip. Therefore, no metal etching is required to complete the χ γ addressable array. Although this method seems to be applicable to the formation of metal patterns, it is limited to a certain distance and may cause leakage in pixels in the array. Proposed on March 22, 1995, Case No. 08/409 129, with the name of Full Color Organic Light Emitting. Diode Array " pending US patent application, revealing a full-color diode array made on the i-chip Novel methods. However, in some applications, it is desirable to form a diode array on the semiconductor substrate so that the driver and similar components can be directly integrated with the array. Since the semiconductor substrate is usually opaque to the emitted light, it is necessary to make several important modifications on the array and the manufacturing method. . For (, it is appropriate to provide a full-color organic LED array that overcomes these problems .. 1. The purpose of the present invention is to provide a novel method for manufacturing a full-color organic LED array for image display applications. One objective is to provide a full-color organic LED array made on Thai fans and a novel method of manufacturing. Another objective of the present invention is to provide a cavity structure in which a full-color organic LED array is formed. Central Standard of the Ministry of Economic Affairs Bureau Staff Consumer Cooperative Printed Another object of this invention is to provide a passivated full-color organic LED array with improved reliability for image display applications. SUMMARY OF THE INVENTION +-In a semiconductor substrate that includes a flat surface Full-color organic light-emitting diode array, at least partly resolve the above and other problems, and achieve the above and many other purposes. Many horizontally spaced conductive strips are arranged in rows-6- This paper scale is applicable to the Chinese National Standards ) Α4 specification (210Χ297mm)

The Ministry of Economic Affairs, Central Bureau of Preservation and Employment Cooperatives printed on the surface of the substrate, and some parts of the surface of the substrate are exposed between them, and the conductive strips and these parts of the surface of the substrate are coated with-layer electricity = quality = = 予 =: To define many cavity structures, each-cavity structure is defined: / pixel, to Xu Xi cavity, the structure is located in a row with many conductive strips, and the individual cavity structure is located in the land of the bathroom ^ ', cover 1 In relation to ..., the κ conductive strips are in a covering relationship, so that the conductive strips (-Shaofen are exposed. In the cavity structures, the related conductive strips = three electroluminescent media are interleaved, each of which is like a second shot conductive material, Each-individual row 4. ::::: Contains only one of the two electroluminescent media: a transparent dielectric * material 2 sealed against the cavity structure, and the conductive materials are connected in rows to be conductive The strips are orthogonal to complete the array .... This case also reveals that a full-color organic light-emitting diode array method repeats several of the above steps to form two or three groups of sub-pixels. For a brief description of the wall chart, please refer to the drawings, in which The same number indicates the same part in all figures 1 is a different cavity structure, which is intentionally shown in the plan view of the size difference on the same substrate; 1 does not have figures 2, 3, 4 and 5 are plan views in a continuous stage of manufacturing a pixel. The pixel has an organic structure embodying the present invention Three Pixels of LED Array Figure 6 is a top plan view of an organic LED array, cut away for easy inspection; and 10 knives 7 is a simplified top plan view, partly cut away, illustrating part of the LED array according to. Poor month

1. ^ Pack-- (Please read the precautions on the back before filling out this page) Order Xian ---------- 1!

• I—- I I 318966 B7

Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs. Description of the Preferred Embodiments_ Because the device feature size is often in the sub-micron range, the pattern is proportional to the non-dimensional accuracy for Gu Yi ’s inspection surface. With particular reference to FIG. 1, the plan views of the channel 10 and the cavity 20 are intentionally shown on the same substrate to illustrate the difference in size. As will be explained shortly, the channel and the cavity are usually formed by patterning a dielectric layer 1 0 3 on a conductive strip 101 (see FIG. 2) that has been applied to a suitable metal or the like by photolithography. The conductive strips are supported by the semiconductor substrate 100 below. 'Every' one structure 10 is defined as a long, narrow, straight ·: deep concave part, with four relatively steep (actually vertical) sides _ formed on the dielectric. Mass layer. 1 03 on 3 Each channel 10 generally takes the shape of a rectangular parallelepiped as shown in FIG. 1. A channel 10 is usually in a direction perpendicular to the lower conductive strip 1 ο 1 (see, for example, FIG. 6) or parallel to the lower conductive strip 101 and extends over the substrate 100 above it. In this particular embodiment, the channel 10 is preferably perpendicular to the underlying conductive strips, so as to form an X-Y addressable matrix β in each single-channel 10 can constitute many pixels. Each cavity 20 is defined as a hole formed in the dielectric layer 103, having a rectangular, square or circular opening, and steep (practically vertical) side walls. The characteristics of the recess 20 are the small characteristic size of the opening and the nearly isotropic shape. Many recesses 20 form a row across the substrate 100, in a covering relationship with the underlying conductive strip 101 (see, for example, FIG. 6). Each cavity_2 0 defines the shape of a sub-pixel in the array. As will be explained shortly, the trench 10 or the recess 20 can be used to manufacture a full-color organic array of image displays. For the sake of further explanation, the trench 10 and the recess 20 are collectively referred to as the cavity structure in the following, and the term also includes -8-This paper scale is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) I --- ------ ^ ------ 1T ------ ^ (please read the precautions on the back and then fill out this page) _____ *-Printed by Beigong Consumer Cooperative, Central Bureau of Standards, Ministry of Economic Affairs Description of the invention (including various other changes in the structure. The LED array described below is characterized in that the array can display full-color images. Each pixel is composed of three pixels, each of which can emit-different colors , Preferably red, or green, or blue light electroluminescent medium. Each sub-pixel is configured with a cavity structure, with a conductive strip 101 at the bottom, a dielectric medium on the side wall and a transparent dielectric material on top. In this case, a method for manufacturing a full-color organic LED vehicle for image display applications according to the present invention is disclosed. Figures 2, 3, 4 and 5 are cross-sectional views illustrating a single pixel of an organic LED array I with secondary pixels in continuous Manufacturing stage. ~ Please refer to Figure 2, the pixel structure is a ratio The flatter half-conductor substrate starts at 1000, which can be, for example, a general CMOS substrate (more on this later). ## A substrate made of any semiconductor material can be used, but the CM0S substrate can include low Power driver components are preferred. Generally, the organic LED array and any high-order or similar structures generated on the two pieces can be driven by conventional planarization to form driver circuits and other integrated circuits. The material is applied on the upper surface of the substrate 100, the layer is selected from various stable metals, organic or inorganic conductors, such as aluminum, silver, copper or gold 3 and then the layer is patterned by conventional lithography techniques, Many parallel conductive strips 101 'are formed which can be addressed in a row 7 or vice versa if desired), and will be used as an anode or cathode electrode in the final array (in this particular embodiment the cathode P is borrowed from such as Thermal evaporation, sputtering or plasma-enhanced chemical vapor deposition technology applies a layer of dielectric medium 103 on the exposed portion of the conductive strip 101 and the substrate 100. The dielectric medium used to form the cavity structure 103 can be - kind of organic polymeric please first * heard * 'Read 1 ·'s - CAUTIONS and then fill in - this page stapling line 9- This paper scales applicable towel Kwan provision (CNS) from age (2 songs 297 male thin

趣 济 部 中 夬 #The quasi-bureau employee consumer cooperative printed 318966 or inorganic materials. It is preferred to use an inorganic dielectric material, such as silicon oxide, silicon nitride, or aluminum oxide, which is generally a better barrier to oxygen and moisture than organic polymer materials. The thickness of the dielectric medium 103 is fixed to the depth of the cavity structure, and can vary from 10 microns to 01 microns. It is 2 easy to handle, and the thickness is preferably less than 1 micron. A layer of 105 photoresist is spin coated on the dielectric medium 103 and patterned by a light source through a mask (not shown). Although both positive and negative resists can be used, the use of positive resists is preferred because of their high resolution and superior corrosion resistance. After the heat treatment, the resist layer 105 is developed to expose the dielectric medium 103 on the sub-face. The dielectric medium 103 is then patterned by a known wet or dry etching technique to form a cavity structure or cavity structures [2]. Dry etching is generally preferred because it provides the anisotropy of relatively straight or actual vertical sidewalls. Currently, metals having a work function of less than 4.0 ev, such as lithium, magnesium, indium, calcium, etc., are commonly used as cathode materials to obtain an efficient LED display. It is conceivable that in the near future, metals with a work function greater than 4.0 can also be used as cathode materials, because materials used for electroluminescent media have improved electron injection and transmission capabilities, resulting in efficient LED displays. As proposed on September 12, 1994 and transferred to the same assignee, the name is Organic LED With Improved Efficiency ", as explained in the pending US Patent Application No. 08 / 304,454, the use of a conductive layer includes Materials with work functions that actually match the electronic affinity of the organic materials of the LED can be used to achieve the most efficient. In this embodiment, a layer of matching work function conductive material is located in the cavity ll2 as a part of the conductive strip 101

The size of this paper is related to Guanjia County (CNS) A4 (2297 mm). Printed and invented by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (8) 'or directly on the surface' and will be explained soon, similar materials "Located in each cavity" is the "matching work function conductive material" disclosed in this item as part of the conductive strip 101. An electroluminescent medium 202 is laid in the cavity structure i12, and is in a covering relationship with one of the many conductive strips 101, a single conductive strip. The electroluminescent medium 202 consists of (for exemplary purposes only) a layer of electron transport material, a layer of active emitter material capable of emitting the first color, and a layer of pore transport material. Since the individual layers of electroluminescent material 200 and combinations thereof are known, each individual layer will not be described in detail herein. A layer of 2〇2A g bright conductive material, such as conductive polyaniline (PANI), or indium tin oxide (ιτ〇) is applied in the cavity structure 112 as a second electrode (for example, anode). The layer 2〇2Α can be located or applied within the cavity structure 112 by any convenient method, such as evaporation or casting, without damaging the electroluminescent material 2〇2. For the purpose of this disclosure, the layer 202A can be regarded as a part of the electroluminescent material 202. Then apply a thick layer of 106 transparent dielectric material, such as low-temperature plasma enhanced chemical vapor deposition (PECVD) applied with 02, silicon nitride, or a transparent perfluoropolymer (eg Tefl〇n_af ), As the cover of the cavity structure 112, by controlling the thickness of the upper end of the cavity structure 112 or the opening β layer 106 to be controlled so that the cavity structure 112 is just filled up to the height of the dielectric medium 103. The photoresist layer 105 is removed to complete the first pixel in the pixel that emits the first color (red in this particular embodiment). Please refer to FIG. 3, which illustrates the structure of a second sub-pixel. Roughly as described above, a layer of 107 photoresist # is spin-coated on the first pixel and the dielectric medium 103, and is patterned and developed. Dielectric medium that has been exposed (please read the notes on the back before filling this page)-Pack. Threading •-I — II I 1 11-^ Paper size is applicable to China National Standard (CNS) Α4 specification (210Χ297 Director A7 B7 V. Description of the invention (9 103 Then make a pattern to design a second cavity structure or structures 113 close to the first pixel. Apply a kind of luminescent medium 203 to the cavity structure ι13 and many conductive strips! 〇i's single-conductive strips have a covering relationship. As explained in conjunction with the electroluminescent medium 202, the electroluminescent medium 2Q3 usually consists of a layer of sub-transmissive material 'a layer can emit a second color of active emission It consists of a bulk material and a layer of hole transfer material. Then a layer of 203 A transparent conductive material is applied as the second electrode (for example, cathode). Layer 203A can be used by any convenient method: such as evaporation or casting, located in or applied to the cavity In the structure H3, it is not bad for the private, luminescent material 203. For the purpose of this disclosure, the layer 2〇3A can be regarded as a part of the electroluminescent material 203. Then: a thick layer 108 of transparent dielectric is then applied Materials, such as low temperature PEC The VD is coated with 02, nitrided, or a transparent perfluoropolymer (such as Teflon AF) as a cover for the cavity structure, thereby sealing the upper end of the cavity structure 113 or the open beta layer The thickness of 108 is controlled so that the cavity structure 113 just fills up to the height of the dielectric medium 103. After removing the photoresist layer 107 ′, the second color can be emitted in the center of the pixel (in this specific embodiment The structure of the first pixel in green). Please refer to FIG. 4 to illustrate the composition of a third pixel. Roughly as described above, a layer of 1 09 photoresist is spin-coated on the first and second pixels And the dielectric medium 103, and patterned and developed. The exposed dielectric medium 103 is then patterned to form a third cavity structure or structures 114 close to the first and second sub-pixels. The electroluminescent medium 204 is laid on the cavity structure 114 and has a covering relationship with a single conductive strip of many conductive strips 101. As explained in conjunction with the electroluminescent media 2〇2 and 2〇3, the electroluminescent medium -12- This paper music scale is suitable for China National Standard (CNS) A4 specification (210Χ297 I¾ ------ iT ------- 10 - - · ·: (Please read the notes on the back of this page to fill out) II __ - - _ Economic Affairs Central Office staff standard Falcon consumer cooperatives and India all-rounder

Guan 204 is usually composed of electronic transmission materials printed by the Central Standards Ministry of Economic Affairs Consumer Cooperative, printed materials of a single drawer, chromium chromium, and active emitters, and ... One = 4A translucent conductive material as the second electrode (for example, can be borrowed by any convenient method, # 技 + ^ Zϋ4Α such as Songfa or casting, located or laid in the cavity structure 114, without damaging electricity, double poverty Metamaterial 2〇4. For this project, the drawer 2〇4Α can be regarded as part of the electroluminescent material 204. The transparent dielectric material of the sliding thick layer 110, such as those applied by low temperature Qiu ㈣ called, nitrogen cut, Or a kind of transparent perfluoropolymer (such as TefI〇n_AF) as a cover for the cavity structure π4, with a dense cavity structure m (upper or open σ. The thickness of the layer 11G is to be controlled to the toilet cavity 114 The grid is filled up to the dielectric medium Xiguluo,.. ° structure I medium κ 1 03 hot degree. Remove the photoresist layer 109, .. to complete the pixel can emit a third color (here The specific embodiment is the structure of the third sub-pixel of blue). The entire pixel capable of emitting three primary colors is illustrated in FIG. 5. After removing the last photoresist layer 109, the transparent pixels 202A, 203A, and 204A near the ends of the columns are usually contacted by a metal strip (not shown) to connect the sub-pixels. It is known that the cover layer is coated with metal Create a pattern by lithography, or apply a metal to a pattern covered by a resist, and then follow the removal process to form a metal strip. Figure ό is a plan view of an organic LED array, partially cut away to illustrate three different Manufacturing stage. Starting from left to right in FIG. 6, the region 丨 2 丨 illustrates the stage where the patterned conductive strip ι〇1 has been formed on the semiconductor substrate 100. The central region 122 in FIG. 6 illustrates Three colors (in this example, red, green and blue electroluminescent mediums 2〇2, 2〇3 Please read the notes on the back before binding the binding line ____- 13- This paper size is applicable to the Chinese national standard Standard (CNS) A4 specification (210X297mm)

Printed by the Beigong Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs and 204 of the individual sub-pixels have been applied to the cavity structure respectively, i, 2, 3 and 3! ^ 4 stages. Although the sub-pixels are illustrated as individual squares (cavities), please understand that the entire cavity structure may contain electroluminescent materials, and only the electroluminescent material between the electrode ι〇ι and 202A, 203A, or 204A will be activated . The area 123 is exemplified by the array of transparent conductive strips 202A, 202, and 204, which have been applied to the cavity structures 112, 113, and 114. In this embodiment, the transparent conductive strips 202A ′ 203A, and 204A extend the cavity structures 112, 113, and 114 to the length to the edge of the substrate i 〇〇, so as to facilitate the connection of all pixels of the sub-pixels in the series (or Several rows) as anode electrodes. Tian Ran, who is skilled in this field, will understand that many other methods can be used to connect the transparent conductors. The electrical strips 2〇2A 2〇jA, and 204A are connected into a number of rows or rows, but the method described is the most common. Convenient 'and keep the seal of each cavity structure. [pi] With particular reference to FIG. 7, a simplified top view, plan view of the entire LED array according to the present invention is illustrated. In particular, the end of the conductive bar 101 is exemplified as being connected to the driver 225 'which is formed on the substrate 100 as a CMOS driver. The outer π connection pad 226 is located at the edge of the substrate 100 for connection to another outer path. Similarly, the transparent conductive stripes 202A, 203A, and 204A are exemplified as being connected to the column driver 230, which is formed on the substrate 100 as a CMOS driving valley. The external connection piece 231 is located at the recognized edge of the substrate 10 for connection to another external package path. Because it depends on the specific type of drive used, addressing, etc., many types of specific drive circuits can be used, so the specific details of the drivers 225 and 230 are not illustrated. Although ...: The above cavity structure 11 2, 1 1 3 and 1 1 4 are shown as channels, but please understand that 'except for the channel structure, the orientation is preferably perpendicular to and across all conductive, please read the notes before back Gutter

-14- (210x297 Gongchu)

S1836S A7 B7 12 • — V. Description of the invention (outside the address in a similar way, it can display the number of pixels and sub-pixel spacing required by the two-image display application, the width, and the display required for specific applications Resolution and tone of 2 H3 4 diagonal, line color VGA type display, full 2 = minimum resolution of 640 x 480 pixels, each with three pixels, technically, positive pitch less than 01 mm. Pixel pitch is only limited by Lithography technology limits its current manufacturing technology to approximately 5 micrometers. The array disclosed in this embodiment has inherent superior stability that is superior to the previous art institute "Ren :: Xin; Guang; each- The organic electroluminescent medium in the sub-pixel (concave cavity stiffening) or sub-image channel structure) is in the concave cavity or channel •: 2 by the first electrode 'on the side by the dielectric medium and transparent at the top% Surrounded by Beiyu. The disclosed cavity structure significantly reduces the decay of the display element's environment (oxygen and moisture). Printed by the Employee Consumer Cooperative of the Central Bureau of Prefectural Affairs of the Ministry of Carriage and Industry t The array disclosed in this invention is used for electroluminescence The material of the medium can be organic Any form of EL device. The electroluminescent medium is usually composed of a layer of electron transport material, a layer of active emitter, and a layer of pore transport material. Any combination of organic materials, metal organic compounds, polymer 2 and other materials can be used as pores Transmission materials, active emitters, and sub-transmission materials. Of course, please understand that in some special applications, it is possible to exempt any one of hole transmission materials and electron transmission materials, or both of them. However, this usually leads to undesirable light. Emission. To achieve three primary color emissions, namely red, green, and blue, use three different active emitters that will produce the desired color emission in the pixel. In each activity ------- 15 ·

This paper kills the standard and adapts to the country (CNS) (2 丨 Qx297 Gongchu V B7 V. Description of the invention (D) The sex emitter layer can also include the emission efficiency of each individual color in the element = agent: Achieve three primary color emission , There are three pixels as the main emitter. To make a meal, the human pixel is then mixed with three kinds of auxiliary substances that can be red, green and doped with 'it :: (iv) fluorescent dyes. Auxiliary =; use one The emitter emits a kind of stimulated energy. It uses poly I ::: 'I evaporate and apply organic electroluminescence medium Ϊ medium to embed it. It can also be filled by other techniques such as injection filling, spin Π or apply it from a suitable solution with a scraper. The shape of the heterostructure array composed of sublimation materials and polymers may require a mixture of the above technologies. Operation_From the top surface of the LED P train See the emission pattern from the LED array. Set the electronic drivers 225 and 203 to the program in the order of addressing the -line sub-pixels, and the time interval between repeated addressing in the same line will be less than the number of people. I & Sense, τ, limit (generally less than 1/60 seconds Speed: '1 &address; n order' to drive the LED array to emit light. Although the device is printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs at any instant, only the self-launching is launched, but the human eye sees from all the addresses. I The image formed by the light emission of various lines., The sub-pixel combination of each pixel is addressed to generate the color of the image, which is roughly as follows: _ (1) Address the primary pixels to emit red light; (2) Address the primary pixels Emit green light; (3) Address the primary pixels to emit blue light;

5. Description of the invention (14) 318966 (4) Simultaneous addressing of the second red and green sub-pixels to produce a yellow feeling; (5) Simultaneous addressing of the second red and blue sub-pixels to produce a purple feeling ; (6) Addressing two sub-pixels emitting blue and green at the same time to produce a blue feeling; (7) Addressing all sub-pixels simultaneously to produce white light; and (8) Unaddressing all sub-pixels To produce black light. It should be emphasized that the organic LED array manufacturing method disclosed in the present invention, which can be full-color, is also suitable for manufacturing arrays for monochromatic or multi-color (full-color 2) images. Select monochromatic or multicolor electroluminescent media in the pixels. By the same method as disclosed above, an array can be made for monochromatic or multicolor image display applications. Therefore, this case discloses a full-color organic LED array for image display and its manufacturing method. Although the inventor has illustrated and described specific embodiments of the present invention, those skilled in the art will come up with various modifications and improvements. Therefore, I wish to understand that the present invention is not limited to the specific form shown, and the inventor intends to include in the appended patent application scope all modifications that do not deviate from the spirit and scope of the present invention. -17 I -------- Meal ------ IT ------- .- ·-·· (Please read the notes on the back first and then fill out this page). _______ II — Printed by the Staff Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs

Claims (1)

A8 B8 C8 D8 Printed and patented by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 1. A variety of full-color light-emitting diode arrays, including: "Semiconductor substrate has a flat surface; 1 horizontal t open <conducting strips are arranged in rows in Abundant conductor surface, and the semi-conducting «bean surface I number part is exposed between them;,% dielectric is coated on the conductive strip and the semiconductor surface part; times :; = is defined by the dielectric medium, and each cavity Structural definition-… The cavity structure is located in several rows and has a covering relationship with many conductive strips. Special 1: The other cavity structure is located in a covering relationship with a conductive strip, so as to: expose part of the conductive axe; ~ one or two kinds of electricity Luminescent media, each consisting of at least one layer of active luminescent material and channels + transparent conductive material alternately laterally applied to the exposed associated conductive strips in the cavity structure, and all cavity structures in each individual row contain only three electroluminescent media One is that the transparent conductive material is connected to form a plurality of horizontally spaced parallel metal strips arranged in several rows and are orthogonal to the conductive strips; and a transparent dielectric material is located in the seal and is attached to the cavity junction 2. A method for manufacturing a color organic light-emitting diode array, including the following steps: ° Provide a relatively flat semiconductor substrate with a flat surface; form a layer of conductive material on the flat surface of the semiconductor substrate, This layer of conductive material is patterned into many horizontally spaced conductive strips, and several parts of the substrate are exposed between them;-A layer of dielectric medium is applied on top of the current conductive strips and several parts of the substrate; The photoresist is applied on the dielectric medium; the layer of the photoresist is patterned so that several parts of the dielectric medium are exposed -18 paper size Guanjia County (CNS) A4 ^ (21〇 &gt; &lt; 297 public | 丨 Package :. Order — ---- Line I --- 1 (please read the notes on the back before filling in this education) ---- ----- 318966 A8 bs C8 D8 Ministry of Economic Affairs Printed by the Central Bureau of Standards 'Staff Consumer Cooperatives' patent application scope; the exposed part of the conductive material is used to define the horizontally spaced cavity structure and the conductive strip to form a covering relationship, and each cavity structure exposes the relevant part; Part ^ is coated with a kind of electroluminescent medium in the cavity structure, Including at least the active emitter material for emitting the selected color, and-layer conducting and radiating materials, the conductive light-transmitting material is formed in the cavity structure-the electrical contacts are coated with a layer of light-transmitting dielectric material in each r cavity structure to conduct electricity Edge material to seal the cavity structure; and ... 'Tunyou shot: removing the photosensitive anti-layer, to complete the group structure as a pixel. Wen Baxin &lt; 3 · -manufacturing color organic light-emitting diode array The method includes steps: W provides a relatively flat semiconductor substrate with a flat surface; a layer of conductive material is formed on the upper surface of the semiconductor substrate, and the layer of conductive material is patterned into a plurality of horizontally spaced conductive stripes, The Z part of the substrate is exposed therebetween; apply a layer of dielectric medium on top of the conductive member and the substrate; apply the first layer of photoresist on the dielectric medium; apply the photosensitive layer The resist is patterned to expose the first parts of the dielectric medium; the dielectric medium I is etched to expose the first parts to define the first group of laterally spaced cavity structures to cover the conductive strips, each The cavity structure makes a connection -19- This paper music standard is applicable to the Chinese ^^ quasi (CNS) A4 specification (27〇 ^ 7 ^ (please read the precautions on the back and then fill out this page j. 装 _ 今 A8 A8 Central Standards of the Ministry of Economic Affairs 318966 D8 printed by the Bureau ’s Consumer Cooperatives 6. Part of the conductive strip applied for is exposed; the first electroluminescent medium is deposited in the first cavity structure, including at least one active emission layer selected to emit the first color Bulk material, and a layer of light-transmitting conductive material, the light-transmitting conductive material forms an electrical contact point with the first group of cavity structures; each cavity structure of the first group of cavity structures is covered with a layer of light-transmitting dielectric material, the first Sealing of the cavity structure; -Removing the first layer of photoresist to form the first button and constructing the first-color sub-pixels; Applying the second layer of photoresist on _dielectric medium Above; pattern the second layer of photoresist to expose the second portions of the dielectric medium; etch the exposed second portions of the dielectric medium to define the second set of laterally spaced cavity structures and Conductive strip into cover Each cavity structure exposes a part of an associated conductive strip; the second group of cavity structures is coated with a second electroluminescent medium, including at least one layer of active emitter material selected to emit a second color, And a layer of light-transmitting conductive material, the light-transmitting conductive material forms an electrical contact point with the second group of cavity structures; ~ each cavity structure of the second group of cavity structures is covered with a layer of light-transmitting dielectric material-material, the second The group cavity structure is sealed; ~ Remove the second photoresist layer to complete the second group structure to emit the second pixel of the second color. -20- This paper scale is applicable to Card National Standard (CNS) A4 specification (210X297mm) --------- I ------ 、 玎 ------ First line: ▲ ··: '-. · (Please read the precautions on the back before filling out this page) ___ &lt;-